DE69006740D1 - Kapazitives drucksensorsystem. - Google Patents
Kapazitives drucksensorsystem.Info
- Publication number
- DE69006740D1 DE69006740D1 DE90914824T DE69006740T DE69006740D1 DE 69006740 D1 DE69006740 D1 DE 69006740D1 DE 90914824 T DE90914824 T DE 90914824T DE 69006740 T DE69006740 T DE 69006740T DE 69006740 D1 DE69006740 D1 DE 69006740D1
- Authority
- DE
- Germany
- Prior art keywords
- pressure sensor
- sensor system
- capacitive pressure
- capacitive
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
- G01L9/125—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor with temperature compensating means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/416,698 US4987782A (en) | 1989-10-03 | 1989-10-03 | Capacitive pressure transducer system |
PCT/US1990/005600 WO1991005232A1 (en) | 1989-10-03 | 1990-10-02 | Capacitive pressure transducer system |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69006740D1 true DE69006740D1 (de) | 1994-03-24 |
DE69006740T2 DE69006740T2 (de) | 1994-06-16 |
Family
ID=23650951
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69006740T Expired - Fee Related DE69006740T2 (de) | 1989-10-03 | 1990-10-02 | Kapazitives drucksensorsystem. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4987782A (de) |
EP (1) | EP0494926B1 (de) |
JP (1) | JPH0774767B2 (de) |
DE (1) | DE69006740T2 (de) |
WO (1) | WO1991005232A1 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3233791B2 (ja) * | 1994-08-25 | 2001-11-26 | 株式会社山武 | 差動容量反転積分器及びこれを用いた静電容量変化量検出装置 |
FI102783B (fi) * | 1994-12-22 | 1999-02-15 | Vaisala Oyj | Menetelmä virtausnopeusanturin linearisoimiseksi sekä linearisoitu vir tauksen nopeuden mittauslaitteisto |
US5757608A (en) * | 1996-01-25 | 1998-05-26 | Alliedsignal Inc. | Compensated pressure transducer |
US6499348B1 (en) * | 1999-12-03 | 2002-12-31 | Scimed Life Systems, Inc. | Dynamically configurable ultrasound transducer with integral bias regulation and command and control circuitry |
US6169487B1 (en) * | 1999-12-13 | 2001-01-02 | Robert B. Davis | Severe storm warning system |
US6612175B1 (en) | 2000-07-20 | 2003-09-02 | Nt International, Inc. | Sensor usable in ultra pure and highly corrosive environments |
US7152478B2 (en) * | 2000-07-20 | 2006-12-26 | Entegris, Inc. | Sensor usable in ultra pure and highly corrosive environments |
US6536287B2 (en) | 2001-08-16 | 2003-03-25 | Honeywell International, Inc. | Simplified capacitance pressure sensor |
US20090097178A1 (en) * | 2007-10-12 | 2009-04-16 | Texas Instruments Incorporated | Methods and apparatus to detect and over-current in switching circuits |
US8037770B2 (en) * | 2008-05-21 | 2011-10-18 | Honeywell International Inc. | Pressure-sensor apparatus |
US8836349B2 (en) | 2012-08-15 | 2014-09-16 | Robert Bosch Gmbh | Capacitive sensor |
CA2924724C (en) | 2013-09-18 | 2022-09-20 | Advantec Sensing As | Apparatus and method for characterization of fluids or powders by electrical permittivity |
US10317443B2 (en) | 2017-05-24 | 2019-06-11 | Elmos Semiconductor Ag | Integrated capacitance measurement |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3581238A (en) * | 1967-09-30 | 1971-05-25 | Tsurumi Seikikosaku Sho Co Ltd | Transmission transducer for remote measurement |
US3595084A (en) * | 1970-02-27 | 1971-07-27 | Continental Can Co | Digital transducer system |
DE2433080C2 (de) * | 1974-07-10 | 1983-09-29 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Schaltungsanordnung zur Umwandlung einer Brückenverstimmung in eine Frequenzänderung |
SE431683B (sv) * | 1977-09-23 | 1984-02-20 | Testut Aequitas | Anordning for metning av kapacitansen hos en kondensator |
GB2048488B (en) * | 1979-04-26 | 1983-04-27 | Rosemount Eng Co Ltd | Differential pressure sensing apparatus |
US4227419A (en) * | 1979-09-04 | 1980-10-14 | Kavlico Corporation | Capacitive pressure transducer |
CH652823A5 (de) * | 1980-03-26 | 1985-11-29 | Bosch Gmbh Robert | Weg-frequenz-messgroessenwandler. |
US4322977A (en) * | 1980-05-27 | 1982-04-06 | The Bendix Corporation | Pressure measuring system |
US4457179A (en) * | 1981-03-16 | 1984-07-03 | The Bendix Corporation | Differential pressure measuring system |
US4398426A (en) * | 1981-07-02 | 1983-08-16 | Kavlico Corporation | Linear capacitive pressure transducer system |
DE3128032A1 (de) * | 1981-07-16 | 1983-02-03 | Robert Bosch Gmbh, 7000 Stuttgart | Anordnung zur erfassung eines druckes |
GB2123157B (en) * | 1982-06-22 | 1986-10-15 | Peter Caleb Frederi Wolfendale | Load cells |
JPS6165114A (ja) * | 1984-09-06 | 1986-04-03 | Yokogawa Hokushin Electric Corp | 容量式変換装置 |
US4763063A (en) * | 1985-07-26 | 1988-08-09 | Allied-Signal Inc. | Compact digital pressure sensor circuitry |
-
1989
- 1989-10-03 US US07/416,698 patent/US4987782A/en not_active Expired - Lifetime
-
1990
- 1990-10-02 JP JP2513841A patent/JPH0774767B2/ja not_active Expired - Lifetime
- 1990-10-02 WO PCT/US1990/005600 patent/WO1991005232A1/en active IP Right Grant
- 1990-10-02 DE DE69006740T patent/DE69006740T2/de not_active Expired - Fee Related
- 1990-10-02 EP EP90914824A patent/EP0494926B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69006740T2 (de) | 1994-06-16 |
WO1991005232A1 (en) | 1991-04-18 |
JPH0774767B2 (ja) | 1995-08-09 |
EP0494926B1 (de) | 1994-02-16 |
EP0494926A1 (de) | 1992-07-22 |
JPH05500569A (ja) | 1993-02-04 |
US4987782A (en) | 1991-01-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |