DE10000191B8 - Projektbelichtungsanlage der Mikrolithographie - Google Patents
Projektbelichtungsanlage der Mikrolithographie Download PDFInfo
- Publication number
- DE10000191B8 DE10000191B8 DE10000191A DE10000191A DE10000191B8 DE 10000191 B8 DE10000191 B8 DE 10000191B8 DE 10000191 A DE10000191 A DE 10000191A DE 10000191 A DE10000191 A DE 10000191A DE 10000191 B8 DE10000191 B8 DE 10000191B8
- Authority
- DE
- Germany
- Prior art keywords
- microlithography
- exposure system
- project exposure
- project
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
- G03F7/70891—Temperature
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/028—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Epidemiology (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Public Health (AREA)
- Toxicology (AREA)
- Atmospheric Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Optics & Photonics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Optical Couplings Of Light Guides (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10000191A DE10000191B8 (de) | 2000-01-05 | 2000-01-05 | Projektbelichtungsanlage der Mikrolithographie |
JP2000376898A JP4612945B2 (ja) | 2000-01-05 | 2000-12-12 | 光学装置 |
TW089122846A TW486610B (en) | 2000-01-05 | 2000-12-18 | Optical arrangement |
US09/755,423 US6504597B2 (en) | 2000-01-05 | 2001-01-05 | Optical arrangement |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10000191A DE10000191B8 (de) | 2000-01-05 | 2000-01-05 | Projektbelichtungsanlage der Mikrolithographie |
Publications (3)
Publication Number | Publication Date |
---|---|
DE10000191A1 DE10000191A1 (de) | 2001-07-26 |
DE10000191B4 DE10000191B4 (de) | 2004-11-18 |
DE10000191B8 true DE10000191B8 (de) | 2005-10-06 |
Family
ID=7626782
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE10000191A Expired - Fee Related DE10000191B8 (de) | 2000-01-05 | 2000-01-05 | Projektbelichtungsanlage der Mikrolithographie |
Country Status (4)
Country | Link |
---|---|
US (1) | US6504597B2 (de) |
JP (1) | JP4612945B2 (de) |
DE (1) | DE10000191B8 (de) |
TW (1) | TW486610B (de) |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3944008B2 (ja) * | 2002-06-28 | 2007-07-11 | キヤノン株式会社 | 反射ミラー装置及び露光装置及びデバイス製造方法 |
TW200423224A (en) * | 2002-12-03 | 2004-11-01 | Nippon Kogaku Kk | Exposure system, exposure method, and device fabricating method |
DE10301799B4 (de) * | 2003-01-20 | 2005-08-11 | Carl Zeiss Smt Ag | Projektionsbelichtungsanlage und Verfahren zur Homogenisierung optischer Eigenschaften einer optischen Komponente |
KR20060120629A (ko) * | 2003-08-28 | 2006-11-27 | 가부시키가이샤 니콘 | 노광방법 및 장치, 그리고 디바이스 제조방법 |
JP4666908B2 (ja) * | 2003-12-12 | 2011-04-06 | キヤノン株式会社 | 露光装置、計測方法及びデバイス製造方法 |
KR101328356B1 (ko) * | 2004-02-13 | 2013-11-11 | 가부시키가이샤 니콘 | 노광 방법 및 장치, 그리고 디바이스 제조 방법 |
US20080204682A1 (en) * | 2005-06-28 | 2008-08-28 | Nikon Corporation | Exposure method and exposure apparatus, and device manufacturing method |
DE102005031792A1 (de) * | 2005-07-07 | 2007-01-11 | Carl Zeiss Smt Ag | Verfahren zur Entfernung von Kontamination von optischen Elementen, insbesondere von Oberflächen optischer Elemente sowie ein optisches System oder Teilsystem hierfür |
TWI439815B (zh) | 2006-07-03 | 2014-06-01 | Zeiss Carl Smt Gmbh | 校正/修復微影投影曝光裝置中之投影物鏡的方法與此投影物鏡 |
DE102006039895A1 (de) | 2006-08-25 | 2008-03-13 | Carl Zeiss Smt Ag | Verfahren zur Korrektur von durch Intensitätsverteilungen in optischen Systemen erzeugten Abbildungsveränderungen sowie entsprechendes optisches System |
US7903234B2 (en) * | 2006-11-27 | 2011-03-08 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method and computer program product |
EP2097789B1 (de) * | 2006-12-01 | 2012-08-01 | Carl Zeiss SMT GmbH | Optisches system mit austauschbarer manipulierbarer korrekturanordnung zur verminderung von bildfehlern |
