DE3774765D1 - Optische messanordnung des abstands zwischen einer oberflaeche und einer bezugsebene. - Google Patents
Optische messanordnung des abstands zwischen einer oberflaeche und einer bezugsebene.Info
- Publication number
- DE3774765D1 DE3774765D1 DE8787200991T DE3774765T DE3774765D1 DE 3774765 D1 DE3774765 D1 DE 3774765D1 DE 8787200991 T DE8787200991 T DE 8787200991T DE 3774765 T DE3774765 T DE 3774765T DE 3774765 D1 DE3774765 D1 DE 3774765D1
- Authority
- DE
- Germany
- Prior art keywords
- radiation
- distance
- detection system
- optical
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
- Automatic Focus Adjustment (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL8601433 | 1986-06-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3774765D1 true DE3774765D1 (de) | 1992-01-09 |
Family
ID=19848116
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787200991T Expired - Lifetime DE3774765D1 (de) | 1986-06-04 | 1987-05-26 | Optische messanordnung des abstands zwischen einer oberflaeche und einer bezugsebene. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4874246A (de) |
EP (1) | EP0248479B1 (de) |
JP (1) | JP2529691B2 (de) |
KR (1) | KR880000771A (de) |
AT (1) | ATE69876T1 (de) |
DE (1) | DE3774765D1 (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0654231B2 (ja) * | 1986-12-18 | 1994-07-20 | 株式会社ミツトヨ | 非接触変位計 |
JPH0652171B2 (ja) * | 1987-02-10 | 1994-07-06 | 株式会社オカダ | 光学式非接触位置測定装置 |
EP0322356A3 (de) * | 1987-12-19 | 1991-06-12 | Baumer Electric Ag | Verfahren und Vorrichtung zur optischen Distanzmessung |
US5011960A (en) * | 1988-05-20 | 1991-04-30 | Fujitsu Limited | Wiring pattern detection method and apparatus |
EP0370770A1 (de) * | 1988-11-22 | 1990-05-30 | Hewlett-Packard Company | Abstandsmessystem |
US5113082A (en) * | 1990-09-11 | 1992-05-12 | Moshe Golberstein | Electro-optical instrument with self-contained photometer |
JPH04290914A (ja) * | 1991-03-20 | 1992-10-15 | Hitachi Zosen Corp | 光学式変位センサおよび光学式変位測定方法 |
FR2680414B1 (fr) * | 1991-08-14 | 1995-05-24 | Sofie | Ensemble d'observation et de mesures interferometriques simultanees par laser, en particulier sur des structures a couches minces. |
US5270795A (en) * | 1992-08-11 | 1993-12-14 | National Research Council Of Canada/Conseil National De Rechereches Du Canada | Validation of optical ranging of a target surface in a cluttered environment |
DE4339710C2 (de) * | 1993-11-22 | 1997-02-13 | Univ Schiller Jena | Optoelektronische Abstandsmeßeinrichtung |
EP0920791B1 (de) * | 1996-11-26 | 2006-05-24 | Assembléon N.V. | Methode zum anordnen von bauteilen auf einem träger mit kalibrierungsverfahren und vorrichtung dafür |
DE19714202A1 (de) * | 1997-04-07 | 1998-10-15 | Bosch Gmbh Robert | Vorrichtung zum optischen Prüfen von Oberflächen |
US5978089A (en) * | 1997-04-15 | 1999-11-02 | Nextel Ltd. | Non-contact method for measuring the shape of an object |
DE10142206A1 (de) * | 2001-08-25 | 2003-03-13 | Fraunhofer Ges Forschung | Messanordnung und Verfahren zur Bestimmung der Tiefe von in Substratoberflächen ausgebildeten Bohrungen oder nutenförmigen Einschnitten |
DE10211070A1 (de) * | 2002-03-13 | 2003-09-25 | Gurny Broesch Andrea | Vorrichtung zum Vermessen eines Messobjekts |
JP4121803B2 (ja) * | 2002-08-08 | 2008-07-23 | 株式会社トプコン | 光波距離測定装置 |
DE102004002253B4 (de) * | 2004-01-07 | 2009-06-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und Verfahren zur Bestimmung des Abstandes zwischen einer Referenzebene und einer Substratoberfläche |
JP2014523536A (ja) * | 2011-07-19 | 2014-09-11 | ザ ジェネラル ホスピタル コーポレイション | 光コヒーレンストモグラフィーにおいて偏波モード分散補償を提供するためのシステム、方法、装置およびコンピュータアクセス可能な媒体 |
DE112014007223T5 (de) * | 2014-12-02 | 2017-08-24 | Mitsubishi Electric Corporation | Abstandssensor, Abstandserfassungsvorrichtung und Abstandserfassungsverfahren |
JP7181790B2 (ja) * | 2018-12-28 | 2022-12-01 | 株式会社キーエンス | レーザ加工装置 |
DE102020134317A1 (de) | 2020-12-18 | 2022-06-23 | Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung | Vorrichtung und Verfahren zur Fokuslagen-Bestimmung |
DE102020134109B3 (de) | 2020-12-18 | 2022-05-25 | Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung | Vorrichtung und Verfahren zur Fokuslagen-Bestimmung |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3606541A (en) * | 1968-09-28 | 1971-09-20 | Mitsubishi Electric Corp | Contact-less probe system |
FR2229042A1 (en) * | 1973-05-11 | 1974-12-06 | Onera (Off Nat Aerospatiale) | Electro optical system for determining small displacements - facilitates vibration studies on bodies or models |
DE2355185C2 (de) * | 1973-11-05 | 1975-05-22 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Anordnung zur Dickenmessung von Gegenständen unter Verwendung von Laserstrahlen |
US4110607A (en) * | 1975-12-22 | 1978-08-29 | Victor Company Of Japan, Ltd. | System for detecting height fluctuations of a surface on a recording medium in an optical recording or reproducing apparatus |
NL7803969A (nl) * | 1978-04-14 | 1979-10-16 | Philips Nv | Opto-elektronisch fokusfout-detektiestelsel. |
EP0071667A1 (de) * | 1981-08-11 | 1983-02-16 | Karl-Erik Morander | Vorrichtung zur Bestimmung des reellen oder virtuellen Abstands einer Lichtquelle von einer Messebene |
US4705941A (en) * | 1983-06-30 | 1987-11-10 | Kabushiki Kaisha Toshiba | Apparatus for detecting a focusing state of an optical system |
DE3331552A1 (de) * | 1983-09-01 | 1985-03-28 | Henning Dr.-Ing. 7440 Nürtingen Wolf | Optisches einweg-entfernungsmessverfahren |
JPS60100114A (ja) * | 1983-11-05 | 1985-06-04 | Canon Inc | 合焦検出装置 |
EP0162973A1 (de) * | 1984-05-30 | 1985-12-04 | Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO | Abstandsmessvorrichtung |
GB8422535D0 (en) * | 1984-09-06 | 1984-10-10 | Renishaw Plc | Position-sensing apparatus |
US4677302A (en) * | 1985-03-29 | 1987-06-30 | Siemens Corporate Research & Support, Inc. | Optical system for inspecting printed circuit boards wherein a ramp filter is disposed between reflected beam and photodetector |
US4645347A (en) * | 1985-04-30 | 1987-02-24 | Canadian Patents And Development Limited-Societe Canadienne Des Brevets Et D'exploitation Limitee | Three dimensional imaging device |
JPH0652170B2 (ja) * | 1986-02-25 | 1994-07-06 | 株式会社オカダ | 光結像式非接触位置測定装置 |
-
1987
- 1987-05-26 AT AT87200991T patent/ATE69876T1/de active
- 1987-05-26 DE DE8787200991T patent/DE3774765D1/de not_active Expired - Lifetime
- 1987-05-26 EP EP87200991A patent/EP0248479B1/de not_active Expired - Lifetime
- 1987-06-01 KR KR870005504A patent/KR880000771A/ko not_active Application Discontinuation
- 1987-06-04 JP JP62139054A patent/JP2529691B2/ja not_active Expired - Lifetime
-
1989
- 1989-01-17 US US07/298,200 patent/US4874246A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US4874246A (en) | 1989-10-17 |
EP0248479B1 (de) | 1991-11-27 |
KR880000771A (ko) | 1988-03-29 |
ATE69876T1 (de) | 1991-12-15 |
JP2529691B2 (ja) | 1996-08-28 |
JPS6325507A (ja) | 1988-02-03 |
EP0248479A1 (de) | 1987-12-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL |
|
8339 | Ceased/non-payment of the annual fee |