DE3880003D1 - Halbleiteranordnung mit einer leiterschicht unter dem kontaktfleck. - Google Patents

Halbleiteranordnung mit einer leiterschicht unter dem kontaktfleck.

Info

Publication number
DE3880003D1
DE3880003D1 DE8888107501T DE3880003T DE3880003D1 DE 3880003 D1 DE3880003 D1 DE 3880003D1 DE 8888107501 T DE8888107501 T DE 8888107501T DE 3880003 T DE3880003 T DE 3880003T DE 3880003 D1 DE3880003 D1 DE 3880003D1
Authority
DE
Germany
Prior art keywords
layer
contact point
semiconductor arrangement
under
layer under
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888107501T
Other languages
English (en)
Other versions
DE3880003T2 (de
Inventor
Hiroshi Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE3880003D1 publication Critical patent/DE3880003D1/de
Publication of DE3880003T2 publication Critical patent/DE3880003T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
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    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5226Via connections in a multilevel interconnection structure
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    • H01L24/02Bonding areas ; Manufacturing methods related thereto
    • H01L24/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
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    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/0212Auxiliary members for bonding areas, e.g. spacers
    • H01L2224/02122Auxiliary members for bonding areas, e.g. spacers being formed on the semiconductor or solid-state body
    • H01L2224/02163Auxiliary members for bonding areas, e.g. spacers being formed on the semiconductor or solid-state body on the bonding area
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    • H01L2224/04042Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
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    • H01L2224/48599Principal constituent of the connecting portion of the wire connector being Gold (Au)
    • H01L2224/486Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/48617Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950 °C
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    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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    • H01L2924/049Nitrides composed of metals from groups of the periodic table
    • H01L2924/050414th Group
    • H01L2924/05042Si3N4
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    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
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    • H01L2924/1305Bipolar Junction Transistor [BJT]
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    • H01L2924/301Electrical effects
    • H01L2924/30105Capacitance

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Wire Bonding (AREA)
  • Bipolar Transistors (AREA)
  • Local Oxidation Of Silicon (AREA)
DE8888107501T 1987-05-15 1988-05-10 Halbleiteranordnung mit einer leiterschicht unter dem kontaktfleck. Expired - Fee Related DE3880003T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62116727A JPS63283040A (ja) 1987-05-15 1987-05-15 半導体装置

Publications (2)

Publication Number Publication Date
DE3880003D1 true DE3880003D1 (de) 1993-05-13
DE3880003T2 DE3880003T2 (de) 1993-09-16

Family

ID=14694302

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888107501T Expired - Fee Related DE3880003T2 (de) 1987-05-15 1988-05-10 Halbleiteranordnung mit einer leiterschicht unter dem kontaktfleck.

Country Status (4)

Country Link
US (1) US4984061A (de)
EP (1) EP0291014B1 (de)
JP (1) JPS63283040A (de)
DE (1) DE3880003T2 (de)

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US5281855A (en) * 1991-06-05 1994-01-25 Trovan Limited Integrated circuit device including means for facilitating connection of antenna lead wires to an integrated circuit die
US5223851A (en) * 1991-06-05 1993-06-29 Trovan Limited Apparatus for facilitating interconnection of antenna lead wires to an integrated circuit and encapsulating the assembly to form an improved miniature transponder device
US5149674A (en) * 1991-06-17 1992-09-22 Motorola, Inc. Method for making a planar multi-layer metal bonding pad
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US5309025A (en) * 1992-07-27 1994-05-03 Sgs-Thomson Microelectronics, Inc. Semiconductor bond pad structure and method
SE500523C2 (sv) * 1992-10-09 1994-07-11 Elsa Elektroniska Systems And Halvledarkomponent med minst en första och en andra komponentelektrod innefattande ett flertal på en halvledarbricka integrerade halvledarelement, som vart och ett innefattar minst en första och en andra elementelektrod på samma sida av halvledarbrickan, varid de första elementelektroderna är förbundna med den första komponentelektroden och de andra elementelektroderna är förbundna med den andra komponentelektroden.
JP2807396B2 (ja) * 1993-05-25 1998-10-08 ローム株式会社 半導体装置
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US5965903A (en) * 1995-10-30 1999-10-12 Lucent Technologies Inc. Device and method of manufacture for an integrated circuit having a BIST circuit and bond pads incorporated therein
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JPS63283040A (ja) 1988-11-18
JPH0546973B2 (de) 1993-07-15
EP0291014A3 (en) 1989-07-12
US4984061A (en) 1991-01-08
EP0291014A2 (de) 1988-11-17
DE3880003T2 (de) 1993-09-16
EP0291014B1 (de) 1993-04-07

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