DE69030348D1 - Belichtungsvorrichtung - Google Patents
BelichtungsvorrichtungInfo
- Publication number
- DE69030348D1 DE69030348D1 DE69030348T DE69030348T DE69030348D1 DE 69030348 D1 DE69030348 D1 DE 69030348D1 DE 69030348 T DE69030348 T DE 69030348T DE 69030348 T DE69030348 T DE 69030348T DE 69030348 D1 DE69030348 D1 DE 69030348D1
- Authority
- DE
- Germany
- Prior art keywords
- exposure device
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1257075A JP2700416B2 (ja) | 1989-10-03 | 1989-10-03 | 露光装置 |
JP1257076A JP2743199B2 (ja) | 1989-10-03 | 1989-10-03 | 露光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69030348D1 true DE69030348D1 (de) | 1997-05-07 |
DE69030348T2 DE69030348T2 (de) | 1997-09-04 |
Family
ID=26543044
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1990630348 Expired - Fee Related DE69030348T2 (de) | 1989-10-03 | 1990-10-03 | Belichtungsvorrichtung |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0421746B1 (de) |
DE (1) | DE69030348T2 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0446076B1 (de) * | 1990-03-09 | 1997-07-09 | Canon Kabushiki Kaisha | Belichtungsvorrichtung |
EP0540178B1 (de) * | 1991-09-30 | 1998-05-06 | Canon Kabushiki Kaisha | Röntgenbelichtungsvorrichtung und Verfahren |
JP3540174B2 (ja) * | 1998-10-12 | 2004-07-07 | ウシオ電機株式会社 | 斜めから光を照射するプロキシミティ露光方法 |
EP1174769B1 (de) * | 2000-07-10 | 2006-12-13 | ASML Netherlands B.V. | Lithographischer Projektionsapparat und lithographisches Verfahren zur Herstellung einer Vorrichtung |
JP2003059801A (ja) * | 2001-08-14 | 2003-02-28 | Canon Inc | 露光装置及び露光方法 |
WO2004031854A2 (de) * | 2002-09-30 | 2004-04-15 | Carl Zeiss Smt Ag | Beleuchtungssystem für eine wellenlänge ≤ 193 nm mit sensoren zur bestimmung der ausleuchtung |
DE102007047446A1 (de) | 2007-10-04 | 2009-04-09 | Carl Zeiss Smt Ag | Optisches Element mit wenigstens einem elektrisch leitenden Bereich und Beleuchtungssystem mit einem solchen Element |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5633633A (en) * | 1979-08-27 | 1981-04-04 | Fuji Photo Optical Co Ltd | Composite camera |
JPS6037616B2 (ja) * | 1980-01-24 | 1985-08-27 | 理学電機株式会社 | X線リゾグラフイ装置 |
EP0083394B1 (de) * | 1981-12-31 | 1986-04-09 | International Business Machines Corporation | Verfahren und Vorrichtung für die gleichmässige Beleuchtung einer Fläche |
JPS5928337A (ja) * | 1982-08-09 | 1984-02-15 | Hitachi Ltd | プロジエクシヨンアライナ |
JPS607722A (ja) * | 1983-06-27 | 1985-01-16 | Fujitsu Ltd | エツクス線露光装置 |
JPS62204527A (ja) * | 1986-03-05 | 1987-09-09 | Hitachi Ltd | マスク露光装置 |
JP2744245B2 (ja) * | 1988-03-25 | 1998-04-28 | キヤノン株式会社 | 露光装置と露光方法 |
DE68925323T2 (de) * | 1988-09-14 | 1996-05-30 | Canon K.K., Tokio/Tokyo | Belichtungssteuerung in einem Röntgenbelichtungsapparat |
-
1990
- 1990-10-03 EP EP90310798A patent/EP0421746B1/de not_active Expired - Lifetime
- 1990-10-03 DE DE1990630348 patent/DE69030348T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0421746A3 (en) | 1992-01-22 |
EP0421746A2 (de) | 1991-04-10 |
EP0421746B1 (de) | 1997-04-02 |
DE69030348T2 (de) | 1997-09-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |