DE10038761A1 - Beschleunigungssensor - Google Patents

Beschleunigungssensor

Info

Publication number
DE10038761A1
DE10038761A1 DE2000138761 DE10038761A DE10038761A1 DE 10038761 A1 DE10038761 A1 DE 10038761A1 DE 2000138761 DE2000138761 DE 2000138761 DE 10038761 A DE10038761 A DE 10038761A DE 10038761 A1 DE10038761 A1 DE 10038761A1
Authority
DE
Germany
Prior art keywords
stops
spring
acceleration sensor
sensor according
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE2000138761
Other languages
German (de)
English (en)
Inventor
Michael Offenberg
Dirk Scholz
Falk Herrmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE2000138761 priority Critical patent/DE10038761A1/de
Priority to PCT/DE2001/002754 priority patent/WO2002012905A1/fr
Publication of DE10038761A1 publication Critical patent/DE10038761A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
DE2000138761 2000-08-09 2000-08-09 Beschleunigungssensor Withdrawn DE10038761A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE2000138761 DE10038761A1 (de) 2000-08-09 2000-08-09 Beschleunigungssensor
PCT/DE2001/002754 WO2002012905A1 (fr) 2000-08-09 2001-07-20 Capteur d'acceleration

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2000138761 DE10038761A1 (de) 2000-08-09 2000-08-09 Beschleunigungssensor

Publications (1)

Publication Number Publication Date
DE10038761A1 true DE10038761A1 (de) 2002-02-21

Family

ID=7651779

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2000138761 Withdrawn DE10038761A1 (de) 2000-08-09 2000-08-09 Beschleunigungssensor

Country Status (2)

Country Link
DE (1) DE10038761A1 (fr)
WO (1) WO2002012905A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006059231A2 (fr) 2004-05-21 2006-06-08 William Thomas Pike Plaque de suspension micro-usinee amelioree avec masse etalon integree a utiliser dans des sismometres ou autres dispositifs similaires
WO2008012500A1 (fr) * 2006-07-25 2008-01-31 Schlumberger Holdings Limited Capteur à fibre optique de disque flexible et procédé de formation de celui-ci
DE102009026476A1 (de) 2009-05-26 2010-12-02 Robert Bosch Gmbh Mikromechanische Struktur

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10118340A1 (de) * 2001-04-12 2002-10-24 Bosch Gmbh Robert Vorrichtung zur Messung einer Beschleunigung und/oder einer Drehrate
US7013730B2 (en) * 2003-12-15 2006-03-21 Honeywell International, Inc. Internally shock caged serpentine flexure for micro-machined accelerometer
JP6206651B2 (ja) * 2013-07-17 2017-10-04 セイコーエプソン株式会社 機能素子、電子機器、および移動体

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5542295A (en) * 1994-12-01 1996-08-06 Analog Devices, Inc. Apparatus to minimize stiction in micromachined structures
US6065341A (en) * 1998-02-18 2000-05-23 Denso Corporation Semiconductor physical quantity sensor with stopper portion
DE19817357B4 (de) * 1998-04-18 2008-10-30 Robert Bosch Gmbh Mikromechanisches Bauelement

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006059231A2 (fr) 2004-05-21 2006-06-08 William Thomas Pike Plaque de suspension micro-usinee amelioree avec masse etalon integree a utiliser dans des sismometres ou autres dispositifs similaires
WO2006059231A3 (fr) * 2004-05-21 2006-08-24 William Thomas Pike Plaque de suspension micro-usinee amelioree avec masse etalon integree a utiliser dans des sismometres ou autres dispositifs similaires
CN101014879B (zh) * 2004-05-21 2010-05-05 凯恩迈特里克斯公司 用于地震仪或其它装置中的微机械悬浮板
WO2008012500A1 (fr) * 2006-07-25 2008-01-31 Schlumberger Holdings Limited Capteur à fibre optique de disque flexible et procédé de formation de celui-ci
US8155486B2 (en) 2006-07-25 2012-04-10 Schlumberger Technology Corporation Flexural disc fiber optic sensor and method of forming same
DE102009026476A1 (de) 2009-05-26 2010-12-02 Robert Bosch Gmbh Mikromechanische Struktur
WO2010136222A1 (fr) 2009-05-26 2010-12-02 Robert Bosch Gmbh Structure micromécanique

Also Published As

Publication number Publication date
WO2002012905A1 (fr) 2002-02-14

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
R016 Response to examination communication
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee