DE3506623C3 - Verfahren zum Beschichten eines thermisch widerstandsfähigen Gegenstandes - Google Patents

Verfahren zum Beschichten eines thermisch widerstandsfähigen Gegenstandes

Info

Publication number
DE3506623C3
DE3506623C3 DE19853506623 DE3506623A DE3506623C3 DE 3506623 C3 DE3506623 C3 DE 3506623C3 DE 19853506623 DE19853506623 DE 19853506623 DE 3506623 A DE3506623 A DE 3506623A DE 3506623 C3 DE3506623 C3 DE 3506623C3
Authority
DE
Germany
Prior art keywords
deposited
thickness
layers
coating
microlaminate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE19853506623
Other languages
English (en)
Other versions
DE3506623A1 (de
DE3506623C2 (de
Inventor
James R Snyder
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Parker Pen Products
Original Assignee
Parker Pen Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Parker Pen Co filed Critical Parker Pen Co
Publication of DE3506623A1 publication Critical patent/DE3506623A1/de
Application granted granted Critical
Publication of DE3506623C2 publication Critical patent/DE3506623C2/de
Publication of DE3506623C3 publication Critical patent/DE3506623C3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B37/00—Cases
    • G04B37/22—Materials or processes of manufacturing pocket watch or wrist watch cases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)

Claims (5)

1. Verfahren zum Beschichten eines thermisch widerstandsfähigen Gegenstandes mit mindestens drei sich abwechselnden, lichtdurchlässigen Mikrolaminatschichten aus zwei verschiedenen Materialien, wobei das erste Material im wesentlichen ein Metallnitrid und das zweite Material im wesentlichen ein Edelmetall ist, dadurch gekennzeichnet, daß als erstes Material ein refraktorisches Metallnitrid gewählt wird, das eine ähnliche Färbung aufweist wie das zweite Material; daß die Mikrolaminatschichten in einer Dicke abgeschieden werden, in der keine Wechselwirkung zwischen dem ersten und dem zweiten Material auftritt; und keine Mischschicht entsteht und daß als oberste Schicht eine Schicht aus dem zweiten Material abgeschieden wird.
2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß das erste Material aus einer Gruppe bestehend aus TiN, TaN, ZrN und HfN und das zweite Material aus einer Gruppe bestehend aus Gold und einer Goldlegierung ausgewählt wird.
3. Verfahren nach Anspruch 2, dadurch gekennzeichnet, daß das erste Material im wesentlichen TiN ist.
4. Verfahren nach Anspruch 2 oder 3, dadurch gekennzeichnet, daß die Mikrolaminatschichten aus dem ersten Material in einer Dicke zwischen 0,01 µm und 0,33 µm und die Mikrolaminatschichten aus dem zweiten Material in einer Dicke zwischen 0,003 µm und 0,13 µm abgeschieden werden.
5. Verfahren nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß die Abscheidungsschritte unter Verwendung mindestens zweier in einer einzigen Vakuumkammer angeordneter Kathodenzerstäubungsquellen durchgeführt werden, die hinreichend voneinander getrennt sind, um ein Mischen des ersten und des zweiten Materials auf atomarem Niveau von vorneherein auszuschließen.
DE19853506623 1984-10-26 1985-02-26 Verfahren zum Beschichten eines thermisch widerstandsfähigen Gegenstandes Expired - Lifetime DE3506623C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/665,436 US4591418A (en) 1984-10-26 1984-10-26 Microlaminated coating

Publications (3)

Publication Number Publication Date
DE3506623A1 DE3506623A1 (de) 1986-04-30
DE3506623C2 DE3506623C2 (de) 1988-08-04
DE3506623C3 true DE3506623C3 (de) 1991-05-08

Family

ID=24670105

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19853506623 Expired - Lifetime DE3506623C3 (de) 1984-10-26 1985-02-26 Verfahren zum Beschichten eines thermisch widerstandsfähigen Gegenstandes

Country Status (13)

Country Link
US (1) US4591418A (de)
JP (1) JPS61104069A (de)
KR (1) KR910001772B1 (de)
CN (1) CN1003523B (de)
AU (1) AU570602B2 (de)
BR (1) BR8500366A (de)
CA (1) CA1211073A (de)
CH (1) CH671584A5 (de)
DE (1) DE3506623C3 (de)
FR (1) FR2572421B1 (de)
GB (1) GB2166162B (de)
IN (1) IN162532B (de)
IT (1) IT1184597B (de)

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DE3506623A1 (de) 1986-04-30
GB2166162B (en) 1987-12-31
US4591418A (en) 1986-05-27
BR8500366A (pt) 1986-09-09
DE3506623C2 (de) 1988-08-04
CH671584A5 (de) 1989-09-15
GB8526049D0 (en) 1985-11-27
KR910001772B1 (ko) 1991-03-23
JPH048503B2 (de) 1992-02-17
KR860003363A (ko) 1986-05-23
CA1211073A (en) 1986-09-09
FR2572421A1 (fr) 1986-05-02
CN1003523B (zh) 1989-03-08
IT8521079A0 (it) 1985-06-07
CN85106785A (zh) 1986-05-10
IN162532B (de) 1988-06-04
AU570602B2 (en) 1988-03-17
AU3761885A (en) 1986-05-01
IT1184597B (it) 1987-10-28
JPS61104069A (ja) 1986-05-22
GB2166162A (en) 1986-04-30
FR2572421B1 (fr) 1992-10-09

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