WO2008089953A1 (en) | 2007-01-22 | 2008-07-31 | Carl Zeiss Smt Ag | Method for improving imaging properties of an optical system, and optical system |
DE102007009867A1 (de) * | 2007-02-28 | 2008-09-11 | Carl Zeiss Smt Ag | Abbildungsvorrichtung mit auswechselbaren Blenden sowie Verfahren hierzu |
US7829249B2 (en) * | 2007-03-05 | 2010-11-09 | Asml Netherlands B.V. | Device manufacturing method, computer program and lithographic apparatus |
KR101492287B1 (ko) | 2007-03-27 | 2015-02-11 | 칼 짜이스 에스엠테 게엠베하 | 편평하게 조사된 보정광을 이용한 광학 소자의 보정 |
KR101506358B1 (ko) * | 2007-04-23 | 2015-03-26 | 가부시키가이샤 니콘 | 광학 소자 유지 장치, 렌즈 배럴 및 노광 장치 |
US7692766B2 (en) * | 2007-05-04 | 2010-04-06 | Asml Holding Nv | Lithographic apparatus |
US20080285000A1 (en) * | 2007-05-17 | 2008-11-20 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
EP2048540A1 (de) * | 2007-10-09 | 2009-04-15 | Carl Zeiss SMT AG | Mikrolithographisches Projektionsbelichtungsgerät |
US20100290020A1 (en) * | 2009-05-15 | 2010-11-18 | Shinichi Mori | Optical apparatus, exposure apparatus, exposure method, and method for producing device |
NL2005449A (en) * | 2009-11-16 | 2012-04-05 | Asml Netherlands Bv | Lithographic method and apparatus. |
WO2011116792A1 (en) | 2010-03-26 | 2011-09-29 | Carl Zeiss Smt Gmbh | Optical system, exposure apparatus, and waverfront correction method |
TWI498679B (zh) | 2010-07-30 | 2015-09-01 | 卡爾蔡司Smt有限公司 | 超紫外線曝光裝置 |
DE102010039930A1 (de) * | 2010-08-30 | 2012-03-01 | Carl Zeiss Smt Gmbh | Projektionsbelichtungsanlage |
DE102010041298A1 (de) | 2010-09-24 | 2012-03-29 | Carl Zeiss Smt Gmbh | EUV-Mikrolithographie-Projektionsbelichtungsanlage mit einer Heizlichtquelle |
NL2007498A (en) | 2010-12-23 | 2012-06-27 | Asml Netherlands Bv | Lithographic apparatus and method of modifying a beam of radiation within a lithographic apparatus. |
DE102011004375B3 (de) * | 2011-02-18 | 2012-05-31 | Carl Zeiss Smt Gmbh | Vorrichtung zur Führung von elektromagnetischer Strahlung in eine Projektionsbelichtungsanlage |
DE102011076435B4 (de) * | 2011-05-25 | 2013-09-19 | Carl Zeiss Smt Gmbh | Verfahren sowie Vorrichtung zur Einstellung einer Beleuchtungsoptik |
DE102011077784A1 (de) * | 2011-06-20 | 2012-12-20 | Carl Zeiss Smt Gmbh | Projektionsanordnung |
JP5863974B2 (ja) * | 2011-09-29 | 2016-02-17 | カール・ツァイス・エスエムティー・ゲーエムベーハー | マイクロリソグラフィ投影露光装置の投影対物レンズ |
DE102012201410B4 (de) | 2012-02-01 | 2013-08-14 | Carl Zeiss Smt Gmbh | Projektionsbelichtungsanlage mit einer Messvorrichtung zum Vermessen eines optischen Elements |
NL2010196A (en) | 2012-02-09 | 2013-08-13 | Asml Netherlands Bv | Lens heating aware source mask optimization for advanced lithography. |
WO2013156041A1 (en) | 2012-04-18 | 2013-10-24 | Carl Zeiss Smt Gmbh | A microlithographic apparatus and a method of changing an optical wavefront in an objective of such an apparatus |
DE102012212757A1 (de) | 2012-07-20 | 2014-01-23 | Carl Zeiss Smt Gmbh | Verfahren zum betreiben einer mikrolithographischen projektionsbelichtungsanlage |
NL2011592A (en) | 2012-10-31 | 2014-05-06 | Asml Netherlands Bv | Compensation for patterning device deformation. |
JP6236095B2 (ja) * | 2013-03-13 | 2017-11-22 | カール・ツァイス・エスエムティー・ゲーエムベーハー | マイクロリソグラフィ装置 |
DE102013205567A1 (de) * | 2013-03-28 | 2014-03-06 | Carl Zeiss Smt Gmbh | Mikrolithographische Projektionsbelichtungsanlage mit einem variablen Transmissionsfilter |
WO2015032418A1 (en) | 2013-09-09 | 2015-03-12 | Carl Zeiss Smt Gmbh | Microlithographic projection exposure apparatus and method of correcting optical wavefront deformations in such an apparatus |
KR101668984B1 (ko) | 2013-09-14 | 2016-10-24 | 칼 짜이스 에스엠티 게엠베하 | 마이크로리소그래피 투영 장치의 동작 방법 |
DE102015212785B4 (de) * | 2015-07-08 | 2020-06-18 | Heraeus Noblelight Gmbh | Optimierung der Strahlenverteilung einer Strahlungsquelle |
DE102016214480A1 (de) * | 2016-08-04 | 2017-08-24 | Carl Zeiss Smt Gmbh | Optische anordnung für eine lithographieanlage und verfahren zum betreiben einer lithographieanlage |
DE102016225701A1 (de) | 2016-12-21 | 2017-03-02 | Carl Zeiss Smt Gmbh | Verfahren zum Betreiben einer EUV-Lithographieanlage |
CN109426088B (zh) * | 2017-08-25 | 2021-03-09 | 上海微电子装备(集团)股份有限公司 | 一种照明***、曝光装置和曝光方法 |
US11474439B2 (en) * | 2019-06-25 | 2022-10-18 | Canon Kabushiki Kaisha | Exposure apparatus, exposure method, and method of manufacturing article |
DE102022209455A1 (de) * | 2022-09-09 | 2024-03-14 | Carl Zeiss Smt Gmbh | Heizanordnung, sowie optisches System und Verfahren zum Heizen eines optischen Elements |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0864548A (ja) * | 1994-08-25 | 1996-03-08 | Kokusai Electric Co Ltd | ウェーハのランプアニール方法及び装置 |
EP0823662A2 (de) * | 1996-08-07 | 1998-02-11 | Nikon Corporation | Projektionsbelichtungsapparat |
US5805273A (en) * | 1994-04-22 | 1998-09-08 | Canon Kabushiki Kaisha | Projection exposure apparatus and microdevice manufacturing method |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5719704A (en) * | 1991-09-11 | 1998-02-17 | Nikon Corporation | Projection exposure apparatus |
US5995263A (en) * | 1993-11-12 | 1999-11-30 | Nikon Corporation | Projection exposure apparatus |
US6018384A (en) * | 1994-09-07 | 2000-01-25 | Nikon Corporation | Projection exposure system |
US5883704A (en) | 1995-08-07 | 1999-03-16 | Nikon Corporation | Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system |
JPH09232213A (ja) * | 1996-02-26 | 1997-09-05 | Nikon Corp | 投影露光装置 |
JP3790833B2 (ja) * | 1996-08-07 | 2006-06-28 | 株式会社ニコン | 投影露光方法及び装置 |
US6256086B1 (en) * | 1998-10-06 | 2001-07-03 | Canon Kabushiki Kaisha | Projection exposure apparatus, and device manufacturing method |
-
2000
- 2000-01-05 DE DE10000191A patent/DE10000191B8/de not_active Expired - Fee Related
- 2000-12-12 JP JP2000376898A patent/JP4612945B2/ja not_active Expired - Fee Related
- 2000-12-18 TW TW089122846A patent/TW486610B/zh not_active IP Right Cessation
-
2001
- 2001-01-05 US US09/755,423 patent/US6504597B2/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5805273A (en) * | 1994-04-22 | 1998-09-08 | Canon Kabushiki Kaisha | Projection exposure apparatus and microdevice manufacturing method |
JPH0864548A (ja) * | 1994-08-25 | 1996-03-08 | Kokusai Electric Co Ltd | ウェーハのランプアニール方法及び装置 |
EP0823662A2 (de) * | 1996-08-07 | 1998-02-11 | Nikon Corporation | Projektionsbelichtungsapparat |
Also Published As
Publication number | Publication date |
---|---|
US20010019403A1 (en) | 2001-09-06 |
DE10000191A1 (de) | 2001-07-26 |
TW486610B (en) | 2002-05-11 |
JP4612945B2 (ja) | 2011-01-12 |
US6504597B2 (en) | 2003-01-07 |
JP2001196305A (ja) | 2001-07-19 |
DE10000191B4 (de) | 2004-11-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
8127 | New person/name/address of the applicant |
Owner name: CARL ZEISS SMT AG, 73447 OBERKOCHEN, DE |
|
8364 | No opposition during term of opposition | ||
8381 | Inventor (new situation) |
Inventor name: HUMMEL, WOLFGANG, 73525 SCHWAEBISCH GMUEND, DE Inventor name: B?NAU, RUDOLF, VON, 73457 ESSINGEN, DE Inventor name: HOLDERER, HUBERT, 89551 KOENIGSBRONN, DE Inventor name: SCHUSTER, KARL-HEINZ, 89551 KOENIGSBRONN, DE Inventor name: XALTER, STEFAN, 73447 OBERKOCHEN, DE Inventor name: WAGNER, CHRISTIAN, DR., 73430 AALEN, DE Inventor name: BECKER, JOCHEN, 73447 OBERKOCHEN, DE |
|
8396 | Reprint of erroneous front page | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: CARL ZEISS SMT GMBH, 73447 OBERKOCHEN, DE |
|
R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |