ATE456416T1 - Verfahren zur herstellung einer siliciumcarbid- wärmetauschvorrichtung und in diesem verfahren hergestellte siliciumcarbid- wärmetauschvorrichtung - Google Patents

Verfahren zur herstellung einer siliciumcarbid- wärmetauschvorrichtung und in diesem verfahren hergestellte siliciumcarbid- wärmetauschvorrichtung

Info

Publication number
ATE456416T1
ATE456416T1 AT07823772T AT07823772T ATE456416T1 AT E456416 T1 ATE456416 T1 AT E456416T1 AT 07823772 T AT07823772 T AT 07823772T AT 07823772 T AT07823772 T AT 07823772T AT E456416 T1 ATE456416 T1 AT E456416T1
Authority
AT
Austria
Prior art keywords
heat exchange
silicon carbide
exchange device
carbide heat
order
Prior art date
Application number
AT07823772T
Other languages
English (en)
Inventor
Marc Ferrato
Original Assignee
Boostec S A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=38180662&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE456416(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Boostec S A filed Critical Boostec S A
Application granted granted Critical
Publication of ATE456416T1 publication Critical patent/ATE456416T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D9/00—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D9/0031—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits for one heat-exchange medium being formed by paired plates touching each other
    • F28D9/0043—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits for one heat-exchange medium being formed by paired plates touching each other the plates having openings therein for circulation of at least one heat-exchange medium from one conduit to another
    • F28D9/005—Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits for one heat-exchange medium being formed by paired plates touching each other the plates having openings therein for circulation of at least one heat-exchange medium from one conduit to another the plates having openings therein for both heat-exchange media
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • B23K1/0012—Brazing heat exchangers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/005—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of glass or ceramic material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
    • F28F21/04—Constructions of heat-exchange apparatus characterised by the selection of particular materials of ceramic; of concrete; of natural stone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/04—Tubular or hollow articles
    • B23K2101/14—Heat exchangers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/612—Machining
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/94—Products characterised by their shape
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/16—Silicon interlayers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/365—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/708—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2275/00—Fastening; Joining
    • F28F2275/04—Fastening; Joining by brazing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y10T428/24488—Differential nonuniformity at margin
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y10T428/24612—Composite web or sheet

Landscapes

  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Structural Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
  • Silicon Compounds (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
AT07823772T 2006-09-12 2007-09-05 Verfahren zur herstellung einer siliciumcarbid- wärmetauschvorrichtung und in diesem verfahren hergestellte siliciumcarbid- wärmetauschvorrichtung ATE456416T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0653680A FR2905754B1 (fr) 2006-09-12 2006-09-12 Procede de fabrication d'un dispositif de type echangeur de chaleur en carbure de silicium et dispositif en carbure de silicium realise par le procede
PCT/FR2007/051875 WO2008031966A1 (fr) 2006-09-12 2007-09-05 Procede de fabrication d'un dispositif de type echangeur de chaleur en carbure de silicium et dispositif en carbure de silicium realise par le procede

Publications (1)

Publication Number Publication Date
ATE456416T1 true ATE456416T1 (de) 2010-02-15

Family

ID=38180662

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07823772T ATE456416T1 (de) 2006-09-12 2007-09-05 Verfahren zur herstellung einer siliciumcarbid- wärmetauschvorrichtung und in diesem verfahren hergestellte siliciumcarbid- wärmetauschvorrichtung

Country Status (7)

Country Link
US (1) US20090280299A1 (de)
EP (1) EP2066474B1 (de)
AT (1) ATE456416T1 (de)
DE (1) DE602007004637D1 (de)
ES (1) ES2339407T3 (de)
FR (1) FR2905754B1 (de)
WO (1) WO2008031966A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010030781A1 (de) * 2010-06-30 2012-01-05 Sgl Carbon Se Wärmeübertragerplatte, damit versehener Plattenwärmeübertrager und Verfahren zum Herstellen eines Plattenwärmeübertragers
EP2785666B1 (de) * 2011-11-29 2019-09-18 Corning Incorporated Verfahren zur behandlung einer verbindung bei einer keramischen anordnung
JP6182082B2 (ja) * 2013-03-15 2017-08-16 日本碍子株式会社 緻密質複合材料、その製法及び半導体製造装置用部材
JP6182084B2 (ja) * 2013-03-25 2017-08-16 日本碍子株式会社 緻密質複合材料、その製法、接合体及び半導体製造装置用部材
FR3071750B1 (fr) * 2017-09-29 2022-01-28 Atmostat Reacteur-echangeur a vieillissement maitrise
FR3092778B1 (fr) * 2019-02-14 2022-02-25 Thermocoax Cie « Procédé de brasure d’éléments chauffants pour réaliser une source chauffante, plaque de cuisson, thermoplongeur ou source infrarouge »
WO2021067455A1 (en) * 2019-09-30 2021-04-08 Corning Incorporated Fabrication of flow reactor modules and modules produced
WO2022005862A1 (en) * 2020-06-30 2022-01-06 Corning Incorporated Pressed silicon carbide ceramic (sic) fluidic modules with integrated heat exchange
WO2022035513A1 (en) * 2020-08-13 2022-02-17 Corning Incorporated Pressed silicon carbide (sic) multilayer fluidic modules
WO2022204019A1 (en) * 2021-03-26 2022-09-29 Corning Incorporated Fabrication of fluid devices and fluid devices produced
JP2023056710A (ja) * 2021-10-08 2023-04-20 日本碍子株式会社 ウエハ載置台
WO2023081186A2 (en) * 2021-11-04 2023-05-11 Corning Incorporated Method of forming ceramic fluidic modules with smooth interior surfaces and modules produced
WO2024118341A1 (en) * 2022-11-29 2024-06-06 Corning Incorporated Pre-pressed ceramic bodies for fabrication of ceramic fluidic modules via isostatic pressing

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3071853A (en) * 1955-10-17 1963-01-08 Solar Aircraft Co Method and apparatus for making brazed honeycomb
US4130160A (en) * 1976-09-27 1978-12-19 Gte Sylvania Incorporated Composite ceramic cellular structure and heat recuperative apparatus incorporating same
JPS56133598A (en) * 1980-03-24 1981-10-19 Ngk Insulators Ltd Heat transfer type ceramic heat exchanger and its manufacture
DE3136253A1 (de) * 1981-09-12 1983-03-31 Rosenthal Technik Ag, 8672 Selb Verfahren und vorrichtung zum herstellen von waermetauschern aus keramischen folien
US4488920A (en) * 1982-05-18 1984-12-18 Williams International Corporation Process of making a ceramic heat exchanger element
DE3643750A1 (de) * 1986-12-20 1988-06-30 Hoechst Ag Waermetauschermodul aus gebranntem keramischen material
US5234152A (en) * 1992-01-07 1993-08-10 Regents Of The University Of California Transient liquid phase ceramic bonding
JP2004361022A (ja) * 2003-06-05 2004-12-24 Denso Corp 熱交換器
DE102005054093A1 (de) * 2004-11-18 2006-06-14 Helmut Aaslepp Wärmeaustausch durch Siliziumcarbid-Rohre

Also Published As

Publication number Publication date
DE602007004637D1 (de) 2010-03-18
ES2339407T3 (es) 2010-05-19
EP2066474B1 (de) 2010-01-27
FR2905754A1 (fr) 2008-03-14
US20090280299A1 (en) 2009-11-12
FR2905754B1 (fr) 2008-10-31
WO2008031966A1 (fr) 2008-03-20
EP2066474A1 (de) 2009-06-10

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