DE3578020D1 - Nichtthermische hohlanode-gasentladungselektronenstrahlquelle. - Google Patents

Nichtthermische hohlanode-gasentladungselektronenstrahlquelle.

Info

Publication number
DE3578020D1
DE3578020D1 DE8585104350T DE3578020T DE3578020D1 DE 3578020 D1 DE3578020 D1 DE 3578020D1 DE 8585104350 T DE8585104350 T DE 8585104350T DE 3578020 T DE3578020 T DE 3578020T DE 3578020 D1 DE3578020 D1 DE 3578020D1
Authority
DE
Germany
Prior art keywords
hohanode
thermal
electron beam
gas discharge
beam source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585104350T
Other languages
English (en)
Inventor
Mooyoung Ham
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Spectrum Control Inc
Original Assignee
Spectrum Control Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Spectrum Control Inc filed Critical Spectrum Control Inc
Application granted granted Critical
Publication of DE3578020D1 publication Critical patent/DE3578020D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/38—Cold-cathode tubes
    • H01J17/40—Cold-cathode tubes with one cathode and one anode, e.g. glow tubes, tuning-indicator glow tubes, voltage-stabiliser tubes, voltage-indicator tubes
    • H01J17/44—Cold-cathode tubes with one cathode and one anode, e.g. glow tubes, tuning-indicator glow tubes, voltage-stabiliser tubes, voltage-indicator tubes having one or more control electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/025—Electron guns using a discharge in a gas or a vapour as electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
DE8585104350T 1984-04-16 1985-04-10 Nichtthermische hohlanode-gasentladungselektronenstrahlquelle. Expired - Lifetime DE3578020D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/600,674 US4647818A (en) 1984-04-16 1984-04-16 Nonthermionic hollow anode gas discharge electron beam source

Publications (1)

Publication Number Publication Date
DE3578020D1 true DE3578020D1 (de) 1990-07-05

Family

ID=24404620

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585104350T Expired - Lifetime DE3578020D1 (de) 1984-04-16 1985-04-10 Nichtthermische hohlanode-gasentladungselektronenstrahlquelle.

Country Status (4)

Country Link
US (1) US4647818A (de)
EP (1) EP0158970B1 (de)
JP (1) JPS6122547A (de)
DE (1) DE3578020D1 (de)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6276137A (ja) * 1985-09-30 1987-04-08 Hitachi Ltd イオン源
YU46728B (sh) * 1986-10-23 1994-04-05 VUJO dr. MILJEVIĆ Jonsko-elektronski izvor sa šupljom anodom
US5105123A (en) * 1988-10-27 1992-04-14 Battelle Memorial Institute Hollow electrode plasma excitation source
US5003226A (en) * 1989-11-16 1991-03-26 Avco Research Laboratories Plasma cathode
JP2512204B2 (ja) * 1990-05-09 1996-07-03 三菱電機株式会社 投写型陰極線管
EP0561243B1 (de) * 1992-03-13 1997-08-13 Matsushita Electric Industrial Co., Ltd. Plasma-CVD-Anlage und entsprechendes Verfahren
US20040241454A1 (en) * 1993-10-04 2004-12-02 Shaw David G. Barrier sheet and method of making same
JP3101682B2 (ja) 1993-10-04 2000-10-23 プレステック，インコーポレイティド コンデンサーの誘電体及び酸素バリヤーを形成するのに有用な架橋アクリレートコーティング材料
US5440446A (en) * 1993-10-04 1995-08-08 Catalina Coatings, Inc. Acrylate coating material
US5545375A (en) * 1994-10-03 1996-08-13 Becton, Dickinson And Company Blood collection tube assembly
US5877895A (en) * 1995-03-20 1999-03-02 Catalina Coatings, Inc. Multicolor interference coating
US5811183A (en) * 1995-04-06 1998-09-22 Shaw; David G. Acrylate polymer release coated sheet materials and method of production thereof
US6218004B1 (en) 1995-04-06 2001-04-17 David G. Shaw Acrylate polymer coated sheet materials and method of production thereof
KR0166644B1 (ko) * 1995-11-28 1999-01-15 박주탁 대전력 의사방전 스위치
US5683771A (en) 1996-01-30 1997-11-04 Becton, Dickinson And Company Blood collection tube assembly
US5955161A (en) 1996-01-30 1999-09-21 Becton Dickinson And Company Blood collection tube assembly
US5702770A (en) * 1996-01-30 1997-12-30 Becton, Dickinson And Company Method for plasma processing
US5763033A (en) * 1996-01-30 1998-06-09 Becton, Dickinson And Company Blood collection tube assembly
US5738920A (en) 1996-01-30 1998-04-14 Becton, Dickinson And Company Blood collection tube assembly
US5716683A (en) * 1996-01-30 1998-02-10 Becton, Dickinson And Company Blood collection tube assembly
US5686157A (en) * 1996-01-30 1997-11-11 Becton, Dickinson And Company Blood collection tube assembly
US6203898B1 (en) 1997-08-29 2001-03-20 3M Innovatave Properties Company Article comprising a substrate having a silicone coating
KR100312395B1 (ko) 1998-03-23 2001-11-03 프레스텍, 인크. 유기/무기 혼합층을 갖는 구조물을 사용하는 석판 인쇄 방법
US6251334B1 (en) 1998-03-23 2001-06-26 Presstek, Inc. Composite constructions having mixed organic/inorganic layers
ATE257182T1 (de) 1998-10-23 2004-01-15 Avery Dennison Corp Verfahren zur herstellung von metallplättchen
US20030178734A1 (en) * 1998-10-23 2003-09-25 Karl Josephy Process for making angstrom scale and high aspect functional platelets
US6863851B2 (en) * 1998-10-23 2005-03-08 Avery Dennison Corporation Process for making angstrom scale and high aspect functional platelets
US6802315B2 (en) 2001-03-21 2004-10-12 Hollingsorth & Vose Company Vapor deposition treated electret filter media
FR2833452B1 (fr) * 2001-12-07 2004-03-12 Centre Nat Rech Scient Source d'electrons
US7931787B2 (en) * 2002-02-26 2011-04-26 Donald Bennett Hilliard Electron-assisted deposition process and apparatus
CA2428893C (en) * 2002-05-31 2007-12-18 Thomas & Betts International, Inc. Connector for hard-line coaxial cable
US20040028931A1 (en) * 2002-06-26 2004-02-12 Bletsos Ioannis V. Coated sheet materials and packages made therewith
US7678586B2 (en) * 2005-12-08 2010-03-16 Chartered Semiconductor Manufacturing, Ltd. Structure and method to prevent charge damage from e-beam curing process
KR101481933B1 (ko) * 2005-12-29 2015-01-14 쓰리엠 이노베이티브 프로퍼티즈 컴파니 코팅 공정을 위한 물질의 분무화 방법
EP2088612A1 (de) * 2007-12-21 2009-08-12 Applied Materials, Inc. Verfahren zur Erhitzung oder Reinigung einer Materialbahn oder einer Folie
EP2073243B1 (de) 2007-12-21 2018-10-03 Applied Materials, Inc. Lineare Elektronenquelle sowie Elektronenstrahlverdampfer mit linearer Elektronenquelle und deren Anwendungen
EP2073249B1 (de) * 2007-12-21 2012-06-13 Applied Materials, Inc. Lineare Elektronenquelle und deren Anwendung für die Aufladung von Folien
EP2707098A4 (de) 2011-05-13 2014-05-07 Thomas J Sheperak Plasmagerichtetes elektronenstrahl-wundbehandlungssystem sowie vorrichtung damit und verfahren dafür
EP2739765B1 (de) 2011-08-05 2019-01-16 3M Innovative Properties Company Systeme und verfahren zur verarbeitung von dampf
DE102011112759A1 (de) * 2011-09-08 2013-03-14 Oerlikon Trading Ag, Trübbach Plasmaquelle
CN102523673A (zh) * 2011-12-19 2012-06-27 北京大学 一种采用磁镜场约束的等离子体密封窗及其密封方法
CN112630288B (zh) * 2020-11-17 2021-10-12 燕山大学 一种基于放电的二次电子发射系数测量装置及方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3218431A (en) * 1962-12-27 1965-11-16 Gen Electric Self-focusing electron beam apparatus
US3243570A (en) * 1963-04-30 1966-03-29 Gen Electric Automatic gas pressure control for electron beam apparatus
GB1093133A (en) * 1965-07-16 1967-11-29 Atomic Energy Authority Uk Improvements in or relating to cold cathode glow discharge devices
GB1238451A (de) * 1965-12-30 1971-07-07
US3411035A (en) * 1966-05-31 1968-11-12 Gen Electric Multi-chamber hollow cathode low voltage electron beam apparatus
US3515932A (en) * 1967-04-27 1970-06-02 Hughes Aircraft Co Hollow cathode plasma generator
US3831052A (en) * 1973-05-25 1974-08-20 Hughes Aircraft Co Hollow cathode gas discharge device
NL7407253A (nl) * 1974-05-30 1975-12-02 Philips Nv Gasontladingselektronenkanon voor het opwekken van een elektronenbundel met behulp van een glimontlading.
US4019091A (en) * 1974-05-30 1977-04-19 U.S. Philips Corporation Gas discharge electron gun for generating an electron beam by means of a glow discharge
US3943494A (en) * 1974-06-26 1976-03-09 International Business Machines Corporation Distributed execution processor
US3970892A (en) * 1975-05-19 1976-07-20 Hughes Aircraft Company Ion plasma electron gun
US4297615A (en) * 1979-03-19 1981-10-27 The Regents Of The University Of California High current density cathode structure
JPS6011417B2 (ja) * 1979-10-23 1985-03-26 株式会社東芝 ホロ−カソ−ド放電装置
GB2073942A (en) * 1980-03-21 1981-10-21 Dobson C D Vacuum treatment apparatus
DE3014151C2 (de) * 1980-04-12 1982-11-18 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Generator für gepulste Elektronenstrahlen
US4458180A (en) * 1982-02-18 1984-07-03 Elscint Ltd. Plasma electron source for cold-cathode discharge device or the like

Also Published As

Publication number Publication date
JPS6122547A (ja) 1986-01-31
US4647818A (en) 1987-03-03
EP0158970A1 (de) 1985-10-23
EP0158970B1 (de) 1990-05-30

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Legal Events

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8364 No opposition during term of opposition