DE602007004637D1 - Verfahren zur herstellung einer siliciumcarbid-wärmetauschvorrichtung und in diesem verfahren hergestellte siliciumcarbid-wärmetauschvorrichtung - Google Patents
Verfahren zur herstellung einer siliciumcarbid-wärmetauschvorrichtung und in diesem verfahren hergestellte siliciumcarbid-wärmetauschvorrichtungInfo
- Publication number
- DE602007004637D1 DE602007004637D1 DE602007004637T DE602007004637T DE602007004637D1 DE 602007004637 D1 DE602007004637 D1 DE 602007004637D1 DE 602007004637 T DE602007004637 T DE 602007004637T DE 602007004637 T DE602007004637 T DE 602007004637T DE 602007004637 D1 DE602007004637 D1 DE 602007004637D1
- Authority
- DE
- Germany
- Prior art keywords
- silicon carbide
- carbide heat
- heat exchanger
- producing
- order
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D9/00—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D9/0031—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits for one heat-exchange medium being formed by paired plates touching each other
- F28D9/0043—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits for one heat-exchange medium being formed by paired plates touching each other the plates having openings therein for circulation of at least one heat-exchange medium from one conduit to another
- F28D9/005—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits for one heat-exchange medium being formed by paired plates touching each other the plates having openings therein for circulation of at least one heat-exchange medium from one conduit to another the plates having openings therein for both heat-exchange media
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
- B23K1/0012—Brazing heat exchangers
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
- C04B37/005—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of glass or ceramic material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/04—Constructions of heat-exchange apparatus characterised by the selection of particular materials of ceramic; of concrete; of natural stone
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/04—Tubular or hollow articles
- B23K2101/14—Heat exchangers
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/612—Machining
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/94—Products characterised by their shape
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/16—Silicon interlayers
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
- C04B2237/365—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/708—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2275/00—Fastening; Joining
- F28F2275/04—Fastening; Joining by brazing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24488—Differential nonuniformity at margin
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24612—Composite web or sheet
Landscapes
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Structural Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
- Silicon Compounds (AREA)
- Carbon And Carbon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0653680A FR2905754B1 (fr) | 2006-09-12 | 2006-09-12 | Procede de fabrication d'un dispositif de type echangeur de chaleur en carbure de silicium et dispositif en carbure de silicium realise par le procede |
PCT/FR2007/051875 WO2008031966A1 (fr) | 2006-09-12 | 2007-09-05 | Procede de fabrication d'un dispositif de type echangeur de chaleur en carbure de silicium et dispositif en carbure de silicium realise par le procede |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602007004637D1 true DE602007004637D1 (de) | 2010-03-18 |
Family
ID=38180662
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602007004637T Active DE602007004637D1 (de) | 2006-09-12 | 2007-09-05 | Verfahren zur herstellung einer siliciumcarbid-wärmetauschvorrichtung und in diesem verfahren hergestellte siliciumcarbid-wärmetauschvorrichtung |
Country Status (7)
Country | Link |
---|---|
US (1) | US20090280299A1 (de) |
EP (1) | EP2066474B1 (de) |
AT (1) | ATE456416T1 (de) |
DE (1) | DE602007004637D1 (de) |
ES (1) | ES2339407T3 (de) |
FR (1) | FR2905754B1 (de) |
WO (1) | WO2008031966A1 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010030781A1 (de) * | 2010-06-30 | 2012-01-05 | Sgl Carbon Se | Wärmeübertragerplatte, damit versehener Plattenwärmeübertrager und Verfahren zum Herstellen eines Plattenwärmeübertragers |
EP2785666B1 (de) * | 2011-11-29 | 2019-09-18 | Corning Incorporated | Verfahren zur behandlung einer verbindung bei einer keramischen anordnung |
JP6182082B2 (ja) * | 2013-03-15 | 2017-08-16 | 日本碍子株式会社 | 緻密質複合材料、その製法及び半導体製造装置用部材 |
JP6182084B2 (ja) * | 2013-03-25 | 2017-08-16 | 日本碍子株式会社 | 緻密質複合材料、その製法、接合体及び半導体製造装置用部材 |
FR3071750B1 (fr) * | 2017-09-29 | 2022-01-28 | Atmostat | Reacteur-echangeur a vieillissement maitrise |
FR3092778B1 (fr) * | 2019-02-14 | 2022-02-25 | Thermocoax Cie | « Procédé de brasure d’éléments chauffants pour réaliser une source chauffante, plaque de cuisson, thermoplongeur ou source infrarouge » |
WO2021067455A1 (en) * | 2019-09-30 | 2021-04-08 | Corning Incorporated | Fabrication of flow reactor modules and modules produced |
WO2022005862A1 (en) * | 2020-06-30 | 2022-01-06 | Corning Incorporated | Pressed silicon carbide ceramic (sic) fluidic modules with integrated heat exchange |
WO2022035513A1 (en) * | 2020-08-13 | 2022-02-17 | Corning Incorporated | Pressed silicon carbide (sic) multilayer fluidic modules |
WO2022204019A1 (en) * | 2021-03-26 | 2022-09-29 | Corning Incorporated | Fabrication of fluid devices and fluid devices produced |
JP2023056710A (ja) * | 2021-10-08 | 2023-04-20 | 日本碍子株式会社 | ウエハ載置台 |
WO2023081186A2 (en) * | 2021-11-04 | 2023-05-11 | Corning Incorporated | Method of forming ceramic fluidic modules with smooth interior surfaces and modules produced |
WO2024118341A1 (en) * | 2022-11-29 | 2024-06-06 | Corning Incorporated | Pre-pressed ceramic bodies for fabrication of ceramic fluidic modules via isostatic pressing |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3071853A (en) * | 1955-10-17 | 1963-01-08 | Solar Aircraft Co | Method and apparatus for making brazed honeycomb |
US4130160A (en) * | 1976-09-27 | 1978-12-19 | Gte Sylvania Incorporated | Composite ceramic cellular structure and heat recuperative apparatus incorporating same |
JPS56133598A (en) * | 1980-03-24 | 1981-10-19 | Ngk Insulators Ltd | Heat transfer type ceramic heat exchanger and its manufacture |
DE3136253A1 (de) * | 1981-09-12 | 1983-03-31 | Rosenthal Technik Ag, 8672 Selb | Verfahren und vorrichtung zum herstellen von waermetauschern aus keramischen folien |
US4488920A (en) * | 1982-05-18 | 1984-12-18 | Williams International Corporation | Process of making a ceramic heat exchanger element |
DE3643750A1 (de) * | 1986-12-20 | 1988-06-30 | Hoechst Ag | Waermetauschermodul aus gebranntem keramischen material |
US5234152A (en) * | 1992-01-07 | 1993-08-10 | Regents Of The University Of California | Transient liquid phase ceramic bonding |
JP2004361022A (ja) * | 2003-06-05 | 2004-12-24 | Denso Corp | 熱交換器 |
DE102005054093A1 (de) * | 2004-11-18 | 2006-06-14 | Helmut Aaslepp | Wärmeaustausch durch Siliziumcarbid-Rohre |
-
2006
- 2006-09-12 FR FR0653680A patent/FR2905754B1/fr not_active Expired - Fee Related
-
2007
- 2007-09-05 EP EP07823772A patent/EP2066474B1/de not_active Revoked
- 2007-09-05 US US12/440,640 patent/US20090280299A1/en not_active Abandoned
- 2007-09-05 AT AT07823772T patent/ATE456416T1/de not_active IP Right Cessation
- 2007-09-05 ES ES07823772T patent/ES2339407T3/es active Active
- 2007-09-05 WO PCT/FR2007/051875 patent/WO2008031966A1/fr active Application Filing
- 2007-09-05 DE DE602007004637T patent/DE602007004637D1/de active Active
Also Published As
Publication number | Publication date |
---|---|
ES2339407T3 (es) | 2010-05-19 |
EP2066474B1 (de) | 2010-01-27 |
FR2905754A1 (fr) | 2008-03-14 |
US20090280299A1 (en) | 2009-11-12 |
FR2905754B1 (fr) | 2008-10-31 |
WO2008031966A1 (fr) | 2008-03-20 |
EP2066474A1 (de) | 2009-06-10 |
ATE456416T1 (de) | 2010-02-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent |