DE60336203D1 - Tintenstrahlaufzeichnungskopf, Verfahren zu dessen Herstellung, und Substrat zur Tintenstrahlaufzeichnungskopfherstellung - Google Patents
Tintenstrahlaufzeichnungskopf, Verfahren zu dessen Herstellung, und Substrat zur TintenstrahlaufzeichnungskopfherstellungInfo
- Publication number
- DE60336203D1 DE60336203D1 DE60336203T DE60336203T DE60336203D1 DE 60336203 D1 DE60336203 D1 DE 60336203D1 DE 60336203 T DE60336203 T DE 60336203T DE 60336203 T DE60336203 T DE 60336203T DE 60336203 D1 DE60336203 D1 DE 60336203D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- ink jet
- recording head
- jet recording
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002379638A JP4261904B2 (ja) | 2002-12-27 | 2002-12-27 | インクジェット記録ヘッド用基板の製造方法、およびインクジェット記録ヘッドの製造方法 |
JP2002379594A JP2004209708A (ja) | 2002-12-27 | 2002-12-27 | インクジェット記録ヘッド、その製造方法、およびその製造に用いるインクジェット記録ヘッド用基体 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60336203D1 true DE60336203D1 (de) | 2011-04-14 |
Family
ID=32473752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60336203T Expired - Lifetime DE60336203D1 (de) | 2002-12-27 | 2003-12-29 | Tintenstrahlaufzeichnungskopf, Verfahren zu dessen Herstellung, und Substrat zur Tintenstrahlaufzeichnungskopfherstellung |
Country Status (5)
Country | Link |
---|---|
US (2) | US7063799B2 (de) |
EP (1) | EP1433609B1 (de) |
KR (1) | KR20040060816A (de) |
CN (1) | CN100355573C (de) |
DE (1) | DE60336203D1 (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4522086B2 (ja) * | 2003-12-15 | 2010-08-11 | キヤノン株式会社 | 梁、梁の製造方法、梁を備えたインクジェット記録ヘッド、および該インクジェット記録ヘッドの製造方法 |
JP2005205889A (ja) * | 2003-12-26 | 2005-08-04 | Canon Inc | インクジェット記録ヘッドの製造方法及び該製造方法により製造されるインクジェット記録ヘッド |
GB2410464A (en) * | 2004-01-29 | 2005-08-03 | Hewlett Packard Development Co | A method of making an inkjet printhead |
US7429335B2 (en) * | 2004-04-29 | 2008-09-30 | Shen Buswell | Substrate passage formation |
JP2006130868A (ja) * | 2004-11-09 | 2006-05-25 | Canon Inc | インクジェット記録ヘッド及びその製造方法 |
JP4241605B2 (ja) * | 2004-12-21 | 2009-03-18 | ソニー株式会社 | 液体吐出ヘッドの製造方法 |
JP4641440B2 (ja) * | 2005-03-23 | 2011-03-02 | キヤノン株式会社 | インクジェット記録ヘッドおよび該インクジェット記録ヘッドの製造方法 |
JP4766658B2 (ja) * | 2005-05-10 | 2011-09-07 | キヤノン株式会社 | 液体吐出ヘッドおよびその製造方法 |
US7637013B2 (en) * | 2005-08-23 | 2009-12-29 | Canon Kabushiki Kaisha | Method of manufacturing ink jet recording head |
JP4854336B2 (ja) * | 2006-03-07 | 2012-01-18 | キヤノン株式会社 | インクジェットヘッド用基板の製造方法 |
US7566949B2 (en) | 2006-04-28 | 2009-07-28 | International Business Machines Corporation | High performance 3D FET structures, and methods for forming the same using preferential crystallographic etching |
US8562845B2 (en) * | 2006-10-12 | 2013-10-22 | Canon Kabushiki Kaisha | Ink jet print head and method of manufacturing ink jet print head |
KR20080060003A (ko) * | 2006-12-26 | 2008-07-01 | 삼성전자주식회사 | 잉크젯 프린트 헤드의 제조방법 |
KR20080086306A (ko) * | 2007-03-22 | 2008-09-25 | 삼성전자주식회사 | 잉크젯 프린트헤드의 제조방법 |
US7855151B2 (en) | 2007-08-21 | 2010-12-21 | Hewlett-Packard Development Company, L.P. | Formation of a slot in a silicon substrate |
US7881594B2 (en) * | 2007-12-27 | 2011-02-01 | Stmicroeletronics, Inc. | Heating system and method for microfluidic and micromechanical applications |
JP5361231B2 (ja) * | 2008-03-26 | 2013-12-04 | キヤノン株式会社 | インクジェット記録ヘッド及び電子デバイス |
JP5335396B2 (ja) * | 2008-12-16 | 2013-11-06 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
US8012773B2 (en) * | 2009-06-11 | 2011-09-06 | Canon Kabushiki Kaisha | Method for manufacturing liquid discharge head |
JP4659898B2 (ja) | 2009-09-02 | 2011-03-30 | キヤノン株式会社 | 液体吐出ヘッド用基板の製造方法 |
CN102079503B (zh) * | 2009-11-26 | 2012-08-29 | 中芯国际集成电路制造(上海)有限公司 | 构成mems器件的硅衬底的刻蚀方法 |
CN102348155B (zh) * | 2010-07-30 | 2014-02-05 | 上海丽恒光微电子科技有限公司 | 微机电麦克风及其制造方法 |
US8435805B2 (en) * | 2010-09-06 | 2013-05-07 | Canon Kabushiki Kaisha | Method of manufacturing a substrate for liquid ejection head |
CN102693909A (zh) * | 2011-03-23 | 2012-09-26 | 中芯国际集成电路制造(上海)有限公司 | 硅片上的三维薄膜的成型方法 |
US9263586B2 (en) | 2014-06-06 | 2016-02-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Quantum well fin-like field effect transistor (QWFinFET) having a two-section combo QW structure |
CN109179314A (zh) * | 2018-10-24 | 2019-01-11 | 西南交通大学 | 基于氢氟酸/硝酸混合溶液的摩擦诱导纳米加工方法 |
JP7317521B2 (ja) * | 2019-02-28 | 2023-07-31 | キヤノン株式会社 | ウルトラファインバブル生成装置およびウルトラファインバブル生成方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4216477A (en) * | 1978-05-10 | 1980-08-05 | Hitachi, Ltd. | Nozzle head of an ink-jet printing apparatus with built-in fluid diodes |
JPH0412859A (ja) * | 1990-04-28 | 1992-01-17 | Canon Inc | 液体噴射方法、該方法を用いた記録ヘッド及び該方法を用いた記録装置 |
JP2783647B2 (ja) | 1990-04-27 | 1998-08-06 | キヤノン株式会社 | 液体噴射方法および該方法を用いた記録装置 |
US5317346A (en) * | 1992-03-04 | 1994-05-31 | Hewlett-Packard Company | Compound ink feed slot |
US5387314A (en) * | 1993-01-25 | 1995-02-07 | Hewlett-Packard Company | Fabrication of ink fill slots in thermal ink-jet printheads utilizing chemical micromachining |
JP3143307B2 (ja) * | 1993-02-03 | 2001-03-07 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
US5729261A (en) * | 1996-03-28 | 1998-03-17 | Xerox Corporation | Thermal ink jet printhead with improved ink resistance |
JP3652022B2 (ja) | 1996-07-23 | 2005-05-25 | キヤノン株式会社 | インクジェット記録ヘッド及びインクジェット記録ヘッドの製造方法 |
JPH1095119A (ja) * | 1996-09-25 | 1998-04-14 | Canon Inc | 液体吐出ヘッドおよびその製造方法 |
DE69730667T2 (de) | 1996-11-11 | 2005-09-22 | Canon K.K. | Verfahren zur Herstellung eines Durchgangslochs, Gebrauch dieses Verfahrens zur Herstellung eines Slikonsubstrates mit einem solchen Durchgangsloch oder eine Vorrichtung mit diesem Substrat, Verfahren zur Herstellung eines Tintenstrahl-Druckkopfes und Gebrauch dieses Verfahrens zur Herstellung eines Tintenstrahldruckkopfes |
JPH10230611A (ja) * | 1997-02-19 | 1998-09-02 | Canon Inc | 液体噴射記録ヘッドおよびその製造方法 |
JP3647365B2 (ja) | 1999-08-24 | 2005-05-11 | キヤノン株式会社 | 液体吐出ヘッド用基板ユニットおよびその製造方法ならびに液体吐出ヘッド,カートリッジおよび画像形成装置 |
JP4632386B2 (ja) * | 2000-12-21 | 2011-02-16 | キヤノン株式会社 | 液体吐出記録ヘッド |
US6517735B2 (en) * | 2001-03-15 | 2003-02-11 | Hewlett-Packard Company | Ink feed trench etch technique for a fully integrated thermal inkjet printhead |
US6715859B2 (en) * | 2001-06-06 | 2004-04-06 | Hewlett -Packard Development Company, L.P. | Thermal ink jet resistor passivation |
US6698868B2 (en) * | 2001-10-31 | 2004-03-02 | Hewlett-Packard Development Company, L.P. | Thermal drop generator for ultra-small droplets |
US6627467B2 (en) * | 2001-10-31 | 2003-09-30 | Hewlett-Packard Development Company, Lp. | Fluid ejection device fabrication |
-
2003
- 2003-12-26 CN CNB2003101247770A patent/CN100355573C/zh not_active Expired - Fee Related
- 2003-12-27 KR KR1020030098021A patent/KR20040060816A/ko not_active Application Discontinuation
- 2003-12-29 EP EP03029888A patent/EP1433609B1/de not_active Expired - Fee Related
- 2003-12-29 DE DE60336203T patent/DE60336203D1/de not_active Expired - Lifetime
- 2003-12-29 US US10/745,608 patent/US7063799B2/en not_active Expired - Fee Related
-
2006
- 2006-04-25 US US11/410,104 patent/US7753495B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN100355573C (zh) | 2007-12-19 |
US20060191862A1 (en) | 2006-08-31 |
US7753495B2 (en) | 2010-07-13 |
CN1515413A (zh) | 2004-07-28 |
KR20040060816A (ko) | 2004-07-06 |
EP1433609A1 (de) | 2004-06-30 |
US7063799B2 (en) | 2006-06-20 |
US20040174407A1 (en) | 2004-09-09 |
EP1433609B1 (de) | 2011-03-02 |
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