DE60021212D1 - Hydrofluorether als wärmeübertragungsflüssigkeit - Google Patents

Hydrofluorether als wärmeübertragungsflüssigkeit

Info

Publication number
DE60021212D1
DE60021212D1 DE60021212T DE60021212T DE60021212D1 DE 60021212 D1 DE60021212 D1 DE 60021212D1 DE 60021212 T DE60021212 T DE 60021212T DE 60021212 T DE60021212 T DE 60021212T DE 60021212 D1 DE60021212 D1 DE 60021212D1
Authority
DE
Germany
Prior art keywords
hydrofluorether
heat transfer
transfer fluid
fluid
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60021212T
Other languages
English (en)
Other versions
DE60021212T2 (de
Inventor
A Tousignant
E Tuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of DE60021212D1 publication Critical patent/DE60021212D1/de
Application granted granted Critical
Publication of DE60021212T2 publication Critical patent/DE60021212T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K5/00—Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
    • C09K5/08—Materials not undergoing a change of physical state when used
    • C09K5/10—Liquid materials
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C19/00—Acyclic saturated compounds containing halogen atoms
    • C07C19/08—Acyclic saturated compounds containing halogen atoms containing fluorine
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C43/00—Ethers; Compounds having groups, groups or groups
    • C07C43/02—Ethers
    • C07C43/03—Ethers having all ether-oxygen atoms bound to acyclic carbon atoms
    • C07C43/04—Saturated ethers
    • C07C43/12—Saturated ethers containing halogen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Thermal Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Lubricants (AREA)
DE60021212T 1999-10-08 2000-09-29 Hydrofluorether als wärmeübertragungsflüssigkeit Expired - Lifetime DE60021212T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US15869799P 1999-10-08 1999-10-08
US158697P 1999-10-08
US09/661,935 US6374907B1 (en) 1999-10-08 2000-09-14 Hydrofluoroether as a heat-transfer fluid
US661935 2000-09-14
PCT/US2000/026968 WO2001027217A1 (en) 1999-10-08 2000-09-29 Hydrofluoroether as a heat-transfer fluid

Publications (2)

Publication Number Publication Date
DE60021212D1 true DE60021212D1 (de) 2005-08-11
DE60021212T2 DE60021212T2 (de) 2006-05-18

Family

ID=26855295

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60021212T Expired - Lifetime DE60021212T2 (de) 1999-10-08 2000-09-29 Hydrofluorether als wärmeübertragungsflüssigkeit

Country Status (7)

Country Link
US (1) US6374907B1 (de)
EP (1) EP1261676B1 (de)
JP (1) JP2003526906A (de)
KR (1) KR100669264B1 (de)
AU (1) AU7741500A (de)
DE (1) DE60021212T2 (de)
WO (1) WO2001027217A1 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1235046B1 (de) 1999-11-26 2011-10-05 JFE Engineering Corporation Wärmespeichermaterial mit benutzung einer vorrichtung zur wärme- und hydratspeicherung und herstellungsverfahren des wärmespeichermaterials
EP1306417B1 (de) * 2001-10-23 2012-08-01 Solvay Specialty Polymers Italy S.p.A. Verwendung von fluorierten Flüssigkeiten zum Wärmeaustausch oder als Arbeitsflüssigkeiten in der Anwesenheit von ionisierenden Strahlungen und/oder Bestrahlungen mit Neutronen
EP1510763B1 (de) * 2002-05-31 2012-02-01 JFE Engineering Corporation Vorrichtung zur herstellung einer hydrataufschlämmung
WO2005007771A1 (en) * 2003-07-23 2005-01-27 Dupont Canada Inc. Coolant liquids having a low dielectric constant and high resistivity for use in fuel cells & other electrochemical reactor stacks
WO2005008819A2 (en) * 2003-07-23 2005-01-27 Dupont Canada Inc. Evaporative coolants having low dielectric constant for use in fuel cells & other electrochemical reactor stacks
US6953082B2 (en) * 2003-12-16 2005-10-11 3M Innovative Properties Company Hydrofluoroether as a heat-transfer fluid
US7128133B2 (en) * 2003-12-16 2006-10-31 3M Innovative Properties Company Hydrofluoroether as a heat-transfer fluid
US7055579B2 (en) * 2003-12-16 2006-06-06 3M Innovative Properties Company Hydrofluoroether as a heat-transfer fluid
US7788939B2 (en) 2004-07-15 2010-09-07 Parker-Hannifin Corporation Azeotrope spray cooling system
US7428816B2 (en) * 2004-07-16 2008-09-30 Honeywell International Inc. Working fluids for thermal energy conversion of waste heat from fuel cells using Rankine cycle systems
US7338575B2 (en) * 2004-09-10 2008-03-04 Axcelis Technologies, Inc. Hydrocarbon dielectric heat transfer fluids for microwave plasma generators
EP1655358A1 (de) * 2004-11-04 2006-05-10 Solvay Fluor GmbH Arbeitsfluid zur Wärmeübertragung
US7691282B2 (en) 2005-09-08 2010-04-06 3M Innovative Properties Company Hydrofluoroether compounds and processes for their preparation and use
US7385089B2 (en) * 2005-12-23 2008-06-10 3M Innovative Properties Company Fluorochemical ketone compounds and processes for their use
ITMI20060381A1 (it) 2006-03-02 2007-09-03 Solvay Solexis Spa Fluidi di scambio termico
US8791254B2 (en) * 2006-05-19 2014-07-29 3M Innovative Properties Company Cyclic hydrofluoroether compounds and processes for their preparation and use
US8193397B2 (en) * 2006-12-06 2012-06-05 3M Innovative Properties Company Hydrofluoroether compounds and processes for their preparation and use
US8905124B2 (en) * 2007-06-27 2014-12-09 Taiwan Semiconductor Manufacturing Company, Ltd. Temperature controlled loadlock chamber
US20090176148A1 (en) * 2008-01-04 2009-07-09 3M Innovative Properties Company Thermal management of electrochemical cells
US8003004B2 (en) * 2008-01-23 2011-08-23 3M Innovative Properties Company Heat transfer apparatus and methods including hydrofluorocarbonates
US20090269521A1 (en) * 2008-04-24 2009-10-29 3M Innovative Properties Company Porous structured thermal transfer article
US8071816B2 (en) * 2008-06-30 2011-12-06 3M Innovative Properties Company Hydrofluoroacetal compounds and processes for their preparation and use
US20100263885A1 (en) * 2009-04-21 2010-10-21 3M Innovative Properties Company Protection systems and methods for electronic devices
US9010318B2 (en) 2009-09-04 2015-04-21 Wisconsin Alumni Research Foundation Extended-range heat transfer fluid using variable composition
US8323524B2 (en) 2009-10-01 2012-12-04 3M Innovative Properties Company Apparatus including hydrofluoroether with high temperature stability and uses thereof
US8193393B2 (en) * 2010-03-26 2012-06-05 3M Innovative Properties Company Fluoroether diketones for high temperature heat transfer
US8535559B2 (en) * 2010-03-26 2013-09-17 3M Innovative Properties Company Nitrogen-containing fluoroketones for high temperature heat transfer
CN103596915B (zh) 2011-06-10 2016-08-24 3M创新有限公司 部分氟化酮及其制备和使用方法
DE102012221923A1 (de) * 2012-11-29 2014-06-05 Carl Zeiss Smt Gmbh Kühlsystem für zumindest eine Systemkomponente eines optischen Systems für EUV-Anwendungen sowie derartige Systemkomponente und derartiges optisches System
JP6514695B2 (ja) 2013-07-25 2019-05-15 スリーエム イノベイティブ プロパティズ カンパニー 窒素含有ハイドロフルオロエーテル及びその作製方法
EP3169745B1 (de) * 2014-07-16 2020-04-29 3M Innovative Properties Company Hydrofluoretherolefine und verfahren zur verwendung davon
CN105457575B (zh) * 2014-09-12 2017-06-06 张宝权 氯化物成品质量控制工艺
WO2016064585A1 (en) 2014-10-24 2016-04-28 3M Innovative Properties Company Segregated fluorinated esters
EP3601470B1 (de) 2017-03-21 2024-04-24 3M Innovative Properties Company Ein verfahren zur selektiven herstellung von hfp-trimer
FR3083800B1 (fr) * 2018-07-13 2020-12-25 Total Marketing Services Composition refroidissante et ignifugeante pour systeme de propulsion d'un vehicule electrique ou hybride
FR3094744B1 (fr) * 2019-04-03 2021-12-10 Safran Nacelles Fluide caloporteur pour système de refroidissement de turboréacteur pour aéronef

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU668534B2 (en) * 1991-12-03 1996-05-09 United States Environmental Protection Agency Refrigerant compositions and processes for using same
DE4305239A1 (de) 1993-02-20 1994-08-25 Hoechst Ag Verwendung von weitgehend fluorierten Verbindungen als Wärmeträger
CA2129380A1 (en) * 1993-08-11 1995-02-12 Kenichi Sanechika Lubricant oil composition comprising a fluorine-containing aromatic compound and an alkyl- or alkyl derivative-substituted aromatic compound, and a refrigerant composition containing the same
US5737923A (en) * 1995-10-17 1998-04-14 Marlow Industries, Inc. Thermoelectric device with evaporating/condensing heat exchanger
DE69611930T3 (de) * 1995-10-20 2010-05-20 Minnesota Mining And Mfg. Co., Saint Paul Hydrofluorether als tieftemperaturkühlmittel
US6023002A (en) 1998-01-26 2000-02-08 3M Innovative Properties Company Process for preparing hydrofluoroethers

Also Published As

Publication number Publication date
EP1261676A1 (de) 2002-12-04
AU7741500A (en) 2001-04-23
WO2001027217A1 (en) 2001-04-19
EP1261676B1 (de) 2005-07-06
KR100669264B1 (ko) 2007-01-17
JP2003526906A (ja) 2003-09-09
DE60021212T2 (de) 2006-05-18
KR20020042859A (ko) 2002-06-07
US6374907B1 (en) 2002-04-23

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