DE3470179D1 - Porous ceramic thin film and process for preparing the same - Google Patents

Porous ceramic thin film and process for preparing the same

Info

Publication number
DE3470179D1
DE3470179D1 DE8484105294T DE3470179T DE3470179D1 DE 3470179 D1 DE3470179 D1 DE 3470179D1 DE 8484105294 T DE8484105294 T DE 8484105294T DE 3470179 T DE3470179 T DE 3470179T DE 3470179 D1 DE3470179 D1 DE 3470179D1
Authority
DE
Germany
Prior art keywords
preparing
thin film
same
porous ceramic
ceramic thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484105294T
Other languages
English (en)
Inventor
Tsutomu Nanseidai Mansio Nanao
Tamiyuki Eguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanegafuchi Chemical Industry Co Ltd
Original Assignee
Kanegafuchi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanegafuchi Chemical Industry Co Ltd filed Critical Kanegafuchi Chemical Industry Co Ltd
Application granted granted Critical
Publication of DE3470179D1 publication Critical patent/DE3470179D1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208—Oxides, e.g. ceramics
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Ceramic Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Catalysts (AREA)
  • Porous Artificial Stone Or Porous Ceramic Products (AREA)
DE8484105294T 1983-05-13 1984-05-10 Porous ceramic thin film and process for preparing the same Expired DE3470179D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58084795A JPS59213660A (ja) 1983-05-13 1983-05-13 多孔性セラミツクス薄膜およびその製造法

Publications (1)

Publication Number Publication Date
DE3470179D1 true DE3470179D1 (en) 1988-05-05

Family

ID=13840631

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484105294T Expired DE3470179D1 (en) 1983-05-13 1984-05-10 Porous ceramic thin film and process for preparing the same

Country Status (5)

Country Link
US (1) US4584280A (de)
EP (1) EP0125639B1 (de)
JP (1) JPS59213660A (de)
CA (1) CA1224985A (de)
DE (1) DE3470179D1 (de)

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JPS59213660A (ja) * 1983-05-13 1984-12-03 鐘淵化学工業株式会社 多孔性セラミツクス薄膜およびその製造法
US4595609A (en) * 1984-11-21 1986-06-17 Regents Of The University Of Minnesota Corrosion resistant tantalum pentaoxide coatings
US4797325A (en) * 1984-12-13 1989-01-10 United Kingdom Atomic Energy Authority Spacecraft materials
US4966742A (en) * 1985-08-20 1990-10-30 Khoury Issam A Preparation of thin ceramic sheets
JPS62195833A (ja) * 1986-02-24 1987-08-28 Toshiba Corp 陰極線管
DE3609814A1 (de) * 1986-03-22 1987-09-24 Basf Ag Elektromagnetische strahlung absorbierende kunststoffmischungen, die ferro- und/oder piezoelektrische stoffe enthalten
US4988671A (en) * 1987-05-20 1991-01-29 Hoechst Celanese Corp. Process for producing a superconductive complex metal oxide
US4978515A (en) * 1987-05-20 1990-12-18 Hoechst Celanese Corp. Perovskite fibers from bimetal complexes
US5096745A (en) * 1987-07-27 1992-03-17 Wisconsin Alumni Research Foundation Preparation of titanium oxide ceramic membranes
US5217754A (en) * 1987-07-27 1993-06-08 Trustees Of The University Of Pennsylvania Organometallic precursors in conjunction with rapid thermal annealing for synthesis of thin film ceramics
US4900536A (en) * 1987-11-16 1990-02-13 Westinghouse Electric Corp. Preparation of precursors for yttrium-containing ceramic superconductors
US5271768A (en) * 1988-02-02 1993-12-21 Hitachi Chemical Co., Ltd. Coating for forming an oxide coating
US4929575A (en) * 1988-03-21 1990-05-29 The Dow Chemical Company Melt processable, green, ceramic precursor powder
US5308687A (en) * 1989-05-09 1994-05-03 Eastman Kodak Company Fiber element containing tin oxide heteropolycondensates with enhanced electrical conductivity
US5316695A (en) * 1989-08-10 1994-05-31 Virginia Tech Intellectual Properties, Inc. Use of polymeric catalyst in synthesis of sol-gel derived ceramic materials
US5202175A (en) * 1989-10-16 1993-04-13 Eastman Kodak Company Thin films of metal phosphates and the method of their formation
US5073410A (en) * 1989-10-16 1991-12-17 Eastman Kodak Company Thin films of metal phosphates and the method of their formation
US5342431A (en) * 1989-10-23 1994-08-30 Wisconsin Alumni Research Foundation Metal oxide membranes for gas separation
US5169576A (en) * 1989-10-23 1992-12-08 Wisconsin Alumni Research Foundation Method of making metal oxide ceramic membranes with small pore sizes
CA2027678C (en) * 1989-10-23 2002-05-28 Marc A. Anderson Metal oxide porous ceramic membranes with small pore sizes
JPH05507120A (ja) * 1990-05-04 1993-10-14 バッテル・メモリアル・インスティチュート 有機官能基で変性した表面上に薄膜層を沈着させる方法及びその方法により形成される生成物
DE4017518A1 (de) * 1990-05-31 1991-12-05 Philips Patentverwaltung Verfahren zur herstellung von monolayer-kondensatoren
US7323581B1 (en) 1990-07-06 2008-01-29 Advanced Technology Materials, Inc. Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition
US5104539A (en) * 1990-08-06 1992-04-14 Wisconsin Alumni Research Foundation Metal oxide porous ceramic membranes with small pore sizes
US5200237A (en) * 1990-10-01 1993-04-06 Associated Universities, Inc. Solid-gel precursor solutions and methods for the fabrication of polymetallicsiloxane coating films
US5110863A (en) * 1990-10-01 1992-05-05 Associated Universities, Inc. Solid-gel precursor solutions and methods for the fabrication of polymetallicsiloxane coating films
JPH0543399A (ja) * 1991-03-08 1993-02-23 Ricoh Co Ltd 薄膜機能部材
US5227342A (en) * 1991-05-01 1993-07-13 Wisconsin Alumni Research Foundation Process of making porous ceramic materials with controlled porosity
DE4304679C2 (de) * 1992-02-17 1996-03-21 Mitsubishi Electric Corp Verfahren zur Herstellung einer dünnen dielektrischen Schicht eines Oxid-Systems unter Verwendung des CVD-Verfahrens
JPH0647286A (ja) * 1992-07-28 1994-02-22 Merck Japan Kk 金属酸化物被覆メタルよりなる触媒用多孔質担体およびその製造方法
US5364693A (en) * 1993-01-25 1994-11-15 Minnesota Mining And Manufacturing Company Orthopedic support materials
US5346939A (en) * 1993-01-25 1994-09-13 Minnesota Mining And Manufacturing Company Water curable resin compositions
US5552351A (en) * 1993-11-29 1996-09-03 Wisconsin Alumni Research Foundation Ceramic membranes having macroscopic channels
US5439624A (en) * 1994-02-14 1995-08-08 Wisconsin Alumni Research Foundation Method for forming porous ceramic materials
GB2290308A (en) * 1994-06-14 1995-12-20 British Ceramic Res Ltd Decorative material
US5679167A (en) * 1994-08-18 1997-10-21 Sulzer Metco Ag Plasma gun apparatus for forming dense, uniform coatings on large substrates
US6506499B1 (en) 1996-11-04 2003-01-14 The Boeing Company Silicon-yttrium sol coating of metals
US6037060A (en) * 1996-11-04 2000-03-14 The Boeing Company Sol for bonding expoxies to aluminum or titanium alloys
US5849110A (en) * 1996-11-04 1998-12-15 The Boeing Company Sol coating of metals
US5789085A (en) * 1996-11-04 1998-08-04 Blohowiak; Kay Y. Paint adhesion
US6605365B1 (en) 1996-11-04 2003-08-12 The Boeing Company Pigmented alkoxyzirconium sol
US5869141A (en) * 1996-11-04 1999-02-09 The Boeing Company Surface pretreatment for sol coating of metals
US5844058A (en) * 1996-12-17 1998-12-01 Brookhaven Science Associates Organosiloxane-grafted natural polymer coatings
JP3182522B2 (ja) * 1996-12-20 2001-07-03 ファインセラミックス技術研究組合 一次元貫通気孔を持つセラミック膜とその製造方法
US6448331B1 (en) * 1997-07-15 2002-09-10 Asahi Kasei Kabushiki Kaisha Alkoxysilane/organic polymer composition for thin insulating film production and use thereof
US6303046B1 (en) * 1997-08-08 2001-10-16 William M. Risen, Jr. Aerogel materials and detectors, liquid and gas absorbing objects, and optical devices comprising same
RU2197423C1 (ru) * 2002-02-19 2003-01-27 Общество с ограниченной ответственностью "Ярси" Способ получения алюмосиликатного пористого материала
US20030211330A1 (en) * 2002-05-09 2003-11-13 Anderson Robert A. Method of preparing a metal material for bonding
US7452843B2 (en) * 2003-12-29 2008-11-18 Umicore Ag & Co. Kg Exhaust treatment devices, catalyst, and methods of making and using the same
WO2005103172A2 (en) * 2004-04-15 2005-11-03 Avery Dennison Corporation Dew resistant coatings
CA2766589A1 (en) * 2009-06-30 2011-01-06 Nanoink, Inc. Advanced photomask repair
EP2880474A4 (de) * 2012-08-01 2016-03-23 Ferro Corp Lichtbeeinflussende nanoschicht

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US30284A (en) * 1860-10-09 Transferring- railroad-cars from one track to another
US3124542A (en) * 1964-03-10 Porous sefractoky heat-insulating ma-
NL282176A (de) * 1961-02-27
NL293139A (de) * 1962-05-23
DE1596839B1 (de) * 1966-05-07 1970-11-26 Jenaer Glaswerk Schott & Gen Verfahren zur Herstellung von Formkoerpern aus Glaesern bei einer Temperatur unterhalb der ueblichen Schmelztemperatur
FR1596613A (de) * 1967-11-20 1970-06-22
US3782982A (en) * 1970-06-12 1974-01-01 Corning Glass Works Products prepared from soluble silicate solutions
US3850665A (en) * 1971-07-08 1974-11-26 Glaverbel Process for forming a metal oxide coating on a substrate and resulting products
CH637355A5 (de) * 1978-10-06 1983-07-29 Millcell Ag Schaumglas-granulat und verfahren zu dessen herstellung.
US4241108A (en) * 1978-10-10 1980-12-23 Rca Corporation Sprayable titanium composition
US4271210A (en) * 1979-10-25 1981-06-02 Westinghouse Electric Corp. Method of forming transmissive, porous metal oxide optical layer of a vitreous substrate
GB2083899B (en) * 1980-09-11 1984-05-31 Atomic Energy Authority Uk Removing water from gels
JPS5777044A (en) * 1980-10-30 1982-05-14 Central Glass Co Ltd Manufacture of glass from metallic alcoholate
US4397338A (en) * 1981-11-02 1983-08-09 Cunningham & Thompson, Inc. Heat resistant protective coating
JPS59213660A (ja) * 1983-05-13 1984-12-03 鐘淵化学工業株式会社 多孔性セラミツクス薄膜およびその製造法

Also Published As

Publication number Publication date
EP0125639A1 (de) 1984-11-21
JPH0254302B2 (de) 1990-11-21
CA1224985A (en) 1987-08-04
US4584280A (en) 1986-04-22
EP0125639B1 (de) 1988-03-30
JPS59213660A (ja) 1984-12-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee