DE10213579A1 - Deformierbare Spiegelvorrichtung - Google Patents
Deformierbare SpiegelvorrichtungInfo
- Publication number
- DE10213579A1 DE10213579A1 DE10213579A DE10213579A DE10213579A1 DE 10213579 A1 DE10213579 A1 DE 10213579A1 DE 10213579 A DE10213579 A DE 10213579A DE 10213579 A DE10213579 A DE 10213579A DE 10213579 A1 DE10213579 A1 DE 10213579A1
- Authority
- DE
- Germany
- Prior art keywords
- light
- deformable element
- element according
- bending
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/435—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material
- B41J2/465—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using masks, e.g. light-switching masks
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
Description
Claims (30)
einer federnden, flexiblen langgezogenen Einrichtung, wel che eine Licht-reflektierende Oberfläche aufweist, wobei die Einrichtung auf einem Substrat angebracht ist und biegbar um eine Achse angeordnet ist,
wobei eine Länge der Einrichtung in einer Richtung paral lel zu der Achse größer als eine Breite der Einrichtung in einer Richtung rechtwinklig zu der Achse ist.
Bereitstellen eines Lichtmodulators nach Anspruch 22;
Richten eines Lichtstrahls zum Reflektieren von der re flektiven Einrichtung des reflektiven Elements; und
Biegen eines oder mehrerer der reflektiven Einrichtungen um deren Achsen.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/816,751 | 2001-03-26 | ||
US09/816,751 US6661561B2 (en) | 2001-03-26 | 2001-03-26 | High frequency deformable mirror device |
Publications (2)
Publication Number | Publication Date |
---|---|
DE10213579A1 true DE10213579A1 (de) | 2002-12-05 |
DE10213579B4 DE10213579B4 (de) | 2011-08-11 |
Family
ID=25221516
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE10213579A Expired - Fee Related DE10213579B4 (de) | 2001-03-26 | 2002-03-26 | Deformierbare Spiegelvorrichtung |
Country Status (2)
Country | Link |
---|---|
US (2) | US6661561B2 (de) |
DE (1) | DE10213579B4 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010028111A1 (de) * | 2010-04-22 | 2011-10-27 | Technische Universität Dresden | Mikromechanisches Element |
Families Citing this family (110)
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US7550794B2 (en) | 2002-09-20 | 2009-06-23 | Idc, Llc | Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer |
US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
KR100703140B1 (ko) | 1998-04-08 | 2007-04-05 | 이리다임 디스플레이 코포레이션 | 간섭 변조기 및 그 제조 방법 |
JP3760810B2 (ja) * | 2001-07-06 | 2006-03-29 | ソニー株式会社 | 光変調素子、glvデバイス、及びレーザディスプレイ |
US20030025981A1 (en) * | 2001-07-31 | 2003-02-06 | Ball Semiconductor, Inc. | Micromachined optical phase shift device |
JP3770158B2 (ja) * | 2001-12-26 | 2006-04-26 | ソニー株式会社 | Mems素子の製造方法 |
US6856068B2 (en) * | 2002-02-28 | 2005-02-15 | Pts Corporation | Systems and methods for overcoming stiction |
US7781850B2 (en) | 2002-09-20 | 2010-08-24 | Qualcomm Mems Technologies, Inc. | Controlling electromechanical behavior of structures within a microelectromechanical systems device |
EP1590698A4 (de) | 2003-01-24 | 2009-07-22 | Univ Montana State | Variable ausserachsen-fokussierung und aberrationssteuerspiegel und verfahren |
US20070035855A1 (en) * | 2003-03-03 | 2007-02-15 | Dickensheets David L | Miniature confocal optical device, system, and method |
US6873398B2 (en) * | 2003-05-21 | 2005-03-29 | Esko-Graphics A/S | Method and apparatus for multi-track imaging using single-mode beams and diffraction-limited optics |
TW570896B (en) | 2003-05-26 | 2004-01-11 | Prime View Int Co Ltd | A method for fabricating an interference display cell |
US6998758B2 (en) * | 2003-06-05 | 2006-02-14 | Lucent Technologies Inc. | Deformable MEMS mirror with membrane actuated by application of torque |
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JP4125648B2 (ja) * | 2003-08-11 | 2008-07-30 | 大倉インダストリー株式会社 | ライン状光ビーム発生装置及びレーザ顕微鏡 |
NL1024171C2 (nl) * | 2003-08-27 | 2005-03-01 | Amc Amsterdam | Krachtsensor en laparoscopisch instrument voorzien van een dergelijke krachtsensor. |
CA2464207C (en) * | 2004-04-14 | 2011-03-29 | Institut National D'optique | Light modulating microdevice |
US7476327B2 (en) * | 2004-05-04 | 2009-01-13 | Idc, Llc | Method of manufacture for microelectromechanical devices |
US7068417B2 (en) * | 2004-07-28 | 2006-06-27 | Miradia Inc. | Method and apparatus for a reflective spatial light modulator with a flexible pedestal |
JP4442505B2 (ja) * | 2004-07-30 | 2010-03-31 | ソニー株式会社 | 変形可能ミラー装置、変形ミラー板 |
US7289259B2 (en) | 2004-09-27 | 2007-10-30 | Idc, Llc | Conductive bus structure for interferometric modulator array |
US7304784B2 (en) | 2004-09-27 | 2007-12-04 | Idc, Llc | Reflective display device having viewable display on both sides |
US7944599B2 (en) | 2004-09-27 | 2011-05-17 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
US7302157B2 (en) * | 2004-09-27 | 2007-11-27 | Idc, Llc | System and method for multi-level brightness in interferometric modulation |
US7369296B2 (en) | 2004-09-27 | 2008-05-06 | Idc, Llc | Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator |
US7420725B2 (en) | 2004-09-27 | 2008-09-02 | Idc, Llc | Device having a conductive light absorbing mask and method for fabricating same |
US7130104B2 (en) | 2004-09-27 | 2006-10-31 | Idc, Llc | Methods and devices for inhibiting tilting of a mirror in an interferometric modulator |
US7321456B2 (en) | 2004-09-27 | 2008-01-22 | Idc, Llc | Method and device for corner interferometric modulation |
US7527995B2 (en) | 2004-09-27 | 2009-05-05 | Qualcomm Mems Technologies, Inc. | Method of making prestructure for MEMS systems |
US7612932B2 (en) | 2004-09-27 | 2009-11-03 | Idc, Llc | Microelectromechanical device with optical function separated from mechanical and electrical function |
US7630119B2 (en) | 2004-09-27 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Apparatus and method for reducing slippage between structures in an interferometric modulator |
US8008736B2 (en) | 2004-09-27 | 2011-08-30 | Qualcomm Mems Technologies, Inc. | Analog interferometric modulator device |
US7417783B2 (en) | 2004-09-27 | 2008-08-26 | Idc, Llc | Mirror and mirror layer for optical modulator and method |
US7936497B2 (en) | 2004-09-27 | 2011-05-03 | Qualcomm Mems Technologies, Inc. | MEMS device having deformable membrane characterized by mechanical persistence |
US7684104B2 (en) | 2004-09-27 | 2010-03-23 | Idc, Llc | MEMS using filler material and method |
US7372613B2 (en) | 2004-09-27 | 2008-05-13 | Idc, Llc | Method and device for multistate interferometric light modulation |
US7564612B2 (en) | 2004-09-27 | 2009-07-21 | Idc, Llc | Photonic MEMS and structures |
US7583429B2 (en) | 2004-09-27 | 2009-09-01 | Idc, Llc | Ornamental display device |
CN1769945A (zh) * | 2004-09-30 | 2006-05-10 | 富士胶片株式会社 | 微型机电式调制元件和微型机电式调制元件阵列 |
KR100640872B1 (ko) * | 2004-10-06 | 2006-11-02 | 엘지전자 주식회사 | 투사표시장치 |
WO2006086029A2 (en) * | 2004-11-19 | 2006-08-17 | Trustees Of Boston University | Mems based retroreflector |
US7484857B2 (en) * | 2004-11-30 | 2009-02-03 | Massachusetts Institute Of Technology | Light modulating mirror device and array |
US7463406B2 (en) * | 2004-12-31 | 2008-12-09 | Au Optronics Corp. | Method for fabricating microelectromechanical optical display devices |
US7573631B1 (en) * | 2005-02-22 | 2009-08-11 | Silicon Light Machines Corporation | Hybrid analog/digital spatial light modulator |
CA2507177C (en) * | 2005-05-13 | 2012-04-24 | Institut National D'optique | Image projector with flexible reflective analog modulator |
US7884989B2 (en) | 2005-05-27 | 2011-02-08 | Qualcomm Mems Technologies, Inc. | White interferometric modulators and methods for forming the same |
US20070064293A1 (en) * | 2005-09-16 | 2007-03-22 | Texas Instruments Incorporated | Method of adjusting the resonant frequency of an assembled torsional hinged device |
US7630114B2 (en) | 2005-10-28 | 2009-12-08 | Idc, Llc | Diffusion barrier layer for MEMS devices |
US7795061B2 (en) | 2005-12-29 | 2010-09-14 | Qualcomm Mems Technologies, Inc. | Method of creating MEMS device cavities by a non-etching process |
US7916980B2 (en) | 2006-01-13 | 2011-03-29 | Qualcomm Mems Technologies, Inc. | Interconnect structure for MEMS device |
US7382515B2 (en) | 2006-01-18 | 2008-06-03 | Qualcomm Mems Technologies, Inc. | Silicon-rich silicon nitrides as etch stops in MEMS manufacture |
US7711239B2 (en) | 2006-04-19 | 2010-05-04 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device and method utilizing nanoparticles |
US7649671B2 (en) | 2006-06-01 | 2010-01-19 | Qualcomm Mems Technologies, Inc. | Analog interferometric modulator device with electrostatic actuation and release |
US7835061B2 (en) | 2006-06-28 | 2010-11-16 | Qualcomm Mems Technologies, Inc. | Support structures for free-standing electromechanical devices |
US7527998B2 (en) | 2006-06-30 | 2009-05-05 | Qualcomm Mems Technologies, Inc. | Method of manufacturing MEMS devices providing air gap control |
US7763546B2 (en) | 2006-08-02 | 2010-07-27 | Qualcomm Mems Technologies, Inc. | Methods for reducing surface charges during the manufacture of microelectromechanical systems devices |
JP4398507B2 (ja) * | 2006-08-21 | 2010-01-13 | ソニー株式会社 | 光学素子、光学素子作製用原盤の製造方法、および光電変換装置 |
US7629197B2 (en) | 2006-10-18 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Spatial light modulator |
US7706042B2 (en) | 2006-12-20 | 2010-04-27 | Qualcomm Mems Technologies, Inc. | MEMS device and interconnects for same |
US8115987B2 (en) | 2007-02-01 | 2012-02-14 | Qualcomm Mems Technologies, Inc. | Modulating the intensity of light from an interferometric reflector |
BE1017522A6 (nl) * | 2007-03-21 | 2008-11-04 | Flooring Ind Ltd | Werkwijze voor het vervaardigen van vloerpanelen, alsmede vloerpaneel en halfproduct hierbij verkregen. |
US7742220B2 (en) | 2007-03-28 | 2010-06-22 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device and method utilizing conducting layers separated by stops |
US7715085B2 (en) | 2007-05-09 | 2010-05-11 | Qualcomm Mems Technologies, Inc. | Electromechanical system having a dielectric movable membrane and a mirror |
US7643202B2 (en) | 2007-05-09 | 2010-01-05 | Qualcomm Mems Technologies, Inc. | Microelectromechanical system having a dielectric movable membrane and a mirror |
US7719752B2 (en) | 2007-05-11 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same |
US7643199B2 (en) | 2007-06-19 | 2010-01-05 | Qualcomm Mems Technologies, Inc. | High aperture-ratio top-reflective AM-iMod displays |
US7782517B2 (en) | 2007-06-21 | 2010-08-24 | Qualcomm Mems Technologies, Inc. | Infrared and dual mode displays |
US7630121B2 (en) | 2007-07-02 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
US8068268B2 (en) | 2007-07-03 | 2011-11-29 | Qualcomm Mems Technologies, Inc. | MEMS devices having improved uniformity and methods for making them |
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EP2183623A1 (de) | 2007-07-31 | 2010-05-12 | Qualcomm Mems Technologies, Inc. | Einrichtungen zur verstärkung der farbverschiebung interferometrischer modulatoren |
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US7859740B2 (en) | 2008-07-11 | 2010-12-28 | Qualcomm Mems Technologies, Inc. | Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control |
US7855826B2 (en) | 2008-08-12 | 2010-12-21 | Qualcomm Mems Technologies, Inc. | Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices |
US8358266B2 (en) | 2008-09-02 | 2013-01-22 | Qualcomm Mems Technologies, Inc. | Light turning device with prismatic light turning features |
US8270056B2 (en) | 2009-03-23 | 2012-09-18 | Qualcomm Mems Technologies, Inc. | Display device with openings between sub-pixels and method of making same |
CN102449511A (zh) | 2009-05-29 | 2012-05-09 | 高通Mems科技公司 | 照明装置及其制造方法 |
US8270062B2 (en) | 2009-09-17 | 2012-09-18 | Qualcomm Mems Technologies, Inc. | Display device with at least one movable stop element |
US8488228B2 (en) | 2009-09-28 | 2013-07-16 | Qualcomm Mems Technologies, Inc. | Interferometric display with interferometric reflector |
EP2556403A1 (de) | 2010-04-09 | 2013-02-13 | Qualcomm Mems Technologies, Inc. | Mechanische schicht einer elektromechanischen vorrichtung und verfahren zu ihrer herstellung |
BE1019383A3 (nl) | 2010-06-23 | 2012-06-05 | Flooring Ind Ltd Sarl | Werkwijze voor het vervaardigen van panelen en paneel hierbij bekomen. |
EP2606485A1 (de) | 2010-08-17 | 2013-06-26 | Qualcomm Mems Technologies, Inc. | Betätigung und kalibrierung einer ladungsneutralen elektrode bei einer interferometrischen anzeigevorrichtung |
US9057872B2 (en) | 2010-08-31 | 2015-06-16 | Qualcomm Mems Technologies, Inc. | Dielectric enhanced mirror for IMOD display |
US9134527B2 (en) | 2011-04-04 | 2015-09-15 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
US8963159B2 (en) | 2011-04-04 | 2015-02-24 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
US8659816B2 (en) | 2011-04-25 | 2014-02-25 | Qualcomm Mems Technologies, Inc. | Mechanical layer and methods of making the same |
US8736939B2 (en) | 2011-11-04 | 2014-05-27 | Qualcomm Mems Technologies, Inc. | Matching layer thin-films for an electromechanical systems reflective display device |
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CN108892098B (zh) * | 2018-06-20 | 2020-09-29 | 青岛科技大学 | 一种偏转可控的mems微型反射镜结构 |
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-
2001
- 2001-03-26 US US09/816,751 patent/US6661561B2/en not_active Expired - Fee Related
-
2002
- 2002-03-26 DE DE10213579A patent/DE10213579B4/de not_active Expired - Fee Related
-
2003
- 2003-10-22 US US10/689,719 patent/US6836352B2/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010028111A1 (de) * | 2010-04-22 | 2011-10-27 | Technische Universität Dresden | Mikromechanisches Element |
DE102010028111B4 (de) * | 2010-04-22 | 2016-01-21 | Technische Universität Dresden | Mikromechanisches Element |
Also Published As
Publication number | Publication date |
---|---|
US6661561B2 (en) | 2003-12-09 |
US6836352B2 (en) | 2004-12-28 |
DE10213579B4 (de) | 2011-08-11 |
US20040114209A1 (en) | 2004-06-17 |
US20020135857A1 (en) | 2002-09-26 |
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