DE60032041D1 - Piezoelektrisches Antriebselement, Tintenstrahldruckkopf, Herstellungsverfahren dafür, und Tintenstrahldrucker - Google Patents
Piezoelektrisches Antriebselement, Tintenstrahldruckkopf, Herstellungsverfahren dafür, und TintenstrahldruckerInfo
- Publication number
- DE60032041D1 DE60032041D1 DE60032041T DE60032041T DE60032041D1 DE 60032041 D1 DE60032041 D1 DE 60032041D1 DE 60032041 T DE60032041 T DE 60032041T DE 60032041 T DE60032041 T DE 60032041T DE 60032041 D1 DE60032041 D1 DE 60032041D1
- Authority
- DE
- Germany
- Prior art keywords
- ink jet
- piezoelectric
- group
- ceramic particles
- piezoelectric ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000002245 particle Substances 0.000 abstract 8
- 239000000919 ceramic Substances 0.000 abstract 6
- 239000000463 material Substances 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
- H10N30/078—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition by sol-gel deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Dispersion Chemistry (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Compositions Of Oxide Ceramics (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5393199 | 1999-03-02 | ||
JP5393199 | 1999-03-02 | ||
JP2000056138 | 2000-03-01 | ||
JP2000056138A JP3508682B2 (ja) | 1999-03-02 | 2000-03-01 | 圧電アクチュエータ、インクジェット式記録ヘッド、これらの製造方法及びインクジェットプリンタ |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60032041D1 true DE60032041D1 (de) | 2007-01-11 |
DE60032041T2 DE60032041T2 (de) | 2007-03-08 |
Family
ID=26394664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE2000632041 Expired - Lifetime DE60032041T2 (de) | 1999-03-02 | 2000-03-02 | Piezoelektrisches Antriebselement, Tintenstrahldruckkopf, Herstellungsverfahren dafür, und Tintenstrahldrucker |
Country Status (5)
Country | Link |
---|---|
US (1) | US6419848B1 (de) |
EP (1) | EP1033250B1 (de) |
JP (1) | JP3508682B2 (de) |
AT (1) | ATE346748T1 (de) |
DE (1) | DE60032041T2 (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6566983B2 (en) * | 2000-09-02 | 2003-05-20 | Lg Electronics Inc. | Saw filter using a carbon nanotube and method for manufacturing the same |
JP4721507B2 (ja) * | 2000-11-29 | 2011-07-13 | 京セラ株式会社 | 圧電磁器組成物及びこれを用いたインクジェット記録ヘッド |
JP4688301B2 (ja) * | 2001-01-23 | 2011-05-25 | 京セラ株式会社 | 圧電磁器組成物及びこれを用いたインクジェット記録ヘッド |
SG115500A1 (en) | 2002-10-09 | 2005-10-28 | Inst Materials Research & Eng | Method to produce a reliable piezoelectric thick film on a substrate |
GB0229655D0 (en) * | 2002-12-20 | 2003-01-22 | Xaar Technology Ltd | Droplet deposition apparatus |
JP4521751B2 (ja) * | 2003-03-26 | 2010-08-11 | 国立大学法人東京工業大学 | チタン酸ジルコニウム酸鉛系膜、誘電体素子、誘電体膜の製造方法 |
JP4179029B2 (ja) | 2003-04-15 | 2008-11-12 | 株式会社村田製作所 | 圧電セラミックの製造方法 |
US7399067B2 (en) | 2004-02-27 | 2008-07-15 | Canon Kabushiki Kaisha | Piezoelectric thin film, method of manufacturing piezoelectric thin film, piezoelectric element, and ink jet recording head |
US7565723B2 (en) * | 2004-03-30 | 2009-07-28 | Brother Kogyo Kabushik Kaisha | Piezoelectric actuator and method of fabricating piezoelectric actuator |
US7527363B2 (en) * | 2004-07-16 | 2009-05-05 | Fujifilm Corporation | Discharge head of image forming apparatus with piezoelectric body for generating and sensing pressure |
US8356011B2 (en) * | 2005-07-26 | 2013-01-15 | Microsoft Corporation | Organizing presence information into collections of publications |
JP4925007B2 (ja) * | 2006-02-17 | 2012-04-25 | 独立行政法人産業技術総合研究所 | 圧電体球状微粒子の製造方法 |
JP4640222B2 (ja) * | 2006-03-15 | 2011-03-02 | セイコーエプソン株式会社 | インクジェットヘッドの製造方法 |
US8108345B2 (en) | 2006-03-31 | 2012-01-31 | Microsoft Corporation | Managing rich presence collections in a single request |
US20070235500A1 (en) * | 2006-03-31 | 2007-10-11 | Daewoong Suh | Room temperature joining process with piezoelectric ceramic-activated reactive multilayer foil |
US8234559B2 (en) * | 2006-03-31 | 2012-07-31 | Microsoft Corporation | Managing rich presence collections |
JP4940389B2 (ja) * | 2007-01-19 | 2012-05-30 | 国立大学法人 名古屋工業大学 | 無鉛圧電磁器複合体及びこれを用いた圧電素子 |
JP5281786B2 (ja) * | 2007-11-14 | 2013-09-04 | 日本碍子株式会社 | (Li,Na,K)(Nb,Ta)O3系圧電材料、及びその製造方法 |
JP5011227B2 (ja) * | 2008-07-28 | 2012-08-29 | 日本碍子株式会社 | (Li,Na,K,Bi)(Nb,Ta)O3系圧電材料及びその製造方法 |
JP5244749B2 (ja) * | 2009-09-14 | 2013-07-24 | 富士フイルム株式会社 | 液体吐出ヘッド、液体吐出ヘッドの駆動方法、及び、画像記録装置 |
FR2950197A1 (fr) * | 2009-09-15 | 2011-03-18 | Commissariat Energie Atomique | Membrane piezoelectrique a actionnement optimise et procede de fabrication de la membrane |
US8766511B2 (en) * | 2011-08-17 | 2014-07-01 | The Boeing Company | Method and system for distributed network of nanoparticle ink based piezoelectric sensors for structural health monitoring |
JP6186784B2 (ja) * | 2013-03-22 | 2017-08-30 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置、圧電素子及び超音波センサー |
JP5984774B2 (ja) * | 2013-09-30 | 2016-09-06 | 三菱重工業株式会社 | 超音波探触子 |
JP6597987B2 (ja) * | 2014-03-18 | 2019-10-30 | セイコーエプソン株式会社 | 圧電素子、アクチュエーター装置、液体噴射ヘッド、液体噴射装置及び超音波測定装置 |
CN107266072A (zh) * | 2017-03-02 | 2017-10-20 | 中国兵器工业第五二研究所烟台分所 | 一种低温烧结pzt95‑5压电陶瓷的制备方法 |
CN113004025A (zh) * | 2021-02-24 | 2021-06-22 | 广西中科鑫玺电子科技有限公司 | 一种压电陶瓷工艺配方 |
CN113264766A (zh) * | 2021-06-07 | 2021-08-17 | 西安交通大学 | 一种无铅压电薄膜材料及其制备方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG83626A1 (en) | 1989-07-11 | 2001-10-16 | Seiko Epson Corp | Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film |
JP2842448B2 (ja) | 1989-07-11 | 1999-01-06 | 日本碍子株式会社 | 圧電/電歪膜型アクチュエータ |
JP2825366B2 (ja) * | 1991-05-23 | 1998-11-18 | 松下電器産業株式会社 | 圧電セラミックス |
JP3254750B2 (ja) * | 1992-09-28 | 2002-02-12 | セイコーエプソン株式会社 | 強誘電体薄膜素子、インクジェット記録装置および強誘電体薄膜素子の製造方法 |
US5634999A (en) | 1994-09-06 | 1997-06-03 | Ngk Insulators, Ltd. | Method of producing ceramic diaphragm structure having convex diaphragm portion |
JPH08104568A (ja) * | 1994-09-30 | 1996-04-23 | Matsushita Electric Ind Co Ltd | 圧電セラミックスおよびその製造方法 |
JPH09157019A (ja) | 1995-11-30 | 1997-06-17 | Mita Ind Co Ltd | 複合酸化物膜 |
JPH1093153A (ja) * | 1996-09-13 | 1998-04-10 | Ricoh Co Ltd | 電気機械変換素子及びその製造方法並びにインクジェットヘッド |
JP3682684B2 (ja) * | 1997-10-20 | 2005-08-10 | セイコーエプソン株式会社 | 圧電体薄膜素子の製造方法 |
US6402304B1 (en) | 1998-08-12 | 2002-06-11 | Seiko Epson Corporation | Piezoelectric actuator, ink jet printing head, printer, method for manufacturing piezoelectric actuator, and method for manufacturing ink jet printing head |
-
2000
- 2000-03-01 JP JP2000056138A patent/JP3508682B2/ja not_active Expired - Fee Related
- 2000-03-02 US US09/518,189 patent/US6419848B1/en not_active Expired - Lifetime
- 2000-03-02 AT AT00104371T patent/ATE346748T1/de not_active IP Right Cessation
- 2000-03-02 DE DE2000632041 patent/DE60032041T2/de not_active Expired - Lifetime
- 2000-03-02 EP EP20000104371 patent/EP1033250B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
ATE346748T1 (de) | 2006-12-15 |
JP3508682B2 (ja) | 2004-03-22 |
DE60032041T2 (de) | 2007-03-08 |
EP1033250B1 (de) | 2006-11-29 |
JP2000315827A (ja) | 2000-11-14 |
EP1033250A1 (de) | 2000-09-06 |
US6419848B1 (en) | 2002-07-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE60032041D1 (de) | Piezoelektrisches Antriebselement, Tintenstrahldruckkopf, Herstellungsverfahren dafür, und Tintenstrahldrucker | |
NL1011241A1 (nl) | Werkwijze voor het vervaardigen van een micro-aandrijver voor een inktjetkop. | |
KR960013670A (ko) | 잉크 제트 헤드 제조 방법, 상기 방법에 의해 제조된 잉크 제트 헤드, 및 잉크 제트 헤드를 구비한 잉크 제트 장치 | |
DE69123932D1 (de) | Herstellungsverfahren eines Tintenstrahldruckkopfes | |
DE60119998D1 (de) | Tintenstrahlaufzeichnungskopf, Verfahren zur Herstellung und Tintenstrahlaufzeichnungsgerät | |
DE69305477D1 (de) | Antriebselement mit keramischem Substrat und Tintenstrahldruckkopf mit Benützung derselben | |
EP0841165A3 (de) | Antriebvorrichtung mit piezoelektrischem Element, Verfahren zur Herstellung derselben und Tintenstrahlaufzeichnungskopf | |
MX9204741A (es) | Metodo para manufacturar un conjunto de cabeza de impresion a chorro con tinta de alta densidad. | |
EP0911891A3 (de) | Verfahren zum Herstellen einer piezoelektrischen Dünnschicht und Tintenstrahldruckkopf mit Verwendung dieser Dünnschicht | |
DE602005005379D1 (de) | Tintenstrahlkopf und Kopfmodule | |
EP1228890A3 (de) | Bildaufzeichnungsmaterialien und Verfahren zu ihrer Herstellung | |
ATE270970T1 (de) | Tintenstrahlaufzeichnungsmaterial für pigmenthaltige tinte und tintenstrahlaufzeichnungsverfahren | |
CN2691853Y (zh) | 喷墨打印头及具有该喷墨打印头的喷墨打印机 | |
ATE381964T1 (de) | Fokussierte akustische energie in der herstellung und screening von kombinatorischen bibliotheken | |
MXPA03011989A (es) | Cabeza de impresion compacta de inyeccion de tinta. | |
KR960013667A (ko) | 잉크제트프린터용 인자헤드 및 그 제조방법 | |
DE69935777D1 (de) | Hydrophile struktur | |
ATE240840T1 (de) | Tintenstrahldruckkopf | |
DE50310112D1 (de) | Mehrschichtmaterialien zum herstellen von verpackungen | |
DE60102346D1 (de) | Tintenstrahlaufzeichnungsmaterial | |
US6367916B2 (en) | Piezoelectric device for controlling ink ejection and inkjet head for inkjet printer | |
ATE284314T1 (de) | Herstellungsverfahren für einen tintenstrahlaufzeichnungskopf | |
DE60132408D1 (de) | Tintenstrahlaufzeichnungskopf und Tintenstrahlaufzeichnungsvorrichtung | |
DE60009240D1 (de) | Aufzeichnungsmaterial, Herstellungsverfahren davon, Aufzeichnungsverfahren und damit aufgezeichnetes Produkt | |
US6844661B2 (en) | Piezoelectric ceramic composition and piezoelectric actuator for ink-jet head based on use of the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |