DE60142012D1 - Schleuse für Vakuumkammer - Google Patents
Schleuse für VakuumkammerInfo
- Publication number
- DE60142012D1 DE60142012D1 DE60142012T DE60142012T DE60142012D1 DE 60142012 D1 DE60142012 D1 DE 60142012D1 DE 60142012 T DE60142012 T DE 60142012T DE 60142012 T DE60142012 T DE 60142012T DE 60142012 D1 DE60142012 D1 DE 60142012D1
- Authority
- DE
- Germany
- Prior art keywords
- lock
- sealing means
- vacuum chamber
- inner sealing
- closing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
- C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/02—Permanent magnets [PM]
- H01F7/04—Means for releasing the attractive force
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Physical Vapour Deposition (AREA)
- Electron Tubes For Measurement (AREA)
- Sampling And Sample Adjustment (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Details Of Valves (AREA)
- Magnetically Actuated Valves (AREA)
- Chemical Vapour Deposition (AREA)
- Element Separation (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL1015690A NL1015690C2 (nl) | 2000-07-12 | 2000-07-12 | Sluis voor vacu³mkamer. |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60142012D1 true DE60142012D1 (de) | 2010-06-17 |
Family
ID=19771725
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60129975T Expired - Lifetime DE60129975T2 (de) | 2000-07-12 | 2001-06-26 | Vorrichtung zur durchführung mindestens einer behandlung eines substrates |
DE60142012T Expired - Lifetime DE60142012D1 (de) | 2000-07-12 | 2001-07-09 | Schleuse für Vakuumkammer |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60129975T Expired - Lifetime DE60129975T2 (de) | 2000-07-12 | 2001-06-26 | Vorrichtung zur durchführung mindestens einer behandlung eines substrates |
Country Status (11)
Country | Link |
---|---|
US (2) | US7198678B2 (de) |
EP (2) | EP1299571B1 (de) |
JP (2) | JP2004502869A (de) |
CN (1) | CN1291061C (de) |
AT (1) | ATE370262T1 (de) |
AU (1) | AU2001272844A1 (de) |
DE (2) | DE60129975T2 (de) |
ES (1) | ES2291331T3 (de) |
HK (1) | HK1043161B (de) |
NL (1) | NL1015690C2 (de) |
WO (1) | WO2002004697A1 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004027752A1 (de) | 2004-06-08 | 2006-01-05 | Leybold Optics Gmbh | Schleusenvorrichtung |
US7611322B2 (en) | 2004-11-18 | 2009-11-03 | Intevac, Inc. | Processing thin wafers |
EA008187B1 (ru) * | 2005-06-07 | 2007-04-27 | Владимир Яковлевич ШИРИПОВ | Способ очистки теневых масок в производстве дисплеев (варианты) и устройство для его реализации |
EP1862624B1 (de) * | 2006-06-01 | 2017-02-15 | Pilz Auslandsbeteiligungen GmbH | Zuhalteeinrichtung für eine Zugangsschutzvorrichtung |
JP6282917B2 (ja) | 2014-04-11 | 2018-02-21 | 株式会社Ihi | 真空処理装置 |
DE102016107990A1 (de) * | 2016-04-29 | 2017-11-02 | Von Ardenne Gmbh | Vakuumprozesskammer |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57207313A (en) * | 1981-06-16 | 1982-12-20 | Toshiba Corp | Method of demagnetizing induction electric equipment |
US4676884A (en) * | 1986-07-23 | 1987-06-30 | The Boc Group, Inc. | Wafer processing machine with evacuated wafer transporting and storage system |
US4842683A (en) * | 1986-12-19 | 1989-06-27 | Applied Materials, Inc. | Magnetic field-enhanced plasma etch reactor |
EP0448782B1 (de) * | 1990-03-26 | 1993-06-16 | Leybold Aktiengesellschaft | Vorrichtung zum Ein- und Ausschleusen eines Werkstücks in eine Vakuumkammer |
US5451131A (en) * | 1992-06-19 | 1995-09-19 | International Business Machines Corporation | Dockable interface airlock between process enclosure and interprocess transfer container |
JPH07292740A (ja) | 1994-04-25 | 1995-11-07 | Tokai Rika Co Ltd | 弁駆動装置及び衛生器具の自動洗浄装置 |
JP3873100B2 (ja) * | 1994-04-25 | 2007-01-24 | 芝浦メカトロニクス株式会社 | 真空装置でのディスクの保持方法及び保持装置 |
JP2001524259A (ja) * | 1995-07-10 | 2001-11-27 | シーヴィシー、プラダクツ、インク | マイクロエレクトロニクス製造装置用プログラマブル超クリーン電磁サブストレート回転装置及び方法 |
DE19605598C1 (de) * | 1996-02-15 | 1996-10-31 | Singulus Technologies Gmbh | Vorrichtung zum Greifen und Halten von Substraten |
JP3076775B2 (ja) * | 1997-07-31 | 2000-08-14 | 芝浦メカトロニクス株式会社 | 真空処理装置 |
DE19742923A1 (de) * | 1997-09-29 | 1999-04-01 | Leybold Systems Gmbh | Vorrichtung zum Beschichten eines im wesentlichen flachen, scheibenförmigen Substrats |
DE19814834A1 (de) * | 1998-04-02 | 1999-10-07 | Leybold Systems Gmbh | Vorrichtung zum Greifen und Halten eines flachen Substrats |
-
2000
- 2000-07-12 NL NL1015690A patent/NL1015690C2/nl not_active IP Right Cessation
-
2001
- 2001-06-26 EP EP01952049A patent/EP1299571B1/de not_active Expired - Lifetime
- 2001-06-26 AU AU2001272844A patent/AU2001272844A1/en not_active Abandoned
- 2001-06-26 ES ES01952049T patent/ES2291331T3/es not_active Expired - Lifetime
- 2001-06-26 US US10/332,381 patent/US7198678B2/en not_active Expired - Fee Related
- 2001-06-26 AT AT01952049T patent/ATE370262T1/de not_active IP Right Cessation
- 2001-06-26 WO PCT/NL2001/000475 patent/WO2002004697A1/en active IP Right Grant
- 2001-06-26 DE DE60129975T patent/DE60129975T2/de not_active Expired - Lifetime
- 2001-06-26 JP JP2002509550A patent/JP2004502869A/ja active Pending
- 2001-06-26 CN CNB018155154A patent/CN1291061C/zh not_active Expired - Fee Related
- 2001-07-09 EP EP01202632A patent/EP1172456B1/de not_active Expired - Lifetime
- 2001-07-09 DE DE60142012T patent/DE60142012D1/de not_active Expired - Lifetime
- 2001-07-12 US US09/902,617 patent/US6615547B2/en not_active Expired - Fee Related
- 2001-07-12 JP JP2001211704A patent/JP3757239B2/ja not_active Expired - Fee Related
-
2002
- 2002-07-05 HK HK02105031.8A patent/HK1043161B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
NL1015690C2 (nl) | 2002-01-15 |
EP1172456A1 (de) | 2002-01-16 |
US6615547B2 (en) | 2003-09-09 |
US20020021542A1 (en) | 2002-02-21 |
US20040083968A1 (en) | 2004-05-06 |
WO2002004697A1 (en) | 2002-01-17 |
JP2002139166A (ja) | 2002-05-17 |
EP1299571B1 (de) | 2007-08-15 |
JP2004502869A (ja) | 2004-01-29 |
EP1299571A1 (de) | 2003-04-09 |
US7198678B2 (en) | 2007-04-03 |
HK1043161B (zh) | 2011-02-18 |
EP1172456B1 (de) | 2010-05-05 |
JP3757239B2 (ja) | 2006-03-22 |
ES2291331T3 (es) | 2008-03-01 |
CN1455827A (zh) | 2003-11-12 |
DE60129975T2 (de) | 2008-05-15 |
HK1043161A1 (en) | 2002-09-06 |
CN1291061C (zh) | 2006-12-20 |
DE60129975D1 (de) | 2007-09-27 |
AU2001272844A1 (en) | 2002-01-21 |
ATE370262T1 (de) | 2007-09-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |