DE3576326D1 - Aluminiumnitridsinterkoerper und verfahren zu seiner herstellung. - Google Patents

Aluminiumnitridsinterkoerper und verfahren zu seiner herstellung.

Info

Publication number
DE3576326D1
DE3576326D1 DE8585110151T DE3576326T DE3576326D1 DE 3576326 D1 DE3576326 D1 DE 3576326D1 DE 8585110151 T DE8585110151 T DE 8585110151T DE 3576326 T DE3576326 T DE 3576326T DE 3576326 D1 DE3576326 D1 DE 3576326D1
Authority
DE
Germany
Prior art keywords
production
aluminum nitride
intermediate body
nitride intermediate
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585110151T
Other languages
English (en)
Inventor
Mituo C O K K Toshiba Kasori
Kazuo C O K K Toshib Shinozaki
Kazuo C O K K Toshiba Anzai
Akihiko C O K K Toshiba Tsuge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP59234093A external-priority patent/JPH0649613B2/ja
Priority claimed from JP60048257A external-priority patent/JPH0712981B2/ja
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE3576326D1 publication Critical patent/DE3576326D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
DE8585110151T 1984-11-08 1985-08-13 Aluminiumnitridsinterkoerper und verfahren zu seiner herstellung. Expired - Lifetime DE3576326D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP59234093A JPH0649613B2 (ja) 1984-11-08 1984-11-08 窒化アルミニウム焼結体およびその製造方法
JP60048257A JPH0712981B2 (ja) 1985-03-13 1985-03-13 窒化アルミニウム焼結体の製造方法

Publications (1)

Publication Number Publication Date
DE3576326D1 true DE3576326D1 (de) 1990-04-12

Family

ID=26388495

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585110151T Expired - Lifetime DE3576326D1 (de) 1984-11-08 1985-08-13 Aluminiumnitridsinterkoerper und verfahren zu seiner herstellung.

Country Status (3)

Country Link
US (1) US4746637A (de)
EP (1) EP0180724B1 (de)
DE (1) DE3576326D1 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3627317A1 (de) * 1985-08-13 1987-02-19 Tokuyama Soda Kk Sinterbare aluminiumnitridzusammensetzung, sinterkoerper aus dieser zusammensetzung und verfahren zu seiner herstellung
US4843042A (en) * 1986-06-30 1989-06-27 General Electric Company Alkaline earth fluoride additive for sintering aluminum nitride
US5242872A (en) * 1986-07-18 1993-09-07 Tokuyama Soda Kabushiki Kaisha Process for producing aluminum nitride sintered body
US4810679A (en) * 1986-07-21 1989-03-07 General Electric Company Rare earth fluoride additive for sintering aluminum nitride
US4847221A (en) * 1987-01-13 1989-07-11 Kabushiki Kaisha Toshiba AlN sintered body having high thermal conductivity and a method of fabricating the same
JPS63260867A (ja) * 1987-01-20 1988-10-27 ケラモント、アドバンスド、セラミック、プロダクツ、コーポレーション 高いグリーン密度および高いグリーン強度を有する窒化アルミニウム体
AU1063788A (en) * 1987-01-20 1988-07-21 Keramont Advanced Ceramic Products Corp. Mixed powders synergy for high density and high strength ceramic compacts
CA1318691C (en) * 1987-08-28 1993-06-01 Akira Yamakawa Sintered body of aluminum nitride and method for producing the same
FR2621910B1 (fr) * 1987-10-14 1992-12-31 Armines Materiau ceramique a haut pouvoir de dissipation thermique, son procede de fabrication et ses applications notamment dans l'industrie electronique
DE3743663A1 (de) * 1987-12-22 1989-07-06 Kempten Elektroschmelz Gmbh Polykristalline sinterkoerper auf basis von aluminiumnitrid und verfahren zu ihrer herstellung
CN1037321A (zh) * 1988-03-15 1989-11-22 唐化学原料公司 装甲材料
JPH01252581A (ja) * 1988-03-31 1989-10-09 Taiyo Yuden Co Ltd 窒化物セラミツクスの製造方法
EP0372910B1 (de) * 1988-12-07 1994-06-29 Sumitomo Chemical Company Limited Verfahren zur Herstellung eines Sinterkörpers aus Aluminiumnitrid
JPH03261663A (ja) * 1990-03-01 1991-11-21 Shin Etsu Chem Co Ltd 窒化アルミニウム焼結体の製造方法
GB9127416D0 (en) * 1991-12-27 1992-02-19 Atomic Energy Authority Uk A nitrogen-strengthened alloy
WO1993017982A1 (en) * 1992-03-09 1993-09-16 American Technology, Inc. Aluminum nitride insulated electrical components and method for making same
JPH06206772A (ja) * 1992-11-18 1994-07-26 Toshiba Corp 窒化アルミニウム焼結体およびセラミック回路基板
US5330692A (en) * 1992-12-22 1994-07-19 Matsushita Electric Works, Ltd. Process for producing an aluminum nitride sintered product
CA2171548A1 (en) * 1993-07-12 1995-01-26 Junhong Zhao Aluminum nitride sintered body with high thermal conductivity and its preparation
US5424261A (en) * 1993-12-22 1995-06-13 The Carborundum Company Low temperature sintering route for aluminum nitride ceramics
US5541145A (en) * 1993-12-22 1996-07-30 The Carborundum Company/Ibm Corporation Low temperature sintering route for aluminum nitride ceramics
JP3662955B2 (ja) * 1994-09-16 2005-06-22 株式会社東芝 回路基板および回路基板の製造方法
US5932505A (en) * 1996-11-04 1999-08-03 Rutgers, The State University Hydrofluoric acid resistant ceramic mortar
JP3362113B2 (ja) * 1997-07-15 2003-01-07 日本碍子株式会社 耐蝕性部材、ウエハー設置部材および耐蝕性部材の製造方法
JP4812144B2 (ja) 1998-07-22 2011-11-09 住友電気工業株式会社 窒化アルミニウム焼結体及びその製造方法
WO2001069674A1 (fr) * 2000-03-15 2001-09-20 Sumitomo Electric Industries, Ltd. Substrat de semi-conducteur a base d'aluminium-carbure de silicium et procede de fabrication
DE102005036768A1 (de) * 2005-06-23 2006-12-28 Webasto Ag Heizgerät mit thermoelektrischer Einrichtung
JP5307671B2 (ja) 2008-10-23 2013-10-02 日本碍子株式会社 窒化アルミニウム基複合材料、その製造方法及び半導体製造装置用部材
CN102502539B (zh) * 2011-11-08 2013-04-10 中国计量学院 一种钇掺杂纳米氮化铝粉体的制备方法
CN102502538B (zh) * 2011-11-08 2013-04-10 中国计量学院 一种钙辅助低温合成超细氮化铝粉体的方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE620323A (de) * 1961-07-21
GB978734A (en) * 1962-05-15 1964-12-23 Union Carbide Corp Improvements in and relating to articles of boron nitride
US3531245A (en) * 1968-04-01 1970-09-29 Du Pont Magnesium-aluminum nitrides
JPS491427A (de) * 1972-04-25 1974-01-08
JPS57181356A (en) * 1981-04-30 1982-11-08 Hitachi Ltd Sintered aluminum nitride body with high heat conductivity
JPS5855377A (ja) * 1981-09-28 1983-04-01 株式会社東芝 窒化アルミニウム焼結体の製造方法
JPS5950077A (ja) * 1982-09-14 1984-03-22 株式会社東芝 良熱伝導性窒化アルミニウム焼結体
DE3247985C2 (de) * 1982-12-24 1992-04-16 W.C. Heraeus Gmbh, 6450 Hanau Keramischer Träger
DE3313836C2 (de) * 1983-04-16 1985-08-29 W.C. Heraeus Gmbh, 6450 Hanau Verwendung von Aluminiumnitrid für Laserröhrenbauteile
US4547471A (en) * 1983-11-18 1985-10-15 General Electric Company High thermal conductivity aluminum nitride ceramic body
JPS60127267A (ja) * 1983-12-12 1985-07-06 株式会社東芝 高熱伝導性窒化アルミニウム焼結体の製造方法
US4698320A (en) * 1984-06-26 1987-10-06 Kabushiki Kaisha Toshiba Aluminum nitride sintered body

Also Published As

Publication number Publication date
EP0180724A3 (en) 1986-07-02
EP0180724A2 (de) 1986-05-14
EP0180724B1 (de) 1990-03-07
US4746637A (en) 1988-05-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee