DE602005004493D1 - Präzisionsbearbeitungsapparat und Verfahren zur Präzisionsbearbeitung - Google Patents

Präzisionsbearbeitungsapparat und Verfahren zur Präzisionsbearbeitung

Info

Publication number
DE602005004493D1
DE602005004493D1 DE602005004493T DE602005004493T DE602005004493D1 DE 602005004493 D1 DE602005004493 D1 DE 602005004493D1 DE 602005004493 T DE602005004493 T DE 602005004493T DE 602005004493 T DE602005004493 T DE 602005004493T DE 602005004493 D1 DE602005004493 D1 DE 602005004493D1
Authority
DE
Germany
Prior art keywords
precision machining
machining apparatus
precision
machining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005004493T
Other languages
English (en)
Other versions
DE602005004493T2 (de
Inventor
Sumio Kamiya
Hisao Iwase
Tetsuya Nagaike
Hiroshi Eda
Libo Zhou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Publication of DE602005004493D1 publication Critical patent/DE602005004493D1/de
Application granted granted Critical
Publication of DE602005004493T2 publication Critical patent/DE602005004493T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/02—Frames; Beds; Carriages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
DE602005004493T 2004-12-28 2005-12-21 Präzisionsbearbeitungsapparat und Verfahren zur Präzisionsbearbeitung Active DE602005004493T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004380782A JP4506461B2 (ja) 2004-12-28 2004-12-28 精密加工装置および精密加工方法
JP2004380782 2004-12-28

Publications (2)

Publication Number Publication Date
DE602005004493D1 true DE602005004493D1 (de) 2008-03-13
DE602005004493T2 DE602005004493T2 (de) 2009-01-22

Family

ID=36013272

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005004493T Active DE602005004493T2 (de) 2004-12-28 2005-12-21 Präzisionsbearbeitungsapparat und Verfahren zur Präzisionsbearbeitung

Country Status (8)

Country Link
US (1) US7247081B2 (de)
EP (1) EP1676671B1 (de)
JP (1) JP4506461B2 (de)
KR (1) KR100748415B1 (de)
CN (1) CN100527033C (de)
DE (1) DE602005004493T2 (de)
RU (1) RU2315391C2 (de)
TW (1) TWI308512B (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005003013B3 (de) * 2005-01-21 2006-09-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur dynamischen Belastungsprüfung einer Probe
JP4852868B2 (ja) 2005-04-04 2012-01-11 トヨタ自動車株式会社 精密加工方法
JP4839720B2 (ja) * 2005-08-04 2011-12-21 トヨタ自動車株式会社 精密加工装置
CN102626899B (zh) * 2011-04-28 2014-09-03 北京市电加工研究所 一种磁斥力自动恒压进给装置
RU2494852C1 (ru) * 2012-07-17 2013-10-10 Владимир Юрьевич Карасев Способ обработки поверхности твердого тела
RU2534854C1 (ru) * 2013-06-04 2014-12-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Владимирский государственный университет имени Александра Григорьевича и Николая Григорьевича Столетовых" (ВлГУ) Устройство прецизионного механического позиционирования
CN104493651B (zh) * 2014-12-10 2017-03-08 东莞市天合机电开发有限公司 一种新型外圆磨装置
RU2686826C1 (ru) * 2018-03-28 2019-04-30 Михаил Леонидович Галкин Магнитострикционный теплоноситель
CN109108755B (zh) * 2018-10-31 2023-09-15 浙江登亿自动化设备股份有限公司 全自动平面磨床的磨削机构
IT202000004819A1 (it) * 2020-03-06 2021-09-06 Bottero Spa Unita' di molatura o lucidatura di una lastra, in particolare una lastra di vetro, e metodo di lavorazione lastra utilizzante tale unita'
CN112692700A (zh) * 2020-12-28 2021-04-23 柳友香 一种冷轧机免更换自给进除锈设备

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4840860B1 (de) * 1970-08-28 1973-12-03
JPS5016551B1 (de) * 1970-12-19 1975-06-13
JPS55101369A (en) * 1979-01-30 1980-08-02 Toyoda Mach Works Ltd Sizing device corrected at measuring position responsive to boring diameter
JPS56126574A (en) * 1980-02-29 1981-10-03 Toyoda Mach Works Ltd Safety device for feeding movable mount
US4528743A (en) * 1982-01-16 1985-07-16 Hauni-Werke Korber & Co. Kg Grinding machine with magazine for spare grinding wheels
DE3826277A1 (de) * 1987-08-04 1989-02-16 Yamazaki Mazak Corp Werkzeugmaschine mit einer schleiffunktion, umfassend eine elektroerosionsaus-/zurichtvorrichtung, ein schleifwerkzeug und eine spansammelvorrichtung
JPH01171747A (ja) * 1987-12-25 1989-07-06 Matsushita Electric Ind Co Ltd 研削加工装置
JPH07270559A (ja) * 1994-03-31 1995-10-20 Chichibu Onoda Cement Corp 密封式超精密微動装置
JP3052201B2 (ja) * 1998-11-06 2000-06-12 茨城県 精密平面加工機械
JP2001265441A (ja) * 2000-03-15 2001-09-28 Hirotami Nakano 微細位置決め装置および微細位置決め方法
US6447379B1 (en) * 2000-03-31 2002-09-10 Speedfam-Ipec Corporation Carrier including a multi-volume diaphragm for polishing a semiconductor wafer and a method therefor
JP4530479B2 (ja) * 2000-05-24 2010-08-25 弘 江田 精密加工装置
JP2002127003A (ja) 2000-10-26 2002-05-08 Hiroshi Eda 姿勢制御装置付精密加工装置及び姿勢制御方法
JP2003165042A (ja) * 2001-11-29 2003-06-10 Okamoto Machine Tool Works Ltd 基板用乾式研磨装置および基板の乾式研磨方法
JP2004235201A (ja) * 2003-01-28 2004-08-19 Okamoto Machine Tool Works Ltd 基板の乾式化学機械研磨方法および乾式化学機械研磨装置

Also Published As

Publication number Publication date
US20060194510A1 (en) 2006-08-31
EP1676671B1 (de) 2008-01-23
KR100748415B1 (ko) 2007-08-10
RU2005141119A (ru) 2007-07-10
JP2006181703A (ja) 2006-07-13
RU2315391C2 (ru) 2008-01-20
KR20060076704A (ko) 2006-07-04
TWI308512B (en) 2009-04-11
JP4506461B2 (ja) 2010-07-21
US7247081B2 (en) 2007-07-24
CN100527033C (zh) 2009-08-12
CN1797256A (zh) 2006-07-05
TW200626296A (en) 2006-08-01
DE602005004493T2 (de) 2009-01-22
EP1676671A1 (de) 2006-07-05

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