DE60322557D1 - Lichtleiteinrichtung - Google Patents
LichtleiteinrichtungInfo
- Publication number
- DE60322557D1 DE60322557D1 DE60322557T DE60322557T DE60322557D1 DE 60322557 D1 DE60322557 D1 DE 60322557D1 DE 60322557 T DE60322557 T DE 60322557T DE 60322557 T DE60322557 T DE 60322557T DE 60322557 D1 DE60322557 D1 DE 60322557D1
- Authority
- DE
- Germany
- Prior art keywords
- light guide
- guide
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/04—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings formed by bundles of fibres
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4206—Optical features
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4298—Coupling light guides with opto-electronic elements coupling with non-coherent light sources and/or radiation detectors, e.g. lamps, incandescent bulbs, scintillation chambers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
- Optical Couplings Of Light Guides (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002217184A JP4302373B2 (ja) | 2002-07-25 | 2002-07-25 | 導光装置 |
PCT/JP2003/008560 WO2004012244A1 (ja) | 2002-07-25 | 2003-07-04 | 導光装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60322557D1 true DE60322557D1 (de) | 2008-09-11 |
Family
ID=31184599
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60322557T Expired - Lifetime DE60322557D1 (de) | 2002-07-25 | 2003-07-04 | Lichtleiteinrichtung |
Country Status (9)
Country | Link |
---|---|
US (1) | US7360953B2 (de) |
EP (1) | EP1548802B1 (de) |
JP (1) | JP4302373B2 (de) |
KR (1) | KR100936591B1 (de) |
CN (1) | CN1672242B (de) |
AU (1) | AU2003281709A1 (de) |
DE (1) | DE60322557D1 (de) |
TW (1) | TWI278719B (de) |
WO (1) | WO2004012244A1 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010014815A (ja) * | 2008-07-01 | 2010-01-21 | Mitsubishi Electric Corp | 投写型表示装置 |
JP2010170835A (ja) * | 2009-01-22 | 2010-08-05 | Sanyo Electric Co Ltd | 照明装置および投写型映像表示装置 |
JP6061571B2 (ja) * | 2012-09-04 | 2017-01-18 | キヤノン株式会社 | 被検体情報取得装置 |
JP6082721B2 (ja) * | 2014-10-01 | 2017-02-15 | Hoya Candeo Optronics株式会社 | 周辺露光装置用の光照射装置 |
JP6002261B2 (ja) * | 2015-03-11 | 2016-10-05 | Hoya Candeo Optronics株式会社 | 光照射装置 |
CN106842828B (zh) * | 2017-04-05 | 2019-09-03 | 无锡影速半导体科技有限公司 | 一种匀光棒固定装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4964692A (en) * | 1982-07-21 | 1990-10-23 | Smith & Nephew Dyonics, Inc. | Fiber bundle illumination system |
US4662714A (en) * | 1983-10-28 | 1987-05-05 | Kei Mori | Integrated construction of a large number of optical conductor cables |
US5229811A (en) * | 1990-06-15 | 1993-07-20 | Nikon Corporation | Apparatus for exposing peripheral portion of substrate |
JP3219925B2 (ja) | 1993-12-27 | 2001-10-15 | 東京エレクトロン株式会社 | 周辺露光装置及び周辺露光方法 |
JP3237522B2 (ja) * | 1996-02-05 | 2001-12-10 | ウシオ電機株式会社 | ウエハ周辺露光方法および装置 |
JP3223826B2 (ja) | 1996-06-26 | 2001-10-29 | ウシオ電機株式会社 | 基板上の不要レジスト露光装置 |
JPH10233354A (ja) | 1997-02-20 | 1998-09-02 | Ushio Inc | 紫外線照射装置 |
JP3356047B2 (ja) * | 1997-11-26 | 2002-12-09 | ウシオ電機株式会社 | ウエハ周辺露光装置 |
JP2001195901A (ja) * | 2000-01-14 | 2001-07-19 | Nippon Sheet Glass Co Ltd | 照明装置 |
JP4090273B2 (ja) * | 2002-05-23 | 2008-05-28 | 株式会社Sokudo | エッジ露光装置 |
-
2002
- 2002-07-25 JP JP2002217184A patent/JP4302373B2/ja not_active Expired - Fee Related
-
2003
- 2003-07-04 KR KR1020047019510A patent/KR100936591B1/ko not_active IP Right Cessation
- 2003-07-04 DE DE60322557T patent/DE60322557D1/de not_active Expired - Lifetime
- 2003-07-04 CN CN038178184A patent/CN1672242B/zh not_active Expired - Fee Related
- 2003-07-04 US US10/522,180 patent/US7360953B2/en not_active Expired - Fee Related
- 2003-07-04 AU AU2003281709A patent/AU2003281709A1/en not_active Abandoned
- 2003-07-04 EP EP03741212A patent/EP1548802B1/de not_active Expired - Fee Related
- 2003-07-04 WO PCT/JP2003/008560 patent/WO2004012244A1/ja active IP Right Grant
- 2003-07-24 TW TW092120212A patent/TWI278719B/zh active
Also Published As
Publication number | Publication date |
---|---|
TWI278719B (en) | 2007-04-11 |
CN1672242A (zh) | 2005-09-21 |
EP1548802B1 (de) | 2008-07-30 |
EP1548802A4 (de) | 2007-12-19 |
US7360953B2 (en) | 2008-04-22 |
WO2004012244A1 (ja) | 2004-02-05 |
JP4302373B2 (ja) | 2009-07-22 |
JP2004063597A (ja) | 2004-02-26 |
TW200405123A (en) | 2004-04-01 |
EP1548802A1 (de) | 2005-06-29 |
CN1672242B (zh) | 2010-04-21 |
US20060099754A1 (en) | 2006-05-11 |
KR100936591B1 (ko) | 2010-01-13 |
KR20050020818A (ko) | 2005-03-04 |
AU2003281709A1 (en) | 2004-02-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |