DE69025652D1 - Verfahren zur Herstellung borhaltiger keramischer Formkörper auf Siliciumnitridbasis - Google Patents

Verfahren zur Herstellung borhaltiger keramischer Formkörper auf Siliciumnitridbasis

Info

Publication number
DE69025652D1
DE69025652D1 DE69025652T DE69025652T DE69025652D1 DE 69025652 D1 DE69025652 D1 DE 69025652D1 DE 69025652 T DE69025652 T DE 69025652T DE 69025652 T DE69025652 T DE 69025652T DE 69025652 D1 DE69025652 D1 DE 69025652D1
Authority
DE
Germany
Prior art keywords
boron
production
silicon nitride
containing ceramic
ceramic moldings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69025652T
Other languages
English (en)
Other versions
DE69025652T2 (de
Inventor
Osamu Funayama
Mikiro Arai
Hiroyuki Aoki
Yuuji Tashiro
Toshio Katahata
Kiyoshi Sato
Takeshi Isoda
Tadashi Suzuki
Ichiro Kohshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tonen General Sekiyu KK
Original Assignee
Tonen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1157191A external-priority patent/JPH0327120A/ja
Priority claimed from JP1183922A external-priority patent/JPH0350161A/ja
Application filed by Tonen Corp filed Critical Tonen Corp
Application granted granted Critical
Publication of DE69025652D1 publication Critical patent/DE69025652D1/de
Publication of DE69025652T2 publication Critical patent/DE69025652T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/589—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained from Si-containing polymer precursors or organosilicon monomers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Ceramic Products (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
DE69025652T 1989-06-20 1990-06-19 Verfahren zur Herstellung borhaltiger keramischer Formkörper auf Siliciumnitridbasis Expired - Fee Related DE69025652T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1157191A JPH0327120A (ja) 1989-06-20 1989-06-20 窒化珪素質無機繊維
JP1183922A JPH0350161A (ja) 1989-07-17 1989-07-17 窒化珪素質セラミツクス成形体

Publications (2)

Publication Number Publication Date
DE69025652D1 true DE69025652D1 (de) 1996-04-11
DE69025652T2 DE69025652T2 (de) 1996-07-18

Family

ID=26484740

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69025652T Expired - Fee Related DE69025652T2 (de) 1989-06-20 1990-06-19 Verfahren zur Herstellung borhaltiger keramischer Formkörper auf Siliciumnitridbasis

Country Status (3)

Country Link
US (1) US5128286A (de)
EP (1) EP0404503B1 (de)
DE (1) DE69025652T2 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5171736A (en) * 1989-10-16 1992-12-15 Massachusetts Institute Of Technology Preceramic organosilicon-boron polymers
FR2674846A1 (fr) * 1991-04-05 1992-10-09 Atochem Procede de preparation de ceramiques monolithiques non oxydes a partir de precurseurs organometalliques.
US5292830A (en) * 1991-06-20 1994-03-08 Tonen Corporation Thermosetting copolymers, silicon carbide-based fiber and processes for producing same
US5863848A (en) * 1991-09-27 1999-01-26 Dow Corning Corporation Preparation of substantially crystalline silicon carbide fibers from borosilazanes
US5169908A (en) * 1991-12-20 1992-12-08 Dow Corning Corporation Curable boron modified hydropolysilazane polymers
JP3448611B2 (ja) * 1993-04-08 2003-09-22 東燃ゼネラル石油株式会社 低酸素ポリメタロシラザン及びその製造方法
EP0659806B1 (de) * 1993-12-23 2000-09-27 Bayer Ag Präkeramische Polyborosilazane, Verfahren zu deren Herstellung sowie daraus erhältliches keramisches Material
DE4425312A1 (de) * 1994-07-18 1996-01-25 Bayer Ag Sinterwerkstoffe auf Basis von Si¶3¶N¶4¶/BN sowie Verfahren zu ihrer Herstellung
US5972511A (en) * 1994-11-01 1999-10-26 Advanced Ceramics Corporation Process for forming low thermal expansion pyrolytic nitride coatings on low thermal expansion materials and coated article
US5571397A (en) * 1995-07-05 1996-11-05 Ford Motor Company Boron nitride exhaust seal
DE19530404A1 (de) * 1995-08-18 1997-02-20 Bayer Ag Neue keramische Fasern im System Silicium-Bor-Stickstoff-Kohlenstoff
DE19628448A1 (de) * 1996-07-15 1998-01-22 Bayer Ag Polymere Silaborocarboazane, ein Verfahren zu deren Herstellung und deren Verwendung
US5866705A (en) * 1996-07-15 1999-02-02 Bayer Aktiengesellschaft Polymeric silaborocarboazanes, a process for their preparation and their use
US5618766A (en) * 1996-07-22 1997-04-08 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Lightweight ceramic composition of carbon silicon oxygen and boron
DE59703176D1 (de) * 1996-11-11 2001-04-26 Bayer Ag Silizium-, Bor- und Stickstoff-enthaltende amorphe Fasern, Verfahren zu deren Herstellung und deren Verwendung sowie Komposite, enthaltend diese Fasern und deren Herstellung
TW500910B (en) 2000-10-10 2002-09-01 Ishikawajima Harima Heavy Ind Continuous sintering furnace and its using method
DE10105278A1 (de) * 2001-02-02 2002-08-08 Basf Ag Klebstoffe, enthaltend Polyvinylalkylether
AU2003275594A1 (en) * 2002-10-23 2004-05-13 Fuji Electric Holdings Co., Ltd. Molded resin for electrical part and process for producing the same
DE102006013469A1 (de) * 2006-03-23 2007-09-27 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Siliciumborcarbonitridkeramiken aus polycyclischen Vorläuferverbindungen, Verfahren zu deren Herstellung und Verwendung
US20110319252A1 (en) * 2010-06-28 2011-12-29 Schmidt Wayde R Composite powders
JP6252493B2 (ja) * 2013-01-11 2017-12-27 コニカミノルタ株式会社 ガスバリア性フィルム
US10763103B2 (en) * 2015-03-31 2020-09-01 Versum Materials Us, Llc Boron-containing compounds, compositions, and methods for the deposition of a boron containing films
CN109643639B (zh) * 2016-09-13 2023-08-11 应用材料公司 用于间隔件和硬掩模应用的硼烷介导的从硅烷和烷基硅烷物质脱氢的工艺

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4167616A (en) * 1977-08-22 1979-09-11 Rohm And Haas Company Polymerization with diborane adducts or oligomers of boron-containing monomers
DE3249981C2 (de) * 1981-04-13 1991-06-13 Showa Electric Wire & Cable Co., Ltd., Kawasaki, Kanagawa, Jp
JPS60120725A (ja) * 1983-12-05 1985-06-28 Shin Etsu Chem Co Ltd 有機金属共重合体およびその製造方法
US4482689A (en) * 1984-03-12 1984-11-13 Dow Corning Corporation Process for the preparation of polymetallo(disily)silazane polymers and the polymers therefrom
JPS60200864A (ja) * 1984-03-22 1985-10-11 東芝タンガロイ株式会社 立方晶窒化ホウ素を含む焼結体を製造する方法
JPS6147735A (ja) * 1984-08-11 1986-03-08 Isoji Taniguchi 有機窒化ホウ素重合体の製造法
CA1241972A (en) * 1984-09-11 1988-09-13 Dow Corning Corporation Ceramic materials from silazane polymers
US4851491A (en) * 1986-07-30 1989-07-25 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Boron-containing organosilane polymers and ceramic materials thereof
US4730026A (en) * 1986-09-30 1988-03-08 E. I. Du Pont De Nemours And Company Cross-linked organosilazane polymers
US4743662A (en) * 1986-11-03 1988-05-10 Dow Corning Corporation Infusible preceramic polymers via plasma treatment
US4810436A (en) * 1986-11-21 1989-03-07 Hoechst Celanese Corp. Process for the formation of boron-containing ceramics from organoboron preceramic polymers
US4931100A (en) * 1986-11-21 1990-06-05 Hoechst Celanese Corp. Boron-containing preceramic blend and fiber formed therefrom
US4832895A (en) * 1986-11-21 1989-05-23 Hoechst Celanese Corporation Boron-containing ceramics through the chemical conversian of borane-containing polymers
US4707556A (en) * 1987-02-13 1987-11-17 Ultrasystems Defense And Space, Inc. Boron nitride polymeric precursors
US4857490A (en) * 1987-08-31 1989-08-15 Hoechst Celanese Corp. Process of manufacturing boron ceramics from carboralated diacetylene polymers
FR2620455B1 (fr) * 1987-09-11 1989-12-22 Rhone Poulenc Chimie Polymeres a base de bore et d'azote, leur procede de preparation et leur utilisation dans la fabrication de produits et articles ceramiques a base de nitrure de bore
AU603724B2 (en) * 1988-01-22 1990-11-22 Ethyl Corporation Organoborosilazane polymers
US4921925A (en) * 1988-06-30 1990-05-01 Ethyl Corporation Organoborosilazane polymers
US5032551A (en) * 1988-03-05 1991-07-16 Toa Nenryo Kogyo Kabushiki Kaisha Silicon nitride based ceramic fibers, process of preparing same and composite material containing same
US4910173A (en) * 1989-04-14 1990-03-20 Ethyl Corporation Preceramic compositions and ceramic products

Also Published As

Publication number Publication date
EP0404503B1 (de) 1996-03-06
DE69025652T2 (de) 1996-07-18
EP0404503A1 (de) 1990-12-27
US5128286A (en) 1992-07-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee