DE69101393T2 - Kodierer. - Google Patents

Kodierer.

Info

Publication number
DE69101393T2
DE69101393T2 DE69101393T DE69101393T DE69101393T2 DE 69101393 T2 DE69101393 T2 DE 69101393T2 DE 69101393 T DE69101393 T DE 69101393T DE 69101393 T DE69101393 T DE 69101393T DE 69101393 T2 DE69101393 T2 DE 69101393T2
Authority
DE
Germany
Prior art keywords
encoder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69101393T
Other languages
English (en)
Other versions
DE69101393D1 (de
Inventor
Renshi Sawada
Hidenao Tanaka
Osamu Ohguchi
Junichi Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Publication of DE69101393D1 publication Critical patent/DE69101393D1/de
Application granted granted Critical
Publication of DE69101393T2 publication Critical patent/DE69101393T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
DE69101393T 1990-04-09 1991-04-09 Kodierer. Expired - Fee Related DE69101393T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2093514A JP3034899B2 (ja) 1990-04-09 1990-04-09 エンコーダ

Publications (2)

Publication Number Publication Date
DE69101393D1 DE69101393D1 (de) 1994-04-21
DE69101393T2 true DE69101393T2 (de) 1994-11-17

Family

ID=14084452

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69101393T Expired - Fee Related DE69101393T2 (de) 1990-04-09 1991-04-09 Kodierer.

Country Status (4)

Country Link
US (1) US5113071A (de)
EP (1) EP0451780B1 (de)
JP (1) JP3034899B2 (de)
DE (1) DE69101393T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3008641B2 (ja) * 1992-01-31 2000-02-14 キヤノン株式会社 変位検出装置
JPH0818152A (ja) * 1994-06-30 1996-01-19 Sony Corp 光半導体装置及びその製造方法
KR100348674B1 (ko) * 1994-09-26 2002-11-07 스미또모 가가꾸 고교 가부시끼가이샤 광학이방체필름,이의제조방법및액정표시장치
GB2308441B (en) * 1995-12-22 1999-09-01 Ramar Technology Ltd Rotation sensor
JP2002228491A (ja) * 2001-02-05 2002-08-14 Mitsutoyo Corp 光学式エンコーダ用発光光源装置
JP4093941B2 (ja) * 2003-09-22 2008-06-04 シャープ株式会社 速度計、変位計、振動計および電子機器
JP4142528B2 (ja) * 2003-08-08 2008-09-03 シャープ株式会社 速度計、変位計および振動計
US7601947B2 (en) 2006-05-19 2009-10-13 Nikon Corporation Encoder that optically detects positional information of a scale
JP4924884B2 (ja) * 2006-05-19 2012-04-25 株式会社ニコン エンコーダ
JP4962773B2 (ja) * 2007-02-05 2012-06-27 株式会社ニコン エンコーダ
US7864336B2 (en) * 2008-04-28 2011-01-04 Agilent Technologies, Inc. Compact Littrow encoder
JP5542071B2 (ja) * 2011-01-26 2014-07-09 日本電信電話株式会社 光集積回路

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3819274A (en) * 1972-02-22 1974-06-25 Genevoise Instr Physique Method of reading and interpolation for a precision rule and apparatus for carrying it out
US3818274A (en) * 1973-03-29 1974-06-18 Gte Automatic Electric Lab Inc Remote sensing voltage clamping circuit
FR2235354A1 (en) * 1973-06-29 1975-01-24 Thomson Csf Photoelectric optical test sensor - measures displacement of a diffraction screen with constant spacing in the test sensor plane
JPS57135313A (en) * 1981-02-16 1982-08-20 Fanuc Ltd Pulse encoder
JPS58225684A (ja) * 1982-06-24 1983-12-27 Agency Of Ind Science & Technol 半導体レ−ザ装置
JPS6212814A (ja) * 1985-07-10 1987-01-21 Canon Inc ロ−タリ−エンコ−ダ−
DE3702314C1 (de) * 1987-01-27 1988-01-14 Heidenhain Gmbh Dr Johannes Lichtelektrische Messeinrichtung
US4883955A (en) * 1987-02-25 1989-11-28 Asahi Kogaku Kogyo K.K. Optical encoder with converging means
US4899048A (en) * 1987-04-27 1990-02-06 Printware, Inc. Focused optical beam encoder of position
JPH0718714B2 (ja) * 1988-05-10 1995-03-06 キヤノン株式会社 エンコーダー
US5003600A (en) * 1989-08-03 1991-03-26 The United States Of America As Represented By The Department Of Energy Diffraction gratings used as identifying markers

Also Published As

Publication number Publication date
DE69101393D1 (de) 1994-04-21
JP3034899B2 (ja) 2000-04-17
EP0451780B1 (de) 1994-03-16
US5113071A (en) 1992-05-12
JPH03291523A (ja) 1991-12-20
EP0451780A1 (de) 1991-10-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee