DE69022651D1 - Dünnes Hochtemperaturheizelement und Verfahren zu dessen Herstellung. - Google Patents

Dünnes Hochtemperaturheizelement und Verfahren zu dessen Herstellung.

Info

Publication number
DE69022651D1
DE69022651D1 DE69022651T DE69022651T DE69022651D1 DE 69022651 D1 DE69022651 D1 DE 69022651D1 DE 69022651 T DE69022651 T DE 69022651T DE 69022651 T DE69022651 T DE 69022651T DE 69022651 D1 DE69022651 D1 DE 69022651D1
Authority
DE
Germany
Prior art keywords
production
high temperature
heating element
temperature heating
thin high
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69022651T
Other languages
English (en)
Inventor
Noriko Morita
Susumu Hoshinouchi
Yoshihiko Kusakabe
Minoru Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1181016A external-priority patent/JPH0343985A/ja
Priority claimed from JP18685889A external-priority patent/JP2752706B2/ja
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of DE69022651D1 publication Critical patent/DE69022651D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
    • H01J1/22—Heaters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/08—Manufacture of heaters for indirectly-heated cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/28—Heaters for thermionic cathodes
    • H01J2201/2803—Characterised by the shape or size
    • H01J2201/2878—Thin film or film-like

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Resistance Heating (AREA)
DE69022651T 1989-07-12 1990-07-11 Dünnes Hochtemperaturheizelement und Verfahren zu dessen Herstellung. Expired - Lifetime DE69022651D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1181016A JPH0343985A (ja) 1989-07-12 1989-07-12 薄型高温ヒータおよびその製造方法
JP18685889A JP2752706B2 (ja) 1989-07-18 1989-07-18 薄型高温ヒータ

Publications (1)

Publication Number Publication Date
DE69022651D1 true DE69022651D1 (de) 1995-11-02

Family

ID=26500350

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69022651T Expired - Lifetime DE69022651D1 (de) 1989-07-12 1990-07-11 Dünnes Hochtemperaturheizelement und Verfahren zu dessen Herstellung.

Country Status (3)

Country Link
US (1) US5155340A (de)
EP (1) EP0408342B1 (de)
DE (1) DE69022651D1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5350969A (en) * 1991-12-03 1994-09-27 Litton Systems, Inc. Cathode heater and cathode assembly for microwave power tubes
US5539186A (en) * 1992-12-09 1996-07-23 International Business Machines Corporation Temperature controlled multi-layer module
CA2153061A1 (en) * 1993-11-04 1995-05-11 Tetsuya Sugiyama Mirror with heater
JPH07295409A (ja) * 1994-04-25 1995-11-10 Canon Inc 加熱定着装置及びその製造方法
JP3336741B2 (ja) * 1994-05-19 2002-10-21 住友金属工業株式会社 金属薄膜積層セラミックス基板
US5569474A (en) * 1994-06-06 1996-10-29 Daiho Industrial Co., Ltd. Mold for injection molding of plastics using thin film electric heater
CN1115705C (zh) * 1996-05-21 2003-07-23 株式会社东芝 阴极组件、电子枪组件、电子管、灯丝、及阴极组件和电子枪组件的制造方法
US6305923B1 (en) 1998-06-12 2001-10-23 Husky Injection Molding Systems Ltd. Molding system using film heaters and/or sensors
US7241131B1 (en) 2000-06-19 2007-07-10 Husky Injection Molding Systems Ltd. Thick film heater apparatus
US6886233B2 (en) 2002-05-13 2005-05-03 Egc Enterprises, Inc. Method for decreasing the thickness of flexible expanded graphite sheet
US6667100B2 (en) * 2002-05-13 2003-12-23 Egc Enterprises, Inc. Ultra-thin flexible expanded graphite heating element
US7106167B2 (en) * 2002-06-28 2006-09-12 Heetronix Stable high temperature sensor system with tungsten on AlN
US6786076B2 (en) * 2002-11-25 2004-09-07 Reliable Instruments Llc Thin film gas sensor
US6924468B2 (en) * 2002-12-14 2005-08-02 Thermoceramix, Inc. System and method for heating materials
US7164104B2 (en) * 2004-06-14 2007-01-16 Watlow Electric Manufacturing Company In-line heater for use in semiconductor wet chemical processing and method of manufacturing the same
US8193475B2 (en) * 2007-02-13 2012-06-05 Advanced Materials Enterprises Company Limited Heating apparatus and method for making the same
US8284012B2 (en) * 2009-06-04 2012-10-09 The Aerospace Corporation Ultra-stable refractory high-power thin film resistors for space applications

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3748522A (en) * 1969-10-06 1973-07-24 Stanford Research Inst Integrated vacuum circuits
US4096510A (en) * 1974-08-19 1978-06-20 Matsushita Electric Industrial Co., Ltd. Thermal printing head
JPS51147171A (en) * 1975-06-11 1976-12-17 Sony Corp Flat surface multilayer cathode
US4296309A (en) * 1977-05-19 1981-10-20 Canon Kabushiki Kaisha Thermal head
US4361782A (en) * 1980-06-26 1982-11-30 General Electric Company Jacketed discharge lamp having oxidizable fail-safe switch
US4663640A (en) * 1984-07-20 1987-05-05 Canon Kabushiki Kaisha Recording head
JPS61100476A (ja) * 1984-10-23 1986-05-19 Alps Electric Co Ltd サ−マルヘツドおよびその製造方法
US4920071A (en) * 1985-03-15 1990-04-24 Fairchild Camera And Instrument Corporation High temperature interconnect system for an integrated circuit
GB2179007B (en) * 1985-08-12 1990-09-12 Mitsubishi Electric Corp Thermal head for printer
US4758814A (en) * 1985-12-02 1988-07-19 Motorola, Inc. Structure and method for wire lead attachment to a high temperature ceramic sensor
JPS6373660A (ja) * 1986-09-17 1988-04-04 Fujitsu Ltd 半導体装置
JPH0710601B2 (ja) * 1987-08-26 1995-02-08 株式会社日立製作所 感熱ヘツド
US4849605A (en) * 1988-03-11 1989-07-18 Oki Electric Industry Co., Ltd. Heating resistor and method for making same

Also Published As

Publication number Publication date
EP0408342A2 (de) 1991-01-16
US5155340A (en) 1992-10-13
EP0408342A3 (en) 1991-04-03
EP0408342B1 (de) 1995-09-27

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Legal Events

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8332 No legal effect for de