DE4396523T1 - Halbleiter-Drucksensor - Google Patents

Halbleiter-Drucksensor

Info

Publication number
DE4396523T1
DE4396523T1 DE4396523T DE4396523T DE4396523T1 DE 4396523 T1 DE4396523 T1 DE 4396523T1 DE 4396523 T DE4396523 T DE 4396523T DE 4396523 T DE4396523 T DE 4396523T DE 4396523 T1 DE4396523 T1 DE 4396523T1
Authority
DE
Germany
Prior art keywords
pressure sensor
semiconductor pressure
semiconductor
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE4396523T
Other languages
English (en)
Other versions
DE4396523C2 (de
Inventor
Yasuhiro Yamashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of DE4396523T1 publication Critical patent/DE4396523T1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G01L19/143—Two part housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
DE4396523T 1992-12-11 1993-12-06 Halbleiter-Drucksensor Pending DE4396523T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP33141492 1992-12-11
PCT/JP1993/001771 WO1994014042A1 (en) 1992-12-11 1993-12-06 Semiconductor type pressure sensor

Publications (1)

Publication Number Publication Date
DE4396523T1 true DE4396523T1 (de) 1997-07-31

Family

ID=18243416

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4396523T Pending DE4396523T1 (de) 1992-12-11 1993-12-06 Halbleiter-Drucksensor
DE4396523A Expired - Fee Related DE4396523C2 (de) 1992-12-11 1993-12-06 Halbleiter-Drucksensor

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE4396523A Expired - Fee Related DE4396523C2 (de) 1992-12-11 1993-12-06 Halbleiter-Drucksensor

Country Status (3)

Country Link
US (1) US5565629A (de)
DE (2) DE4396523T1 (de)
WO (1) WO1994014042A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004132726A (ja) * 2002-10-08 2004-04-30 Denso Corp 圧力センサ
JP2015169594A (ja) * 2014-03-10 2015-09-28 横河電機株式会社 ダイアフラム
US10739224B2 (en) * 2018-09-26 2020-08-11 Honeywell International Inc. Systems and methods to secure flame spread restriction of individual sub-modules in an ultrasonic gas leak detector

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2968943A (en) * 1956-10-29 1961-01-24 Statham Instrument Inc Transducer
JPS5543819A (en) * 1978-09-22 1980-03-27 Hitachi Ltd Pressure detecting equipment
JPS5733334A (en) * 1980-08-05 1982-02-23 Yokogawa Hokushin Electric Corp Construction of diaphragm in differential pressure and pressure transmitter
JPH0665974B2 (ja) * 1982-03-31 1994-08-24 株式会社日立製作所 圧力センサユニツトの製造方法
JPS6049441A (ja) * 1983-08-29 1985-03-18 Fuji Xerox Co Ltd デ−タ処理装置
JPS60104745A (ja) * 1983-11-12 1985-06-10 Mitsubishi Motors Corp デイ−ゼルエンジンの制御装置
JPS60104745U (ja) * 1983-12-22 1985-07-17 横河電機株式会社 受圧カプセル
US4527434A (en) * 1984-05-10 1985-07-09 The Babcock & Wilcox Company Cylindrical force transducer beam
JPS61203337A (ja) * 1985-03-07 1986-09-09 ラヴアニヤ−ニ　ダニエラ 容器
JPS61203337U (de) * 1985-06-11 1986-12-20
JPS628470A (ja) * 1985-07-04 1987-01-16 Meidensha Electric Mfg Co Ltd 静止型亜鉛−臭素電池の反転方法
JPH0824197B2 (ja) * 1986-08-08 1996-03-06 日本電装株式会社 圧力測定器
US4768382A (en) * 1987-04-23 1988-09-06 Honeywell Inc. Method of producing a uniform fluid-tight seal between a thin, flexible member and a support and an apparatus utilizing the same
JPH0820326B2 (ja) * 1988-03-29 1996-03-04 日本電装株式会社 半導体式圧力センサ
US5000047A (en) * 1988-03-29 1991-03-19 Nippondenso Co., Ltd. Pressure sensor
JP2764993B2 (ja) * 1989-02-07 1998-06-11 株式会社デンソー 半導体圧力検出装置
DE8915981U1 (de) * 1989-02-23 1992-10-01 Kristal Instrumente AG, Winterthur Plattenförmiges Sensorelement sowie damit versehener Druck-, Kraft- oder Beschleunigungsaufnehmer
JP2524236B2 (ja) * 1990-01-30 1996-08-14 タツタ電線株式会社 圧力検出装置
JP2503290B2 (ja) * 1990-05-21 1996-06-05 株式会社日立製作所 半導体圧力・差圧測定ダイヤフラム
KR930011091B1 (ko) * 1990-06-08 1993-11-20 미쯔비시 덴끼 가부시끼가이샤 압력 센서
JP2864716B2 (ja) * 1990-10-30 1999-03-08 株式会社デンソー 半導体圧力検出装置
US5095755A (en) * 1990-11-01 1992-03-17 Rosemount Inc. Isolator for pressure transmitter
JPH04204130A (ja) * 1990-11-30 1992-07-24 Yokogawa Electric Corp 圧力測定装置
US5161415A (en) * 1991-04-11 1992-11-10 Mitsubishi Denki K.K. Pressure sensor

Also Published As

Publication number Publication date
DE4396523C2 (de) 1998-04-09
US5565629A (en) 1996-10-15
WO1994014042A1 (en) 1994-06-23

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