DE3852759D1 - Verfahren zur bewertung glatter oberflächen. - Google Patents
Verfahren zur bewertung glatter oberflächen.Info
- Publication number
- DE3852759D1 DE3852759D1 DE3852759T DE3852759T DE3852759D1 DE 3852759 D1 DE3852759 D1 DE 3852759D1 DE 3852759 T DE3852759 T DE 3852759T DE 3852759 T DE3852759 T DE 3852759T DE 3852759 D1 DE3852759 D1 DE 3852759D1
- Authority
- DE
- Germany
- Prior art keywords
- smooth surfaces
- term
- smooth surface
- image
- evaluating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Magnetic Heads (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/150,136 US4853777A (en) | 1987-07-07 | 1988-01-29 | Method for evaluating smooth surfaces |
PCT/US1988/002284 WO1989007235A1 (en) | 1988-01-29 | 1988-07-26 | Method for evaluating smooth surfaces |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3852759D1 true DE3852759D1 (de) | 1995-02-23 |
DE3852759T2 DE3852759T2 (de) | 1995-05-18 |
Family
ID=22533258
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3852759T Expired - Fee Related DE3852759T2 (de) | 1988-01-29 | 1988-07-26 | Verfahren zur bewertung glatter oberflächen. |
Country Status (8)
Country | Link |
---|---|
US (1) | US4853777A (de) |
EP (1) | EP0360838B1 (de) |
JP (1) | JPH02503035A (de) |
AT (1) | ATE117074T1 (de) |
AU (1) | AU2085488A (de) |
DE (1) | DE3852759T2 (de) |
MX (1) | MX169486B (de) |
WO (1) | WO1989007235A1 (de) |
Families Citing this family (56)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3816392A1 (de) * | 1988-05-13 | 1989-11-23 | Ver Glaswerke Gmbh | Verfahren zur bestimmung der optischen qualitaet von flachglas oder flachglasprodukten |
FR2637189A1 (fr) * | 1988-10-04 | 1990-04-06 | Cgr Mev | Systeme et procede de mesure et/ou de verification de la position d'un patient dans un equipement de radiotherapie |
US4929846A (en) * | 1988-10-05 | 1990-05-29 | Ford Motor Company | Surface quality analyzer apparatus and method |
EP0405806B1 (de) * | 1989-06-30 | 1994-05-04 | Jaguar Cars Limited | Verfahren und Vorrichtung zur Untersuchung von Oberflächenfehlern |
US5153844A (en) * | 1990-01-23 | 1992-10-06 | E. I. Du Pont De Nemours And Company | Method and apparatus for measuring surface flatness |
US5122672A (en) * | 1990-09-07 | 1992-06-16 | Ford Motor Company | Surface quality analyzer apparatus and method |
US5155558A (en) * | 1990-09-19 | 1992-10-13 | E. I. Du Pont De Nemours And Company | Method and apparatus for analyzing the appearance features of a surface |
US5208766A (en) * | 1990-11-13 | 1993-05-04 | Hughes Aircraft Company | Automated evaluation of painted surface quality |
US5251010A (en) * | 1991-06-07 | 1993-10-05 | Glasstech, Inc. | Optical roller wave gauge |
WO1993012615A1 (en) * | 1991-12-19 | 1993-06-24 | The United States Of America, Represented By The Secretary, United States Department Of Commerce | Method and apparatus for assessment of surface smoothness using reflected energy |
US5283642A (en) * | 1992-03-16 | 1994-02-01 | The Boeing Company | Scratch measurement apparatus and method |
US5394183A (en) * | 1992-05-05 | 1995-02-28 | Milliken Research Corporation | Method and apparatus for entering coordinates into a computer |
US5568258A (en) * | 1992-08-25 | 1996-10-22 | Asahi Glass Company Ltd. | Method and device for measuring distortion of a transmitting beam or a surface shape of a three-dimensional object |
DE4230068A1 (de) * | 1992-09-09 | 1994-03-10 | Tzn Forschung & Entwicklung | Verfahren und Vorrichtung zur berührungslosen Überprüfung der Oberflächenrauhigkeit von Materialien |
US5453841A (en) * | 1993-05-03 | 1995-09-26 | The United States Of America As Represented By The Secretary Of Commerce | Method for the dynamic measurement of the progress of a chemical reaction of an electrochemical interface |
US5552890A (en) * | 1994-04-19 | 1996-09-03 | Tricor Systems, Inc. | Gloss measurement system |
US5625705A (en) * | 1994-06-03 | 1997-04-29 | Neuromedical Systems, Inc. | Intensity texture based classification system and method |
US5878153A (en) * | 1994-06-24 | 1999-03-02 | Ford Global Technologies, Inc. | Method for monitoring coating adhesion propensity based on surface morphology |
US5999840A (en) * | 1994-09-01 | 1999-12-07 | Massachusetts Institute Of Technology | System and method of registration of three-dimensional data sets |
US5531520A (en) * | 1994-09-01 | 1996-07-02 | Massachusetts Institute Of Technology | System and method of registration of three-dimensional data sets including anatomical body data |
US5546797A (en) * | 1995-04-11 | 1996-08-20 | The United States Of America As Represented By The Secretary Of The Navy | Constant-depth scratch test for the quantification of interfacial shear strength at film-substrate interfaces |
GB2331359A (en) * | 1997-11-18 | 1999-05-19 | Glaverbel | Glass defect detection |
WO2002018980A2 (en) * | 2000-09-01 | 2002-03-07 | Applied Process Technologies | Optical system for imaging distortions in moving reflective sheets |
KR100418764B1 (ko) * | 2000-12-29 | 2004-02-18 | 현대자동차주식회사 | 외관 굴곡 측정 시스템 및 측정방법 |
WO2002076675A1 (fr) * | 2001-03-27 | 2002-10-03 | Nippon Sheet Glass Co., Ltd. | Substrat pour support d'enregistrement d'informations et procede de production dudit substrat, support d'enregistrement d'informations et feuille de verre ebauche |
US6888919B2 (en) * | 2001-11-02 | 2005-05-03 | Varian Medical Systems, Inc. | Radiotherapy apparatus equipped with an articulable gantry for positioning an imaging unit |
US6974848B2 (en) | 2002-04-16 | 2005-12-13 | Helena Twardowska | Low-density thermosetting sheet molding compounds |
US7227925B1 (en) | 2002-10-02 | 2007-06-05 | Varian Medical Systems Technologies, Inc. | Gantry mounted stereoscopic imaging system |
US7657304B2 (en) | 2002-10-05 | 2010-02-02 | Varian Medical Systems, Inc. | Imaging device for radiation treatment applications |
US7945021B2 (en) | 2002-12-18 | 2011-05-17 | Varian Medical Systems, Inc. | Multi-mode cone beam CT radiotherapy simulator and treatment machine with a flat panel imager |
US7412029B2 (en) * | 2003-06-25 | 2008-08-12 | Varian Medical Systems Technologies, Inc. | Treatment planning, simulation, and verification system |
WO2007018646A1 (en) | 2005-04-29 | 2007-02-15 | Varian Medical Systems Technologies, Inc. | Radiation treatment systems and components thereof |
US20060252869A1 (en) * | 2005-05-09 | 2006-11-09 | Ashland Inc. | Synergistic filler compositions and low density sheet molding compounds therefrom |
US20060249869A1 (en) * | 2005-05-09 | 2006-11-09 | Ashland Inc. | Low-density, class a sheet molding compounds containing divinylbenzene |
US7880154B2 (en) | 2005-07-25 | 2011-02-01 | Karl Otto | Methods and apparatus for the planning and delivery of radiation treatments |
US7362450B2 (en) * | 2005-12-23 | 2008-04-22 | Xerox Corporation | Specular surface flaw detection |
JP2007192660A (ja) * | 2006-01-19 | 2007-08-02 | Fujifilm Corp | フイルムの表面欠陥検出方法及び検出機 |
EP2088925B8 (de) | 2006-11-17 | 2015-06-17 | Varian Medical Systems, Inc. | Dynamisches patientenpositionierungssystem |
USRE46953E1 (en) | 2007-04-20 | 2018-07-17 | University Of Maryland, Baltimore | Single-arc dose painting for precision radiation therapy |
US8402785B2 (en) * | 2007-11-09 | 2013-03-26 | Corning Incorporated | Method and apparatus for measuring surface shape profile |
US9846689B2 (en) | 2008-01-29 | 2017-12-19 | Adobe Systems Incorporated | Method and system to provide portable database functionality in an electronic form |
US8415648B2 (en) | 2008-02-15 | 2013-04-09 | Pilkington Group Limited | Method of determination of glass surface shapes and optical distortion by reflected optical imaging |
US8355541B2 (en) * | 2009-07-14 | 2013-01-15 | Empire Technology Development Llc | Texture sensing |
