DE69122436T2 - Verfahren zum Herstellen einer Stufe in einer integrierten Schaltung - Google Patents

Verfahren zum Herstellen einer Stufe in einer integrierten Schaltung

Info

Publication number
DE69122436T2
DE69122436T2 DE69122436T DE69122436T DE69122436T2 DE 69122436 T2 DE69122436 T2 DE 69122436T2 DE 69122436 T DE69122436 T DE 69122436T DE 69122436 T DE69122436 T DE 69122436T DE 69122436 T2 DE69122436 T2 DE 69122436T2
Authority
DE
Germany
Prior art keywords
layer
dielectric layer
mask
connection points
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69122436T
Other languages
German (de)
English (en)
Other versions
DE69122436D1 (de
Inventor
Michel Heitzmann
Jean Lajzerowicz
Philippe Laporte
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE69122436D1 publication Critical patent/DE69122436D1/de
Application granted granted Critical
Publication of DE69122436T2 publication Critical patent/DE69122436T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/528—Geometry or layout of the interconnection structure
    • H01L23/5283—Cross-sectional geometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
    • H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
    • H01L21/76813—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures involving a partial via etch
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Geometry (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Wire Bonding (AREA)
DE69122436T 1990-06-26 1991-06-25 Verfahren zum Herstellen einer Stufe in einer integrierten Schaltung Expired - Lifetime DE69122436T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9008011A FR2663784B1 (fr) 1990-06-26 1990-06-26 Procede de realisation d'un etage d'un circuit integre.

Publications (2)

Publication Number Publication Date
DE69122436D1 DE69122436D1 (de) 1996-11-07
DE69122436T2 true DE69122436T2 (de) 1997-04-17

Family

ID=9398012

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69122436T Expired - Lifetime DE69122436T2 (de) 1990-06-26 1991-06-25 Verfahren zum Herstellen einer Stufe in einer integrierten Schaltung

Country Status (5)

Country Link
US (1) US5354711A (fr)
EP (1) EP0463956B1 (fr)
JP (1) JP2950653B2 (fr)
DE (1) DE69122436T2 (fr)
FR (1) FR2663784B1 (fr)

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US5651855A (en) * 1992-07-28 1997-07-29 Micron Technology, Inc. Method of making self aligned contacts to silicon substrates during the manufacture of integrated circuits
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US5445994A (en) * 1994-04-11 1995-08-29 Micron Technology, Inc. Method for forming custom planar metal bonding pad connectors for semiconductor dice
JP3277098B2 (ja) * 1994-07-26 2002-04-22 株式会社東芝 半導体装置の製造方法
US5648296A (en) * 1994-07-27 1997-07-15 General Electric Company Post-fabrication repair method for thin film imager devices
US5466639A (en) 1994-10-06 1995-11-14 Micron Semiconductor, Inc. Double mask process for forming trenches and contacts during the formation of a semiconductor memory device
US5635423A (en) * 1994-10-11 1997-06-03 Advanced Micro Devices, Inc. Simplified dual damascene process for multi-level metallization and interconnection structure
US5736457A (en) * 1994-12-09 1998-04-07 Sematech Method of making a damascene metallization
US6388203B1 (en) 1995-04-04 2002-05-14 Unitive International Limited Controlled-shaped solder reservoirs for increasing the volume of solder bumps, and structures formed thereby
JP3549208B2 (ja) 1995-04-05 2004-08-04 ユニティヴ・インターナショナル・リミテッド 集積再分配経路設定導体、はんだバイプならびにそれらにより形成された構造を形成する方法
JP2679680B2 (ja) * 1995-04-24 1997-11-19 日本電気株式会社 半導体装置の製造方法
KR0186085B1 (ko) * 1995-09-02 1999-04-15 문정환 배선 형성방법
JPH09115866A (ja) * 1995-10-17 1997-05-02 Mitsubishi Electric Corp 半導体装置の製造方法
JPH09306988A (ja) * 1996-03-13 1997-11-28 Sony Corp 多層配線の形成方法
US6008121A (en) * 1996-03-19 1999-12-28 Siemens Aktiengesellschaft Etching high aspect contact holes in solid state devices
US5741741A (en) * 1996-05-23 1998-04-21 Vanguard International Semiconductor Corporation Method for making planar metal interconnections and metal plugs on semiconductor substrates
US5793116A (en) * 1996-05-29 1998-08-11 Mcnc Microelectronic packaging using arched solder columns
KR0184158B1 (ko) * 1996-07-13 1999-04-15 문정환 반도체장치의 자기 정합정 금속 배선 형성 방법
WO1998003994A1 (fr) * 1996-07-18 1998-01-29 Advanced Micro Devices, Inc. Utilisation dans circuit integre d'un arret de gravure pour produire des lignes d'interconnexion decalees
US5854515A (en) * 1996-07-23 1998-12-29 Advanced Micro Devices, Inc. Integrated circuit having conductors of enhanced cross-sectional area
US5847462A (en) * 1996-11-14 1998-12-08 Advanced Micro Devices, Inc. Integrated circuit having conductors of enhanced cross-sectional area with etch stop barrier layer
US6303488B1 (en) 1997-02-12 2001-10-16 Micron Technology, Inc. Semiconductor processing methods of forming openings to devices and substrates, exposing material from which photoresist cannot be substantially selectively removed
JPH10242271A (ja) * 1997-02-28 1998-09-11 Sony Corp 半導体装置及びその製造方法
WO1999000839A1 (fr) * 1997-06-26 1999-01-07 Advanced Micro Devices, Inc. Procede de gravure a double damasquinage
US5990472A (en) * 1997-09-29 1999-11-23 Mcnc Microelectronic radiation detectors for detecting and emitting radiation signals
US6137129A (en) 1998-01-05 2000-10-24 International Business Machines Corporation High performance direct coupled FET memory cell
US6297531B2 (en) 1998-01-05 2001-10-02 International Business Machines Corporation High performance, low power vertical integrated CMOS devices
FR2777697B1 (fr) * 1998-04-16 2000-06-09 St Microelectronics Sa Circuit integre avec couche d'arret et procede de fabrication associe
US6680248B2 (en) 1998-06-01 2004-01-20 United Microelectronics Corporation Method of forming dual damascene structure
TW383463B (en) 1998-06-01 2000-03-01 United Microelectronics Corp Manufacturing method for dual damascene structure
US6127263A (en) * 1998-07-10 2000-10-03 Applied Materials, Inc. Misalignment tolerant techniques for dual damascene fabrication
US6190989B1 (en) * 1998-07-15 2001-02-20 Micron Technology, Inc. Method for patterning cavities and enhanced cavity shapes for semiconductor devices
US6391771B1 (en) 1998-07-23 2002-05-21 Applied Materials, Inc. Integrated circuit interconnect lines having sidewall layers
TW374948B (en) * 1998-07-28 1999-11-21 United Microelectronics Corp Method of prevention of poisoning trenches in dual damascene process structures and dielectric layer windows
TW437040B (en) 1998-08-12 2001-05-28 Applied Materials Inc Interconnect line formed by dual damascene using dielectric layers having dissimilar etching characteristics
US5985753A (en) * 1998-08-19 1999-11-16 Advanced Micro Devices, Inc. Method to manufacture dual damascene using a phantom implant mask
US6225207B1 (en) * 1998-10-01 2001-05-01 Applied Materials, Inc. Techniques for triple and quadruple damascene fabrication
US6265308B1 (en) 1998-11-30 2001-07-24 International Business Machines Corporation Slotted damascene lines for low resistive wiring lines for integrated circuit
US6495468B2 (en) 1998-12-22 2002-12-17 Micron Technology, Inc. Laser ablative removal of photoresist
US6204187B1 (en) * 1999-01-06 2001-03-20 Infineon Technologies North America, Corp. Contact and deep trench patterning
US6573148B1 (en) * 2000-07-12 2003-06-03 Koninklljke Philips Electronics N.V. Methods for making semiconductor inductor
US6498088B1 (en) * 2000-11-09 2002-12-24 Micron Technology, Inc. Stacked local interconnect structure and method of fabricating same
EP1332654B1 (fr) 2000-11-10 2005-01-12 Unitive Electronics, Inc. Methodes de positionnement de composants au moyen d'elements d'entrainement a liquides et structures correspondantes
US6863209B2 (en) 2000-12-15 2005-03-08 Unitivie International Limited Low temperature methods of bonding components
TW529099B (en) * 2002-01-21 2003-04-21 Macronix Int Co Ltd Method for performing via etching in the same etching chamber
US6960828B2 (en) 2002-06-25 2005-11-01 Unitive International Limited Electronic structures including conductive shunt layers
US7547623B2 (en) 2002-06-25 2009-06-16 Unitive International Limited Methods of forming lead free solder bumps
US7531898B2 (en) 2002-06-25 2009-05-12 Unitive International Limited Non-Circular via holes for bumping pads and related structures
US6649469B1 (en) * 2002-10-11 2003-11-18 Micron Technology, Inc. Methods of forming capacitors
WO2004038798A2 (fr) 2002-10-22 2004-05-06 Unitive International Limited Structures electroniques empilees comprenant des substrats decales
US7138329B2 (en) * 2002-11-15 2006-11-21 United Microelectronics Corporation Air gap for tungsten/aluminum plug applications
US6917109B2 (en) * 2002-11-15 2005-07-12 United Micorelectronics, Corp. Air gap structure and formation method for reducing undesired capacitive coupling between interconnects in an integrated circuit device
US7449407B2 (en) * 2002-11-15 2008-11-11 United Microelectronics Corporation Air gap for dual damascene applications
TWI225899B (en) 2003-02-18 2005-01-01 Unitive Semiconductor Taiwan C Etching solution and method for manufacturing conductive bump using the etching solution to selectively remove barrier layer
US7358146B2 (en) * 2003-06-24 2008-04-15 Micron Technology, Inc. Method of forming a capacitor
US7049216B2 (en) * 2003-10-14 2006-05-23 Unitive International Limited Methods of providing solder structures for out plane connections
US7153778B2 (en) * 2004-02-20 2006-12-26 Micron Technology, Inc. Methods of forming openings, and methods of forming container capacitors
US7358174B2 (en) 2004-04-13 2008-04-15 Amkor Technology, Inc. Methods of forming solder bumps on exposed metal pads
US7674701B2 (en) 2006-02-08 2010-03-09 Amkor Technology, Inc. Methods of forming metal layers using multi-layer lift-off patterns
US7932615B2 (en) 2006-02-08 2011-04-26 Amkor Technology, Inc. Electronic devices including solder bumps on compliant dielectric layers
KR101774938B1 (ko) 2011-08-31 2017-09-06 삼성전자 주식회사 지지대를 갖는 반도체 패키지 및 그 형성 방법

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JPS6196729A (ja) * 1984-10-17 1986-05-15 Oki Electric Ind Co Ltd 半導体集積回路の接触孔形成方法
US4789648A (en) * 1985-10-28 1988-12-06 International Business Machines Corporation Method for producing coplanar multi-level metal/insulator films on a substrate and for forming patterned conductive lines simultaneously with stud vias
JPH0682658B2 (ja) * 1987-04-29 1994-10-19 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 半導体装置およびその製造方法
JPH01191443A (ja) * 1988-01-27 1989-08-01 Hitachi Ltd 半導体集積回路装置およびその製造方法

Also Published As

Publication number Publication date
DE69122436D1 (de) 1996-11-07
EP0463956A1 (fr) 1992-01-02
JPH04233242A (ja) 1992-08-21
FR2663784A1 (fr) 1991-12-27
EP0463956B1 (fr) 1996-10-02
FR2663784B1 (fr) 1997-01-31
JP2950653B2 (ja) 1999-09-20
US5354711A (en) 1994-10-11

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Legal Events

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8364 No opposition during term of opposition