DE60314687D1 - Herstellungsverfahren für einen Flüssigkeitsausstosskopf - Google Patents

Herstellungsverfahren für einen Flüssigkeitsausstosskopf

Info

Publication number
DE60314687D1
DE60314687D1 DE60314687T DE60314687T DE60314687D1 DE 60314687 D1 DE60314687 D1 DE 60314687D1 DE 60314687 T DE60314687 T DE 60314687T DE 60314687 T DE60314687 T DE 60314687T DE 60314687 D1 DE60314687 D1 DE 60314687D1
Authority
DE
Germany
Prior art keywords
manufacturing
liquid ejection
ejection head
head
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60314687T
Other languages
English (en)
Other versions
DE60314687T2 (de
Inventor
Masahiko Kubota
Wataru Hiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE60314687D1 publication Critical patent/DE60314687D1/de
Application granted granted Critical
Publication of DE60314687T2 publication Critical patent/DE60314687T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/05—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers produced by the application of heat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)
DE60314687T 2002-07-10 2003-07-10 Herstellungsverfahren für einen Flüssigkeitsausstosskopf Expired - Lifetime DE60314687T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002201876 2002-07-10
JP2002201876A JP3862625B2 (ja) 2002-07-10 2002-07-10 液体吐出ヘッドの製造方法

Publications (2)

Publication Number Publication Date
DE60314687D1 true DE60314687D1 (de) 2007-08-16
DE60314687T2 DE60314687T2 (de) 2008-04-10

Family

ID=29728485

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60314687T Expired - Lifetime DE60314687T2 (de) 2002-07-10 2003-07-10 Herstellungsverfahren für einen Flüssigkeitsausstosskopf

Country Status (7)

Country Link
US (1) US6942321B2 (de)
EP (1) EP1380424B1 (de)
JP (1) JP3862625B2 (de)
KR (1) KR100499297B1 (de)
CN (1) CN1257060C (de)
DE (1) DE60314687T2 (de)
TW (1) TWI241958B (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3862624B2 (ja) * 2002-07-10 2006-12-27 キヤノン株式会社 液体吐出ヘッドおよび、該ヘッドの製造方法
US8227043B2 (en) * 2004-06-28 2012-07-24 Canon Kabushiki Kaisha Liquid discharge head manufacturing method, and liquid discharge head obtained using this method
WO2008029650A1 (en) 2006-09-08 2008-03-13 Canon Kabushiki Kaisha Liquid discharge head and method of manufacturing the same
US20080186360A1 (en) * 2007-01-12 2008-08-07 Seiko Epson Corporation Liquid-jet head and liquid-jet apparatus having same
JP5511191B2 (ja) 2008-01-28 2014-06-04 キヤノン株式会社 液体吐出ヘッド、液体吐出ヘッドの製造方法および構造体の形成方法
JP2009208393A (ja) * 2008-03-05 2009-09-17 Canon Inc インクジェット記録ヘッド
KR101101623B1 (ko) * 2009-10-29 2012-01-02 삼성전기주식회사 잉크젯 프린트 헤드
EP2547529B1 (de) * 2010-03-31 2019-09-04 Canon Kabushiki Kaisha Verfahren zur herstellung eines flüssigkeitsausstosskopfs
US8268539B2 (en) 2010-07-23 2012-09-18 Caron Kabushiki Kaisha Method of manufacturing liquid ejection head
JP5967351B2 (ja) * 2012-01-30 2016-08-10 セイコーエプソン株式会社 液体噴射ヘッドおよび液体噴射装置
US9308726B2 (en) * 2012-02-16 2016-04-12 Xerox Corporation Printhead fluid paths formed with sacrificial material patterned using additive manufacturing processes
JP5449590B2 (ja) * 2012-03-14 2014-03-19 キヤノン株式会社 液体吐出ヘッドの製造方法
JP6566709B2 (ja) * 2015-05-07 2019-08-28 キヤノン株式会社 インクジェット記録ヘッド用基板

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54161935A (en) 1978-06-12 1979-12-22 Seiko Epson Corp Ink jet printer
US4558333A (en) * 1981-07-09 1985-12-10 Canon Kabushiki Kaisha Liquid jet recording head
JPS61185455A (ja) 1985-02-14 1986-08-19 Olympus Optical Co Ltd インクジエツトプリンタ
JPS61249768A (ja) 1985-04-30 1986-11-06 Olympus Optical Co Ltd インクジエツト記録装置
US4882595A (en) * 1987-10-30 1989-11-21 Hewlett-Packard Company Hydraulically tuned channel architecture
ES2105472T3 (es) * 1990-04-27 1997-10-16 Canon Kk Metodo y aparato de impresion.
JP2783647B2 (ja) 1990-04-27 1998-08-06 キヤノン株式会社 液体噴射方法および該方法を用いた記録装置
JPH0410941A (ja) 1990-04-27 1992-01-16 Canon Inc 液滴噴射方法及び該方法を用いた記録装置
US5160579A (en) 1991-06-05 1992-11-03 Macdermid, Incorporated Process for manufacturing printed circuit employing selective provision of solderable coating
US5278584A (en) * 1992-04-02 1994-01-11 Hewlett-Packard Company Ink delivery system for an inkjet printhead
JP3143307B2 (ja) * 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US6461798B1 (en) * 1995-03-31 2002-10-08 Canon Kabushiki Kaisha Process for the production of an ink jet head
US6158843A (en) * 1997-03-28 2000-12-12 Lexmark International, Inc. Ink jet printer nozzle plates with ink filtering projections
US6303274B1 (en) * 1998-03-02 2001-10-16 Hewlett-Packard Company Ink chamber and orifice shape variations in an ink-jet orifice plate
EP1005986B1 (de) 1998-06-18 2006-08-23 Matsushita Electric Industrial Co., Ltd. Flüssigkeitsausstossvorrichtung und verfahren zu ihrer hrestellung
US6491834B1 (en) * 1998-12-03 2002-12-10 Canon Kabushiki Kaisha Method for manufacturing liquid discharge head, liquid discharge head, head cartridge, and liquid discharge recording apparatus
JP3986039B2 (ja) * 1998-12-03 2007-10-03 キヤノン株式会社 液体吐出ヘッドの製造方法、液体吐出ヘッド、ヘッドカートリッジおよび液体吐出記録装置
JP3907329B2 (ja) * 1998-12-03 2007-04-18 キヤノン株式会社 液体吐出ヘッドおよび液体吐出装置
JP2000255072A (ja) 1999-03-10 2000-09-19 Canon Inc インクジェット記録ヘッドの製造方法およびインクジェット記録ヘッド
US6520627B2 (en) * 2000-06-26 2003-02-18 Hewlett-Packard Company Direct imaging polymer fluid jet orifice

Also Published As

Publication number Publication date
KR20040005666A (ko) 2004-01-16
KR100499297B1 (ko) 2005-07-04
CN1486848A (zh) 2004-04-07
CN1257060C (zh) 2006-05-24
JP2004042398A (ja) 2004-02-12
TWI241958B (en) 2005-10-21
US6942321B2 (en) 2005-09-13
DE60314687T2 (de) 2008-04-10
EP1380424B1 (de) 2007-07-04
TW200402367A (en) 2004-02-16
EP1380424A1 (de) 2004-01-14
US20040027422A1 (en) 2004-02-12
JP3862625B2 (ja) 2006-12-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition