DE602004008648D1 - Bistabiler mikromechanischer schalter, betätigungsverfahren und entsprechendes verfahren zu seiner realisierung - Google Patents
Bistabiler mikromechanischer schalter, betätigungsverfahren und entsprechendes verfahren zu seiner realisierungInfo
- Publication number
- DE602004008648D1 DE602004008648D1 DE602004008648T DE602004008648T DE602004008648D1 DE 602004008648 D1 DE602004008648 D1 DE 602004008648D1 DE 602004008648 T DE602004008648 T DE 602004008648T DE 602004008648 T DE602004008648 T DE 602004008648T DE 602004008648 D1 DE602004008648 D1 DE 602004008648D1
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- bridge
- realization
- medial
- conductive element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000004913 activation Effects 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 4
- 230000002093 peripheral effect Effects 0.000 abstract 3
- 239000000725 suspension Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
- Push-Button Switches (AREA)
- Hydrogenated Pyridines (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0309534 | 2003-08-01 | ||
FR0309534A FR2858459B1 (fr) | 2003-08-01 | 2003-08-01 | Commutateur micro-mecanique bistable, methode d'actionnement et procede de realisation correspondant |
PCT/FR2004/001988 WO2005015594A2 (fr) | 2003-08-01 | 2004-07-26 | Commutateur micro-mecanique bistable, methode d’actionnement et procede de realisation correspondant |
Publications (2)
Publication Number | Publication Date |
---|---|
DE602004008648D1 true DE602004008648D1 (de) | 2007-10-11 |
DE602004008648T2 DE602004008648T2 (de) | 2008-06-26 |
Family
ID=34043741
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004008648T Expired - Lifetime DE602004008648T2 (de) | 2003-08-01 | 2004-07-26 | Bistabiler mikromechanischer schalter, betätigungsverfahren und entsprechendes verfahren zu seiner realisierung |
Country Status (7)
Country | Link |
---|---|
US (1) | US7342472B2 (de) |
EP (1) | EP1652205B1 (de) |
JP (1) | JP4481309B2 (de) |
AT (1) | ATE371948T1 (de) |
DE (1) | DE602004008648T2 (de) |
FR (1) | FR2858459B1 (de) |
WO (1) | WO2005015594A2 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7683746B2 (en) * | 2005-01-21 | 2010-03-23 | Panasonic Corporation | Electro-mechanical switch |
DE602005003008T2 (de) * | 2005-03-21 | 2008-08-14 | Delfmems | RF MEMS Schalter mit einer flexiblen und freien Schaltmembran |
US7763818B2 (en) * | 2005-07-29 | 2010-07-27 | Brigham Young University | Spherical bistable mechanism |
KR101188438B1 (ko) * | 2006-02-20 | 2012-10-08 | 삼성전자주식회사 | 하향형 멤스 스위치의 제조방법 및 하향형 멤스 스위치 |
EP1850360A1 (de) * | 2006-04-26 | 2007-10-31 | Seiko Epson Corporation | Mikroschalter mit einem ersten betätigbaren Teil und mit einem zweiten Kontaktteil |
WO2007145294A1 (ja) * | 2006-06-15 | 2007-12-21 | Panasonic Corporation | 電気機械素子およびそれを用いた電気機器 |
US8063456B2 (en) | 2006-09-12 | 2011-11-22 | Alcatel Lucent | Mechanical switch with a curved bilayer |
WO2008072163A2 (en) * | 2006-12-12 | 2008-06-19 | Nxp B.V. | Mems device with controlled electrode off-state position |
EP2230679B1 (de) * | 2009-03-20 | 2012-05-16 | Delfmems | MEMS-Struktur mit flexibler Membran und verbesserte elektrische Auslösungsmittel |
GB2497379B (en) * | 2011-12-07 | 2016-06-08 | Ibm | A nano-electromechanical switch |
AU2014331796B2 (en) | 2013-10-11 | 2020-05-07 | Gilead Sciences, Inc. | Spray dry formulations |
US9783977B2 (en) * | 2015-11-20 | 2017-10-10 | University Of South Florida | Shape-morphing space frame apparatus using unit cell bistable elements |
CN109950063B (zh) * | 2019-04-16 | 2024-06-14 | 苏州希美微纳***有限公司 | 基于杠杆原理的双稳态rf mems接触式开关 |
US20220276615A1 (en) * | 2021-02-26 | 2022-09-01 | Honeywell International Inc. | Thermal metamaterial for low power mems thermal control |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH670914A5 (de) * | 1986-09-10 | 1989-07-14 | Landis & Gyr Ag | |
SE0101182D0 (sv) * | 2001-04-02 | 2001-04-02 | Ericsson Telefon Ab L M | Micro electromechanical switches |
US7126446B2 (en) * | 2001-06-15 | 2006-10-24 | Brigham Young University | Self-retracting fully compliant bistable micromechanism |
US20030080839A1 (en) * | 2001-10-31 | 2003-05-01 | Wong Marvin Glenn | Method for improving the power handling capacity of MEMS switches |
US7053736B2 (en) * | 2002-09-30 | 2006-05-30 | Teravicta Technologies, Inc. | Microelectromechanical device having an active opening switch |
FR2865724A1 (fr) * | 2004-02-04 | 2005-08-05 | St Microelectronics Sa | Microsysteme electromecanique pouvant basculer entre deux positions stables |
-
2003
- 2003-08-01 FR FR0309534A patent/FR2858459B1/fr not_active Expired - Fee Related
-
2004
- 2004-07-26 WO PCT/FR2004/001988 patent/WO2005015594A2/fr active IP Right Grant
- 2004-07-26 US US10/564,801 patent/US7342472B2/en not_active Expired - Fee Related
- 2004-07-26 AT AT04767777T patent/ATE371948T1/de not_active IP Right Cessation
- 2004-07-26 DE DE602004008648T patent/DE602004008648T2/de not_active Expired - Lifetime
- 2004-07-26 EP EP04767777A patent/EP1652205B1/de not_active Expired - Lifetime
- 2004-07-26 JP JP2006522366A patent/JP4481309B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1652205A2 (de) | 2006-05-03 |
US20060192641A1 (en) | 2006-08-31 |
US7342472B2 (en) | 2008-03-11 |
EP1652205B1 (de) | 2007-08-29 |
DE602004008648T2 (de) | 2008-06-26 |
FR2858459B1 (fr) | 2006-03-10 |
WO2005015594A3 (fr) | 2005-06-09 |
FR2858459A1 (fr) | 2005-02-04 |
ATE371948T1 (de) | 2007-09-15 |
JP2007501494A (ja) | 2007-01-25 |
WO2005015594A2 (fr) | 2005-02-17 |
JP4481309B2 (ja) | 2010-06-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de | ||
8370 | Indication related to discontinuation of the patent is to be deleted | ||
8364 | No opposition during term of opposition |