CN2847685Y - Grooved metal square colume piezoelectric sheet composite supersonic micro motor - Google Patents
Grooved metal square colume piezoelectric sheet composite supersonic micro motor Download PDFInfo
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- CN2847685Y CN2847685Y CN 200520011396 CN200520011396U CN2847685Y CN 2847685 Y CN2847685 Y CN 2847685Y CN 200520011396 CN200520011396 CN 200520011396 CN 200520011396 U CN200520011396 U CN 200520011396U CN 2847685 Y CN2847685 Y CN 2847685Y
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Abstract
The utility model relates to a metal square column piezoelectric sheet composite supersonic micro motor, which belongs to the field of supersonic application. The utility model is composed of a stator for exciting supersonic vibration, a rotor or a mover for outputting torque, and a pre-stressing mechanism for pressurizing the rotor or the mover. The utility model is characterized in that the stator is mainly composed of a metal piezoelectric ceramic composite square column composed of a metal square column and piezoelectric ceramic sheets for exciting the vibration and a matching block, wherein four corner positions of the metal square column are provided with four grooves along axial direction; the piezoelectric ceramic sheets are bonded on two or four side faces of the metal square column and polarized along with thickness direction. The connecting surfaces between the piezoelectric ceramic sheets and exciting electrodes are coated with outer electrodes used for polarization and excitation. The utility model has the advantages that the piezoelectric ceramic is very easy to be polarized, the polarization manufacturing process is simple and an excitation electric field is ensured to be perpendicular to the direction of polarization. Under the precondition that the sized of pasting sheet ceramic is not reduced, the rigidity of the stator is reduced and the bending amplitude of is increased. The miniaturization of the ultrasonic motor can be improved.
Description
Technical field
The utility model belongs to the applications of ultrasound field, particularly a kind of structural design of supersonic motor of microminiaturization.
Background technology
Piezoelectric ultrasonic motor is an inverse piezoelectric effect of utilizing piezoelectric, the driving mechanism of taking specific structure to make, and it generally is made of functional parts such as stator, rotor and pre-pressure mechanisms.It utilizes the inverse piezoelectric effect of piezoelectric ceramic, produces ultrasonic vibration at stator surface, and by the frictional force drives rotor motion between stator and the rotor.Ultrasound electric machine has the following characteristics that are better than the common electrical magneto:
1, the slow-speed of revolution, big torque do not need reducing gear can directly drive load;
2, volume is little, structure is flexible, and power to volume ratio is 3-10 a times of electromagnetic machine;
3, starting stops response soon, and the response time is less than 1 millisecond;
4, do not produce electromagnetic interference, be not subjected to electromagnetic interference yet;
5, self-sustaining moment is arranged, gearless gap, but precision positioning;
6, move quiet noiseless.
The flexural vibration mode supersonic motor is a kind of of ultrasound electric machine, other ultrasound electric machine is simple relatively for its structure, same mainly by the stator that encourages ultrasonic vibration, rotor of output torque (or mover) and the compositions such as pre-pressure mechanism of giving rotor (or mover) pressurization, described stator mainly is made of the piezo ceramic element and the match block of excited vibration again.The transmission principle of flexural vibration mode supersonic motor as shown in Figure 1, stator is in the mode of vibration that circumference is shaken the head, one very little gap is arranged between stator 11 and the ring-type rotor 12, the curved edges motion of shaking the head in stator limit during transmission, therefore the point of contact contact is arranged between the stator and rotor, its contact point moves on the circumferential periphery of stator, and successively, the frictional force between stator and rotor makes rotor rotate along the direction opposite with the contact point moving direction.
The energisation mode of common flexural vibration mode supersonic motor stator vibration has two kinds, first kind of d that utilizes piezoelectric ceramic
33Effect applies electric field in polarised direction, makes the deformation of piezoelectric ceramic generation along polarised direction; Second kind of d that utilizes piezoelectric ceramic
31Effect applies electric field in polarised direction, make piezoelectric ceramic produce along with the vertical deformation of polarised direction.Fig. 2 is the d that adopts piezoelectric ceramic
33The bending of piezoelectric effect the shake the head energisation mode and the structural representation of ultrasound electric machine, this kind motor is comparative maturity, and it utilizes the d of piezoelectric ceramic
33Effect is carried out the flexural vibrations excitation of stator, thereby inspires the yawing of stator.The polarization of the piezoelectric ceramic of this motor and excitation are shown in Fig. 2 (a), the used piezo ceramic element of this stator is 4 piezoelectric patches, on same piezoelectric patches, divide the two halves opposite polarization with diameter symmetry, two piezoelectric patches 212 spatial vertical of two piezoelectric patches 211 of logical A phase current and logical B phase current are arranged, adopt ten thousand bright sandwich structures to form stator, A imports Sin ω t signal mutually simultaneously, and B imports Cos ω t signal mutually, adopts each 90 degree phase difference of time and space to encourage flexural vibrations like this; The flexural vibration mode supersonic motor structure of this piezoelectric patches excitation is shown in Fig. 2 (b), match block 226,228 clamps the common stator that constitutes motor in 4 piezoelectric ceramic pieces, 227 backs up and down, placing 225 on the stator is rotor, there is the spring 224 that applies precompression its hollow part, moment is by gear 223 outputs, and 222 is the polytetrafluoroethylene cover, plays bearing, 221 is packing ring, and 229 is main shaft.
The main advantage of flexural vibration mode supersonic motor is easy to realize microminiaturization and industrialization exactly.The industrialization of bar-shaped swing type ultrasound electric machine, but the diameter of motor is generally all bigger; At mobile phone, the application in fields such as medical treatment and space flight also is restricted.
Fig. 3 is the swing type ultrasound electric machine of semicircle en structure for the stator of people such as Kenji Uchino invention, and its diameter only is 1.6mm.On two vertical side of metal cylinder 31, paste respectively along the piezoelectric ceramic piece 32,33 of thickness direction polarization, constitute stator, shown in Fig. 3 (a).Piezoelectric ceramic motivates the motion of shaking the head of stator, drives rotor 34 and drives output shaft 35 rotations.33 is the precompression regulating spring, shown in Fig. 3 (b), feeds sin ω t, cos ω t signal excitation successively on electrode 31,32.Utilized the d of piezoelectric ceramic
31Piezoelectric effect motivates flexural vibrations on stator.
Based on Fig. 3 structure, when the other two sides of metallic object 45, promptly the equal pressing electroceramics sheet in four sides is 41,42,43,44 o'clock, constitutes an actuator, as shown in Figure 4.Add rotor-support-foundation system, can constitute the swing type ultrasound electric machine, can obtain the output torque/power bigger than the swing type ultrasound electric machine of Fig. 3 structure.
Though piezoelectric ceramic tube and metal composite tubing string scheme help the microminiaturization of ultrasound electric machine structure.The curved amplitude of oscillator is also less, can not effectively drive but in actuator or electric machine structure size hour.In order to increase curved amplitude, must reduce the diameter of metallic object, also therefore reduced the size of chip ceramic, reduce output torque/power.
Summary of the invention
The utility model proposes a kind of composite ultrasonic micromotor with slotted metal square column piezoelectric sheet in order to overcome the problems referred to above that prior art exists, and utilizes the d of piezoelectric ceramic
31The flexural vibration mode of effect excitation stator.Have the rigidity that under the prerequisite that does not reduce the chip ceramic size, reduces stator, increase the advantage of curved ` amplitude.
The composite ultrasonic micromotor with slotted metal square column piezoelectric sheet that the utility model proposes, stator by the excitation ultrasonic vibration, the rotor of output torque or mover and give rotor or the pre-pressure mechanism of mover pressurization is formed, it is characterized in that, described stator mainly is made of compound square column of metal crimp electroceramics and the match block that the metal square column and the piezoelectric ceramic piece of excited vibration are formed, 4 corner angle positions at described metal square column have four grooves vertically, described piezoelectric ceramic piece is bonded on two of metal square column or four sides, along the thickness direction polarization, the surface that this piezoelectric ceramic piece connects exciting electrode scribbles the external electrode that supplies polarization and excitation usefulness.
Described metal square column can be hollow square column or solid square column.
The groove that described metal square column is opened can be any shapes such as circular recess, rectangular channel, special-shaped groove or trough with straight angle.
When the compound square column of described metal crimp electroceramics adopts 2 piezoelectric ceramic pieces, 2 piezoelectric ceramic pieces are bonded to two adjacent sides of metal square column respectively, add sin ω t and the cos ω t excitation signal of telecommunication (can motivate orthogonal two flexural vibration modes on stator, the end of stator and middle part all produce elliptical vibration) respectively.
When the compound square column of described metal crimp electroceramics adopts 4 piezoelectric ceramic pieces, 4 piezoelectric ceramic pieces are bonded to four sides of metal square column respectively, can make relative piezoelectric ceramic piece polarised direction opposite (with respect to the method direction of metal column adhesive surface), four adjacent side add sin ω t in regular turn, cos ω t, sin ω t, cos ω t encourages the signal of telecommunication (can motivate orthogonal two flexural vibration modes on stator, the end of stator and middle part all produce elliptical vibration).
When the compound square column of described metal crimp electroceramics adopts 4 piezoelectric ceramic pieces, 4 piezoelectric ceramic pieces are bonded to four sides of metal square column respectively, also can make relative piezoelectric ceramic piece polarised direction identical (with respect to the method direction of metal column adhesive surface), four adjacent side add sin ω t in regular turn, cos ω t,-sin ω t ,-cos ω t encourages the signal of telecommunication (can motivate orthogonal two flexural vibration modes on stator, the end of stator and middle part all produce elliptical vibration).
Described piezoelectric ceramic piece can adopt 4, be bonded to four sides of metal square column, one group of relative piezoelectric ceramic piece polarised direction identical (with respect to the method direction of metal column adhesive surface), it is opposite that another organizes relative piezoelectric ceramic piece polarised direction, if four adjacent side add sin ω t in regular turn, cos ω t,-sin ω t, cos ω t encourages the signal of telecommunication, then two cos ω t signals are added on two opposite potteries of polarised direction, if apply sin ω t in regular turn, cog ω t, sin ω t ,-cos ω t encourages the signal of telecommunication, then two sin ω t signals are added in (motivate orthogonal two flexural vibration modes on stator, the end of stator and middle part all produce elliptical vibration) on two opposite potteries of polarised direction.
Above-mentioned sin ω t (or-sin ω t) pumping signal and cos ω t (or-cos ω t) the pumping signal exchange, then crooked yawing is reverse, and motor movement is reverse.
The purpose that the utility model applies electric field is to motivate the flexural vibrations that two space quadratures are 90 degree on stator, and two flexural vibrations of stator synthesize the motion of shaking the head of stator.The movement locus that is used to drive the lip-deep point of rotor this moment on the stator is an ellipse, thereby can drive rotor/mover motion.
Characteristics of the present utility model and effect:
The ultrasound electric machine of the utility model design can reduce the rigidity of stator owing to have four grooves in the edges and corners of metal square column along axis under the prerequisite that does not reduce the chip ceramic size, increase curved amplitude.
The utlity model has piezoelectric ceramic and be easy to polarization, polarization process is simple and can guarantee excitation electrical field perpendicular to polarised direction, the efficient advantage of higher.
The utility model can make the very little of motor size processing, promotes the microminiaturization of ultrasound electric machine; To wide application prospect be arranged at aspects such as biology, medical treatment, micromechanics, science and techniques of defence.
Description of drawings
Fig. 1 is the general transmission principle schematic diagram that adopts the flexural vibration mode supersonic motor.
Fig. 2 is the d of existing employing piezoelectric ceramic
33The bending of the piezoelectric effect ultrasound electric machine schematic diagram of shaking the head;
Wherein: Fig. 2 (a) is the polarization and the excitation of piezoelectric ceramic, and Fig. 2 (b) is the structural representation of motor.
Fig. 3 is the d of existing employing piezoelectric ceramic
31The shake the head structural representation of ultrasound electric machine of the bending of piezoelectric effect;
Wherein: Fig. 3 (a) is the polarization and the subregion of piezoelectric ceramic, and Fig. 3 (b) is an electric machine structure;
Fig. 4 is structure and the exiting form schematic diagram from the stator of the electrical micro-machine of the four sides pressing electroceramics sheet that Fig. 3 structural evolution goes out.
Fig. 5 is the structure and the exiting form schematic diagram of the stator of the utility model electrical micro-machine.
Wherein: Fig. 5 (a) is metal square column and the polarization and the energisation mode of four sides equal pressing electroceramics sheet,
Fig. 5 (b) is the mode of grooving of the metal square column of fluting.
Fig. 6 is embodiment one of the present utility model---both-end axle output motor structural representation.
Fig. 7 is embodiment two of the present utility model---single-ended axle output motor structural representation.
Fig. 8 is embodiment three of the present utility model---magnetic force positioning motor structural representation.
Fig. 9 is embodiment four of the present utility model---waist abdomen drive motors structural representation; Wherein,
Fig. 9 (a) is that rotor is vertical with stator, and stator drives rotor and rotates;
Fig. 9 (b) is that rotor is parallel with stator, and stator drives rotor and rotates.
Figure 10 is embodiment five of the present utility model---end drive motors structural representation.
Embodiment
The embodiment that metal square column piezoelectric sheet composite ultrasonic micromotor of the present utility model reaches five kinds of electric machine structures in conjunction with the accompanying drawings is respectively described below:
The metal square column piezoelectric sheet composite ultrasonic micromotor that the utility model proposes, stator by the excitation ultrasonic vibration, rotor of output torque (or mover) and the pre-pressure mechanism composition of giving rotor (or mover) pressurization, described stator mainly is made of the piezo ceramic element and the match block of excited vibration; This piezo ceramic element constitutes the compound square column of metal piezoelectric ceramic piece for the metal square column by side pressing electroceramics element.The version of the compound square column of metal piezoelectric ceramic piece as shown in Figure 5.4 corner angle positions at metal square column 515 have four grooves 52 vertically, piezoelectric ceramic piece 511,512,513,514 is bonded on two of metal square column or four sides (shown in Fig. 5 (a)), along the thickness direction polarization, the surface that this piezoelectric ceramic piece connects exciting electrode scribbles the external electrode that supplies polarization and excitation usefulness.The compound square column of metal piezoelectric ceramic piece can be a hollow square column, also can be solid square column.
The groove that above-mentioned metal square column is opened can be circular recess 521, rectangular channel 522, special-shaped groove 523 and trough with straight angle 524 etc., shown in Fig. 5 (b).Under the prerequisite of the intensity that guarantees stator, the size of groove is big more, and the flexibility of stator is big more, and crooked amplitude is also big more.
The compound square column of above-mentioned metal piezoelectric ceramic piece adds that match block constitutes stator.
Piezoelectric ceramic all polarizes along thickness direction.In the structure shown in Fig. 5 (a), generally speaking, the polarised direction of relative potsherd (potsherd 511 is relative with 513, and potsherd 512 is relative with 514) should be opposite during installation, to reduce the design difficulty of driving power, can certainly be arbitrarily;
For the stator structure shown in Fig. 5 (a), the mode that applies of electric field is: add on potsherd 511 pole-faces+sin ω t pumping signal, on potsherd 512 pole-faces, add cos ω t pumping signal, if 513 with 511 polarised directions identical (with respect to the method direction of metal column adhesive surface) when mounted, then on 513 pole-faces, add-sin ω t pumping signal, if polarised direction is opposite when mounted for potsherd 513 and potsherd 511, then on potsherd 513 pole-faces, add sin ω t pumping signal.Polarised direction is identical when mounted with potsherd 512 as if potsherd 514, then on potsherd 514 pole-faces, add-cos ω t pumping signal, if polarised direction is opposite when mounted for potsherd 514 and potsherd 512, then on potsherd 514 pole-faces, add cos ω t pumping signal, with metal column 515 ground connection;
Sin ω t (or-sin ω t) pumping signal and cos ω t (or-cos ω t) the pumping signal exchange, then crooked yawing is reverse, and motor movement is reverse.
The purpose that applies electric field is to motivate the flexural vibrations that two space quadratures are 90 degree on stator, and two flexural vibrations of stator synthesize the motion of shaking the head of stator.The movement locus that is used to drive the lip-deep point of rotor this moment on the stator is an ellipse, thereby can drive rotor motion.
The various embodiment of the ultrasound micro-motor of forming with the compound square column structure of above-mentioned metal crimp electroceramics sheet are respectively described below:
Embodiment one: be the electrical micro-machine of both-end axle export structure
The present embodiment structure as shown in Figure 6, its main feature is that both-end drives, axle output, promptly pastes match block 63 at the two ends of the compound square column 64 of metal crimp electroceramics and constitutes stators, 66 for being used to paste the thin glue of one deck of stator 64 and match block 63.The rotor 62 at two ends connects together by the axle 68 that passes from hollow stator, the spring 61 and the clamp nut 67 that are placed on the axle 68.Spring is used to provide the precompression between stator and rotor.Stator drives rotor 62 rotations by frictional layer 65.Moment is directly exported by rotor, rotor 62 outward flanges can be processed into gear during actual the use, by the gear drive output torque.
Embodiment two is the electrical micro-machine of single-ended axle export structure
This structure as shown in Figure 7, its main feature is that the middle one of stator match block 73 processes (or fixing) thin rod fixed axis 77 as motor.This axle and stator match block can be same metalworks.The compound square column of metal piezoelectric ceramic piece 74 and match block 73 connect in that 76 places are gluing, jointly as the stator of motor.Rotor 72 is enclosed within on the fixed axis 77 of stator match block 73 and provides precompression between stator and rotor by being enclosed within little spring 71 on the fixed axis 77.In this motor, the axle 77 main effects that play are to rotor 72 and pressure little spring 71 location.78 for sliding or rolling bearing.Moment is directly exported by rotor, the rotor outward flange can be processed into gear during actual the use, by the gear drive output torque.75 places are the frictional interface between stator and the rotor.
Embodiment three is the electrical micro-machine of magnetic force location structure
This structure as shown in Figure 8, its main feature is to do rotor with magnetic steel ball 81, the compound square column 83 of metal piezoelectric ceramic piece and spill magnetic metal match block 82 usefulness seccotines bonding forms one, constitutes the stator of motor jointly.Magnetic steel ball rotor is placed in the concave surface of metal matching blocks 82.Like this by the magnetic force between rotor and the metal matching blocks 82 as fixed rotor with produce the required precompression of frictional force, moment is directly exported by rotor.
Embodiment four is the electrical micro-machine of waist abdomen Drive Structure
This structure as shown in Figure 9, its main feature of Fig. 9 (a) is, stator can driving axis and the rotor of the axis normal of stator rotate.Stick on the motor match block 913 at the compound square column of metal crimp electroceramics 912 middle parts, match block 913 links to each other with rotor 915 by friction material 914, and compound square column 912 is fixing with fixed mechanism 911 at its curved node place that shakes.Utilize the motion at stator middle part (waist abdomen) to drive rotor 915 motions by match block 913, can constitute linear electric motors, also can continue conversion of motion is rotatablely moving of armature spindle 916.But also rotatablely moving of the armature spindle 925 shown in the pie graph 9 (b), promptly stator can driving axis and the rotor of the parallel axes of stator rotate.
Embodiment five is the electrical micro-machine of end Drive Structure
This structure as shown in figure 10, its main feature is: the compound square column 102 of metal piezoelectric ceramic piece directly utilizes the motion of match block 103 drive motion components 104 of end, can constitute linear electric motors; Also can continue conversion of motion is rotatablely moving of armature spindle 105.The compound square column 102 of metal piezoelectric ceramic piece is fixed on the base 101 in the other end.
Claims (10)
1, a kind of composite ultrasonic micromotor with slotted metal square column piezoelectric sheet, stator by the excitation ultrasonic vibration, the rotor of output torque or mover and give rotor or the pre-pressure mechanism of mover pressurization is formed, it is characterized in that, described stator mainly is made of compound square column of metal crimp electroceramics and the match block that the metal square column and the piezoelectric ceramic piece of excited vibration are formed, 4 corner angle positions at described metal square column have four grooves vertically, described piezoelectric ceramic piece is bonded on two of metal square column or four sides, along the thickness direction polarization, the surface that this piezoelectric ceramic piece connects exciting electrode scribbles the external electrode that supplies polarization and excitation usefulness.
2, composite ultrasonic micromotor with slotted metal square column piezoelectric sheet as claimed in claim 1 is characterized in that, described metal square column is hollow square column or solid square column.
3, composite ultrasonic micromotor with slotted metal square column piezoelectric sheet as claimed in claim 1 is characterized in that, the groove that described metal square column is opened is any shape among circular recess, rectangular channel, special-shaped groove or the trough with straight angle.
4, composite ultrasonic micromotor with slotted metal square column piezoelectric sheet as claimed in claim 1 is characterized in that, described piezoelectric ceramic piece adopts 2, is bonded to two adjacent sides of hollow metal square column, adds sin ω t and the cos ω t excitation signal of telecommunication respectively.
5, composite ultrasonic micromotor with slotted metal square column piezoelectric sheet as claimed in claim 1, it is characterized in that, described piezoelectric ceramic piece adopts 4, be bonded to four sides of metal square column, when relative piezoelectric ceramic piece polarised direction was opposite, four adjacent side added sin ω t in regular turn, cos ω t, sin ω t, cos ω t encourages the signal of telecommunication; When relative piezoelectric ceramic piece polarised direction was identical, four adjacent side added sin ω t in regular turn, cos ω t, and-sin ω t ,-cos ω t encourages the signal of telecommunication.
6, composite ultrasonic micromotor with slotted metal square column piezoelectric sheet as claimed in claim 1, it is characterized in that, described piezoelectric ceramic piece adopts 4, be bonded to four sides of metal square column, one group of relative piezoelectric ceramic piece polarised direction is identical, the relative piezoelectric ceramic piece polarised direction of another group is opposite, when four adjacent side add sin ω t in regular turn, and cos ω t,-sin ω t, cos ω t encourages the signal of telecommunication, and then two cos ω t signals are added on two opposite potteries of polarised direction, apply sin ω t when in regular turn, cos ω t, sin ω t ,-cos ω t encourages the signal of telecommunication, and then two sin ω t signals are added on two opposite potteries of polarised direction.
7, as claim 1,2,3,4,5 or 6 described composite ultrasonic micromotor with slotted metal square column piezoelectric sheet, it is characterized in that, described rotor adopts the magnetic steel ball, described stator is made of compound square column of metal piezoelectric ceramic piece and the spill magnetic metal match block that is combined in its end face, this magnetic steel ball rotor is placed in the concave surface of this metal matching blocks, magnetic force between this rotor and the match block is used for fixing rotor and produces the required precompression of frictional force, and moment is directly exported by rotor.
8, as claim 1,2,3,4,5 or 6 described composite ultrasonic micromotor with slotted metal square column piezoelectric sheet, it is characterized in that, the two ends of the compound square column of described metal crimp electroceramics are pasted match block and are constituted stator, also comprise the axle that passes from hollow stator, described pre-pressure mechanism adopts spring, described rotor is that two two ends that are placed in this join by frictional layer and stator, and fuses by being placed in spring on the axle and clamp nut and this stator; Moment is directly exported by rotor.
9, as claim 1,2,3,4,5 or 6 described composite ultrasonic micromotor with slotted metal square column piezoelectric sheet, it is characterized in that, the match block of a thin rod as the fixed axis of motor in the middle of adopting, described match block arranged, described pre-pressure mechanism adopts the spring that is enclosed within on this fixed axis, and described rotor is enclosed within on the fixed axis of this match block and provides precompression between stator and rotor by little spring; Moment is directly exported by rotor.
10, as claim 1,2,3,4,5 or 6 described composite ultrasonic micromotor with slotted metal square column piezoelectric sheet, it is characterized in that, the fixed mechanism that also comprises fixed stator, described match block sticks on the middle part of the compound square column of metal crimp electroceramics, this match block links to each other with described rotor by friction material layer, and the motion at stator middle part drives the rotatablely moving of axle that rotor motion constitutes linear electric motors or is converted into rotor by match block.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 200520011396 CN2847685Y (en) | 2005-04-08 | 2005-04-08 | Grooved metal square colume piezoelectric sheet composite supersonic micro motor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 200520011396 CN2847685Y (en) | 2005-04-08 | 2005-04-08 | Grooved metal square colume piezoelectric sheet composite supersonic micro motor |
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| CN 200520011396 Expired - Lifetime CN2847685Y (en) | 2005-04-08 | 2005-04-08 | Grooved metal square colume piezoelectric sheet composite supersonic micro motor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100428618C (en) * | 2005-04-08 | 2008-10-22 | 清华大学 | Composite ultrasonic micromotor with slotted metal square column piezoelectric sheet |
| CN102437786A (en) * | 2011-10-18 | 2012-05-02 | 哈尔滨工业大学 | Surface mount type square four-footed rotational ultrasonic motor vibrator |
| CN102684547A (en) * | 2011-03-14 | 2012-09-19 | 江海 | Composite metal ceramic tubular piezoelectric motor |
-
2005
- 2005-04-08 CN CN 200520011396 patent/CN2847685Y/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100428618C (en) * | 2005-04-08 | 2008-10-22 | 清华大学 | Composite ultrasonic micromotor with slotted metal square column piezoelectric sheet |
| CN102684547A (en) * | 2011-03-14 | 2012-09-19 | 江海 | Composite metal ceramic tubular piezoelectric motor |
| CN102684547B (en) * | 2011-03-14 | 2015-03-25 | 江海 | Composite metal ceramic tubular piezoelectric motor |
| CN102437786A (en) * | 2011-10-18 | 2012-05-02 | 哈尔滨工业大学 | Surface mount type square four-footed rotational ultrasonic motor vibrator |
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| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20081022 |
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| C25 | Abandonment of patent right or utility model to avoid double patenting |