DE102013109637A1 - Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe - Google Patents

Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe Download PDF

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Publication number
DE102013109637A1
DE102013109637A1 DE102013109637.9A DE102013109637A DE102013109637A1 DE 102013109637 A1 DE102013109637 A1 DE 102013109637A1 DE 102013109637 A DE102013109637 A DE 102013109637A DE 102013109637 A1 DE102013109637 A1 DE 102013109637A1
Authority
DE
Germany
Prior art keywords
vacuum pump
housing
housing part
attached
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE102013109637.9A
Other languages
German (de)
English (en)
Inventor
Tobias Stoll
Michael Schweighöfer
Robert Watz
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to DE102013109637.9A priority Critical patent/DE102013109637A1/de
Priority to EP14181981.3A priority patent/EP2846044B1/fr
Priority to JP2014174995A priority patent/JP5902777B2/ja
Priority to US14/474,536 priority patent/US20150064033A1/en
Publication of DE102013109637A1 publication Critical patent/DE102013109637A1/de
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE102013109637.9A 2013-09-04 2013-09-04 Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe Pending DE102013109637A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE102013109637.9A DE102013109637A1 (de) 2013-09-04 2013-09-04 Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe
EP14181981.3A EP2846044B1 (fr) 2013-09-04 2014-08-22 Pompe à vide et système doté d'une pompe à vide
JP2014174995A JP5902777B2 (ja) 2013-09-04 2014-08-29 真空ポンプ及び真空ポンプを有する装置
US14/474,536 US20150064033A1 (en) 2013-09-04 2014-09-02 Vacuum pump and arrangement with vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013109637.9A DE102013109637A1 (de) 2013-09-04 2013-09-04 Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe

Publications (1)

Publication Number Publication Date
DE102013109637A1 true DE102013109637A1 (de) 2015-03-05

Family

ID=51383656

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102013109637.9A Pending DE102013109637A1 (de) 2013-09-04 2013-09-04 Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe

Country Status (4)

Country Link
US (1) US20150064033A1 (fr)
EP (1) EP2846044B1 (fr)
JP (1) JP5902777B2 (fr)
DE (1) DE102013109637A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015111049B4 (de) 2015-07-08 2022-10-13 Pfeiffer Vacuum Gmbh Vakuumpumpe

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3085963B1 (fr) * 2015-04-20 2019-09-04 Pfeiffer Vacuum Gmbh Pompe à vide
EP3112688B2 (fr) * 2015-07-01 2022-05-11 Pfeiffer Vacuum GmbH Pompe à vide à débit partagé et système à vide doté d'une pompe à débit partagé
EP3135917B1 (fr) * 2015-08-24 2020-10-07 Pfeiffer Vacuum Gmbh Pompe à vide
JP6578838B2 (ja) * 2015-09-15 2019-09-25 株式会社島津製作所 真空ポンプおよび質量分析装置
WO2020071872A1 (fr) * 2018-10-05 2020-04-09 (주)오메가오토메이션 Ensemble logement de pompe à vide à anneau liquide

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4331589A1 (de) 1992-12-24 1994-06-30 Balzers Pfeiffer Gmbh Vakuumpumpsystem
EP2228540A2 (fr) 2009-03-14 2010-09-15 Pfeiffer Vacuum GmbH Agencement doté d'une pompe à vide

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3104802A (en) * 1963-09-24 Unified system vacuum pump
DE1293388B (de) * 1960-12-08 1969-04-24 Buerger Herbert Drehkolbenvakuumpumpe mit oelgedichtetem Gehaeuse und vertikaler Anordnung des Rotors und der Welle
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
DE19508566A1 (de) * 1995-03-10 1996-09-12 Balzers Pfeiffer Gmbh Molekularvakuumpumpe mit Kühlgaseinrichtung und Verfahren zu deren Betrieb
JP3486000B2 (ja) * 1995-03-31 2004-01-13 日本原子力研究所 ねじ溝真空ポンプ
DE19702456B4 (de) * 1997-01-24 2006-01-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE19745616A1 (de) * 1997-10-10 1999-04-15 Leybold Vakuum Gmbh Gekühlte Schraubenvakuumpumpe
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
US6123526A (en) * 1998-09-18 2000-09-26 Industrial Technology Research Institute Multistage pump and method for assembling the pump
GB0124731D0 (en) * 2001-10-15 2001-12-05 Boc Group Plc Vacuum pumps
DE10302987A1 (de) * 2003-01-25 2004-08-05 Inficon Gmbh Lecksuchgerät mit einem Einlass
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
DE102004044775A1 (de) * 2004-09-16 2006-04-06 Leybold Vacuum Gmbh Vakuumpumpen-Schwingungsdämpfer
DE102005019054A1 (de) * 2005-04-23 2006-10-26 Pfeiffer Vacuum Gmbh Schwingungsreduzierendes Bauteil und damit ausgerüstetes Vakuumpumpsystem
DE102008061805A1 (de) * 2008-12-11 2010-06-17 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe sowie Pumpelement
DE102010032346A1 (de) * 2010-07-27 2012-02-02 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe sowie Turbomolekularpumpen-System

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4331589A1 (de) 1992-12-24 1994-06-30 Balzers Pfeiffer Gmbh Vakuumpumpsystem
EP2228540A2 (fr) 2009-03-14 2010-09-15 Pfeiffer Vacuum GmbH Agencement doté d'une pompe à vide

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015111049B4 (de) 2015-07-08 2022-10-13 Pfeiffer Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
JP2015048849A (ja) 2015-03-16
JP5902777B2 (ja) 2016-04-13
EP2846044A1 (fr) 2015-03-11
EP2846044B1 (fr) 2021-10-13
US20150064033A1 (en) 2015-03-05

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