DE69407275D1 - Tangentialströmungs-Pumpkanal für Turbomolekularpumpen - Google Patents
Tangentialströmungs-Pumpkanal für TurbomolekularpumpenInfo
- Publication number
- DE69407275D1 DE69407275D1 DE69407275T DE69407275T DE69407275D1 DE 69407275 D1 DE69407275 D1 DE 69407275D1 DE 69407275 T DE69407275 T DE 69407275T DE 69407275 T DE69407275 T DE 69407275T DE 69407275 D1 DE69407275 D1 DE 69407275D1
- Authority
- DE
- Germany
- Prior art keywords
- flow pump
- tangential flow
- pump channel
- turbomolecular pumps
- turbomolecular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/265,542 US5449270A (en) | 1994-06-24 | 1994-06-24 | Tangential flow pumping channel for turbomolecular pumps |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69407275D1 true DE69407275D1 (de) | 1998-01-22 |
DE69407275T2 DE69407275T2 (de) | 1998-04-02 |
Family
ID=23010889
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69407275T Expired - Lifetime DE69407275T2 (de) | 1994-06-24 | 1994-09-12 | Tangentialströmungs-Pumpkanal für Turbomolekularpumpen |
DE0691476T Pending DE691476T1 (de) | 1994-06-24 | 1994-09-12 | Tangentialströmungs-Pumpkanal für Turbomolekularpumpen |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE0691476T Pending DE691476T1 (de) | 1994-06-24 | 1994-09-12 | Tangentialströmungs-Pumpkanal für Turbomolekularpumpen |
Country Status (3)
Country | Link |
---|---|
US (1) | US5449270A (de) |
EP (1) | EP0691476B1 (de) |
DE (2) | DE69407275T2 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09126178A (ja) * | 1995-10-27 | 1997-05-13 | Aisan Ind Co Ltd | 燃料ポンプ装置 |
US6607351B1 (en) * | 2002-03-12 | 2003-08-19 | Varian, Inc. | Vacuum pumps with improved impeller configurations |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB336001A (en) * | 1929-07-09 | 1930-10-09 | Edwin Rodolph Grote | Improvements in pumps for obtaining high vacua |
US1942139A (en) * | 1930-12-26 | 1934-01-02 | Central Scientific Co | Molecular vacuum pump |
US1975568A (en) * | 1932-03-18 | 1934-10-02 | Central Scientific Co | Molecular vacuum pump |
DE1063748B (de) * | 1955-04-29 | 1959-08-20 | Leybolds Nachfolger E | Kreiselpumpe zur Evakuierung von gasgefuellten Behaeltern |
DE2034285A1 (de) * | 1970-07-10 | 1972-01-13 | Pfeiffer Vakuumtechnik | Molekularpumpe |
JPS60116895A (ja) * | 1983-11-30 | 1985-06-24 | Hitachi Ltd | 真空ポンプ |
US5020969A (en) * | 1988-09-28 | 1991-06-04 | Hitachi, Ltd. | Turbo vacuum pump |
US5238362A (en) * | 1990-03-09 | 1993-08-24 | Varian Associates, Inc. | Turbomolecular pump |
IT1241431B (it) * | 1990-03-09 | 1994-01-17 | Varian Spa | Pompa turbomolecolare perfezionata. |
RU2001314C1 (ru) * | 1990-10-29 | 1993-10-15 | Алексей Валерьевич Федорук | Двухступенчатый компрессор |
IT1250804B (it) * | 1991-07-10 | 1995-04-21 | Varian Spa | Stadio di pompaggio per pompa turbomolecolare |
US5358373A (en) * | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
-
1994
- 1994-06-24 US US08/265,542 patent/US5449270A/en not_active Expired - Lifetime
- 1994-09-12 EP EP94202623A patent/EP0691476B1/de not_active Expired - Lifetime
- 1994-09-12 DE DE69407275T patent/DE69407275T2/de not_active Expired - Lifetime
- 1994-09-12 DE DE0691476T patent/DE691476T1/de active Pending
Also Published As
Publication number | Publication date |
---|---|
DE69407275T2 (de) | 1998-04-02 |
EP0691476A1 (de) | 1996-01-10 |
US5449270A (en) | 1995-09-12 |
DE691476T1 (de) | 1996-10-10 |
EP0691476B1 (de) | 1997-12-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: VARIAN, INC., PALO ALTO, CALIF., US |
|
R082 | Change of representative |
Ref document number: 691476 Country of ref document: EP Representative=s name: BARTELS & PARTNER, PATENTANWAELTE, 70174 STUTTGART |