DE3883707D1 - Membranabdeckung. - Google Patents

Membranabdeckung.

Info

Publication number: DE3883707D1
Authority: DE; Germany
Prior art keywords: membrane cover; membrane; cover
Prior art date: 1987-11-05
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE88310357T

Other languages

English (en)

Other versions

DE3883707T2 (de

Inventor

Hiroaki Nakagawa

Hitomi Matsuzaki

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Mitsui Chemicals Inc

Original Assignee

Mitsui Petrochemical Industries Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-11-05

Filing date

1988-11-03

Publication date

1993-10-07

1988-11-03 Application filed by Mitsui Petrochemical Industries Ltd filed Critical Mitsui Petrochemical Industries Ltd

1993-10-07 Publication of DE3883707D1 publication Critical patent/DE3883707D1/de

1993-12-16 Application granted granted Critical

1993-12-16 Publication of DE3883707T2 publication Critical patent/DE3883707T2/de

2008-11-04 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

Classifications

- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/3154—Of fluorinated addition polymer from unsaturated monomers
- Y10T428/31544—Addition polymer is perhalogenated
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31855—Of addition polymer from unsaturated monomers
- Y10T428/3188—Next to cellulosic
- Y10T428/31884—Regenerated or modified cellulose
- Y10T428/31888—Addition polymer of hydrocarbon[s] only

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Preparing Plates And Mask In Photomechanical Process (AREA)

DE88310357T 1987-11-05 1988-11-03 Membranabdeckung. Expired - Fee Related DE3883707T2 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP27962787A JP2535971B2 (ja)	1987-11-05	1987-11-05	ペリクル
SG48394A SG48394G (en)	1987-11-05	1994-04-09	Pellicle

Publications (2)

Publication Number	Publication Date
DE3883707D1 true DE3883707D1 (de)	1993-10-07
DE3883707T2 DE3883707T2 (de)	1993-12-16

Family

ID=26553411

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE88310357T Expired - Fee Related DE3883707T2 (de)	1987-11-05	1988-11-03	Membranabdeckung.

Country Status (6)

Country	Link
US (1)	US4996106A (de)
EP (1)	EP0315450B1 (de)
JP (1)	JP2535971B2 (de)
DE (1)	DE3883707T2 (de)
HK (1)	HK84494A (de)
SG (1)	SG48394G (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5573930A (en) *	1985-02-05	1996-11-12	Cetus Oncology Corporation	DNA encoding various forms of colony stimulating factor-1
US6146851A (en) *	1985-02-05	2000-11-14	Chiron Corporation	DNA encoding NV2 (long form) and carboxy truncated fragments thereof
US6156300A (en) *	1985-02-05	2000-12-05	Chiron Corporation	Point mutants of N∇2 CSF-1 and carboxy truncated fragments thereof
US5339197A (en) *	1989-03-31	1994-08-16	Yen Yung Tsai	Optical pellicle with controlled transmission peaking
US4970099A (en) *	1989-05-19	1990-11-13	E. I. Du Pont De Nemours And Company	Perfluoropolymer coated pellicles
JP2714450B2 (ja) *	1989-08-10	1998-02-16	ダイセル化学工業株式会社	防塵膜
KR950002949B1 (ko) *	1990-10-16	1995-03-28	미쓰이세끼유 가가꾸고오교오 가부시끼가이샤	고광선 투과성 방진막, 그 제조방법 및 방진체
JP3037745B2 (ja) *	1990-11-29	2000-05-08	三井化学株式会社	ペリクル構造体
DE69227092T2 (de) *	1991-05-17	1999-05-20	Du Pont Photomasks, Inc., Round Rocks, Tex.	Druckentlastende membranabdeckung
JP2938636B2 (ja) *	1991-09-26	1999-08-23	信越化学工業株式会社	リソグラフィ−用ペリクル
JP2945201B2 (ja) *	1992-01-31	1999-09-06	信越化学工業株式会社	ペリクル
US5422704A (en) *	1992-07-13	1995-06-06	Intel Corporation	Pellicle frame
KR970003593B1 (en) *	1992-09-03	1997-03-20	Samsung Electronics Co Ltd	Projection exposure method and device using mask
JP3027073B2 (ja) *	1993-07-28	2000-03-27	信越化学工業株式会社	ペリクル
US5741576A (en) *	1995-09-06	1998-04-21	Inko Industrial Corporation	Optical pellicle with controlled transmission peaks and anti-reflective coatings
TW337002B (en) *	1996-11-19	1998-07-21	Mitsui Kagaku Kk	Pellicle
JP4011687B2 (ja) *	1997-10-01	2007-11-21	キヤノン株式会社	マスク構造体、該マスク構造体を用いた露光装置、該マスク構造体を用いた半導体デバイス製造方法
JP3434731B2 (ja) *	1999-06-09	2003-08-11	Ｎｅｃエレクトロニクス株式会社	ペリクル及びそのケース
US6524754B2 (en)	2001-01-22	2003-02-25	Photronics, Inc.	Fused silica pellicle
US7351503B2 (en) *	2001-01-22	2008-04-01	Photronics, Inc.	Fused silica pellicle in intimate contact with the surface of a photomask
KR20100049445A (ko) *	2008-11-03	2010-05-12	(주)엠에스티테크놀로지	리소그래피용 펠리클
WO2014020912A1 (ja) *	2012-08-02	2014-02-06	三井化学株式会社	ペリクル
EP3472887A1 (de) *	2016-06-20	2019-04-24	Solvay SA	Fluorpolymerfolie

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4470508A (en) *	1983-08-19	1984-09-11	Micro Lithography, Inc.	Dustfree packaging container and method
JPS6057841A (ja) *	1983-09-09	1985-04-03	Hitachi Ltd	異物固定方法及び装置
JPS60237450A (ja) *	1984-05-11	1985-11-26	Asahi Chem Ind Co Ltd	非反射性フオトマスク・レチクル用防塵カバ−体及びその製造方法
US4833051A (en) *	1984-08-20	1989-05-23	Nippon Kogaku K.K.	Protective device for photographic masks
EP0252574A2 (de) *	1986-07-07	1988-01-13	YEN, Yung-Tsai	Verfahren und Vorrichtung zur Herabsetzung von Staubpartikeln auf Photomasken
JP2642637B2 (ja) *	1987-08-18	1997-08-20	三井石油化学工業株式会社	防塵膜

1987
- 1987-11-05 JP JP27962787A patent/JP2535971B2/ja not_active Expired - Lifetime
1988
- 1988-11-03 EP EP88310357A patent/EP0315450B1/de not_active Expired - Lifetime
- 1988-11-03 DE DE88310357T patent/DE3883707T2/de not_active Expired - Fee Related
- 1988-11-04 US US07/267,380 patent/US4996106A/en not_active Expired - Fee Related
1994
- 1994-04-09 SG SG48394A patent/SG48394G/en unknown
- 1994-08-18 HK HK84494A patent/HK84494A/xx not_active IP Right Cessation

Also Published As

Publication number	Publication date
HK84494A (en)	1994-08-26
DE3883707T2 (de)	1993-12-16
US4996106A (en)	1991-02-26
EP0315450B1 (de)	1993-09-01
EP0315450A2 (de)	1989-05-10
SG48394G (en)	1995-03-17
EP0315450A3 (en)	1989-11-15
JPH01120555A (ja)	1989-05-12
JP2535971B2 (ja)	1996-09-18

Legal Events

Date	Code	Title	Description
1994-09-29	8364	No opposition during term of opposition
1998-12-10	8327	Change in the person/name/address of the patent owner	Owner name: MITSUI CHEMICALS, INC., TOKIO/TOKYO, JP
2002-11-07	8339	Ceased/non-payment of the annual fee

Publication	Publication Date	Title
NO893568L (no)	1990-04-30	Siloksanpodede membraner.
NO874403D0 (no)	1987-10-22	Lokk.
FI882845A (fi)	1988-12-16	Tvaerriktad glansregulator.
DE3883707D1 (de)	1993-10-07	Membranabdeckung.
FI891296A (fi)	1989-03-20	Kompatibelt bredskaermstelevisionssystem.
FI881655A (fi)	1988-10-11	Tvaettmedelssammansaettning.
FI875446A0 (fi)	1987-12-11	Sicksack-vikanordning.
DE3878748D1 (de)	1993-04-08	Geraeuschmindernde membrane.
FI880462A0 (fi)	1988-02-02	Kraftaggregat.
FI880274A (fi)	1988-07-25	Poroest skiktsilikat/ natriumsulfat-agglomerat.
DE3763368D1 (de)	1990-08-02	Zusammengesetzte membranen.
NO883418D0 (no)	1988-08-02	Biologisk dekkskive.
DK185887A (da)	1987-10-12	Miktoporoes hulfibermembran
NO871953D0 (no)	1987-05-12	Forbedringer vedr. roekeartikler.
DE3861543D1 (de)	1991-02-21	Knickstab-anordnung.
FI872246A0 (fi)	1987-05-21	Betongspruta.
FI883435A (fi)	1989-01-22	Styrsystem foer fluider under tryck.
FI871240A0 (fi)	1987-03-20	Maolfaergnyanseringsmaskin.
FI882885A0 (fi)	1988-06-16	Acylderivat.
IT209979Z2 (it)	1988-11-14	Coprimaterasso.
NO870114D0 (no)	1987-01-12	Pessar.
IT8732833V0 (it)	1987-10-27	M.s. antifra
FI874573A (fi)	1989-04-17	Foervaringssystem foer slalomskidor m.m.
ES1003988Y (es)	1990-05-01	Estropajo-bayeta mejorado.
FI875252A0 (fi)	1987-11-27	Doserare foer tandpetare.