DE60039983D1 - In mikrotechnik hergestellter wandler und verfahren zu dessen herstellung - Google Patents

In mikrotechnik hergestellter wandler und verfahren zu dessen herstellung

Info

Publication number
DE60039983D1
DE60039983D1 DE60039983T DE60039983T DE60039983D1 DE 60039983 D1 DE60039983 D1 DE 60039983D1 DE 60039983 T DE60039983 T DE 60039983T DE 60039983 T DE60039983 T DE 60039983T DE 60039983 D1 DE60039983 D1 DE 60039983D1
Authority
DE
Germany
Prior art keywords
microtechnology
production
converters manufactured
converters
manufactured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60039983T
Other languages
English (en)
Inventor
Igal Ladabaum
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Medical Solutions USA Inc
Original Assignee
Siemens Medical Solutions USA Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Medical Solutions USA Inc filed Critical Siemens Medical Solutions USA Inc
Application granted granted Critical
Publication of DE60039983D1 publication Critical patent/DE60039983D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Pressure Sensors (AREA)
DE60039983T 1999-06-24 2000-06-12 In mikrotechnik hergestellter wandler und verfahren zu dessen herstellung Expired - Lifetime DE60039983D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/344,312 US6246158B1 (en) 1999-06-24 1999-06-24 Microfabricated transducers formed over other circuit components on an integrated circuit chip and methods for making the same
PCT/US2000/016089 WO2001001730A2 (en) 1999-06-24 2000-06-12 Microfabricated transducer and method for making the same

Publications (1)

Publication Number Publication Date
DE60039983D1 true DE60039983D1 (de) 2008-10-02

Family

ID=23349992

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60039983T Expired - Lifetime DE60039983D1 (de) 1999-06-24 2000-06-12 In mikrotechnik hergestellter wandler und verfahren zu dessen herstellung

Country Status (6)

Country Link
US (2) US6246158B1 (de)
EP (1) EP1188348B1 (de)
JP (1) JP4981223B2 (de)
AU (1) AU5607100A (de)
DE (1) DE60039983D1 (de)
WO (1) WO2001001730A2 (de)

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US7087023B2 (en) * 2003-02-14 2006-08-08 Sensant Corporation Microfabricated ultrasonic transducers with bias polarity beam profile control and method of operating the same
US7618373B2 (en) 2003-02-14 2009-11-17 Siemens Medical Solutions Usa, Inc. Microfabricated ultrasonic transducer array for 3-D imaging and method of operating the same
US7780597B2 (en) * 2003-02-14 2010-08-24 Siemens Medical Solutions Usa, Inc. Method and apparatus for improving the performance of capacitive acoustic transducers using bias polarity control and multiple firings
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US20050228277A1 (en) * 2004-04-05 2005-10-13 Siemens Medical Solutions Usa, Inc. System and method for 2D partial beamforming arrays with configurable sub-array elements
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US7508113B2 (en) * 2004-05-18 2009-03-24 Siemens Medical Solutions Usa, Inc. Apparatus for two-dimensional transducers used in three-dimensional ultrasonic imaging
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US8658453B2 (en) * 2004-09-15 2014-02-25 Sonetics Ultrasound, Inc. Capacitive micromachined ultrasonic transducer
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US7888709B2 (en) * 2004-09-15 2011-02-15 Sonetics Ultrasound, Inc. Capacitive micromachined ultrasonic transducer and manufacturing method
WO2006041114A1 (ja) 2004-10-15 2006-04-20 Hitachi Medical Corporation 超音波診断装置
JP4583901B2 (ja) * 2004-12-13 2010-11-17 富士フイルム株式会社 体腔内診断用超音波プローブ、および体腔内診断用超音波プローブの作製方法
JP4471856B2 (ja) * 2005-01-27 2010-06-02 株式会社日立製作所 超音波トランスデューサおよびその製造方法
US7449821B2 (en) * 2005-03-02 2008-11-11 Research Triangle Institute Piezoelectric micromachined ultrasonic transducer with air-backed cavities
WO2006121851A2 (en) * 2005-05-05 2006-11-16 Volcano Corporation Capacitive microfabricated ultrasound transducer-based intravascular ultrasound probes
TWI260940B (en) 2005-06-17 2006-08-21 Ind Tech Res Inst Method for producing polymeric capacitive ultrasonic transducer
JP4790315B2 (ja) * 2005-05-31 2011-10-12 オリンパスメディカルシステムズ株式会社 静電容量型超音波振動子
US20070038088A1 (en) * 2005-08-04 2007-02-15 Rich Collin A Medical imaging user interface and control scheme
JP5161773B2 (ja) * 2005-08-05 2013-03-13 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 曲がった二次元アレイ・トランスデューサ
JP4724501B2 (ja) * 2005-09-06 2011-07-13 株式会社日立製作所 超音波トランスデューサおよびその製造方法
WO2007066262A1 (en) * 2005-12-07 2007-06-14 Tpo Displays Corp. Piezoelectric speaker
DE102006001886A1 (de) * 2006-01-13 2007-07-19 Siemens Audiologische Technik Gmbh Mikrofonvorrichtung mit mehreren Siliziummikrofonen für eine Hörvorrichtung
JP4699259B2 (ja) * 2006-03-31 2011-06-08 株式会社日立製作所 超音波トランスデューサ
JP4979283B2 (ja) * 2006-06-29 2012-07-18 株式会社日立製作所 半導体装置の製造方法および半導体装置
JP4972350B2 (ja) * 2006-06-30 2012-07-11 株式会社日立製作所 半導体装置の製造方法
US20080071149A1 (en) * 2006-09-20 2008-03-20 Collin Rich Method and system of representing a medical event
US20080071292A1 (en) * 2006-09-20 2008-03-20 Rich Collin A System and method for displaying the trajectory of an instrument and the position of a body within a volume
JP5016884B2 (ja) * 2006-09-29 2012-09-05 株式会社日立製作所 半導体装置およびその製造方法
JP4271253B2 (ja) * 2006-10-11 2009-06-03 オリンパスメディカルシステムズ株式会社 超音波トランスデューサ、超音波トランスデューサの製造方法、及び超音波内視鏡
JP4294678B2 (ja) * 2006-10-30 2009-07-15 オリンパスメディカルシステムズ株式会社 超音波トランスデューサ、超音波トランスデューサの製造方法、及び超音波内視鏡
AU2006350241B2 (en) * 2006-11-03 2013-01-31 Research Triangle Institute Enhanced ultrasound imaging probes using flexure mode piezoelectric transducers
US20080296708A1 (en) * 2007-05-31 2008-12-04 General Electric Company Integrated sensor arrays and method for making and using such arrays
US7839722B2 (en) * 2007-09-20 2010-11-23 Siemens Medical Solutions Usa, Inc. Microfabricated acoustic transducer with a multilayer electrode
US7781238B2 (en) * 2007-12-06 2010-08-24 Robert Gideon Wodnicki Methods of making and using integrated and testable sensor array
JP2010004199A (ja) * 2008-06-19 2010-01-07 Hitachi Ltd 超音波トランスデューサおよびその製造方法
WO2010100861A1 (ja) 2009-03-05 2010-09-10 株式会社日立メディコ 超音波トランスデューサ、その製造方法、および、それを用いた超音波探触子
US8315125B2 (en) * 2009-03-18 2012-11-20 Sonetics Ultrasound, Inc. System and method for biasing CMUT elements
CN102440005B (zh) 2009-05-25 2014-09-24 株式会社日立医疗器械 超声波换能器及利用该超声波换能器的超声波诊断装置
JP5409138B2 (ja) * 2009-06-19 2014-02-05 キヤノン株式会社 電気機械変換装置、電気機械変換装置の感度ばらつき検出方法、及び補正方法
JP5570311B2 (ja) * 2010-06-07 2014-08-13 キヤノン株式会社 電気機械変換装置、検体診断装置
EP4220221A1 (de) 2013-03-15 2023-08-02 BFLY Operations, Inc. Monolithische ultraschallbildgebungsvorrichtungen, systeme und verfahren
CA2919183A1 (en) 2013-07-23 2015-01-29 Butterfly Network, Inc. Interconnectable ultrasound transducer probes and related methods and apparatus
JP2015023994A (ja) * 2013-07-26 2015-02-05 セイコーエプソン株式会社 超音波測定装置、超音波ヘッドユニット、超音波プローブ及び超音波画像装置
EP3216231B1 (de) * 2014-11-07 2019-08-21 Chirp Microsystems, Inc. Gehäusewellenleiter für akustischen sensor mit elektronischer verzögerungskompensation
JP2016097033A (ja) * 2014-11-20 2016-05-30 キヤノン株式会社 静電容量型トランスデューサ、及び被検体情報取得装置
US11147531B2 (en) 2015-08-12 2021-10-19 Sonetics Ultrasound, Inc. Method and system for measuring blood pressure using ultrasound by emitting push pulse to a blood vessel
CN114631847B (zh) * 2022-05-20 2022-09-09 之江实验室 一种抑制医用超声换能器阵列串扰的分时复用方法

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JPH01312486A (ja) * 1988-06-13 1989-12-18 Agency Of Ind Science & Technol 超音波アレイトランスデューサ
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JPH1188992A (ja) * 1997-09-03 1999-03-30 Hosiden Corp 集積型容量性変換器及びその製造方法
US6346811B1 (en) * 1997-10-20 2002-02-12 Wolff Controls Corp. Methods for mounting a sensor and signal conditioner to form sensing apparatus having enhanced sensing capabilities and reduced size
DE19750167B4 (de) * 1997-11-12 2006-08-31 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung integrierter Schaltkreise
US6324907B1 (en) * 1999-11-29 2001-12-04 Microtronic A/S Flexible substrate transducer assembly

Also Published As

Publication number Publication date
WO2001001730A3 (en) 2001-09-13
US6562650B2 (en) 2003-05-13
EP1188348A2 (de) 2002-03-20
US6246158B1 (en) 2001-06-12
US20030032211A1 (en) 2003-02-13
JP4981223B2 (ja) 2012-07-18
EP1188348B1 (de) 2008-08-20
AU5607100A (en) 2001-01-31
JP2003503923A (ja) 2003-01-28
WO2001001730A2 (en) 2001-01-04

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