DE69122218D1 - Verschiebungsdetektor - Google Patents
VerschiebungsdetektorInfo
- Publication number
- DE69122218D1 DE69122218D1 DE69122218T DE69122218T DE69122218D1 DE 69122218 D1 DE69122218 D1 DE 69122218D1 DE 69122218 T DE69122218 T DE 69122218T DE 69122218 T DE69122218 T DE 69122218T DE 69122218 D1 DE69122218 D1 DE 69122218D1
- Authority
- DE
- Germany
- Prior art keywords
- displacement detector
- detector
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/366—Particular pulse shapes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2400390A JP2941953B2 (ja) | 1990-12-04 | 1990-12-04 | 基準位置の検出方法および回転検出計 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69122218D1 true DE69122218D1 (de) | 1996-10-24 |
DE69122218T2 DE69122218T2 (de) | 1997-03-06 |
Family
ID=18510305
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69122218T Expired - Lifetime DE69122218T2 (de) | 1990-12-04 | 1991-12-03 | Verschiebungsdetektor |
Country Status (4)
Country | Link |
---|---|
US (1) | US5506681A (de) |
EP (1) | EP0489399B1 (de) |
JP (1) | JP2941953B2 (de) |
DE (1) | DE69122218T2 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5384460A (en) * | 1993-11-03 | 1995-01-24 | Silitek Corporation | Encoder with a light emitting editing wheel |
US6229140B1 (en) | 1995-10-27 | 2001-05-08 | Canon Kabushiki Kaisha | Displacement information detection apparatus |
US7332729B1 (en) * | 2004-06-18 | 2008-02-19 | Novelx, Inc. | System and method for multiple electron, ion, and photon beam alignment |
JP4636858B2 (ja) * | 2004-11-24 | 2011-02-23 | キヤノン株式会社 | 光学式エンコーダ |
DE102005004248A1 (de) * | 2005-01-28 | 2006-08-03 | Johann A. Krause Maschinenfabrik Gmbh | Verfahren zur Ermittlung mindestens der Position eines bewegten Bauteils eines Antriebsaggregats, wie Verbrennungsmotor, Getriebe oder dergleichen |
KR100664963B1 (ko) * | 2005-09-29 | 2007-01-04 | 삼성전자주식회사 | 슬라이드 방식의 입력 장치, 이를 구비한 휴대용 장치 및입력 방법 |
JP4173513B2 (ja) * | 2006-06-12 | 2008-10-29 | ヤマザキマザック株式会社 | 機器移設有無検知装置及びその機器移設有無検知装置を備えた機器 |
CN104367300B (zh) * | 2007-01-19 | 2017-05-31 | 桑尼布鲁克健康科学中心 | 具有组合的超声和光学成像装置的成像探头 |
JP6245941B2 (ja) * | 2012-12-10 | 2017-12-13 | Dmg森精機株式会社 | 変位検出装置 |
FR3040783B1 (fr) * | 2015-09-08 | 2020-09-18 | Commissariat Energie Atomique | Capteur angulaire, articulation, dispositif haptique, dispositif de capture de mouvement et robot comprenant un tel capteur. |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3763372A (en) * | 1967-07-13 | 1973-10-02 | Inventors & Investors Inc | Zone plate optics monolithically integrated with photoelectric elements |
US4097734A (en) * | 1977-02-09 | 1978-06-27 | Keuffel & Esser Company | Zero index for electro-optical measuring device |
US4263506A (en) * | 1978-12-21 | 1981-04-21 | Hewlett-Packard Company | Pulse generating apparatus |
DE3104972C2 (de) * | 1981-02-12 | 1985-06-20 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Lichtelektrische inkrementale Positioniereinrichtung |
JPS625130A (ja) * | 1985-07-01 | 1987-01-12 | Canon Inc | 光学式エンコ−ダ |
JPS62128615A (ja) * | 1985-11-29 | 1987-06-10 | Canon Inc | 光学式エンコ−ダ |
DE3542514A1 (de) * | 1985-12-02 | 1987-06-04 | Zeiss Carl Fa | Wegmesseinrichtung |
DE3700777C2 (de) * | 1986-01-14 | 1994-05-05 | Canon Kk | Vorrichtung zur Erfassung der Position eines Objektes |
JPS6361915A (ja) * | 1986-09-02 | 1988-03-18 | Matsushita Electric Ind Co Ltd | 位置検出装置の基準信号発生装置 |
JPS6363919A (ja) * | 1986-09-04 | 1988-03-22 | Matsushita Electric Ind Co Ltd | 位置検出装置 |
JPH07119622B2 (ja) * | 1986-09-25 | 1995-12-20 | キヤノン株式会社 | ロータリーエンコーダー |
DE3737278A1 (de) * | 1986-11-04 | 1988-05-11 | Canon Kk | Verfahren und vorrichtung zum optischen erfassen der stellung eines objekts |
JPH01285803A (ja) * | 1988-05-13 | 1989-11-16 | Fujitsu Ltd | フレネル・ゾーン・プレートおよびそれを用いる位置合せ方法 |
JP2586121B2 (ja) * | 1988-09-30 | 1997-02-26 | キヤノン株式会社 | ロータリーエンコーダの原点検出系 |
EP0439804B1 (de) * | 1989-12-26 | 1995-09-20 | Canon Kabushiki Kaisha | Rotations-Detektorapparat |
JP2810524B2 (ja) * | 1990-10-19 | 1998-10-15 | キヤノン株式会社 | 回転検出計 |
-
1990
- 1990-12-04 JP JP2400390A patent/JP2941953B2/ja not_active Expired - Fee Related
-
1991
- 1991-12-03 DE DE69122218T patent/DE69122218T2/de not_active Expired - Lifetime
- 1991-12-03 EP EP91120760A patent/EP0489399B1/de not_active Expired - Lifetime
-
1994
- 1994-01-25 US US08/188,342 patent/US5506681A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0489399A3 (de) | 1994-01-19 |
EP0489399A2 (de) | 1992-06-10 |
JPH04208812A (ja) | 1992-07-30 |
US5506681A (en) | 1996-04-09 |
EP0489399B1 (de) | 1996-09-18 |
JP2941953B2 (ja) | 1999-08-30 |
DE69122218T2 (de) | 1997-03-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |