DE60307871D1 - Vorrichtungen und verfahren zur wärmeverlustdruckmessung - Google Patents
Vorrichtungen und verfahren zur wärmeverlustdruckmessungInfo
- Publication number
- DE60307871D1 DE60307871D1 DE60307871T DE60307871T DE60307871D1 DE 60307871 D1 DE60307871 D1 DE 60307871D1 DE 60307871 T DE60307871 T DE 60307871T DE 60307871 T DE60307871 T DE 60307871T DE 60307871 D1 DE60307871 D1 DE 60307871D1
- Authority
- DE
- Germany
- Prior art keywords
- sensing element
- compensating
- heat loss
- compensating element
- devices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
- G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US273402 | 2002-10-16 | ||
US10/273,402 US6938493B2 (en) | 1997-07-21 | 2002-10-16 | Apparatus and methods for heat loss pressure measurement |
PCT/US2003/032497 WO2004036169A1 (en) | 2002-10-16 | 2003-10-14 | Apparatus and methods for heat loss pressure measurement |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60307871D1 true DE60307871D1 (de) | 2006-10-05 |
DE60307871T2 DE60307871T2 (de) | 2007-04-19 |
Family
ID=32106455
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60307871T Expired - Fee Related DE60307871T2 (de) | 2002-10-16 | 2003-10-14 | Vorrichtungen und verfahren zur wärmeverlustdruckmessung |
Country Status (11)
Country | Link |
---|---|
US (3) | US6938493B2 (de) |
EP (1) | EP1552265B1 (de) |
JP (1) | JP2006503290A (de) |
KR (1) | KR20050051705A (de) |
CN (1) | CN100374839C (de) |
AT (1) | ATE337543T1 (de) |
AU (1) | AU2003279271A1 (de) |
DE (1) | DE60307871T2 (de) |
FR (1) | FR2847982B1 (de) |
TW (1) | TW200411154A (de) |
WO (1) | WO2004036169A1 (de) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6938493B2 (en) * | 1997-07-21 | 2005-09-06 | Helix Technology Corporation | Apparatus and methods for heat loss pressure measurement |
JP3555844B2 (ja) | 1999-04-09 | 2004-08-18 | 三宅 正二郎 | 摺動部材およびその製造方法 |
US6969198B2 (en) * | 2002-11-06 | 2005-11-29 | Nissan Motor Co., Ltd. | Low-friction sliding mechanism |
JP3891433B2 (ja) * | 2003-04-15 | 2007-03-14 | 日産自動車株式会社 | 燃料噴射弁 |
EP1479946B1 (de) * | 2003-05-23 | 2012-12-19 | Nissan Motor Co., Ltd. | Kolben für eine Brennkraftmaschine |
EP1482190B1 (de) * | 2003-05-27 | 2012-12-05 | Nissan Motor Company Limited | Wälzkörper |
JP2005008851A (ja) * | 2003-05-29 | 2005-01-13 | Nissan Motor Co Ltd | 硬質炭素薄膜付き機械加工工具用切削油及び硬質炭素薄膜付き機械加工工具 |
JP4863152B2 (ja) | 2003-07-31 | 2012-01-25 | 日産自動車株式会社 | 歯車 |
US8206035B2 (en) | 2003-08-06 | 2012-06-26 | Nissan Motor Co., Ltd. | Low-friction sliding mechanism, low-friction agent composition and method of friction reduction |
JP2005054617A (ja) * | 2003-08-08 | 2005-03-03 | Nissan Motor Co Ltd | 動弁機構 |
JP3808092B2 (ja) * | 2003-08-08 | 2006-08-09 | 松下電器産業株式会社 | 電子デバイスおよびその製造方法 |
JP4973971B2 (ja) | 2003-08-08 | 2012-07-11 | 日産自動車株式会社 | 摺動部材 |
JP4117553B2 (ja) * | 2003-08-13 | 2008-07-16 | 日産自動車株式会社 | チェーン駆動装置 |
US7771821B2 (en) | 2003-08-21 | 2010-08-10 | Nissan Motor Co., Ltd. | Low-friction sliding member and low-friction sliding mechanism using same |
EP1508611B1 (de) | 2003-08-22 | 2019-04-17 | Nissan Motor Co., Ltd. | Getriebe enthaltend eine getriebeölzusammensetzung |
US20060021444A1 (en) * | 2004-07-28 | 2006-02-02 | Helix Technology Corporation | Method of operating a resistive heat-loss pressure sensor |
EP1771711B1 (de) | 2004-07-28 | 2012-04-25 | Brooks Automation, Inc. | Verfahren zum betrieb eines widerstands-wärmeverlust-drucksensors |
US7249516B2 (en) * | 2004-07-28 | 2007-07-31 | Brooks Automation, Inc. | Method of operating a resistive heat-loss pressure sensor |
US7331237B2 (en) * | 2006-02-01 | 2008-02-19 | Brooks Automation, Inc. | Technique for improving Pirani gauge temperature compensation over its full pressure range |
JP4831670B2 (ja) * | 2006-02-24 | 2011-12-07 | 富士通株式会社 | 試料抵抗測定装置 |
US7322248B1 (en) * | 2006-08-29 | 2008-01-29 | Eastman Kodak Company | Pressure gauge for organic materials |
US7478002B2 (en) | 2007-01-26 | 2009-01-13 | Delphi Technologies, Inc. | Apparatus and method for trimming multiple sensing elements with a single trim resistor |
US8117898B2 (en) * | 2008-12-19 | 2012-02-21 | Institut National D'optique | Method for sensing gas composition and pressure |
US8171801B2 (en) * | 2008-12-19 | 2012-05-08 | Institut National D'optique | Micro-thermistor gas pressure sensor |
WO2010069035A1 (en) * | 2008-12-19 | 2010-06-24 | Institut National D'optique | Method for sensing gas composition and pressure |
CA2746336C (en) | 2008-12-19 | 2014-05-27 | Institut National D'optique | Micro-thermistor gas pressure sensor |
US9429479B2 (en) * | 2012-07-18 | 2016-08-30 | Millar Instruments | Methods, devices, and systems which determine a parameter value of an object or an environment from a voltage reading associated with a common mode signal of a balanced circuit |
FR2995691B1 (fr) * | 2012-09-19 | 2014-10-10 | Commissariat Energie Atomique | Capteur de flux thermique, capteur de gaz comportant au moins un tel capteur et jauge pirani comportant au moins un tel capteur |
CN108181228B (zh) * | 2017-12-14 | 2021-04-27 | 北京金风科创风电设备有限公司 | 等效温度循环的测试***及测试方法、计算机存储介质 |
US10914717B2 (en) | 2018-05-09 | 2021-02-09 | Mks Instruments, Inc. | Method and apparatus for partial pressure detection |
CA3170485C (en) * | 2020-04-08 | 2023-01-31 | Institut National D'optique | Heat-loss pressure microsensors |
CN111982393B (zh) * | 2020-08-27 | 2021-11-19 | 天津科技大学 | 一种实时监测真空仪表 |
CN114878033B (zh) * | 2022-03-29 | 2023-12-22 | 深圳国微感知技术有限公司 | 一种矩阵式压力分布测量***及方法 |
US20240118158A1 (en) * | 2022-10-11 | 2024-04-11 | Mks Instruments, Inc. | Pirani Gauge |
Family Cites Families (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1094341A (en) * | 1913-05-14 | 1914-04-21 | Ulysses S G Peoples | Water-heating attachment for stoves. |
US1448540A (en) | 1917-07-14 | 1923-03-13 | Western Electric Co | Apparatus for measuring gas pressures |
US1675710A (en) * | 1922-08-07 | 1928-07-03 | Speedaumat Addressing Machiner | Selector-discharge mechanism |
US1648592A (en) * | 1923-01-11 | 1927-11-08 | Howard P Denison | Wireless apparatus |
US1668106A (en) | 1923-07-26 | 1928-05-01 | Bbc Brown Boveri & Cie | Hot-wire vacuum meter |
US1778508A (en) | 1925-10-20 | 1930-10-14 | Western Electric Co | Apparatus for measuring and recording pressures |
US1873984A (en) | 1928-09-14 | 1932-08-30 | Sieber Fritz | Indicating device |
US2105472A (en) * | 1936-07-03 | 1938-01-18 | Bell Telephone Labor Inc | High power discharge device |
US2105047A (en) * | 1936-10-10 | 1938-01-11 | Robert H Lake | Stretcher for uniform cap covers |
BE435406A (de) * | 1938-07-12 | |||
US2650496A (en) * | 1948-05-17 | 1953-09-01 | Phillips Petroleum Co | Fluid flowmeter with heated resistance bridge circuit |
US2938387A (en) | 1956-12-10 | 1960-05-31 | Cons Vacuum Corp | Automatic control circuit |
DE1094341B (de) | 1958-12-13 | 1960-12-08 | Cons Electrodynamics Corp | Anordnung zur selbsttaetigen Steuerung der Temperatur eines stromdurchflossenen Widerstandes |
US3199356A (en) | 1961-11-06 | 1965-08-10 | Andriulis Vytautas | Pressure gauge |
US3429178A (en) * | 1965-01-07 | 1969-02-25 | Enoch J Durbin | Measuring system |
DE1648592A1 (de) | 1967-10-25 | 1971-04-01 | Leybold Heraeus Gmbh & Co Kg | Messverfahren zur Messung kleiner Differenzdruecke |
US3580081A (en) | 1969-09-10 | 1971-05-25 | Veeco Instr Inc | Vacuum gauge |
US4106350A (en) | 1977-08-29 | 1978-08-15 | Morris Richard T | Thin wire pressure sensor |
US4279147A (en) * | 1980-01-10 | 1981-07-21 | Djorup Robert Sonny | Directional heat loss anemometer transducer |
DE3131506A1 (de) | 1981-08-08 | 1983-03-17 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren zum betrieb eines geregelten pirani-vakuummeters und dafuer geeignetes pirani-vakuummeter |
GB2105047B (en) | 1981-08-28 | 1986-04-03 | British Oxygen Co Ltd | Pirani gauges |
DE3230405A1 (de) | 1981-08-28 | 1983-03-10 | Boc Ltd., London | Gasdruck-messschaltung |
US4682503A (en) | 1986-05-16 | 1987-07-28 | Honeywell Inc. | Microscopic size, thermal conductivity type, air or gas absolute pressure sensor |
US4736155A (en) | 1987-03-06 | 1988-04-05 | Colt Industries Inc | Transducer temperature control circuit and method |
SU1675710A1 (ru) | 1987-03-26 | 1991-09-07 | Предприятие П/Я А-1614 | Способ градуировки теплового вакуумметра |
US4787251A (en) * | 1987-07-15 | 1988-11-29 | Tsi Incorporated | Directional low differential pressure transducer |
EP0379841B2 (de) | 1989-01-23 | 1998-11-04 | Balzers Aktiengesellschaft | Gasdruck-Messgerät |
US4918974A (en) * | 1989-02-06 | 1990-04-24 | Alcan International Limited | Method and apparatus for the measurement of the thermal conductivity of gases |
US5184500A (en) | 1990-03-20 | 1993-02-09 | J And N Associates, Inc. | Gas detector |
US5079954A (en) | 1990-12-27 | 1992-01-14 | The Boc Group, Inc. | Vacuum gauge |
DE4308434A1 (de) | 1993-03-17 | 1994-09-22 | Leybold Ag | Temperaturkompensation bei einem geregelten Wärmeleitungsvakuummeter |
DE4308433A1 (de) | 1993-03-17 | 1994-09-22 | Leybold Ag | Wärmeleitungsvakuummeter mit Meßzelle, Meßgerät und Verbindungskabel |
US5347869A (en) | 1993-03-25 | 1994-09-20 | Opto Tech Corporation | Structure of micro-pirani sensor |
EP0660096B1 (de) | 1993-12-23 | 1999-03-17 | Heimann Optoelectronics GmbH | Mikrovakuumsensor |
US5557972A (en) | 1994-09-13 | 1996-09-24 | Teledyne Industries, Inc. | Miniature silicon based thermal vacuum sensor and method of measuring vacuum pressures |
US5668320A (en) | 1995-06-19 | 1997-09-16 | Cardiometrics, Inc. | Piezoresistive pressure transducer circuitry accommodating transducer variability |
DE19617238A1 (de) | 1996-04-30 | 1997-11-06 | Leybold Vakuum Gmbh | Schaltung zur Temperaturkompensation eines Wärmeleitungsvakuummeters |
US5812047A (en) * | 1997-02-18 | 1998-09-22 | Exar Corporation | Offset-free resistor geometry for use in piezo-resistive pressure sensor |
US6023979A (en) | 1997-07-21 | 2000-02-15 | Helix Technology | Apparatus and methods for heat loss pressure measurement |
US6658941B1 (en) | 1997-07-21 | 2003-12-09 | Helix Technology Corporation | Apparatus and methods for heat loss pressure measurement |
US6938493B2 (en) * | 1997-07-21 | 2005-09-06 | Helix Technology Corporation | Apparatus and methods for heat loss pressure measurement |
FR2768817B1 (fr) | 1997-09-19 | 1999-12-10 | Cis Bio Int | Methode homogene pour la detection et/ou la determination de l'activite phosphorylante d'un materiel biologique |
CH692762A5 (de) * | 1997-09-22 | 2002-10-15 | Unaxis Balzers Ag | Verfahren zur Messung des Gasdrucks in einem Gefäss sowie Vorrichtungen zur Durchführung des Verfahrens. |
US6663834B1 (en) * | 2000-10-27 | 2003-12-16 | Mine Safety Appliance Company | Catalytic sensor |
-
2002
- 2002-10-16 US US10/273,402 patent/US6938493B2/en not_active Expired - Lifetime
-
2003
- 2003-10-08 TW TW092127922A patent/TW200411154A/zh unknown
- 2003-10-14 CN CNB2003801031929A patent/CN100374839C/zh not_active Expired - Fee Related
- 2003-10-14 DE DE60307871T patent/DE60307871T2/de not_active Expired - Fee Related
- 2003-10-14 WO PCT/US2003/032497 patent/WO2004036169A1/en active IP Right Grant
- 2003-10-14 JP JP2004544887A patent/JP2006503290A/ja active Pending
- 2003-10-14 KR KR1020057006598A patent/KR20050051705A/ko not_active Application Discontinuation
- 2003-10-14 AT AT03770756T patent/ATE337543T1/de not_active IP Right Cessation
- 2003-10-14 AU AU2003279271A patent/AU2003279271A1/en not_active Abandoned
- 2003-10-14 EP EP03770756A patent/EP1552265B1/de not_active Expired - Lifetime
- 2003-10-15 FR FR0350685A patent/FR2847982B1/fr not_active Expired - Fee Related
-
2004
- 2004-05-24 US US10/852,896 patent/US6945119B2/en not_active Expired - Fee Related
- 2004-05-24 US US10/853,358 patent/US6865952B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TW200411154A (en) | 2004-07-01 |
US6865952B2 (en) | 2005-03-15 |
US20030097876A1 (en) | 2003-05-29 |
EP1552265A1 (de) | 2005-07-13 |
FR2847982B1 (fr) | 2005-09-16 |
US20040216528A1 (en) | 2004-11-04 |
CN100374839C (zh) | 2008-03-12 |
JP2006503290A (ja) | 2006-01-26 |
US20040216527A1 (en) | 2004-11-04 |
FR2847982A1 (fr) | 2004-06-04 |
US6938493B2 (en) | 2005-09-06 |
ATE337543T1 (de) | 2006-09-15 |
EP1552265B1 (de) | 2006-08-23 |
KR20050051705A (ko) | 2005-06-01 |
WO2004036169A1 (en) | 2004-04-29 |
CN1711465A (zh) | 2005-12-21 |
US6945119B2 (en) | 2005-09-20 |
AU2003279271A1 (en) | 2004-05-04 |
DE60307871T2 (de) | 2007-04-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |