DE69207657D1 - Optisches heterodynes Messverfahren und Einrichtung dafür - Google Patents
Optisches heterodynes Messverfahren und Einrichtung dafürInfo
- Publication number
- DE69207657D1 DE69207657D1 DE69207657T DE69207657T DE69207657D1 DE 69207657 D1 DE69207657 D1 DE 69207657D1 DE 69207657 T DE69207657 T DE 69207657T DE 69207657 T DE69207657 T DE 69207657T DE 69207657 D1 DE69207657 D1 DE 69207657D1
- Authority
- DE
- Germany
- Prior art keywords
- measuring method
- device therefor
- optical heterodyne
- heterodyne measuring
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7049—Technique, e.g. interferometric
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/30—Grating as beam-splitter
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17128591 | 1991-07-11 | ||
JP1651992 | 1992-01-31 | ||
JP14156292A JP3244769B2 (ja) | 1991-07-11 | 1992-06-02 | 測定方法及び測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69207657D1 true DE69207657D1 (de) | 1996-02-29 |
DE69207657T2 DE69207657T2 (de) | 1996-10-17 |
Family
ID=27281445
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69207657T Expired - Fee Related DE69207657T2 (de) | 1991-07-11 | 1992-07-09 | Optisches heterodynes Messverfahren und Einrichtung dafür |
Country Status (4)
Country | Link |
---|---|
US (1) | US5321502A (de) |
EP (1) | EP0522557B1 (de) |
JP (1) | JP3244769B2 (de) |
DE (1) | DE69207657T2 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2078732A1 (en) * | 1991-09-27 | 1993-03-28 | Koichi Sentoku | Displacement measuring device and displacement measuring method |
JP3109900B2 (ja) * | 1992-04-21 | 2000-11-20 | キヤノン株式会社 | 測定装置 |
JPH06177013A (ja) * | 1992-12-10 | 1994-06-24 | Canon Inc | 位置検出装置 |
JPH085314A (ja) * | 1994-06-20 | 1996-01-12 | Canon Inc | 変位測定方法及び変位測定装置 |
US5825018A (en) * | 1996-01-11 | 1998-10-20 | Northeastern University | Optical lock-in detection technique for coherent detection applications |
US6157458A (en) * | 1998-04-30 | 2000-12-05 | Agilent Technologies | Achromatic quarter wave plate for an air turbulence compensating inteferometer |
JP3793430B2 (ja) * | 2001-07-18 | 2006-07-05 | 株式会社日立製作所 | 近接場光を用いた光学装置 |
US7206516B2 (en) * | 2002-04-30 | 2007-04-17 | Pivotal Decisions Llc | Apparatus and method for measuring the dispersion of a fiber span |
JP4612817B2 (ja) * | 2004-08-20 | 2011-01-12 | キヤノン株式会社 | グループ管理装置及び情報処理方法、ならびにコンピュータプログラム及び記録媒体 |
JP5558768B2 (ja) * | 2008-10-24 | 2014-07-23 | キヤノン株式会社 | 測定装置、光源装置、干渉測定装置、露光装置、及びデバイス製造方法 |
JP2011220890A (ja) * | 2010-04-12 | 2011-11-04 | Canon Inc | ヘテロダイン干渉変位計測装置 |
US20110292371A1 (en) * | 2010-05-28 | 2011-12-01 | Optical Air Data Systems, Llc | Method and Apparatus for a Pulsed Coherent Laser Range Finder |
KR101753450B1 (ko) * | 2010-12-15 | 2017-07-03 | 브이 테크놀로지 씨오. 엘티디 | 배향 처리 장치 및 배향 처리 방법 |
JP6034633B2 (ja) | 2011-12-16 | 2016-11-30 | キヤノン株式会社 | 無線通信装置及びその制御方法 |
NL2009870A (en) | 2011-12-23 | 2013-06-26 | Asml Netherlands Bv | Lithographic apparatus and method. |
JP5969816B2 (ja) | 2012-05-17 | 2016-08-17 | キヤノン株式会社 | 構造部材及び通信装置 |
CN108592800B (zh) * | 2018-05-02 | 2019-08-20 | 中国计量科学研究院 | 一种基于平面镜反射的激光外差干涉测量装置和方法 |
EP3730897A1 (de) * | 2019-04-25 | 2020-10-28 | Nokia Technologies Oy | Vorrichtung, systeme und verfahren zur detektion von licht |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58191907A (ja) * | 1982-05-04 | 1983-11-09 | Canon Inc | 移動量測定方法 |
US4486657A (en) * | 1982-05-27 | 1984-12-04 | The United States Of America As Represented By The Secretary Of The Navy | Phase-lock fiber optic interferometer |
US4650330A (en) * | 1983-05-13 | 1987-03-17 | Citizen Watch Co., Ltd. | Surface condition measurement apparatus |
US4575247A (en) * | 1984-07-02 | 1986-03-11 | Rockwell International Corporation | Phase-measuring interferometer |
USRE34010E (en) * | 1985-03-22 | 1992-07-28 | Nikon Corporation | Position detection apparatus |
US4842408A (en) * | 1986-05-09 | 1989-06-27 | Canon Kabushiki Kaisha | Phase shift measuring apparatus utilizing optical meterodyne techniques |
CH678108A5 (de) * | 1987-04-28 | 1991-07-31 | Wild Leitz Ag | |
JPH01167607U (de) * | 1988-05-16 | 1989-11-24 | ||
JPH02297005A (ja) * | 1989-05-12 | 1990-12-07 | Matsushita Electric Ind Co Ltd | 位置合わせ装置 |
JPH0339605A (ja) * | 1989-07-05 | 1991-02-20 | Brother Ind Ltd | 光学式表面形状測定装置 |
US5177633A (en) * | 1989-10-12 | 1993-01-05 | Massachusetts Institute Of Technology | Optical parametric oscillator wideband frequency comb generator |
-
1992
- 1992-06-02 JP JP14156292A patent/JP3244769B2/ja not_active Expired - Fee Related
- 1992-07-08 US US07/910,457 patent/US5321502A/en not_active Expired - Lifetime
- 1992-07-09 EP EP92111695A patent/EP0522557B1/de not_active Expired - Lifetime
- 1992-07-09 DE DE69207657T patent/DE69207657T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0522557A1 (de) | 1993-01-13 |
DE69207657T2 (de) | 1996-10-17 |
JP3244769B2 (ja) | 2002-01-07 |
US5321502A (en) | 1994-06-14 |
EP0522557B1 (de) | 1996-01-17 |
JPH05272914A (ja) | 1993-10-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |