DE3778605D1 - Gaslaser mit hochfrequenzerregung. - Google Patents
Gaslaser mit hochfrequenzerregung.Info
- Publication number
- DE3778605D1 DE3778605D1 DE8787901110T DE3778605T DE3778605D1 DE 3778605 D1 DE3778605 D1 DE 3778605D1 DE 8787901110 T DE8787901110 T DE 8787901110T DE 3778605 T DE3778605 T DE 3778605T DE 3778605 D1 DE3778605 D1 DE 3778605D1
- Authority
- DE
- Germany
- Prior art keywords
- high frequency
- gas laser
- frequency excitation
- excitation
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/0315—Waveguide lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1559486A JPS62174986A (ja) | 1986-01-29 | 1986-01-29 | 高周波励起気体レ−ザ− |
JP1559686A JPS62174987A (ja) | 1986-01-29 | 1986-01-29 | 高周波励起気体レ−ザ−用電極 |
PCT/JP1987/000059 WO1987004868A1 (en) | 1986-01-29 | 1987-01-28 | Gas laser utilizing high-frequency excitation |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3778605D1 true DE3778605D1 (de) | 1992-06-04 |
Family
ID=26351773
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787901110T Expired - Lifetime DE3778605D1 (de) | 1986-01-29 | 1987-01-28 | Gaslaser mit hochfrequenzerregung. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4800567A (de) |
EP (1) | EP0256135B1 (de) |
DE (1) | DE3778605D1 (de) |
WO (1) | WO1987004868A1 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2509638B2 (ja) * | 1987-10-29 | 1996-06-26 | ファナック株式会社 | 高周波放電励起レ―ザ装置 |
JPH01258482A (ja) * | 1988-04-08 | 1989-10-16 | Fanuc Ltd | ガスレーザ装置用放電管 |
DE3822229A1 (de) * | 1988-07-01 | 1990-01-04 | Messer Griesheim Gmbh | Verfahren zum elektrischen anregen eines lasergases |
JPH02207578A (ja) * | 1989-02-07 | 1990-08-17 | Matsushita Electric Ind Co Ltd | 気体レーザ発振器 |
GB2233814B (en) * | 1989-07-10 | 1994-06-22 | Toshiba Kk | Laser apparatus |
US5327446A (en) * | 1993-03-26 | 1994-07-05 | The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services | Method of exciting laser action and delivering laser energy for medical and scientific applications |
IL126765A0 (en) * | 1998-10-26 | 1999-08-17 | Anner Oded | Gas laser |
US6711202B2 (en) * | 2000-06-09 | 2004-03-23 | Cymer, Inc. | Discharge laser with porous insulating layer covering anode discharge surface |
US7132123B2 (en) * | 2000-06-09 | 2006-11-07 | Cymer, Inc. | High rep-rate laser with improved electrodes |
US7095774B2 (en) * | 2001-09-13 | 2006-08-22 | Cymer, Inc. | Cathodes for fluorine gas discharge lasers |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3386043A (en) * | 1964-07-31 | 1968-05-28 | Bell Telephone Labor Inc | Dielectric waveguide, maser amplifier and oscillator |
US3427567A (en) * | 1967-05-19 | 1969-02-11 | Hughes Aircraft Co | Gaseous laser discharge tube |
JPS4845419Y1 (de) * | 1970-11-19 | 1973-12-27 | ||
US3777279A (en) * | 1972-03-30 | 1973-12-04 | United Aircraft Corp | Deposition of power in a moving gas stream by electric discharge means |
JPS5140278U (de) * | 1974-09-19 | 1976-03-25 | ||
NL7701389A (nl) * | 1977-02-10 | 1978-08-14 | Stichting Fund Ond Material | Gaslaseropstelling. |
JPS53113496A (en) * | 1977-03-15 | 1978-10-03 | Mitsubishi Electric Corp | Gas laser device |
US4373202A (en) * | 1979-09-24 | 1983-02-08 | Walwel, Inc. | RF Excited waveguide gas laser |
JPS5673484A (en) * | 1979-11-21 | 1981-06-18 | Mitsubishi Electric Corp | Voiceless discharge gas laser device |
US4380079A (en) * | 1980-09-12 | 1983-04-12 | Northrop Corp. | Gas laser preionization device |
US4488309A (en) * | 1981-09-16 | 1984-12-11 | Mitsubishi Denki Kabushiki Kaisha | Gas laser apparatus |
US4455658A (en) * | 1982-04-20 | 1984-06-19 | Sutter Jr Leroy V | Coupling circuit for use with a transversely excited gas laser |
US4553242A (en) * | 1983-05-07 | 1985-11-12 | W.C. Heraeus Gmbh | Gas laser |
NO853264L (no) * | 1984-10-15 | 1986-04-16 | Siemens Ag | Transversalt eksitert gasslaser og fremgangsm¨te til dens drift. |
JPS61280689A (ja) * | 1985-06-05 | 1986-12-11 | Mitsubishi Electric Corp | ガスレ−ザ装置 |
-
1987
- 1987-01-28 DE DE8787901110T patent/DE3778605D1/de not_active Expired - Lifetime
- 1987-01-28 US US07/117,149 patent/US4800567A/en not_active Expired - Fee Related
- 1987-01-28 WO PCT/JP1987/000059 patent/WO1987004868A1/ja active IP Right Grant
- 1987-01-28 EP EP87901110A patent/EP0256135B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO1987004868A1 (en) | 1987-08-13 |
EP0256135A1 (de) | 1988-02-24 |
EP0256135B1 (de) | 1992-04-29 |
EP0256135A4 (de) | 1988-03-07 |
US4800567A (en) | 1989-01-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |