DE3885568D1 - Flacher Pendelbeschleunigungsaufnehmer. - Google Patents
Flacher Pendelbeschleunigungsaufnehmer.Info
- Publication number
- DE3885568D1 DE3885568D1 DE88402429T DE3885568T DE3885568D1 DE 3885568 D1 DE3885568 D1 DE 3885568D1 DE 88402429 T DE88402429 T DE 88402429T DE 3885568 T DE3885568 T DE 3885568T DE 3885568 D1 DE3885568 D1 DE 3885568D1
- Authority
- DE
- Germany
- Prior art keywords
- flat pendulum
- pendulum accelerometer
- accelerometer
- flat
- pendulum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8713619A FR2621394B2 (fr) | 1984-03-06 | 1987-10-02 | Capteur accelerometrique a structure pendulaire plane |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3885568D1 true DE3885568D1 (de) | 1993-12-16 |
DE3885568T2 DE3885568T2 (de) | 1994-03-17 |
Family
ID=9355446
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE88402429T Expired - Fee Related DE3885568T2 (de) | 1987-10-02 | 1988-09-27 | Flacher Pendelbeschleunigungsaufnehmer. |
DE198888402429T Pending DE311484T1 (de) | 1987-10-02 | 1988-09-27 | Flacher pendelbeschleunigungsaufnehmer. |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE198888402429T Pending DE311484T1 (de) | 1987-10-02 | 1988-09-27 | Flacher pendelbeschleunigungsaufnehmer. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4920800A (de) |
EP (1) | EP0311484B1 (de) |
JP (1) | JP2680068B2 (de) |
DE (2) | DE3885568T2 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4022464C2 (de) * | 1990-07-14 | 2000-12-28 | Bosch Gmbh Robert | Beschleunigungssensor |
US5233213A (en) * | 1990-07-14 | 1993-08-03 | Robert Bosch Gmbh | Silicon-mass angular acceleration sensor |
US5417111A (en) * | 1990-08-17 | 1995-05-23 | Analog Devices, Inc. | Monolithic chip containing integrated circuitry and suspended microstructure |
WO1992003740A1 (en) * | 1990-08-17 | 1992-03-05 | Analog Devices, Inc. | Monolithic accelerometer |
US5314572A (en) * | 1990-08-17 | 1994-05-24 | Analog Devices, Inc. | Method for fabricating microstructures |
US5326726A (en) * | 1990-08-17 | 1994-07-05 | Analog Devices, Inc. | Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure |
US5763782A (en) * | 1992-03-16 | 1998-06-09 | British Technology Group Limited | Micromechanical sensor |
DE19503009C2 (de) * | 1995-01-31 | 1998-09-10 | Hs Tech & Design | Beschleunigungssensor |
FR2910635B1 (fr) * | 2006-12-20 | 2009-03-06 | Thales Sa | Lame de guidage de masse d'epreuve et systeme electromecanique micro-usine comportant une telle lame |
US8793926B2 (en) | 2011-04-22 | 2014-08-05 | Universal Select-A-Catch, Llc | Foot snare device |
RU2492490C1 (ru) * | 2011-12-21 | 2013-09-10 | Открытое акционерное общество "Московский радиозавод "Темп" | Чувствительный элемент микромеханического акселерометра |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE667507C (de) * | 1936-11-27 | 1938-11-12 | Versuchsanstalt Fuer Luftfahrt | Vorrichtung zur Messung von Laengsbeschleunigungen |
US2702186A (en) * | 1947-07-07 | 1955-02-15 | Bell Telephone Labor Inc | Accelerometer |
US3636774A (en) * | 1969-08-25 | 1972-01-25 | Conrac Corp | Dual mass accelerometer with semiconductive transducer |
US4600934A (en) * | 1984-01-06 | 1986-07-15 | Harry E. Aine | Method of undercut anisotropic etching of semiconductor material |
FR2560997B1 (fr) * | 1984-03-06 | 1987-06-05 | Sfena | Capteur accelerometrique a structure pendulaire plane |
FR2580389B2 (fr) * | 1985-04-16 | 1989-03-03 | Sfena | Accelerometre micro-usine a rappel electrostatique |
-
1988
- 1988-09-27 DE DE88402429T patent/DE3885568T2/de not_active Expired - Fee Related
- 1988-09-27 EP EP88402429A patent/EP0311484B1/de not_active Expired - Lifetime
- 1988-09-27 DE DE198888402429T patent/DE311484T1/de active Pending
- 1988-09-30 US US07/251,606 patent/US4920800A/en not_active Expired - Lifetime
- 1988-10-03 JP JP63249713A patent/JP2680068B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH01163669A (ja) | 1989-06-27 |
EP0311484A2 (de) | 1989-04-12 |
DE311484T1 (de) | 1990-04-12 |
DE3885568T2 (de) | 1994-03-17 |
JP2680068B2 (ja) | 1997-11-19 |
EP0311484A3 (de) | 1992-01-22 |
EP0311484B1 (de) | 1993-11-10 |
US4920800A (en) | 1990-05-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |