DE112013005662T8 - Verfahren zum Herstellen einer Piezokeramik, Piezokeramik und piezoelektrisches Element - Google Patents

Verfahren zum Herstellen einer Piezokeramik, Piezokeramik und piezoelektrisches Element Download PDF

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Publication number
DE112013005662T8
DE112013005662T8 DE112013005662.3T DE112013005662T DE112013005662T8 DE 112013005662 T8 DE112013005662 T8 DE 112013005662T8 DE 112013005662 T DE112013005662 T DE 112013005662T DE 112013005662 T8 DE112013005662 T8 DE 112013005662T8
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Germany
Prior art keywords
piezoceramic
producing
piezoelectric element
piezoelectric
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Expired - Fee Related
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DE112013005662.3T
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English (en)
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DE112013005662T5 (de
Inventor
Shuji Yamanaka
Genei Nakajima
Tomotsugu Kato
Kenya Tanaka
Tomoaki Karaki
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Toyama Prefectural University
Proterial Ltd
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Toyama Prefecture
Hitachi Metals Ltd
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Publication of DE112013005662T5 publication Critical patent/DE112013005662T5/de
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Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8536—Alkaline earth metal based oxides, e.g. barium titanates
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/093—Forming inorganic materials
    • H10N30/097—Forming inorganic materials by sintering
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    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
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    • H10N30/85—Piezoelectric or electrostrictive active materials
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    • H10N30/8542—Alkali metal based oxides, e.g. lithium, sodium or potassium niobates
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3201—Alkali metal oxides or oxide-forming salts thereof
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3232—Titanium oxides or titanates, e.g. rutile or anatase
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    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3251—Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof
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    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
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    • C04B2235/658—Atmosphere during thermal treatment
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    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6583—Oxygen containing atmosphere, e.g. with changing oxygen pressures
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    • C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
    • H—ELECTRICITY
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    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)
DE112013005662.3T 2012-11-27 2013-11-27 Verfahren zum Herstellen einer Piezokeramik, Piezokeramik und piezoelektrisches Element Expired - Fee Related DE112013005662T8 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP2012258677 2012-11-27
JP2012258677 2012-11-27
PCT/JP2013/081929 WO2014084265A1 (ja) 2012-11-27 2013-11-27 圧電セラミックスの製造方法、圧電セラミックス、および圧電素子

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DE112013005662T5 DE112013005662T5 (de) 2015-08-20
DE112013005662T8 true DE112013005662T8 (de) 2015-09-03

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Country Status (5)

Country Link
US (1) US20150311425A1 (de)
JP (1) JP5710077B2 (de)
CN (1) CN105008305A (de)
DE (1) DE112013005662T8 (de)
WO (1) WO2014084265A1 (de)

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JP5754660B2 (ja) * 2013-06-28 2015-07-29 セイコーエプソン株式会社 圧電材料、圧電素子、液体噴射ヘッド、液体噴射装置、超音波センサー、圧電モーター及び発電装置
US20170309810A1 (en) * 2014-12-26 2017-10-26 Seiko Epson Corporation Piezoelectric material, method of manufacturing the same, piezoelectric element, and piezoelectric element application device
CN107004758A (zh) 2014-12-26 2017-08-01 精工爱普生株式会社 压电材料及其制造方法、以及压电元件和压电元件应用设备
WO2017006984A1 (ja) * 2015-07-09 2017-01-12 株式会社村田製作所 圧電セラミック電子部品、及び圧電セラミック電子部品の製造方法
CN109400146B (zh) * 2018-12-14 2021-06-18 中国人民解放军国防科技大学 一种高居里温度压电陶瓷及其制备方法
CN110981467B (zh) * 2019-12-09 2020-12-29 华中科技大学 一种无铅热释电复合陶瓷材料及其制备方法
CN112321317B (zh) * 2020-11-05 2022-04-01 南京工业大学 一种多孔氧化硅压电陶瓷膜制备方法
CN113321508B (zh) * 2021-06-30 2022-08-12 福州大学 一种促进铌酸钾钠基无铅压电陶瓷冷烧结的方法
CN115465892B (zh) * 2022-09-21 2024-06-14 北京大学人民医院 一种纳米颗粒、其制备方法及应用

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US5259885A (en) * 1991-04-03 1993-11-09 American Superconductor Corporation Process for making ceramic/metal and ceramic/ceramic laminates by oxidation of a metal precursor
JP3259677B2 (ja) * 1998-02-18 2002-02-25 株式会社村田製作所 圧電磁器組成物
JP3783534B2 (ja) * 2000-08-18 2006-06-07 株式会社村田製作所 圧電磁器焼結体および圧電磁器素子
EP1630149B1 (de) * 2003-05-29 2013-10-09 NGK Spark Plug Co., Ltd. Piezoelektrische keramikzusammensetzung und diese enthaltendes piezoelektrisches element
WO2005021461A1 (ja) * 2003-08-28 2005-03-10 National Institute Of Advanced Industrial Science And Technology ペロブスカイト固溶体組成物およびこのものから得られる圧電セラミックス
CN100386291C (zh) * 2004-07-15 2008-05-07 清华大学 铌酸钾钠系无铅压电陶瓷及其制备方法
JP4993056B2 (ja) * 2004-09-29 2012-08-08 Ｔｄｋ株式会社 積層型圧電素子の製造方法及び酸素供給方法
JP3945536B2 (ja) * 2005-04-28 2007-07-18 株式会社村田製作所 圧電体磁器組成物、及び該圧電体磁器組成物の製造方法、並びに圧電セラミック電子部品
DE112006003755B4 (de) * 2006-02-17 2011-06-01 Murata Mfg. Co., Ltd., Nagaokakyo-shi Piezoelektrische Keramikzusammensetzung
JP2007258280A (ja) * 2006-03-20 2007-10-04 Tdk Corp 積層型圧電素子
KR101238870B1 (ko) * 2007-06-15 2013-03-04 가부시키가이샤 무라타 세이사쿠쇼 압전 자기 조성물, 및 압전 세라믹 전자부품
JP5561483B2 (ja) * 2008-10-28 2014-07-30 株式会社村田製作所 圧電セラミック電子部品
JP5748493B2 (ja) * 2010-02-10 2015-07-15 キヤノン株式会社 配向性酸化物セラミックスの製造方法、配向性酸化物セラミックス、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置
WO2012141105A1 (ja) * 2011-04-15 2012-10-18 株式会社村田製作所 圧電体薄膜素子

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JPWO2014084265A1 (ja) 2017-01-05
CN105008305A (zh) 2015-10-28
WO2014084265A1 (ja) 2014-06-05
JP5710077B2 (ja) 2015-04-30
US20150311425A1 (en) 2015-10-29
DE112013005662T5 (de) 2015-08-20

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