CN110601597B - Bimodal compound inchworm ultrasonic motor - Google Patents

Bimodal compound inchworm ultrasonic motor Download PDF

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Publication number
CN110601597B
CN110601597B CN201910905048.XA CN201910905048A CN110601597B CN 110601597 B CN110601597 B CN 110601597B CN 201910905048 A CN201910905048 A CN 201910905048A CN 110601597 B CN110601597 B CN 110601597B
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rotor
piezoelectric ceramic
piezoelectric
ceramic piece
piezoelectric stack
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CN110601597A (en
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张锦
刘佩珊
殷玉枫
吉正杰
冯毅杰
王向梅
刘燚
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Taiyuan University of Science and Technology
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Taiyuan University of Science and Technology
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details

Abstract

The invention relates to a bimodal composite inchworm ultrasonic motor, which belongs to the technical field of piezoelectric drive and comprises a base, a bearing, a longitudinal plate, a fixed plate, a modal converter, a piezoelectric ceramic piece, a piezoelectric stack, a rotor and an output shaft; the modal converter, the piezoelectric ceramic piece and the piezoelectric stack form a stator assembly of the ultrasonic motor; the number of the piezoelectric ceramic pieces is two, the number of the piezoelectric stacks is two, and the output shaft is one; the rotor is fixedly connected with the output shaft, and the output shaft penetrates through the through hole in the longitudinal plate and is connected with the longitudinal plate through the bearing; the modal converter is provided with two elliptical fixators and two driving feet; and a gap for the driving foot to vibrate is arranged between the driving foot and the outer cambered surface of the rotor. The piezoelectric ceramic piece driving device combines the longitudinal vibration of the piezoelectric ceramic piece and the telescopic vibration of the piezoelectric stack into the driving foot to drive the rotor in a micro-amplitude mode, and pushes the rotor to perform forward rotary motion or reverse rotary motion under the inertia effect through friction coupling, so that the energy efficiency utilization rate is high, and the use is flexible.

Description

Bimodal compound inchworm ultrasonic motor
Technical Field
The invention relates to the technical field of piezoelectric driving, in particular to a bimodal composite inchworm ultrasonic motor.
Background
With the continuous development of scientific research and production practice, a necessary micromotor servo system in a system determines the quality of the overall performance of the system to a great extent, in order to meet the requirements of small volume, quick response, high precision, no magnetic field interference and the like of the modern electronic technology, an ultrasonic motor (USM) takes place, the ultrasonic motor converts vibration (the mechanical vibration frequency is more than 20 kHz) or quasi-static deformation into mechanical energy by utilizing the inverse piezoelectric effect of a piezoelectric material, the concept that the traditional motor needs to obtain the rotating speed and the torque by the electromagnetic effect is broken, and the micromotor servo system is concerned since the 20 th century and the 80 th years. The ultrasonic motor has the advantages of high torque density, good controllability, no external magnetic field interference, low noise, low-speed operation, and wide application prospect in the fields of medical equipment, future aerospace vehicles, robots, micro-electro-mechanical systems (MEMS), ultra-high precision measurement, novel weaponry, life science and the like.
In the late 80 s and early 90 s of the 20 th century, ultrasonic motors have gained the attention of scientists in China, and have gained a series of research achievements in the aspects of design theory, control technology, performance analysis, industrialization key technology and the like of miniature ultrasonic motors, various ultrasonic motors with complete structures and capable of actually operating have been developed and researched, some of which have been applied in engineering, and the industrial application prospect of the ultrasonic motors is looked after by large-scale enterprises and traditional motor manufacturers in China. At present, the main research thought of domestic and foreign researchers focuses on inventing a novel motor structure and a drive control technology, but the excellent performance of the ultrasonic motor can be exerted only by combining an effective control method and a control strategy.
With the continuous emergence of new materials, new processes and new structures, the types of ultrasonic motors are continuously expanded, but few ultrasonic motors capable of realizing commercial production are needed, so that an ultrasonic motor which is close to the actual requirement and is expected to realize batch production gradually needs to be designed.
In patent publication CN109861582A entitled "an inertial rotation piezoelectric motor", a pair of masses are provided which continuously rotate a slight angle in a released state to realize unidirectional rotation of the piezoelectric motor. The piezoelectric motor has small friction damage during working and improves the motion efficiency by 5 to 10 percent. However, the invention has the problems of low efficiency, large friction loss and the like.
The ultrasonic motor has good electrical parameters and mechanical parameters, but has complex structure, large abrasion consumption and low driving efficiency, so that the further development of the ultrasonic motor is hindered.
Disclosure of Invention
The invention aims to provide a bimodal composite inchworm ultrasonic motor, so that the problems in the prior art are solved.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
the utility model provides an inchworm type ultrasonic motor mainly includes stator module and rotor, its characterized in that: the ultrasonic motor comprises a base 1, a bearing 2, a longitudinal plate 3, a fixing plate 4, a mode converter 5, a piezoelectric ceramic plate 6, a piezoelectric stack 7, an elliptical fixer 8, a rotor 9 and an output shaft 10; the base 1 is fixedly connected with the longitudinal plate 3, the modal converter 5 is an integral piece made of an elastomer, and the fixed plate 4 comprises a left fixed plate and a right fixed plate which are used for tightly pressing and fixing the modal converter 5; the modal converter 5 is provided with an elliptical fixer 8 for fixing the piezoelectric stack; a piezoelectric ceramic piece is respectively pasted on the left side and the right side of the elastic plate of the upper half part of the mode converter 5, and the two piezoelectric stacks are fixed by the elliptical fixing device of the lower half part.
The piezoelectric ceramic piece 6 comprises a left piezoelectric ceramic piece A1 and a right piezoelectric ceramic piece A2, and the left piezoelectric ceramic piece A1 and the right piezoelectric ceramic piece A2 are polarized along the thickness direction.
The piezoelectric stack 7 comprises a left piezoelectric stack a1 and a right piezoelectric stack a2, the piezoelectric stack a1 and the piezoelectric stack a2 glue multiple layers of piezoelectric ceramic sheets polarized along the thickness, and electrodes are embedded in the piezoelectric stacks, and the total output deformation amount is the sum of the deformation output amounts of the piezoelectric ceramic sheets.
The piezoelectric ceramic piece A1 and the piezoelectric ceramic piece A2 are symmetrically adhered to two sides of the Y-shaped elastomer through conductive epoxy resin glue, the surface plating metal is silver, and the lead mode is tin soldering. The reliability of the soldering process is higher than that of the gluing process, and the service life and the working efficiency of the ultrasonic motor can be prolonged.
The piezoelectric stack a1 and the piezoelectric stack a2 are adhered to the inner surface of the oval fixing device by conductive epoxy glue.
The included angle between the two elliptical fixing devices is 90 degrees.
Preferably, the bearing is a ball bearing.
Furthermore, the surface of the two driving feet, which is in contact with the rotor, is adhered with an A friction material.
Furthermore, the outer arc surface of the rotor is bonded with a B friction material.
Compared with the prior art, the technical scheme adopted by the invention has the following technical effects:
the ultrasonic motor provided by the invention utilizes the longitudinal vibration of the piezoelectric ceramic plate and the telescopic vibration of the piezoelectric stack to be compounded into the driving foot to drive the rotor in a micro-amplitude manner, and the rotor is pushed to rotate clockwise or anticlockwise under the inertia effect through friction coupling, so that the energy efficiency utilization rate is high; the structure of the ultrasonic motor has symmetry, so that the impedance characteristic of the ultrasonic motor also has good symmetry.
Drawings
FIG. 1 is a schematic structural diagram of a bimodal composite inchworm ultrasonic motor. Number designation in the figures: 1-a base; 2-a bearing; 3-longitudinal plates; 4-fixing the plate; a 5-modal converter; 6-piezoelectric ceramic plate; 7-piezoelectric stack; 8-an elliptical fixator; 9-a rotor; 10-output shaft.
Fig. 2 is a schematic diagram of a modal converter. Number designation in the figures: a1-left piezoelectric ceramic plate; a2-right piezoelectric ceramic plate; a 1-left piezoelectric stack; a 2-right piezoelectric stack.
FIG. 3 shows an applied amplitude of 20Vp-pThe working mode schematic diagram of the bimodal composite inchworm ultrasonic motor rotating clockwise during alternating voltage.
FIG. 4 shows an applied amplitude of 20Vp-pThe schematic diagram of the working mode of the bimodal composite inchworm ultrasonic motor rotating counterclockwise in alternating voltage.
In the figure, arrows represent the expansion and contraction directions of the piezoelectric stack. The dashed lines represent the deformation of the modal converter.
Detailed Description
In order to more clearly explain the technical features of the present solution, the present invention is described in detail below with reference to the accompanying drawings.
The structure of a bimodal composite inchworm ultrasonic motor is shown in figure 1 and comprises a base 1; 2-a bearing; 3-longitudinal plates; 4, fixing a plate; a 5-mode converter; 6-piezoelectric ceramic plate; 7-piezoelectric stack; 8-an elliptical fixator; 9-a rotor; 10-an output shaft. The base 1 is fixedly connected with the longitudinal plate 3, and the modal converter 5 is an integral piece made of an elastomer.
For the piezoelectric ceramic piece after polarization processing, the component of the piezoelectric strain constant matrix d is divided into 3 non-zero components d33, d31 and d 15. The piezoelectric ceramic plate of the ultrasonic motor provided by the invention works in a d31 transverse vibration mode, and the piezoelectric stack works in a d33 longitudinal working mode.
As shown in fig. 2, the stator assembly includes a Y-type mode converter 5, a left piezoelectric ceramic sheet a1, a right piezoelectric ceramic sheet a2, a left piezoelectric stack a1, and a right piezoelectric stack a 2; two elliptical fixing devices 8 are arranged on the modal converter and used for fixing the two piezoelectric stacks. The modal converter 5 is of an integrated structure, and two driving feet are arranged at the lower end of the modal converter; the piezoelectric ceramic sheet 6 and the piezoelectric stack 7 are used for receiving an external excitation signal and converting the external excitation signal into ultrasonic vibration.
The rotor is fixedly connected with an output shaft, the output shaft penetrates through a through hole in the longitudinal plate, and the output shaft is connected with the through hole through a bearing.
The bottom plate is fixedly connected with the longitudinal plate.
The two piezoelectric ceramic pieces are polarized along the thickness direction and symmetrically adhered to two sides of the modal converter through conductive epoxy resin glue, the surface coating metal of the piezoelectric ceramic pieces is silver, a lead is arranged on the surface of the piezoelectric ceramic pieces opposite to the adhesive surface, the lead is in a tin soldering mode, and two-phase alternating current signals are applied to the two piezoelectric ceramic pieces through the lead.
The piezoelectric stack is used for gluing a plurality of layers of piezoelectric ceramic pieces polarized along the thickness together, electrodes are embedded in the piezoelectric stack, and the total output deformation is the sum of the output deformation of each layer of piezoelectric ceramic piece. The piezoelectric stack is adhered to the inner side surface of the elliptical fixing device by conductive epoxy resin glue, silver is plated on the adhered surface, and a lead is arranged on the adhered surface.
The invention also discloses a working mode of the bimodal composite inchworm ultrasonic motor, which comprises the following steps:
when alternating voltage is applied to the upper and lower surfaces of the piezoelectric ceramic sheet polarized along the thickness, the piezoelectric ceramic sheet generates first-order longitudinal vibration. As shown in fig. 3(1), 20V is applied to the left piezoelectric ceramic plate a1p-pThe left piezoelectric ceramic piece extends; applying 20V to the right piezoceramic wafer A2p-pThe right piezoelectric ceramic piece contracts, the upper half part of the modal converter generates deformation shown by a dotted line in the figure, and the lower half part of the modal converter generates displacement shown by the dotted line in the figure; the left driving foot presses the rotor to form a friction coupling surface with the outer arc surface of the rotor; the right driving foot is away from the outer arc surface of the rotor by a certain distance and does not generate a contact surface with the rotor. At the moment, reverse voltages are simultaneously applied to the left piezoelectric stack a1 and the right piezoelectric stack a2, the left piezoelectric stack and the right piezoelectric stack are simultaneously shortened, the left driving foot applies a driving force to the rotor through a friction coupling surface formed by the left driving foot and the outer arc surface of the rotor by using friction force, the direction is the upper right, and the rotor is pushed to rotate clockwise.
As shown in FIG. 3(2), 20V is applied to the left piezoelectric ceramic sheet A1p-pThe left piezoelectric ceramic piece contracts; applying 20V to the right piezoceramic wafer A2p-pThe right piezoelectric ceramic piece is extended, the upper half part of the modal converter generates deformation shown by a dotted line in the figure, and the lower half part of the modal converter generates displacement shown by the dotted line in the figure; the left driving foot is away from the outer arc surface of the rotor by a certain distance, and no contact surface is generated; the right driving foot presses the rotor to form a friction coupling surface with the outer arc surface of the rotor. At the moment, forward voltage is simultaneously applied to the left piezoelectric stack a1 and the right piezoelectric stack a2, the left piezoelectric stack and the right piezoelectric stack extend simultaneously, the right driving foot applies a driving force to the rotor through a friction coupling surface formed by the right driving foot and the outer arc surface of the rotor by using friction force, and the rotor is pushed to rotate clockwise in the downward right direction.
Fig. 3 (3) and 3 (4) are the repeated process of the above two basic working modes, the mode converter moves continuously according to the working modes shown in fig. 3(1) to 3 (4), so that the two driving feet are driven at two points respectively, and the rotor can realize continuous clockwise rotation motion.
The motion mechanism of the counterclockwise rotation motion is consistent with that of the clockwise rotation motion, only the positive and negative of the applied piezoelectric are changed, the working mode is shown in fig. 4, and the description is omitted here.
The ultrasonic motor provided by the invention utilizes the longitudinal vibration of the piezoelectric ceramic piece and the telescopic vibration of the piezoelectric stack to compound a driving foot to drive the rotor in a micro-amplitude manner, and the rotor is pushed to perform forward rotation motion or reverse rotation motion under the inertia effect through friction coupling, so that the utilization rate of energy efficiency is high, and the use is flexible. The stator assembly adopts a patch type structure, so that the processing is easy, and the cost is saved.
The present invention has been described in terms of the above embodiments, but it should be understood that the above embodiments are for illustration and description only and are not intended to limit the invention to the described embodiments. It will be appreciated by those skilled in the art that many variations and modifications may be made in light of the above teachings and within the purview of the invention.

Claims (5)

1. A bimodal composite inchworm ultrasonic motor comprises a base, a bearing, a modal converter, a piezoelectric ceramic piece, a piezoelectric stack, a rotor and an output shaft, wherein the stator assembly comprises the modal converter, the piezoelectric ceramic piece and the piezoelectric stack;
the mode converter is a Y-type mode integrated piece made of an elastomer; a piezoelectric ceramic piece is respectively adhered to the left side and the right side of the elastic plate at the upper half part of the modal converter, two driving feet are arranged at the lower half part of the modal converter, and the driving feet face the rotor surface and are respectively fixed with one piezoelectric stack; the rotor is a disk metal body, and the outer arc surface of the rotor and the two driving feet form two friction coupling surfaces;
the piezoelectric ceramic piece is polarized along the thickness direction, and the longitudinal vibration of the piezoelectric ceramic piece and the telescopic vibration of the piezoelectric stack are compounded to be driven by a micro amplitude of the rotor, so that the rotor is pushed to rotate;
when alternating voltage is applied to the upper surface and the lower surface of the piezoelectric ceramic sheet polarized along the thickness, the piezoelectric ceramic sheet can generate first-order longitudinal vibration; applying a forward voltage of 20Vp-p to the left piezoelectric ceramic piece, and extending the left piezoelectric ceramic piece; applying reverse voltage of 20Vp-p to the right piezoelectric ceramic piece, shrinking the right piezoelectric ceramic piece, and generating deformation on the upper half part of the modal converter to enable the lower half part of the modal converter to generate displacement; the left driving foot presses the rotor to form a friction coupling surface with the outer arc surface of the rotor; the left driving foot is away from the outer arc surface of the rotor by a certain distance and does not generate a contact surface with the rotor, reverse voltage is simultaneously applied to the left piezoelectric stack and the right piezoelectric stack, the left piezoelectric stack and the right piezoelectric stack are simultaneously shortened, the left driving foot applies a driving force to the rotor by using friction force through a friction coupling surface formed by the left driving foot and the outer arc surface of the rotor, the direction is upward right, and the rotor is pushed to rotate clockwise; applying a reverse voltage of 20Vp-p to the left piezoelectric ceramic piece, and contracting the left piezoelectric ceramic piece; applying a forward voltage of 20Vp-p to the right piezoelectric ceramic piece, extending the right piezoelectric ceramic piece, and generating deformation on the upper half part of the modal converter to enable the lower half part of the modal converter to generate displacement; the left driving foot is away from the outer arc surface of the rotor by a certain distance, and no contact surface is generated; the right side driving foot compresses the rotor to form a friction coupling surface with the outer arc surface of the rotor, forward voltage is applied to the left side piezoelectric stack and the right side piezoelectric stack at the same time, the left side piezoelectric stack and the right side piezoelectric stack extend at the same time, the right side driving foot utilizes friction force to provide driving force for the rotor through the friction coupling surface formed with the outer arc surface of the rotor, and the rotor is pushed to rotate clockwise in the downward right direction.
2. The bimodal compound inchworm ultrasonic motor of claim 1, wherein: the base is vertically connected with the longitudinal plate, and the number of the output shafts is one; the rotor is fixedly connected with the output shaft, and the output shaft penetrates through the through hole in the longitudinal plate and is connected with the longitudinal plate through the bearing.
3. The bimodal compound inchworm ultrasonic motor of claim 1, wherein: the piezoelectric ceramic plates are symmetrically adhered to two sides of the upper half part of the elastic plate of the mode converter through conductive epoxy resin glue, the surface plating layer metal is silver, and the lead mode is tin soldering.
4. The bimodal compound inchworm ultrasonic motor of claim 1, wherein: the fixed die converter also comprises a left fixed plate and a right fixed plate which are used for compressing the fixed die converter; the mode converter is provided with 2 elliptical fixing devices for fixing the piezoelectric stacks, and the included angle of a vertical plane between the two elliptical fixing devices is 90 degrees.
5. The bimodal compound inchworm ultrasonic motor of claim 1, wherein: the piezoelectric stack is used for gluing a plurality of layers of piezoelectric ceramic pieces polarized along the thickness together, electrodes are embedded in the piezoelectric stack, and the total output deformation is the sum of the output deformation of each layer of piezoelectric ceramic piece.
CN201910905048.XA 2019-09-24 2019-09-24 Bimodal compound inchworm ultrasonic motor Active CN110601597B (en)

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CN116476119B (en) * 2023-06-21 2023-09-12 季华实验室 Opening angle type two-finger clamp and excitation method thereof

Citations (2)

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Publication number Priority date Publication date Assignee Title
JP2004304963A (en) * 2003-03-31 2004-10-28 Seiko Epson Corp Piezoelectric actuator
US6979936B1 (en) * 1999-10-31 2005-12-27 Nanomotion Ltd. Piezoelectric motors and motor driving configurations

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CH696993A5 (en) * 2004-06-24 2008-02-29 Miniswys Sa Piezoelectric drive unit positioning optical component, has resonator connecting pair of arms which oscillate to and from each other, causing movement along shaft
JP4209463B2 (en) * 2007-03-15 2009-01-14 パナソニック株式会社 Ultrasonic actuator
US8237331B2 (en) * 2007-06-14 2012-08-07 Panasonic Corporation Vibratory actuator and drive unit including the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6979936B1 (en) * 1999-10-31 2005-12-27 Nanomotion Ltd. Piezoelectric motors and motor driving configurations
JP2004304963A (en) * 2003-03-31 2004-10-28 Seiko Epson Corp Piezoelectric actuator

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