DE3852759D1 - Verfahren zur bewertung glatter oberflächen. - Google Patents

Verfahren zur bewertung glatter oberflächen.

Info

Publication number
DE3852759D1
DE3852759D1 DE3852759T DE3852759T DE3852759D1 DE 3852759 D1 DE3852759 D1 DE 3852759D1 DE 3852759 T DE3852759 T DE 3852759T DE 3852759 T DE3852759 T DE 3852759T DE 3852759 D1 DE3852759 D1 DE 3852759D1
Authority
DE
Germany
Prior art keywords
smooth surfaces
term
smooth surface
image
evaluating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3852759T
Other languages
English (en)
Other versions
DE3852759T2 (de
Inventor
Stephen Hupp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Diffracto Ltd Canada
Original Assignee
Ashland Oil Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ashland Oil Inc filed Critical Ashland Oil Inc
Application granted granted Critical
Publication of DE3852759D1 publication Critical patent/DE3852759D1/de
Publication of DE3852759T2 publication Critical patent/DE3852759T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Magnetic Heads (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
DE3852759T 1988-01-29 1988-07-26 Verfahren zur bewertung glatter oberflächen. Expired - Fee Related DE3852759T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/150,136 US4853777A (en) 1987-07-07 1988-01-29 Method for evaluating smooth surfaces
PCT/US1988/002284 WO1989007235A1 (en) 1988-01-29 1988-07-26 Method for evaluating smooth surfaces

Publications (2)

Publication Number Publication Date
DE3852759D1 true DE3852759D1 (de) 1995-02-23
DE3852759T2 DE3852759T2 (de) 1995-05-18

Family

ID=22533258

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3852759T Expired - Fee Related DE3852759T2 (de) 1988-01-29 1988-07-26 Verfahren zur bewertung glatter oberflächen.

Country Status (8)

Country Link
US (1) US4853777A (de)
EP (1) EP0360838B1 (de)
JP (1) JPH02503035A (de)
AT (1) ATE117074T1 (de)
AU (1) AU2085488A (de)
DE (1) DE3852759T2 (de)
MX (1) MX169486B (de)
WO (1) WO1989007235A1 (de)

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DE3816392A1 (de) * 1988-05-13 1989-11-23 Ver Glaswerke Gmbh Verfahren zur bestimmung der optischen qualitaet von flachglas oder flachglasprodukten
FR2637189A1 (fr) * 1988-10-04 1990-04-06 Cgr Mev Systeme et procede de mesure et/ou de verification de la position d'un patient dans un equipement de radiotherapie
US4929846A (en) * 1988-10-05 1990-05-29 Ford Motor Company Surface quality analyzer apparatus and method
EP0405806B1 (de) * 1989-06-30 1994-05-04 Jaguar Cars Limited Verfahren und Vorrichtung zur Untersuchung von Oberflächenfehlern
US5153844A (en) * 1990-01-23 1992-10-06 E. I. Du Pont De Nemours And Company Method and apparatus for measuring surface flatness
US5122672A (en) * 1990-09-07 1992-06-16 Ford Motor Company Surface quality analyzer apparatus and method
US5155558A (en) * 1990-09-19 1992-10-13 E. I. Du Pont De Nemours And Company Method and apparatus for analyzing the appearance features of a surface
US5208766A (en) * 1990-11-13 1993-05-04 Hughes Aircraft Company Automated evaluation of painted surface quality
US5251010A (en) * 1991-06-07 1993-10-05 Glasstech, Inc. Optical roller wave gauge
WO1993012615A1 (en) * 1991-12-19 1993-06-24 The United States Of America, Represented By The Secretary, United States Department Of Commerce Method and apparatus for assessment of surface smoothness using reflected energy
US5283642A (en) * 1992-03-16 1994-02-01 The Boeing Company Scratch measurement apparatus and method
US5394183A (en) * 1992-05-05 1995-02-28 Milliken Research Corporation Method and apparatus for entering coordinates into a computer
US5568258A (en) * 1992-08-25 1996-10-22 Asahi Glass Company Ltd. Method and device for measuring distortion of a transmitting beam or a surface shape of a three-dimensional object
DE4230068A1 (de) * 1992-09-09 1994-03-10 Tzn Forschung & Entwicklung Verfahren und Vorrichtung zur berührungslosen Überprüfung der Oberflächenrauhigkeit von Materialien
US5453841A (en) * 1993-05-03 1995-09-26 The United States Of America As Represented By The Secretary Of Commerce Method for the dynamic measurement of the progress of a chemical reaction of an electrochemical interface
US5552890A (en) * 1994-04-19 1996-09-03 Tricor Systems, Inc. Gloss measurement system
US5625705A (en) * 1994-06-03 1997-04-29 Neuromedical Systems, Inc. Intensity texture based classification system and method
US5878153A (en) * 1994-06-24 1999-03-02 Ford Global Technologies, Inc. Method for monitoring coating adhesion propensity based on surface morphology
US5999840A (en) * 1994-09-01 1999-12-07 Massachusetts Institute Of Technology System and method of registration of three-dimensional data sets
US5531520A (en) * 1994-09-01 1996-07-02 Massachusetts Institute Of Technology System and method of registration of three-dimensional data sets including anatomical body data
US5546797A (en) * 1995-04-11 1996-08-20 The United States Of America As Represented By The Secretary Of The Navy Constant-depth scratch test for the quantification of interfacial shear strength at film-substrate interfaces
GB2331359A (en) * 1997-11-18 1999-05-19 Glaverbel Glass defect detection
WO2002018980A2 (en) * 2000-09-01 2002-03-07 Applied Process Technologies Optical system for imaging distortions in moving reflective sheets
KR100418764B1 (ko) * 2000-12-29 2004-02-18 현대자동차주식회사 외관 굴곡 측정 시스템 및 측정방법
WO2002076675A1 (fr) * 2001-03-27 2002-10-03 Nippon Sheet Glass Co., Ltd. Substrat pour support d'enregistrement d'informations et procede de production dudit substrat, support d'enregistrement d'informations et feuille de verre ebauche
US6888919B2 (en) * 2001-11-02 2005-05-03 Varian Medical Systems, Inc. Radiotherapy apparatus equipped with an articulable gantry for positioning an imaging unit
US6974848B2 (en) 2002-04-16 2005-12-13 Helena Twardowska Low-density thermosetting sheet molding compounds
US7227925B1 (en) 2002-10-02 2007-06-05 Varian Medical Systems Technologies, Inc. Gantry mounted stereoscopic imaging system
US7657304B2 (en) 2002-10-05 2010-02-02 Varian Medical Systems, Inc. Imaging device for radiation treatment applications
US7945021B2 (en) 2002-12-18 2011-05-17 Varian Medical Systems, Inc. Multi-mode cone beam CT radiotherapy simulator and treatment machine with a flat panel imager
US7412029B2 (en) * 2003-06-25 2008-08-12 Varian Medical Systems Technologies, Inc. Treatment planning, simulation, and verification system
WO2007018646A1 (en) 2005-04-29 2007-02-15 Varian Medical Systems Technologies, Inc. Radiation treatment systems and components thereof
US20060252869A1 (en) * 2005-05-09 2006-11-09 Ashland Inc. Synergistic filler compositions and low density sheet molding compounds therefrom
US20060249869A1 (en) * 2005-05-09 2006-11-09 Ashland Inc. Low-density, class a sheet molding compounds containing divinylbenzene
US7880154B2 (en) 2005-07-25 2011-02-01 Karl Otto Methods and apparatus for the planning and delivery of radiation treatments
US7362450B2 (en) * 2005-12-23 2008-04-22 Xerox Corporation Specular surface flaw detection
JP2007192660A (ja) * 2006-01-19 2007-08-02 Fujifilm Corp フイルムの表面欠陥検出方法及び検出機
EP2088925B8 (de) 2006-11-17 2015-06-17 Varian Medical Systems, Inc. Dynamisches patientenpositionierungssystem
USRE46953E1 (en) 2007-04-20 2018-07-17 University Of Maryland, Baltimore Single-arc dose painting for precision radiation therapy
US8402785B2 (en) * 2007-11-09 2013-03-26 Corning Incorporated Method and apparatus for measuring surface shape profile
US9846689B2 (en) 2008-01-29 2017-12-19 Adobe Systems Incorporated Method and system to provide portable database functionality in an electronic form
US8415648B2 (en) 2008-02-15 2013-04-09 Pilkington Group Limited Method of determination of glass surface shapes and optical distortion by reflected optical imaging
US8355541B2 (en) * 2009-07-14 2013-01-15 Empire Technology Development Llc Texture sensing
FR2951544A1 (fr) * 2009-10-21 2011-04-22 Saint Gobain Procede d'analyse de la qualite d'un vitrage
EP2585854B1 (de) 2010-06-22 2020-03-18 Varian Medical Systems International AG System und verfahren zur messung und zur änderung einer gemessenen strahlendosis
SE536900C2 (sv) * 2011-09-25 2014-10-21 Ontop Measurement I Sundsvall Ab Förfarande för mätning av topografi på ytan av en materialbana
DE102013216566A1 (de) * 2013-08-21 2015-02-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und verfahren zur erfassung einer zumindest teilweise spiegelnden oberfläche
DE102014104338B4 (de) * 2014-03-27 2023-08-10 Schott Ag Verfahren und Vorrichtung zur Detektion von Oberflächendeformationen
US20150330054A1 (en) * 2014-05-16 2015-11-19 Topcon Positioning Systems, Inc. Optical Sensing a Distance from a Range Sensing Apparatus and Method
JP6697285B2 (ja) * 2015-02-25 2020-05-20 株式会社昭和電気研究所 ウェハ欠陥検査装置
KR101945662B1 (ko) * 2016-06-27 2019-02-07 신닛테츠스미킨 카부시키카이샤 형상 측정 장치 및 형상 측정 방법
US10806409B2 (en) 2016-09-23 2020-10-20 Varian Medical Systems International Ag Medical systems with patient supports
DE102018118293A1 (de) * 2018-07-27 2020-01-30 Dekra Automobil Gmbh Oberflächenvermessungsvorrichtung und -verfahren für einen Scheinwerferprüfstand
HUE060086T2 (hu) * 2018-05-08 2023-02-28 Dekra Automobil Gmbh Felületi mérõberendezés és eljárás fényszóró próbapadhoz
US11781861B2 (en) * 2018-09-06 2023-10-10 Hitachi Astemo, Ltd. Surface measurement method, component manufacturing method, component inspection method, and component measurement device
DE102020129040A1 (de) 2020-11-04 2022-05-05 Speira Gmbh Verfahren und Vorrichtung zur Erkennung von Oberflächenstrukturen

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4249823A (en) * 1979-10-16 1981-02-10 The United States Of America As Represented By The Secretary Of The Air Force Windscreen angular deviation measurement device
US4476489A (en) * 1982-05-20 1984-10-09 Inspection Technology, Inc. Microfinish measurement apparatus and technique
US4468426A (en) * 1982-11-24 1984-08-28 E. I. Du Pont De Nemours And Company Adherable reinforced poly(ethylene terephthalate) composite sheet
JPS60119404A (ja) * 1983-12-01 1985-06-26 Nippon Sheet Glass Co Ltd 板ガラスの歪検査装置
DE3338802A1 (de) * 1983-10-26 1985-05-09 Feldmühle AG, 4000 Düsseldorf Vorrichtung und verfahren zum pruefen von materialbahnen
US4629319A (en) * 1984-02-14 1986-12-16 Diffracto Ltd. Panel surface flaw inspection
JPS60200141A (ja) * 1984-03-26 1985-10-09 Hitachi Ltd 鏡面物体の表面形状検出方式

Also Published As

Publication number Publication date
JPH02503035A (ja) 1990-09-20
EP0360838A1 (de) 1990-04-04
DE3852759T2 (de) 1995-05-18
EP0360838B1 (de) 1995-01-11
WO1989007235A1 (en) 1989-08-10
MX169486B (es) 1993-07-07
US4853777A (en) 1989-08-01
EP0360838A4 (en) 1992-01-08
AU2085488A (en) 1989-08-25
ATE117074T1 (de) 1995-01-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: DIFFRACTO LTD., WINDSOR, ONTARIO, CA

8328 Change in the person/name/address of the agent

Free format text: DERZEIT KEIN VERTRETER BESTELLT

8339 Ceased/non-payment of the annual fee