FR2951544A1 (fr) * | 2009-10-21 | 2011-04-22 | Saint Gobain | Procede d'analyse de la qualite d'un vitrage |
EP2585854B1 (de) | 2010-06-22 | 2020-03-18 | Varian Medical Systems International AG | System und verfahren zur messung und zur änderung einer gemessenen strahlendosis |
SE536900C2 (sv) * | 2011-09-25 | 2014-10-21 | Ontop Measurement I Sundsvall Ab | Förfarande för mätning av topografi på ytan av en materialbana |
DE102013216566A1 (de) * | 2013-08-21 | 2015-02-26 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und verfahren zur erfassung einer zumindest teilweise spiegelnden oberfläche |
DE102014104338B4 (de) * | 2014-03-27 | 2023-08-10 | Schott Ag | Verfahren und Vorrichtung zur Detektion von Oberflächendeformationen |
US20150330054A1 (en) * | 2014-05-16 | 2015-11-19 | Topcon Positioning Systems, Inc. | Optical Sensing a Distance from a Range Sensing Apparatus and Method |
JP6697285B2 (ja) * | 2015-02-25 | 2020-05-20 | 株式会社昭和電気研究所 | ウェハ欠陥検査装置 |
KR101945662B1 (ko) * | 2016-06-27 | 2019-02-07 | 신닛테츠스미킨 카부시키카이샤 | 형상 측정 장치 및 형상 측정 방법 |
US10806409B2 (en) | 2016-09-23 | 2020-10-20 | Varian Medical Systems International Ag | Medical systems with patient supports |
DE102018118293A1 (de) * | 2018-07-27 | 2020-01-30 | Dekra Automobil Gmbh | Oberflächenvermessungsvorrichtung und -verfahren für einen Scheinwerferprüfstand |
HUE060086T2 (hu) * | 2018-05-08 | 2023-02-28 | Dekra Automobil Gmbh | Felületi mérõberendezés és eljárás fényszóró próbapadhoz |
US11781861B2 (en) * | 2018-09-06 | 2023-10-10 | Hitachi Astemo, Ltd. | Surface measurement method, component manufacturing method, component inspection method, and component measurement device |
DE102020129040A1 (de) | 2020-11-04 | 2022-05-05 | Speira Gmbh | Verfahren und Vorrichtung zur Erkennung von Oberflächenstrukturen |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4249823A (en) * | 1979-10-16 | 1981-02-10 | The United States Of America As Represented By The Secretary Of The Air Force | Windscreen angular deviation measurement device |
US4476489A (en) * | 1982-05-20 | 1984-10-09 | Inspection Technology, Inc. | Microfinish measurement apparatus and technique |
US4468426A (en) * | 1982-11-24 | 1984-08-28 | E. I. Du Pont De Nemours And Company | Adherable reinforced poly(ethylene terephthalate) composite sheet |
JPS60119404A (ja) * | 1983-12-01 | 1985-06-26 | Nippon Sheet Glass Co Ltd | 板ガラスの歪検査装置 |
DE3338802A1 (de) * | 1983-10-26 | 1985-05-09 | Feldmühle AG, 4000 Düsseldorf | Vorrichtung und verfahren zum pruefen von materialbahnen |
US4629319A (en) * | 1984-02-14 | 1986-12-16 | Diffracto Ltd. | Panel surface flaw inspection |
JPS60200141A (ja) * | 1984-03-26 | 1985-10-09 | Hitachi Ltd | 鏡面物体の表面形状検出方式 |
-
1988
- 1988-01-29 US US07/150,136 patent/US4853777A/en not_active Expired - Fee Related
- 1988-07-05 MX MX012161A patent/MX169486B/es unknown
- 1988-07-06 AU AU20854/88A patent/AU2085488A/en not_active Abandoned
- 1988-07-26 DE DE3852759T patent/DE3852759T2/de not_active Expired - Fee Related
- 1988-07-26 WO PCT/US1988/002284 patent/WO1989007235A1/en active IP Right Grant
- 1988-07-26 EP EP88906518A patent/EP0360838B1/de not_active Expired - Lifetime
- 1988-07-26 AT AT88906518T patent/ATE117074T1/de active
- 1988-07-26 JP JP63506141A patent/JPH02503035A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JPH02503035A (ja) | 1990-09-20 |
EP0360838A1 (de) | 1990-04-04 |
DE3852759T2 (de) | 1995-05-18 |
EP0360838B1 (de) | 1995-01-11 |
WO1989007235A1 (en) | 1989-08-10 |
MX169486B (es) | 1993-07-07 |
US4853777A (en) | 1989-08-01 |
EP0360838A4 (en) | 1992-01-08 |
AU2085488A (en) | 1989-08-25 |
ATE117074T1 (de) | 1995-01-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: DIFFRACTO LTD., WINDSOR, ONTARIO, CA |
|
8328 | Change in the person/name/address of the agent |
Free format text: DERZEIT KEIN VERTRETER BESTELLT |
|
8339 | Ceased/non-payment of the annual fee |