DE69302893D1 - Verfahren und Vorrichtung zur Rückgewinnung von zusammengesetzten Gasgemischen - Google Patents
Verfahren und Vorrichtung zur Rückgewinnung von zusammengesetzten GasgemischenInfo
- Publication number
- DE69302893D1 DE69302893D1 DE69302893T DE69302893T DE69302893D1 DE 69302893 D1 DE69302893 D1 DE 69302893D1 DE 69302893 T DE69302893 T DE 69302893T DE 69302893 T DE69302893 T DE 69302893T DE 69302893 D1 DE69302893 D1 DE 69302893D1
- Authority
- DE
- Germany
- Prior art keywords
- gas mixtures
- composite gas
- recovering composite
- recovering
- mixtures
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D8/00—Cold traps; Cold baffles
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
- A61L2/16—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using chemical substances
- A61L2/20—Gaseous substances, e.g. vapours
- A61L2/206—Ethylene oxide
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Epidemiology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/028,742 US5261250A (en) | 1993-03-09 | 1993-03-09 | Method and apparatus for recovering multicomponent vapor mixtures |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69302893D1 true DE69302893D1 (de) | 1996-07-04 |
DE69302893T2 DE69302893T2 (de) | 1996-09-26 |
Family
ID=21845167
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69302893T Expired - Fee Related DE69302893T2 (de) | 1993-03-09 | 1993-09-15 | Verfahren und Vorrichtung zur Rückgewinnung von zusammengesetzten Gasgemischen |
Country Status (5)
Country | Link |
---|---|
US (1) | US5261250A (de) |
EP (1) | EP0614687B1 (de) |
JP (1) | JPH06269605A (de) |
CA (1) | CA2104055C (de) |
DE (1) | DE69302893T2 (de) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5540057A (en) * | 1995-06-30 | 1996-07-30 | Praxair Technology, Inc. | Volatile organic compounds recovery from vent gas streams |
US5617727A (en) * | 1996-05-24 | 1997-04-08 | Richard R. Zito R & D Corp. | Controlled multiple storage vessel gas trap |
US5799509A (en) * | 1997-08-22 | 1998-09-01 | The Boc Group, Inc. | Multi-component recovery apparatus and method |
US6094922A (en) * | 1998-09-09 | 2000-08-01 | Ziegler; Alex R. | Vacuum-insulated refrigerant line for allowing a vaccum chamber system with water-vapor cryocoil compressor to be locatable outside cleanroom |
US6383257B1 (en) | 2000-04-04 | 2002-05-07 | Air Products And Chemicals, Inc. | Reclamation and separation of perfluorocarbons using condensation |
US7611903B2 (en) * | 2002-09-11 | 2009-11-03 | Lawrence Livermore National Security, Llc | System for trapping and storing gases for subsequent chemical reduction to solids |
US8664124B2 (en) | 2005-10-31 | 2014-03-04 | Novellus Systems, Inc. | Method for etching organic hardmasks |
US8110493B1 (en) | 2005-12-23 | 2012-02-07 | Novellus Systems, Inc. | Pulsed PECVD method for modulating hydrogen content in hard mask |
US7981810B1 (en) | 2006-06-08 | 2011-07-19 | Novellus Systems, Inc. | Methods of depositing highly selective transparent ashable hardmask films |
US7666369B2 (en) | 2006-09-29 | 2010-02-23 | Tyco Healthcare Group Lp | System and method for recycling sterilant gas |
US8268238B2 (en) | 2006-09-29 | 2012-09-18 | Tyco Healthcare Group Lp | System and method for recycling sterilant gas |
US7981777B1 (en) | 2007-02-22 | 2011-07-19 | Novellus Systems, Inc. | Methods of depositing stable and hermetic ashable hardmask films |
US7915166B1 (en) | 2007-02-22 | 2011-03-29 | Novellus Systems, Inc. | Diffusion barrier and etch stop films |
US8236253B2 (en) * | 2007-04-30 | 2012-08-07 | Midmark Corporation | Portable sterilizing apparatus for surgical and dental instruments |
US8962101B2 (en) | 2007-08-31 | 2015-02-24 | Novellus Systems, Inc. | Methods and apparatus for plasma-based deposition |
US7820556B2 (en) * | 2008-06-04 | 2010-10-26 | Novellus Systems, Inc. | Method for purifying acetylene gas for use in semiconductor processes |
US8435608B1 (en) | 2008-06-27 | 2013-05-07 | Novellus Systems, Inc. | Methods of depositing smooth and conformal ashable hard mask films |
US7955990B2 (en) * | 2008-12-12 | 2011-06-07 | Novellus Systems, Inc. | Method for improved thickness repeatability of PECVD deposited carbon films |
US8563414B1 (en) | 2010-04-23 | 2013-10-22 | Novellus Systems, Inc. | Methods for forming conductive carbon films by PECVD |
US10118122B2 (en) * | 2011-08-29 | 2018-11-06 | The Boeing Company | CO2 collection methods and systems |
US9205357B2 (en) | 2012-03-29 | 2015-12-08 | The Boeing Company | Carbon dioxide separation system and method |
US9156703B2 (en) | 2012-03-30 | 2015-10-13 | The Boeing Company | System and method for producing carbon dioxide |
SG195494A1 (en) | 2012-05-18 | 2013-12-30 | Novellus Systems Inc | Carbon deposition-etch-ash gap fill process |
US9103549B2 (en) | 2012-08-23 | 2015-08-11 | The Boeing Company | Dual stream system and method for producing carbon dioxide |
US9777628B2 (en) | 2012-08-23 | 2017-10-03 | The Boeing Company | System and method for processing greenhouse gases |
US9362133B2 (en) | 2012-12-14 | 2016-06-07 | Lam Research Corporation | Method for forming a mask by etching conformal film on patterned ashable hardmask |
US9073001B2 (en) | 2013-02-14 | 2015-07-07 | The Boeing Company | Monolithic contactor and associated system and method for collecting carbon dioxide |
US9304396B2 (en) | 2013-02-25 | 2016-04-05 | Lam Research Corporation | PECVD films for EUV lithography |
US9302021B2 (en) | 2013-08-30 | 2016-04-05 | American Sterilizer Company | Method of performing sterilization cycle |
US9320387B2 (en) | 2013-09-30 | 2016-04-26 | Lam Research Corporation | Sulfur doped carbon hard masks |
US9589799B2 (en) | 2013-09-30 | 2017-03-07 | Lam Research Corporation | High selectivity and low stress carbon hardmask by pulsed low frequency RF power |
JP6351525B2 (ja) * | 2015-03-04 | 2018-07-04 | 住友重機械工業株式会社 | クライオポンプシステム、クライオポンプ制御装置、及びクライオポンプ再生方法 |
US10738020B2 (en) | 2017-11-22 | 2020-08-11 | Joseph D. Duff | Recovery of ethylene oxide from sterilization process |
US11207612B2 (en) * | 2019-03-20 | 2021-12-28 | Taiwan Advanced Sterilization Technologies Inc. | Method and system for recovering and purifying a gaseous sterilizing agent |
JP7229463B2 (ja) * | 2019-03-26 | 2023-02-28 | 三浦工業株式会社 | 食品機械とその除菌方法 |
KR20220002748A (ko) | 2019-05-29 | 2022-01-06 | 램 리써치 코포레이션 | 고 전력 펄싱된 저 주파수 rf에 의한 고 선택도, 저 응력, 및 저 수소 다이아몬드-유사 탄소 하드 마스크들 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US622936A (en) * | 1899-04-11 | And william a | ||
US2242299A (en) * | 1940-05-15 | 1941-05-20 | Standard Oil Dev Co | Vapor recovery system |
US2274094A (en) * | 1941-02-18 | 1942-02-24 | Standard Oil Dev Co | Refining process |
US3075362A (en) * | 1957-09-25 | 1963-01-29 | Linde Eismasch Ag | Process for separating so2 and constituents of a similar dew point from gases by means of regenerators |
US3238633A (en) * | 1963-06-10 | 1966-03-08 | Hackenberg Ulrich | Method and apparatus for reclaiming aromatic substances in drying process |
US3633371A (en) * | 1968-04-05 | 1972-01-11 | Phillips Petroleum Co | Gas separation |
US3549312A (en) * | 1968-05-06 | 1970-12-22 | Sybron Corp | Process and apparatus for recovering sterilization gas for reuse |
BE789308A (fr) * | 1971-10-04 | 1973-03-27 | Shell Int Research | Terige oplossingen van etheenoxyde werkwijze voor het concentreren en zuiveren van wa |
US4249917A (en) * | 1979-11-21 | 1981-02-10 | Union Carbide Corporation | Sterilization gas separation process |
FR2545588B1 (fr) * | 1983-05-05 | 1985-10-11 | Air Liquide | Appareil de refrigeration et piege frigorifique comprenant un tel appareil |
SE8302611L (sv) * | 1983-05-06 | 1984-11-07 | Gambro Lundia Ab | Forfarande och anleggning for atervinning av en eller flera bestandsdelar ur en gasblandning |
GB8407857D0 (en) * | 1984-03-27 | 1984-05-02 | Mann R | Separation of gaseous mixture |
DE3422417A1 (de) * | 1984-06-16 | 1985-12-19 | Kernforschungsanlage Jülich GmbH, 5170 Jülich | Verfahren und vorrichtung zur abtrennung einer gaskomponente aus einem gasgemisch durch ausfrieren |
US4551197A (en) * | 1984-07-26 | 1985-11-05 | Guilmette Joseph G | Method and apparatus for the recovery and recycling of condensable gas reactants |
DE3701544A1 (de) * | 1987-01-21 | 1988-08-04 | Messer Griesheim Gmbh | Verfahren zum entfernen von verunreinigungen aus abgasen |
US4822563A (en) * | 1987-10-26 | 1989-04-18 | Joslyn Value Corporation | Method for the recovery of sterilants |
US4954315A (en) * | 1988-02-03 | 1990-09-04 | Mg Industries | Method for recovery of sterilizing gas |
US5128101A (en) * | 1990-03-21 | 1992-07-07 | The Kendall Company | Sterilization with ethylene oxide |
US5069686A (en) * | 1990-08-07 | 1991-12-03 | Membrane Technology & Research, Inc. | Process for reducing emissions from industrial sterilizers |
US5108475A (en) * | 1991-01-28 | 1992-04-28 | Venturedyne, Ltd. | Solvent recovery system with means for reducing input energy |
US5073896A (en) * | 1991-04-18 | 1991-12-17 | Lumonics Inc. | Purification of laser gases |
-
1993
- 1993-03-09 US US08/028,742 patent/US5261250A/en not_active Expired - Fee Related
- 1993-08-13 CA CA002104055A patent/CA2104055C/en not_active Expired - Fee Related
- 1993-09-15 EP EP93114854A patent/EP0614687B1/de not_active Expired - Lifetime
- 1993-09-15 DE DE69302893T patent/DE69302893T2/de not_active Expired - Fee Related
- 1993-12-29 JP JP5354628A patent/JPH06269605A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
US5261250A (en) | 1993-11-16 |
EP0614687B1 (de) | 1996-05-29 |
DE69302893T2 (de) | 1996-09-26 |
JPH06269605A (ja) | 1994-09-27 |
CA2104055A1 (en) | 1994-09-10 |
EP0614687A1 (de) | 1994-09-14 |
CA2104055C (en) | 2001-07-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |