DE69003483D1 - Verfahren zur Herstellung von Siliziumnitridpulver. - Google Patents

Verfahren zur Herstellung von Siliziumnitridpulver.

Info

Publication number
DE69003483D1
DE69003483D1 DE90114382T DE69003483T DE69003483D1 DE 69003483 D1 DE69003483 D1 DE 69003483D1 DE 90114382 T DE90114382 T DE 90114382T DE 69003483 T DE69003483 T DE 69003483T DE 69003483 D1 DE69003483 D1 DE 69003483D1
Authority
DE
Germany
Prior art keywords
production
silicon nitride
nitride powder
powder
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE90114382T
Other languages
English (en)
Other versions
DE69003483T2 (de
Inventor
Mutsuo Shimizu
Hirofumi Fukuoka
Masanori Fukuhira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1195955A external-priority patent/JPH0649564B2/ja
Priority claimed from JP1195954A external-priority patent/JPH066482B2/ja
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Publication of DE69003483D1 publication Critical patent/DE69003483D1/de
Application granted granted Critical
Publication of DE69003483T2 publication Critical patent/DE69003483T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0682—Preparation by direct nitridation of silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
  • Silicon Compounds (AREA)
DE90114382T 1989-07-28 1990-07-26 Verfahren zur Herstellung von Siliziumnitridpulver. Expired - Fee Related DE69003483T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1195955A JPH0649564B2 (ja) 1989-07-28 1989-07-28 窒化ケイ素粉末の連続製造装置
JP1195954A JPH066482B2 (ja) 1989-07-28 1989-07-28 窒化ケイ素粉末の製造方法

Publications (2)

Publication Number Publication Date
DE69003483D1 true DE69003483D1 (de) 1993-10-28
DE69003483T2 DE69003483T2 (de) 1994-04-28

Family

ID=26509437

Family Applications (1)

Application Number Title Priority Date Filing Date
DE90114382T Expired - Fee Related DE69003483T2 (de) 1989-07-28 1990-07-26 Verfahren zur Herstellung von Siliziumnitridpulver.

Country Status (3)

Country Link
US (1) US5073358A (de)
EP (1) EP0410459B1 (de)
DE (1) DE69003483T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0733411A (ja) * 1993-07-16 1995-02-03 Shin Etsu Chem Co Ltd 高α型窒化ケイ素粉末の製造方法
US7175685B1 (en) 2002-04-15 2007-02-13 Gt Solar Incorporated Dry conversion of high purity ultrafine silicon powder to densified pellet form for silicon melting applications
US20070148034A1 (en) * 2002-04-15 2007-06-28 Gt Solar Incorporated Dry conversion of high purity ultrafine silicon powder to densified pellet form for silicon melting applications
WO2008057483A2 (en) * 2006-11-03 2008-05-15 Semlux Technologies, Inc. Laser conversion of high purity silicon powder to densified garnular forms
EP3033168A4 (de) 2013-08-12 2016-09-21 United Technologies Corp Pulverkugelglühen über wirbelschicht
CN105377476B (zh) 2013-08-12 2018-05-15 联合工艺公司 用于粉末处理的高温流化床
CN107285772A (zh) * 2016-04-05 2017-10-24 新特能源股份有限公司 一种α相氮化硅的生产方法及α相氮化硅
CN107285287A (zh) * 2016-04-05 2017-10-24 新特能源股份有限公司 一种β相氮化硅的生产方法及β相氮化硅

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197110A (ja) * 1984-10-18 1986-05-15 Osaka Titanium Seizo Kk 高α相率窒化けい素の製造方法
JPH06197110A (ja) * 1992-12-24 1994-07-15 Hitachi Ltd バッファ制御方式

Also Published As

Publication number Publication date
EP0410459A2 (de) 1991-01-30
US5073358A (en) 1991-12-17
DE69003483T2 (de) 1994-04-28
EP0410459B1 (de) 1993-09-22
EP0410459A3 (en) 1992-03-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee