DE602005021088D1 - Verfahren zur herstellung eines quartz-sensorsystems - Google Patents

Verfahren zur herstellung eines quartz-sensorsystems

Info

Publication number
DE602005021088D1
DE602005021088D1 DE602005021088T DE602005021088T DE602005021088D1 DE 602005021088 D1 DE602005021088 D1 DE 602005021088D1 DE 602005021088 T DE602005021088 T DE 602005021088T DE 602005021088 T DE602005021088 T DE 602005021088T DE 602005021088 D1 DE602005021088 D1 DE 602005021088D1
Authority
DE
Germany
Prior art keywords
producing
sensor system
quartz sensor
quartz
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005021088T
Other languages
English (en)
Inventor
James D Cook
Brian J Marsh
James Z Liu
Brian D Speldrich
Ioan Pavelescu
Vlad Buiculescu
Cornel P Cobianu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of DE602005021088D1 publication Critical patent/DE602005021088D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE602005021088T 2004-04-20 2005-04-19 Verfahren zur herstellung eines quartz-sensorsystems Active DE602005021088D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/828,142 US7000298B2 (en) 2004-04-20 2004-04-20 Method a quartz sensor
PCT/US2005/013453 WO2005103639A1 (en) 2004-04-20 2005-04-19 Quartz sensor system and producing method thereof

Publications (1)

Publication Number Publication Date
DE602005021088D1 true DE602005021088D1 (de) 2010-06-17

Family

ID=34966509

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005021088T Active DE602005021088D1 (de) 2004-04-20 2005-04-19 Verfahren zur herstellung eines quartz-sensorsystems

Country Status (6)

Country Link
US (1) US7000298B2 (de)
EP (2) EP1845353B1 (de)
JP (1) JP2007533998A (de)
CN (1) CN1973193B (de)
DE (1) DE602005021088D1 (de)
WO (1) WO2005103639A1 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3956809B2 (ja) * 2002-09-09 2007-08-08 株式会社デンソー 圧力センサ
US20050262943A1 (en) * 2004-05-27 2005-12-01 Glenn Claydon Apparatus, methods, and systems to detect an analyte based on changes in a resonant frequency of a spring element
US7243547B2 (en) * 2004-10-13 2007-07-17 Honeywell International Inc. MEMS SAW sensor
GB2426336A (en) * 2005-05-20 2006-11-22 Transense Technologies Plc SAW based torque and temperature sensor
US20070028692A1 (en) * 2005-08-05 2007-02-08 Honeywell International Inc. Acoustic wave sensor packaging for reduced hysteresis and creep
US7302864B2 (en) * 2005-09-23 2007-12-04 Honeywell International Inc. Torque sensor
US7597005B2 (en) 2005-11-10 2009-10-06 Honeywell International Inc. Pressure sensor housing and configuration
US20070139165A1 (en) * 2005-12-19 2007-06-21 Honeywell International, Inc. Acoustic wave device used as RFID and as sensor
US8803680B2 (en) * 2006-06-21 2014-08-12 Trw Automotive U.S. Llc Tire pressure monitoring apparatus
FR2907284B1 (fr) * 2006-10-17 2008-12-19 Senseor Soc Par Actions Simpli Procede de fabrication collective de capteurs sans calibrage a base de dispositif a ondes acoustiques
US8850893B2 (en) * 2007-12-05 2014-10-07 Valtion Teknillinen Tutkimuskeskus Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas
US7891252B2 (en) * 2008-02-01 2011-02-22 Honeywell International Inc. Method for sensor fabrication and related sensor and system
US8372674B2 (en) * 2008-02-01 2013-02-12 Honeywell International Inc. Method for chemical sensor fabrication and related sensor
US8104340B2 (en) * 2008-12-19 2012-01-31 Honeywell International Inc. Flow sensing device including a tapered flow channel
CN101620018B (zh) * 2009-08-06 2010-10-20 浙江大学 声表面波压力传感器
US8656772B2 (en) 2010-03-22 2014-02-25 Honeywell International Inc. Flow sensor with pressure output signal
US8397586B2 (en) * 2010-03-22 2013-03-19 Honeywell International Inc. Flow sensor assembly with porous insert
US8113046B2 (en) 2010-03-22 2012-02-14 Honeywell International Inc. Sensor assembly with hydrophobic filter
US8756990B2 (en) 2010-04-09 2014-06-24 Honeywell International Inc. Molded flow restrictor
US8418549B2 (en) 2011-01-31 2013-04-16 Honeywell International Inc. Flow sensor assembly with integral bypass channel
US9003877B2 (en) 2010-06-15 2015-04-14 Honeywell International Inc. Flow sensor assembly
FR2965050B1 (fr) * 2010-09-22 2013-06-28 Senseor Capteur de pression et de temperature bas cout comportant des resonateurs saw et son procede de fabrication
US8479590B2 (en) 2010-11-18 2013-07-09 Honeywell International Inc. System for monitoring structural assets
US8695417B2 (en) 2011-01-31 2014-04-15 Honeywell International Inc. Flow sensor with enhanced flow range capability
US20130098160A1 (en) * 2011-10-25 2013-04-25 Honeywell International Inc. Sensor with fail-safe media seal
US9151153B2 (en) * 2011-11-30 2015-10-06 Baker Hughes Incorporated Crystal sensor made by ion implantation for sensing a property of interest within a borehole in the earth
US9052217B2 (en) 2012-11-09 2015-06-09 Honeywell International Inc. Variable scale sensor
US20160302729A1 (en) * 2013-12-11 2016-10-20 The Board Of Regents Of The University Of Texas System Devices and methods for parameter measurement
US9952079B2 (en) 2015-07-15 2018-04-24 Honeywell International Inc. Flow sensor
US11143561B2 (en) * 2018-12-05 2021-10-12 Resonant Inc. Passive microphone/pressure sensor using a piezoelectric diaphragm
US11835414B2 (en) 2018-12-05 2023-12-05 Murata Manufacturing Co., Ltd. Passive pressure sensor with a piezoelectric diaphragm and a non-piezoelectric substrate
US11834328B2 (en) * 2020-06-29 2023-12-05 Invensense, Inc. Semiconductor package with built-in vibration isolation, thermal stability, and connector decoupling

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US3978731A (en) * 1974-02-25 1976-09-07 United Technologies Corporation Surface acoustic wave transducer
US4129042A (en) * 1977-11-18 1978-12-12 Signetics Corporation Semiconductor transducer packaged assembly
US4216401A (en) 1978-12-22 1980-08-05 United Technologies Corporation Surface acoustic wave (SAW) pressure sensor structure
US4454440A (en) 1978-12-22 1984-06-12 United Technologies Corporation Surface acoustic wave (SAW) pressure sensor structure
FR2454616A1 (fr) * 1979-04-18 1980-11-14 Thomson Csf Capteur de pression a ondes elastiques de surface et systeme d'allumage pour moteur a combustion interne mettant en oeuvre ce capteur
US4771639A (en) * 1987-09-02 1988-09-20 Yokogawa Electric Corporation Semiconductor pressure sensor
US4904978A (en) * 1988-04-29 1990-02-27 Solartron Electronics, Inc. Mechanical sensor for high temperature environments
US5461922A (en) * 1993-07-27 1995-10-31 Lucas-Novasensor Pressure sensor isolated within housing having integral diaphragm and method of making same
US5471723A (en) 1993-08-20 1995-12-05 Endress + Hauser Gmbh + Co. Methods of manufacturing thin-film absolute pressure sensors
US5637802A (en) 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US5686779A (en) * 1995-03-01 1997-11-11 The United States Of America As Represented By The Secretary Of The Army High sensitivity temperature sensor and sensor array
JPH09222372A (ja) * 1996-02-19 1997-08-26 Mitsubishi Electric Corp 半導体式センサ
US5821425A (en) 1996-09-30 1998-10-13 The United States Of America As Represented By The Secretary Of The Army Remote sensing of structural integrity using a surface acoustic wave sensor
JP2001041838A (ja) 1999-08-03 2001-02-16 Yamatake Corp 圧力センサおよびその製造方法
US6550337B1 (en) 2000-01-19 2003-04-22 Measurement Specialties, Inc. Isolation technique for pressure sensing structure
AU779050B2 (en) 2000-02-02 2005-01-06 Rutgers, The State University Of New Jersey Programmable surface acoustic wave (SAW) filter
US6571638B2 (en) 2000-06-30 2003-06-03 Sawtek, Inc. Surface-acoustic-wave pressure sensor and associated methods
JP4320593B2 (ja) 2002-03-21 2009-08-26 トランセンス テクノロジーズ ピーエルシー Ｓａｗデバイスと併用される圧力モニター

Also Published As

Publication number Publication date
US7000298B2 (en) 2006-02-21
CN1973193A (zh) 2007-05-30
CN1973193B (zh) 2010-10-06
US20050231067A1 (en) 2005-10-20
EP1738147A1 (de) 2007-01-03
EP1845353B1 (de) 2013-09-04
EP1738147B1 (de) 2010-05-05
JP2007533998A (ja) 2007-11-22
WO2005103639A1 (en) 2005-11-03
EP1845353A1 (de) 2007-10-17

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