DE69301982D1 - Aluminiumnitrid-sinterkörper und Verfahren zu seiner Herstellung - Google Patents

Aluminiumnitrid-sinterkörper und Verfahren zu seiner Herstellung

Info

Publication number
DE69301982D1
DE69301982D1 DE69301982T DE69301982T DE69301982D1 DE 69301982 D1 DE69301982 D1 DE 69301982D1 DE 69301982 T DE69301982 T DE 69301982T DE 69301982 T DE69301982 T DE 69301982T DE 69301982 D1 DE69301982 D1 DE 69301982D1
Authority
DE
Germany
Prior art keywords
production
sintered body
aluminum nitride
nitride sintered
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69301982T
Other languages
English (en)
Other versions
DE69301982T2 (de
Inventor
Seiji Nakahata
Takahiro Matsuura
Kouichi Sogabe
Akira Yamakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE69301982D1 publication Critical patent/DE69301982D1/de
Application granted granted Critical
Publication of DE69301982T2 publication Critical patent/DE69301982T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
    • H01L21/4807—Ceramic parts

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
DE69301982T 1992-09-04 1993-08-31 Aluminiumnitrid-sinterkörper und Verfahren zu seiner Herstellung Expired - Lifetime DE69301982T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP23668992 1992-09-04
JP20926393A JP3404813B2 (ja) 1992-09-04 1993-08-24 窒化アルミニウム焼結体およびその製造方法

Publications (2)

Publication Number Publication Date
DE69301982D1 true DE69301982D1 (de) 1996-05-02
DE69301982T2 DE69301982T2 (de) 1996-08-08

Family

ID=26517329

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69301982T Expired - Lifetime DE69301982T2 (de) 1992-09-04 1993-08-31 Aluminiumnitrid-sinterkörper und Verfahren zu seiner Herstellung

Country Status (5)

Country Link
US (2) US5393715A (de)
EP (1) EP0585876B1 (de)
JP (1) JP3404813B2 (de)
DE (1) DE69301982T2 (de)
SG (1) SG43214A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07187788A (ja) * 1993-12-27 1995-07-25 Ngk Spark Plug Co Ltd 窒化アルミニウム焼結体及びその製造方法
KR100436870B1 (ko) * 1995-07-19 2004-08-12 가부시끼가이샤 도꾸야마 질화알루미늄 접합 구조체
DE69635908T2 (de) * 1995-08-03 2006-11-23 Ngk Insulators, Ltd., Nagoya Gesinterte Aluminiumnitridkörper und deren Verwendung als Subtrat in einer Vorrichtung zur Herstellung von Halbleitern
JP3433063B2 (ja) * 1997-09-29 2003-08-04 日本碍子株式会社 窒化アルミニウム焼結体、電子機能材料および静電チャック
JP5038565B2 (ja) * 2000-09-22 2012-10-03 株式会社東芝 セラミックス回路基板およびその製造方法
JP4710139B2 (ja) * 2001-01-15 2011-06-29 豊田合成株式会社 Ｉｉｉ族窒化物系化合物半導体素子
JP5043260B2 (ja) * 2001-07-05 2012-10-10 電気化学工業株式会社 窒化アルミニウム焼結体及びその製造方法、用途
TW200726372A (en) * 2005-12-30 2007-07-01 Porite Taiwan Co Ltd Method of manufacturing fixture base of microelectromechanical elements and circuit boards and its structure thereof
WO2011155319A1 (ja) 2010-06-08 2011-12-15 電気化学工業株式会社 回路基板用窒化アルミニウム基板及びその製造方法
US11319254B2 (en) 2018-09-19 2022-05-03 Maruwa Co., Ltd. Aluminum nitride sintered body and method for producing same
CN115812069B (zh) * 2020-07-13 2023-12-19 京瓷株式会社 试样保持工具

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4877760A (en) * 1985-05-22 1989-10-31 Ngk Spark Plug Co., Ltd. Aluminum nitride sintered body with high thermal conductivity and process for producing same
US5001089A (en) * 1985-06-28 1991-03-19 Kabushiki Kaisha Toshiba Aluminum nitride sintered body
US4892849A (en) * 1987-02-25 1990-01-09 Southwest Research Institute Ceramic composition having low friction coefficient at high operating temperatures
US4929433A (en) * 1987-10-22 1990-05-29 Alfred University Method for the preparation of sinterable nitrides
US5219803A (en) * 1988-05-16 1993-06-15 Sumitomo Electric Industries, Ltd. Sintered body of aluminum nitride
US5264388A (en) * 1988-05-16 1993-11-23 Sumitomo Electric Industries, Inc. Sintered body of aluminum nitride
US5273700A (en) * 1990-10-29 1993-12-28 Sumitomo Electric Industries Ltd. Aluminum nitride sintered body and process for producing the same

Also Published As

Publication number Publication date
EP0585876A1 (de) 1994-03-09
JP3404813B2 (ja) 2003-05-12
JPH06128041A (ja) 1994-05-10
US5393715A (en) 1995-02-28
EP0585876B1 (de) 1996-03-27
DE69301982T2 (de) 1996-08-08
SG43214A1 (en) 1997-10-17
US5449648A (en) 1995-09-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: GROSSE, BOCKHORNI, SCHUMACHER, 81476 MUENCHEN

8328 Change in the person/name/address of the agent

Representative=s name: BOCKHORNI & KOLLEGEN, 80687 MUENCHEN