DE3683867D1 - Beschichtungsgeraet. - Google Patents

Beschichtungsgeraet.

Info

Publication number: DE3683867D1
Authority: DE; Germany
Prior art keywords: coating device; coating
Prior art date: 1985-05-16
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE8686303630T

Other languages

English (en)

Inventor

David Stafford Rickerby

Derek Stephen Whitmell

Joseph Paul Coad

Richard Stuart Nelson

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Ricardo AEA Ltd

Original Assignee

UK Atomic Energy Authority

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1985-05-16

Filing date

1986-05-13

Publication date

1992-03-26

1986-05-13 Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority

1992-03-26 Application granted granted Critical

1992-03-26 Publication of DE3683867D1 publication Critical patent/DE3683867D1/de

2006-05-14 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3423—Shape
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Plasma & Fusion (AREA)
Analytical Chemistry (AREA)
Chemical Kinetics & Catalysis (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Physical Vapour Deposition (AREA)

DE8686303630T 1985-05-16 1986-05-13 Beschichtungsgeraet. Expired - Fee Related DE3683867D1 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
GB858512455A GB8512455D0 (en)	1985-05-16	1985-05-16	Coating apparatus

Publications (1)

Publication Number	Publication Date
DE3683867D1 true DE3683867D1 (de)	1992-03-26

Family

ID=10579258

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE8686303630T Expired - Fee Related DE3683867D1 (de)	1985-05-16	1986-05-13	Beschichtungsgeraet.

Country Status (6)

Country	Link
US (1)	US5013419A (de)
EP (1)	EP0203754B1 (de)
JP (1)	JPS61266568A (de)
DE (1)	DE3683867D1 (de)
ES (1)	ES8703534A1 (de)
GB (2)	GB8512455D0 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CH671407A5 (de) *	1986-06-13	1989-08-31	Balzers Hochvakuum
US4736087A (en) *	1987-01-12	1988-04-05	Olin Corporation	Plasma stripper with multiple contact point cathode
US5238741A (en) *	1989-10-19	1993-08-24	United Kingdom Atomic Energy Authority	Silicon carbide filaments bearing a carbon layer and a titanium carbide or titanium boride layer
GB9006073D0 (en) *	1990-03-17	1990-05-16	D G Teer Coating Services Limi	Magnetron sputter ion plating
GB9821903D0 (en) *	1998-10-09	1998-12-02	Rolls Royce Plc	A method of applying a coating to a metallic article and an apparatus for applying a coating to a metallic article
GB0116688D0 (en) *	2001-07-07	2001-08-29	Trikon Holdings Ltd	Method of depositing aluminium nitride
US20050260354A1 (en) *	2004-05-20	2005-11-24	Varian Semiconductor Equipment Associates, Inc.	In-situ process chamber preparation methods for plasma ion implantation systems
JP5097823B2 (ja) *	2008-06-05	2012-12-12	株式会社日立ハイテクノロジーズ	イオンビーム装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4026787A (en) *	1974-01-25	1977-05-31	Coulter Information Systems, Inc.	Thin film deposition apparatus using segmented target means
US3926147A (en) *	1974-11-15	1975-12-16	Mc Donnell Douglas Corp	Glow discharge-tumbling vapor deposition apparatus
US3979273A (en) *	1975-05-27	1976-09-07	United Technologies Corporation	Method of forming aluminide coatings on nickel-, cobalt-, and iron-base alloys
US4151064A (en) *	1977-12-27	1979-04-24	Coulter Stork U.S.A., Inc.	Apparatus for sputtering cylinders
GB2058142B (en) *	1979-07-31	1983-08-10	Nordiko Ltd	Sputtering electrodes
US4252626A (en) *	1980-03-10	1981-02-24	United Technologies Corporation	Cathode sputtering with multiple targets
US4342901A (en) *	1980-08-11	1982-08-03	Eaton Corporation	Plasma etching electrode
CH649578A5 (de) *	1981-03-27	1985-05-31	Ulvac Corp	Hochgeschwindigkeits-kathoden-zerstaeubungsvorrichtung.
JPS6037188B2 (ja) *	1981-08-27	1985-08-24	三菱マテリアル株式会社	スパツタリング装置
US4478703A (en) *	1983-03-31	1984-10-23	Kawasaki Jukogyo Kabushiki Kaisha	Sputtering system

1985
- 1985-05-16 GB GB858512455A patent/GB8512455D0/en active Pending
1986
- 1986-05-13 DE DE8686303630T patent/DE3683867D1/de not_active Expired - Fee Related
- 1986-05-13 GB GB8611630A patent/GB2175017B/en not_active Expired
- 1986-05-13 EP EP86303630A patent/EP0203754B1/de not_active Expired - Lifetime
- 1986-05-15 US US06/863,580 patent/US5013419A/en not_active Expired - Fee Related
- 1986-05-16 ES ES555031A patent/ES8703534A1/es not_active Expired
- 1986-05-16 JP JP61112410A patent/JPS61266568A/ja active Pending

Also Published As

Publication number	Publication date
EP0203754B1 (de)	1992-02-12
GB8611630D0 (en)	1986-06-18
EP0203754A3 (en)	1989-02-08
US5013419A (en)	1991-05-07
EP0203754A2 (de)	1986-12-03
ES555031A0 (es)	1987-02-16
GB2175017A (en)	1986-11-19
GB8512455D0 (en)	1985-06-19
JPS61266568A (ja)	1986-11-26
ES8703534A1 (es)	1987-02-16
GB2175017B (en)	1989-04-26

Legal Events

Date	Code	Title	Description
1993-03-18	8364	No opposition during term of opposition
1998-01-02	8327	Change in the person/name/address of the patent owner	Owner name: AEA TECHNOLOGY PLC, DIDCOT, OXFORDSHIRE, GB
1999-07-08	8339	Ceased/non-payment of the annual fee

Publication	Publication Date	Title
DE3682954D1 (de)	1992-01-30	Zerstaeubungsvorrichtung.
DE3677710D1 (de)	1991-04-04	Cefuroximaxetil-dragee.
DE3684970D1 (de)	1992-05-27	Tiefdruckbeschichtungsvorrichtung.
DE3671055D1 (de)	1990-06-13	Selbsttaetige streichvorrichtung.
DE3676350D1 (de)	1991-02-07	Schwenkvorrichtung.
DE68911939D1 (de)	1994-02-17	Beschichtungsvorrichtung.
DE3672397D1 (de)	1990-08-09	Haltevorrichtung.
DE3683529D1 (de)	1992-03-05	Antifaeulnis-ueberzugsmasse.
DE3669644D1 (de)	1990-04-26	Epiliergeraet.
IT8620128A0 (it)	1986-04-17	Dispositivo di spalmatura.
DE3774924D1 (de)	1992-01-16	Ueberzugsmasse.
DE3580479D1 (de)	1990-12-13	Auftragsvorrichtung.
DE3675325D1 (de)	1990-12-06	Kaltverfestigungsvorrichtung.
DE3685465D1 (de)	1992-07-02	Verbindungsvorrichtung.
NO863584L (no)	1987-03-12	Betraktningsanordning.
FI872648A (fi)	1987-06-15	Oeverlappslimfog.
DK259685D0 (da)	1985-06-11	Overtraekspraeparat
DE3672759D1 (de)	1990-08-23	Entschichtungsvorrichtung.
DE3782004D1 (de)	1992-11-05	Beschichtungsmasse.
DE68922228D1 (de)	1995-05-24	Beschichtungsvorrichtung.
FI860551A0 (fi)	1986-02-06	Gas-luft-avskiljare.
IT8619464A0 (it)	1986-02-19	Dispositivo di spalmatura.
DE3671035D1 (de)	1990-06-13	Ueberzugsmassen.
DE3783894D1 (de)	1993-03-11	Beschichtungsvorrichtung.
DE3683867D1 (de)	1992-03-26	Beschichtungsgeraet.