DE59702612D1 - Ventilanordnung - Google Patents

Ventilanordnung

Info

Publication number
DE59702612D1
DE59702612D1 DE59702612T DE59702612T DE59702612D1 DE 59702612 D1 DE59702612 D1 DE 59702612D1 DE 59702612 T DE59702612 T DE 59702612T DE 59702612 T DE59702612 T DE 59702612T DE 59702612 D1 DE59702612 D1 DE 59702612D1
Authority
DE
Germany
Prior art keywords
valve arrangement
valve
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59702612T
Other languages
English (en)
Inventor
Heinz-Werner Etzkorn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ETZKORN, HEINZ-WERNER, DR., 45257 ESSEN, DE
Original Assignee
GASWAERME INST EV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GASWAERME INST EV filed Critical GASWAERME INST EV
Application granted granted Critical
Publication of DE59702612D1 publication Critical patent/DE59702612D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Magnetically Actuated Valves (AREA)
DE59702612T 1996-08-06 1997-08-02 Ventilanordnung Expired - Lifetime DE59702612D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19631693A DE19631693A1 (de) 1996-08-06 1996-08-06 Ventilanordnung
PCT/EP1997/004223 WO1998005871A1 (de) 1996-08-06 1997-08-02 Ventilanordnung

Publications (1)

Publication Number Publication Date
DE59702612D1 true DE59702612D1 (de) 2000-12-14

Family

ID=7801907

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19631693A Withdrawn DE19631693A1 (de) 1996-08-06 1996-08-06 Ventilanordnung
DE59702612T Expired - Lifetime DE59702612D1 (de) 1996-08-06 1997-08-02 Ventilanordnung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19631693A Withdrawn DE19631693A1 (de) 1996-08-06 1996-08-06 Ventilanordnung

Country Status (3)

Country Link
EP (1) EP0916028B1 (de)
DE (2) DE19631693A1 (de)
WO (1) WO1998005871A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10162983B4 (de) * 2001-12-20 2010-07-08 Qimonda Ag Kontaktfederanordnung zur elektrischen Kontaktierung eines Halbleiterwafers zu Testzwecken sowie Verfahren zu deren Herstellung
KR100512185B1 (ko) * 2003-07-07 2005-09-05 엘지전자 주식회사 유량 제어 밸브

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5065978A (en) * 1988-04-27 1991-11-19 Dragerwerk Aktiengesellschaft Valve arrangement of microstructured components
DE3914031C2 (de) * 1989-04-28 1993-10-28 Deutsche Aerospace Mikromechanischer Aktuator
DE3917423C1 (de) * 1989-05-29 1990-05-31 Buerkert Gmbh & Co Werk Ingelfingen, 7118 Ingelfingen, De
DE4101575A1 (de) * 1991-01-21 1992-07-23 Bosch Gmbh Robert Mikroventil
DE4221089A1 (de) * 1992-06-26 1994-01-05 Bosch Gmbh Robert Mikroventil
DE4222660C2 (de) * 1992-07-10 1996-03-21 Kernforschungsz Karlsruhe Verfahren zur Herstellung eines Mikroventils
US5417235A (en) * 1993-07-28 1995-05-23 Regents Of The University Of Michigan Integrated microvalve structures with monolithic microflow controller
JPH09505130A (ja) * 1993-09-24 1997-05-20 ローズマウント アナリティカル インコーポレイテッド ミクロ機械加工された弁装置
US5640995A (en) * 1995-03-14 1997-06-24 Baxter International Inc. Electrofluidic standard module and custom circuit board assembly

Also Published As

Publication number Publication date
EP0916028A1 (de) 1999-05-19
DE19631693A1 (de) 1998-02-12
EP0916028B1 (de) 2000-11-08
WO1998005871A1 (de) 1998-02-12

Similar Documents

Publication Publication Date Title
DE69423523T2 (de) Ventilanordnung
DE59504713D1 (de) Ventilanordnung
DE19580519T1 (de) Ventilanordnung
DE59502925D1 (de) Ventilanordnung
DE69526520D1 (de) Ventilanordnung
DE69504962T2 (de) Ventilanordnung
DE69518874T2 (de) Ventilanordnung
ID16086A (id) Katup peredam
DE59504855D1 (de) Ventilanordnung
DE59808091D1 (de) Ventilanordnung
DE59801426D1 (de) Ventilanordnung
DE59707233D1 (de) Ventileinheit
DE59505682D1 (de) Ventilanordnung
FI103297B (fi) Venttiili
DE59706200D1 (de) Wegeventil
DE59711796D1 (de) Mehrwegeventil
DE59800655D1 (de) Ventilanordnung
DE69704122D1 (de) Ventilanordnung
FI973140A0 (fi) Venttiili
DE9415118U1 (de) Ventilanordnung
DE59702612D1 (de) Ventilanordnung
DE29603869U1 (de) Ventilanordnung
FI964068A0 (fi) Venttiili
DE19781576T1 (de) Ventileinheit
FR2747450B1 (fr) Clapet de retenue

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8327 Change in the person/name/address of the patent owner

Owner name: ETZKORN, HEINZ-WERNER, DR., 45257 ESSEN, DE