DE69301982D1 - Aluminiumnitrid-sinterkörper und Verfahren zu seiner Herstellung - Google Patents
Aluminiumnitrid-sinterkörper und Verfahren zu seiner HerstellungInfo
- Publication number
- DE69301982D1 DE69301982D1 DE69301982T DE69301982T DE69301982D1 DE 69301982 D1 DE69301982 D1 DE 69301982D1 DE 69301982 T DE69301982 T DE 69301982T DE 69301982 T DE69301982 T DE 69301982T DE 69301982 D1 DE69301982 D1 DE 69301982D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- sintered body
- aluminum nitride
- nitride sintered
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
- H01L21/4807—Ceramic parts
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23668992 | 1992-09-04 | ||
JP20926393A JP3404813B2 (ja) | 1992-09-04 | 1993-08-24 | 窒化アルミニウム焼結体およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69301982D1 true DE69301982D1 (de) | 1996-05-02 |
DE69301982T2 DE69301982T2 (de) | 1996-08-08 |
Family
ID=26517329
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69301982T Expired - Lifetime DE69301982T2 (de) | 1992-09-04 | 1993-08-31 | Aluminiumnitrid-sinterkörper und Verfahren zu seiner Herstellung |
Country Status (5)
Country | Link |
---|---|
US (2) | US5393715A (de) |
EP (1) | EP0585876B1 (de) |
JP (1) | JP3404813B2 (de) |
DE (1) | DE69301982T2 (de) |
SG (1) | SG43214A1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07187788A (ja) * | 1993-12-27 | 1995-07-25 | Ngk Spark Plug Co Ltd | 窒化アルミニウム焼結体及びその製造方法 |
KR100436870B1 (ko) * | 1995-07-19 | 2004-08-12 | 가부시끼가이샤 도꾸야마 | 질화알루미늄 접합 구조체 |
DE69635908T2 (de) * | 1995-08-03 | 2006-11-23 | Ngk Insulators, Ltd., Nagoya | Gesinterte Aluminiumnitridkörper und deren Verwendung als Subtrat in einer Vorrichtung zur Herstellung von Halbleitern |
JP3433063B2 (ja) * | 1997-09-29 | 2003-08-04 | 日本碍子株式会社 | 窒化アルミニウム焼結体、電子機能材料および静電チャック |
JP5038565B2 (ja) * | 2000-09-22 | 2012-10-03 | 株式会社東芝 | セラミックス回路基板およびその製造方法 |
JP4710139B2 (ja) * | 2001-01-15 | 2011-06-29 | 豊田合成株式会社 | Iii族窒化物系化合物半導体素子 |
JP5043260B2 (ja) * | 2001-07-05 | 2012-10-10 | 電気化学工業株式会社 | 窒化アルミニウム焼結体及びその製造方法、用途 |
TW200726372A (en) * | 2005-12-30 | 2007-07-01 | Porite Taiwan Co Ltd | Method of manufacturing fixture base of microelectromechanical elements and circuit boards and its structure thereof |
WO2011155319A1 (ja) | 2010-06-08 | 2011-12-15 | 電気化学工業株式会社 | 回路基板用窒化アルミニウム基板及びその製造方法 |
US11319254B2 (en) | 2018-09-19 | 2022-05-03 | Maruwa Co., Ltd. | Aluminum nitride sintered body and method for producing same |
CN115812069B (zh) * | 2020-07-13 | 2023-12-19 | 京瓷株式会社 | 试样保持工具 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4877760A (en) * | 1985-05-22 | 1989-10-31 | Ngk Spark Plug Co., Ltd. | Aluminum nitride sintered body with high thermal conductivity and process for producing same |
US5001089A (en) * | 1985-06-28 | 1991-03-19 | Kabushiki Kaisha Toshiba | Aluminum nitride sintered body |
US4892849A (en) * | 1987-02-25 | 1990-01-09 | Southwest Research Institute | Ceramic composition having low friction coefficient at high operating temperatures |
US4929433A (en) * | 1987-10-22 | 1990-05-29 | Alfred University | Method for the preparation of sinterable nitrides |
US5219803A (en) * | 1988-05-16 | 1993-06-15 | Sumitomo Electric Industries, Ltd. | Sintered body of aluminum nitride |
US5264388A (en) * | 1988-05-16 | 1993-11-23 | Sumitomo Electric Industries, Inc. | Sintered body of aluminum nitride |
US5273700A (en) * | 1990-10-29 | 1993-12-28 | Sumitomo Electric Industries Ltd. | Aluminum nitride sintered body and process for producing the same |
-
1993
- 1993-08-24 JP JP20926393A patent/JP3404813B2/ja not_active Expired - Lifetime
- 1993-08-31 SG SG1996005676A patent/SG43214A1/en unknown
- 1993-08-31 DE DE69301982T patent/DE69301982T2/de not_active Expired - Lifetime
- 1993-08-31 EP EP93113904A patent/EP0585876B1/de not_active Expired - Lifetime
- 1993-09-01 US US08/115,446 patent/US5393715A/en not_active Expired - Lifetime
-
1994
- 1994-05-02 US US08/236,707 patent/US5449648A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0585876A1 (de) | 1994-03-09 |
JP3404813B2 (ja) | 2003-05-12 |
JPH06128041A (ja) | 1994-05-10 |
US5393715A (en) | 1995-02-28 |
EP0585876B1 (de) | 1996-03-27 |
DE69301982T2 (de) | 1996-08-08 |
SG43214A1 (en) | 1997-10-17 |
US5449648A (en) | 1995-09-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: GROSSE, BOCKHORNI, SCHUMACHER, 81476 MUENCHEN |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: BOCKHORNI & KOLLEGEN, 80687 MUENCHEN |