DE1913881A1 - Device for crucible-free zone melting - Google Patents

Device for crucible-free zone melting

Info

Publication number
DE1913881A1
DE1913881A1 DE19691913881 DE1913881A DE1913881A1 DE 1913881 A1 DE1913881 A1 DE 1913881A1 DE 19691913881 DE19691913881 DE 19691913881 DE 1913881 A DE1913881 A DE 1913881A DE 1913881 A1 DE1913881 A1 DE 1913881A1
Authority
DE
Germany
Prior art keywords
crucible
free zone
zone melting
melting
free
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19691913881
Other languages
German (de)
Other versions
DE1913881B2 (en
DE1913881C (en
Inventor
Keller Dr Rer Nat Wolfgang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19691913881 priority Critical patent/DE1913881B2/en
Priority to NL6918529A priority patent/NL6918529A/xx
Priority to US19290A priority patent/US3644151A/en
Priority to CH393570A priority patent/CH557199A/en
Priority to SE03678/70A priority patent/SE355957B/xx
Priority to GB02943/70A priority patent/GB1256438A/en
Priority to FR7009703A priority patent/FR2039037A5/fr
Publication of DE1913881A1 publication Critical patent/DE1913881A1/en
Publication of DE1913881B2 publication Critical patent/DE1913881B2/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/02Induction heating
    • H05B6/06Control, e.g. of temperature, of power
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16Heating of the molten zone
    • C30B13/20Heating of the molten zone by induction, e.g. hot wire technique
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1088Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Induction Heating (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
DE19691913881 1969-03-19 1969-03-19 Device for crucible-free zone melting Pending DE1913881B2 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
DE19691913881 DE1913881B2 (en) 1969-03-19 1969-03-19 Device for crucible-free zone melting
NL6918529A NL6918529A (en) 1969-03-19 1969-12-10
US19290A US3644151A (en) 1969-03-19 1970-03-13 Method and device for crucible-free zone melting a crystalline rod
CH393570A CH557199A (en) 1969-03-19 1970-03-17 DEVICE FOR CRUCIBLE-FREE ZONE MELTING OF A SEMICONDUCTOR ROD.
SE03678/70A SE355957B (en) 1969-03-19 1970-03-18
GB02943/70A GB1256438A (en) 1969-03-19 1970-03-18 Improvements in or relating to non-crucible zone melting
FR7009703A FR2039037A5 (en) 1969-03-19 1970-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691913881 DE1913881B2 (en) 1969-03-19 1969-03-19 Device for crucible-free zone melting

Publications (2)

Publication Number Publication Date
DE1913881A1 true DE1913881A1 (en) 1970-10-22
DE1913881B2 DE1913881B2 (en) 1970-10-22

Family

ID=5728595

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19691913881 Pending DE1913881B2 (en) 1969-03-19 1969-03-19 Device for crucible-free zone melting

Country Status (7)

Country Link
US (1) US3644151A (en)
CH (1) CH557199A (en)
DE (1) DE1913881B2 (en)
FR (1) FR2039037A5 (en)
GB (1) GB1256438A (en)
NL (1) NL6918529A (en)
SE (1) SE355957B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2220519C3 (en) * 1972-04-26 1982-03-11 Siemens AG, 1000 Berlin und 8000 München Process for crucible-free zone melting of semiconductor rods
DK578077A (en) * 1976-12-27 1978-06-28 Monsanto Co APPLIANCE FOR HIGH-FREQUENCY INDUCTION HEATING A LIQUID ZONE WHEN CLEANING SEMICONDUCTOR MATERIALS
US4220626A (en) * 1978-04-13 1980-09-02 Monsanto Company RF Induction heating circuits for float zone refining of semiconductor rods
DE3143146A1 (en) * 1981-10-30 1983-05-11 Siemens AG, 1000 Berlin und 8000 München INDUCTION HEATING COIL DESIGNED AS A FLAT COIL FOR POT-FREE ZONE MELTING
DE3226713A1 (en) * 1982-07-16 1984-01-19 Siemens AG, 1000 Berlin und 8000 München INDUCTION HEATING COIL DESIGNED AS A FLAT COIL FOR POT-FREE ZONE MELTING
DE3229461A1 (en) * 1982-08-06 1984-02-09 Siemens AG, 1000 Berlin und 8000 München DEVICE FOR POT-FREE ZONE MELTING OF A SEMICONDUCTOR STICK, PARTICULARLY MADE OF SILICON
DE3836239A1 (en) * 1988-10-25 1990-04-26 Deutsche Forsch Luft Raumfahrt DEVICE FOR TANKLESS POSITIONING AND MELTING OF ELECTRICALLY CONDUCTIVE MATERIALS
JP2016157567A (en) * 2015-02-24 2016-09-01 高周波熱錬株式会社 Heating device and heating coil

Also Published As

Publication number Publication date
FR2039037A5 (en) 1971-01-08
US3644151A (en) 1972-02-22
GB1256438A (en) 1971-12-08
NL6918529A (en) 1970-09-22
DE1913881B2 (en) 1970-10-22
SE355957B (en) 1973-05-14
CH557199A (en) 1974-12-31

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Legal Events

Date Code Title Description
E771 Valid patent as to the heymanns-index 1977, willingness to grant licences