DE3866041D1 - Pendelbeschleunigungsmesser mit kraftausgleich. - Google Patents
Pendelbeschleunigungsmesser mit kraftausgleich.Info
- Publication number
- DE3866041D1 DE3866041D1 DE8888401637T DE3866041T DE3866041D1 DE 3866041 D1 DE3866041 D1 DE 3866041D1 DE 8888401637 T DE8888401637 T DE 8888401637T DE 3866041 T DE3866041 T DE 3866041T DE 3866041 D1 DE3866041 D1 DE 3866041D1
- Authority
- DE
- Germany
- Prior art keywords
- force balancing
- pendulum accelerometer
- pendulum
- accelerometer
- balancing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8709229A FR2617607B1 (fr) | 1987-06-30 | 1987-06-30 | Accelerometre pendulaire a reequilibrage et procede de fabrication d'un tel accelerometre |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3866041D1 true DE3866041D1 (de) | 1991-12-12 |
Family
ID=9352687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8888401637T Expired - Lifetime DE3866041D1 (de) | 1987-06-30 | 1988-06-27 | Pendelbeschleunigungsmesser mit kraftausgleich. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5054320A (de) |
EP (1) | EP0299825B1 (de) |
JP (1) | JPS6429775A (de) |
DE (1) | DE3866041D1 (de) |
FR (1) | FR2617607B1 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5417111A (en) * | 1990-08-17 | 1995-05-23 | Analog Devices, Inc. | Monolithic chip containing integrated circuitry and suspended microstructure |
US5620931A (en) * | 1990-08-17 | 1997-04-15 | Analog Devices, Inc. | Methods for fabricating monolithic device containing circuitry and suspended microstructure |
JPH0644008B2 (ja) * | 1990-08-17 | 1994-06-08 | アナログ・ディバイセス・インコーポレーテッド | モノリシック加速度計 |
EP0537347B1 (de) * | 1991-03-30 | 1997-01-22 | OKADA, Kazuhiro | Beschleunigungssensor mit Selbsttest |
US5343766A (en) * | 1992-02-25 | 1994-09-06 | C & J Industries, Inc. | Switched capacitor transducer |
FR2700614B1 (fr) * | 1993-01-19 | 1995-04-14 | Sextant Avionique | Accéléromètre capacitif à circuit de correction de l'effet perturbateur de capacités parasites. |
US5430342A (en) | 1993-04-27 | 1995-07-04 | Watson Industries, Inc. | Single bar type vibrating element angular rate sensor system |
US5497660A (en) * | 1994-05-31 | 1996-03-12 | Litton Systems, Inc. | Digital force balanced instrument |
US5646348A (en) | 1994-08-29 | 1997-07-08 | The Charles Stark Draper Laboratory, Inc. | Micromechanical sensor with a guard band electrode and fabrication technique therefor |
US5581035A (en) | 1994-08-29 | 1996-12-03 | The Charles Stark Draper Laboratory, Inc. | Micromechanical sensor with a guard band electrode |
US5473946A (en) * | 1994-09-09 | 1995-12-12 | Litton Systems, Inc. | Accelerometer using pulse-on-demand control |
US5659195A (en) * | 1995-06-08 | 1997-08-19 | The Regents Of The University Of California | CMOS integrated microsensor with a precision measurement circuit |
DE19541388A1 (de) * | 1995-11-07 | 1997-05-15 | Telefunken Microelectron | Mikromechanischer Beschleunigungssensor |
US5659262A (en) * | 1996-03-15 | 1997-08-19 | Analog Devices, Inc. | Offset trimming for a micromachined sensing device |
US6386032B1 (en) | 1999-08-26 | 2002-05-14 | Analog Devices Imi, Inc. | Micro-machined accelerometer with improved transfer characteristics |
US6868726B2 (en) * | 2000-01-20 | 2005-03-22 | Analog Devices Imi, Inc. | Position sensing with improved linearity |
US7578190B2 (en) * | 2007-08-03 | 2009-08-25 | Freescale Semiconductor, Inc. | Symmetrical differential capacitive sensor and method of making same |
US8079262B2 (en) * | 2007-10-26 | 2011-12-20 | Rosemount Aerospace Inc. | Pendulous accelerometer with balanced gas damping |
US8850889B2 (en) | 2008-11-25 | 2014-10-07 | Panasonic Corporation | Acceleration sensor |
JP4965547B2 (ja) * | 2008-11-25 | 2012-07-04 | パナソニック株式会社 | 加速度センサ |
JP4965546B2 (ja) * | 2008-11-25 | 2012-07-04 | パナソニック株式会社 | 加速度センサ |
WO2011064642A2 (ja) | 2009-11-24 | 2011-06-03 | パナソニック電工株式会社 | 加速度センサ |
JP5943192B2 (ja) * | 2012-04-10 | 2016-06-29 | セイコーエプソン株式会社 | 物理量センサーおよびその製造方法、並びに電子機器 |
FR3002324B1 (fr) * | 2013-02-19 | 2016-01-22 | Sagem Defense Securite | Capteur a accelerometre pendulaire electrostatique et procede de commande d'un tel capteur |
JP7225817B2 (ja) * | 2019-01-17 | 2023-02-21 | セイコーエプソン株式会社 | 角速度センサー、慣性計測装置、電子機器および移動体 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3913406A (en) * | 1973-08-02 | 1975-10-21 | Us Army | Digital pulse rebalance accelerometer |
FR2454103A1 (fr) * | 1979-04-11 | 1980-11-07 | Sagem | Perfectionnements aux accelerometres pendulaires asservis |
US4353254A (en) * | 1980-12-18 | 1982-10-12 | The Singer Company | Control circuit for electro-static accelerometer |
GB2096326B (en) * | 1981-04-06 | 1984-08-15 | Secr Defence | Force-balance pendulum accelerometers |
CH642461A5 (fr) * | 1981-07-02 | 1984-04-13 | Centre Electron Horloger | Accelerometre. |
FR2544865B1 (fr) * | 1983-04-21 | 1985-10-04 | Onera (Off Nat Aerospatiale) | Accelerometres a suspension electrostatique |
US4600934A (en) * | 1984-01-06 | 1986-07-15 | Harry E. Aine | Method of undercut anisotropic etching of semiconductor material |
US4699006A (en) * | 1984-03-19 | 1987-10-13 | The Charles Stark Draper Laboratory, Inc. | Vibratory digital integrating accelerometer |
US4638669A (en) * | 1985-05-07 | 1987-01-27 | Massachusetts Institute Of Technology | Quantum tunneling cantilever accelerometer |
US4679434A (en) * | 1985-07-25 | 1987-07-14 | Litton Systems, Inc. | Integrated force balanced accelerometer |
US4736629A (en) * | 1985-12-20 | 1988-04-12 | Silicon Designs, Inc. | Micro-miniature accelerometer |
-
1987
- 1987-06-30 FR FR8709229A patent/FR2617607B1/fr not_active Expired
-
1988
- 1988-06-27 DE DE8888401637T patent/DE3866041D1/de not_active Expired - Lifetime
- 1988-06-27 EP EP88401637A patent/EP0299825B1/de not_active Expired - Lifetime
- 1988-06-30 JP JP63164083A patent/JPS6429775A/ja active Pending
-
1990
- 1990-03-28 US US07/503,123 patent/US5054320A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPS6429775A (en) | 1989-01-31 |
EP0299825B1 (de) | 1991-11-06 |
US5054320A (en) | 1991-10-08 |
EP0299825A3 (en) | 1989-02-22 |
FR2617607B1 (fr) | 1989-12-01 |
EP0299825A2 (de) | 1989-01-18 |
FR2617607A1 (fr) | 1989-01-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3866041D1 (de) | Pendelbeschleunigungsmesser mit kraftausgleich. | |
DE3867748D1 (de) | Beschleunigungsmesser. | |
DE68907981D1 (de) | Beschleunigungsmesser. | |
NO862550D0 (no) | Akselerometer. | |
DE3880116D1 (de) | Stossdaempfer. | |
NO880983L (no) | Loggesonde. | |
DE3773365D1 (de) | Daempfer mit lastausgleich. | |
DE69012429D1 (de) | Beschleunigungsmessaufnehmer. | |
NO891105D0 (no) | Akselerometer. | |
DE3870194D1 (de) | Fluidgedaempfter beschleunigungssensor. | |
FR2595142B1 (fr) | Accelerometre opto-electronique | |
DE3781472D1 (de) | Beschleunigungsmesser. | |
DE3877622D1 (de) | Inertialsensor. | |
NO880739L (no) | Akselerometer. | |
DE3764442D1 (de) | Beschleunigungssensor. | |
DK326089A (da) | Accelerometer | |
DE68905913D1 (de) | Beschleunigungsmessaufnehmer. | |
DE3885568D1 (de) | Flacher Pendelbeschleunigungsaufnehmer. | |
DE3878182D1 (de) | Schwingkreisel. | |
DE3870810D1 (de) | Drehzahlmesser. | |
DE3765028D1 (de) | Beschleunigungssensor. | |
DE68917700D1 (de) | Beschleunigungssensor. | |
NO891106D0 (no) | Akselerometer. | |
FR2637689B1 (fr) | Accelerometre | |
DE68904148D1 (de) | Beschleunigungsmessaufnehmer. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |