DE69302893D1 - Verfahren und Vorrichtung zur Rückgewinnung von zusammengesetzten Gasgemischen - Google Patents

Verfahren und Vorrichtung zur Rückgewinnung von zusammengesetzten Gasgemischen

Info

Publication number
DE69302893D1
DE69302893D1 DE69302893T DE69302893T DE69302893D1 DE 69302893 D1 DE69302893 D1 DE 69302893D1 DE 69302893 T DE69302893 T DE 69302893T DE 69302893 T DE69302893 T DE 69302893T DE 69302893 D1 DE69302893 D1 DE 69302893D1
Authority
DE
Germany
Prior art keywords
gas mixtures
composite gas
recovering composite
recovering
mixtures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69302893T
Other languages
English (en)
Other versions
DE69302893T2 (de
Inventor
Dale J Missimer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Polycold Systems International
Original Assignee
Polycold Systems International
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Polycold Systems International filed Critical Polycold Systems International
Application granted granted Critical
Publication of DE69302893D1 publication Critical patent/DE69302893D1/de
Publication of DE69302893T2 publication Critical patent/DE69302893T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/16—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using chemical substances
    • A61L2/20—Gaseous substances, e.g. vapours
    • A61L2/206—Ethylene oxide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Epidemiology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
DE69302893T 1993-03-09 1993-09-15 Verfahren und Vorrichtung zur Rückgewinnung von zusammengesetzten Gasgemischen Expired - Fee Related DE69302893T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/028,742 US5261250A (en) 1993-03-09 1993-03-09 Method and apparatus for recovering multicomponent vapor mixtures

Publications (2)

Publication Number Publication Date
DE69302893D1 true DE69302893D1 (de) 1996-07-04
DE69302893T2 DE69302893T2 (de) 1996-09-26

Family

ID=21845167

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69302893T Expired - Fee Related DE69302893T2 (de) 1993-03-09 1993-09-15 Verfahren und Vorrichtung zur Rückgewinnung von zusammengesetzten Gasgemischen

Country Status (5)

Country Link
US (1) US5261250A (de)
EP (1) EP0614687B1 (de)
JP (1) JPH06269605A (de)
CA (1) CA2104055C (de)
DE (1) DE69302893T2 (de)

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US5799509A (en) * 1997-08-22 1998-09-01 The Boc Group, Inc. Multi-component recovery apparatus and method
US6094922A (en) * 1998-09-09 2000-08-01 Ziegler; Alex R. Vacuum-insulated refrigerant line for allowing a vaccum chamber system with water-vapor cryocoil compressor to be locatable outside cleanroom
US6383257B1 (en) 2000-04-04 2002-05-07 Air Products And Chemicals, Inc. Reclamation and separation of perfluorocarbons using condensation
US7611903B2 (en) * 2002-09-11 2009-11-03 Lawrence Livermore National Security, Llc System for trapping and storing gases for subsequent chemical reduction to solids
US8664124B2 (en) 2005-10-31 2014-03-04 Novellus Systems, Inc. Method for etching organic hardmasks
US8110493B1 (en) 2005-12-23 2012-02-07 Novellus Systems, Inc. Pulsed PECVD method for modulating hydrogen content in hard mask
US7981810B1 (en) 2006-06-08 2011-07-19 Novellus Systems, Inc. Methods of depositing highly selective transparent ashable hardmask films
US7666369B2 (en) 2006-09-29 2010-02-23 Tyco Healthcare Group Lp System and method for recycling sterilant gas
US8268238B2 (en) 2006-09-29 2012-09-18 Tyco Healthcare Group Lp System and method for recycling sterilant gas
US7981777B1 (en) 2007-02-22 2011-07-19 Novellus Systems, Inc. Methods of depositing stable and hermetic ashable hardmask films
US7915166B1 (en) 2007-02-22 2011-03-29 Novellus Systems, Inc. Diffusion barrier and etch stop films
US8236253B2 (en) * 2007-04-30 2012-08-07 Midmark Corporation Portable sterilizing apparatus for surgical and dental instruments
US8962101B2 (en) 2007-08-31 2015-02-24 Novellus Systems, Inc. Methods and apparatus for plasma-based deposition
US7820556B2 (en) * 2008-06-04 2010-10-26 Novellus Systems, Inc. Method for purifying acetylene gas for use in semiconductor processes
US8435608B1 (en) 2008-06-27 2013-05-07 Novellus Systems, Inc. Methods of depositing smooth and conformal ashable hard mask films
US7955990B2 (en) * 2008-12-12 2011-06-07 Novellus Systems, Inc. Method for improved thickness repeatability of PECVD deposited carbon films
US8563414B1 (en) 2010-04-23 2013-10-22 Novellus Systems, Inc. Methods for forming conductive carbon films by PECVD
US10118122B2 (en) * 2011-08-29 2018-11-06 The Boeing Company CO2 collection methods and systems
US9205357B2 (en) 2012-03-29 2015-12-08 The Boeing Company Carbon dioxide separation system and method
US9156703B2 (en) 2012-03-30 2015-10-13 The Boeing Company System and method for producing carbon dioxide
SG195494A1 (en) 2012-05-18 2013-12-30 Novellus Systems Inc Carbon deposition-etch-ash gap fill process
US9103549B2 (en) 2012-08-23 2015-08-11 The Boeing Company Dual stream system and method for producing carbon dioxide
US9777628B2 (en) 2012-08-23 2017-10-03 The Boeing Company System and method for processing greenhouse gases
US9362133B2 (en) 2012-12-14 2016-06-07 Lam Research Corporation Method for forming a mask by etching conformal film on patterned ashable hardmask
US9073001B2 (en) 2013-02-14 2015-07-07 The Boeing Company Monolithic contactor and associated system and method for collecting carbon dioxide
US9304396B2 (en) 2013-02-25 2016-04-05 Lam Research Corporation PECVD films for EUV lithography
US9302021B2 (en) 2013-08-30 2016-04-05 American Sterilizer Company Method of performing sterilization cycle
US9320387B2 (en) 2013-09-30 2016-04-26 Lam Research Corporation Sulfur doped carbon hard masks
US9589799B2 (en) 2013-09-30 2017-03-07 Lam Research Corporation High selectivity and low stress carbon hardmask by pulsed low frequency RF power
JP6351525B2 (ja) * 2015-03-04 2018-07-04 住友重機械工業株式会社 クライオポンプシステム、クライオポンプ制御装置、及びクライオポンプ再生方法
US10738020B2 (en) 2017-11-22 2020-08-11 Joseph D. Duff Recovery of ethylene oxide from sterilization process
US11207612B2 (en) * 2019-03-20 2021-12-28 Taiwan Advanced Sterilization Technologies Inc. Method and system for recovering and purifying a gaseous sterilizing agent
JP7229463B2 (ja) * 2019-03-26 2023-02-28 三浦工業株式会社 食品機械とその除菌方法
KR20220002748A (ko) 2019-05-29 2022-01-06 램 리써치 코포레이션 고 전력 펄싱된 저 주파수 rf에 의한 고 선택도, 저 응력, 및 저 수소 다이아몬드-유사 탄소 하드 마스크들

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US2242299A (en) * 1940-05-15 1941-05-20 Standard Oil Dev Co Vapor recovery system
US2274094A (en) * 1941-02-18 1942-02-24 Standard Oil Dev Co Refining process
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US3238633A (en) * 1963-06-10 1966-03-08 Hackenberg Ulrich Method and apparatus for reclaiming aromatic substances in drying process
US3633371A (en) * 1968-04-05 1972-01-11 Phillips Petroleum Co Gas separation
US3549312A (en) * 1968-05-06 1970-12-22 Sybron Corp Process and apparatus for recovering sterilization gas for reuse
BE789308A (fr) * 1971-10-04 1973-03-27 Shell Int Research Terige oplossingen van etheenoxyde werkwijze voor het concentreren en zuiveren van wa
US4249917A (en) * 1979-11-21 1981-02-10 Union Carbide Corporation Sterilization gas separation process
FR2545588B1 (fr) * 1983-05-05 1985-10-11 Air Liquide Appareil de refrigeration et piege frigorifique comprenant un tel appareil
SE8302611L (sv) * 1983-05-06 1984-11-07 Gambro Lundia Ab Forfarande och anleggning for atervinning av en eller flera bestandsdelar ur en gasblandning
GB8407857D0 (en) * 1984-03-27 1984-05-02 Mann R Separation of gaseous mixture
DE3422417A1 (de) * 1984-06-16 1985-12-19 Kernforschungsanlage Jülich GmbH, 5170 Jülich Verfahren und vorrichtung zur abtrennung einer gaskomponente aus einem gasgemisch durch ausfrieren
US4551197A (en) * 1984-07-26 1985-11-05 Guilmette Joseph G Method and apparatus for the recovery and recycling of condensable gas reactants
DE3701544A1 (de) * 1987-01-21 1988-08-04 Messer Griesheim Gmbh Verfahren zum entfernen von verunreinigungen aus abgasen
US4822563A (en) * 1987-10-26 1989-04-18 Joslyn Value Corporation Method for the recovery of sterilants
US4954315A (en) * 1988-02-03 1990-09-04 Mg Industries Method for recovery of sterilizing gas
US5128101A (en) * 1990-03-21 1992-07-07 The Kendall Company Sterilization with ethylene oxide
US5069686A (en) * 1990-08-07 1991-12-03 Membrane Technology & Research, Inc. Process for reducing emissions from industrial sterilizers
US5108475A (en) * 1991-01-28 1992-04-28 Venturedyne, Ltd. Solvent recovery system with means for reducing input energy
US5073896A (en) * 1991-04-18 1991-12-17 Lumonics Inc. Purification of laser gases

Also Published As

Publication number Publication date
US5261250A (en) 1993-11-16
EP0614687B1 (de) 1996-05-29
DE69302893T2 (de) 1996-09-26
JPH06269605A (ja) 1994-09-27
CA2104055A1 (en) 1994-09-10
EP0614687A1 (de) 1994-09-14
CA2104055C (en) 2001-07-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee