CN100375380C - Curve swing head supersonic mciro motor composed of multiple piezoelectric lamination pile transducer - Google Patents
Curve swing head supersonic mciro motor composed of multiple piezoelectric lamination pile transducer Download PDFInfo
- Publication number
- CN100375380C CN100375380C CNB2004100711527A CN200410071152A CN100375380C CN 100375380 C CN100375380 C CN 100375380C CN B2004100711527 A CNB2004100711527 A CN B2004100711527A CN 200410071152 A CN200410071152 A CN 200410071152A CN 100375380 C CN100375380 C CN 100375380C
- Authority
- CN
- China
- Prior art keywords
- lamination
- piezoelectric
- transducer
- group
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000003475 lamination Methods 0.000 title claims abstract description 163
- 238000000034 method Methods 0.000 claims abstract description 28
- 238000005452 bending Methods 0.000 claims abstract description 16
- 230000005611 electricity Effects 0.000 claims description 33
- 238000002604 ultrasonography Methods 0.000 claims description 24
- 230000005284 excitation Effects 0.000 claims description 22
- 238000000605 extraction Methods 0.000 claims description 17
- 239000000919 ceramic Substances 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 12
- 230000010287 polarization Effects 0.000 claims description 9
- 239000002783 friction material Substances 0.000 claims description 4
- 238000005516 engineering process Methods 0.000 abstract description 3
- 230000007123 defense Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 9
- 238000005086 pumping Methods 0.000 description 8
- 230000007704 transition Effects 0.000 description 7
- 230000036316 preload Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000037007 arousal Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000010276 construction Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 229920006335 epoxy glue Polymers 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
Images
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The present invention relates to a bending oscillating ultrasonic micromotor composed of a plurality of sets of piezoelectric laminated pile transducers, which belongs to the field of ultrasonic application. The present invention comprises a central shaft, a rotor and a stator sheathed on the central shaft, and a torque output component, wherein the stator is composed of an upper matching block, a transducer, an electrode leading-out piece and a lower matching block; the transducer is a piezoelectric laminated pile with n pieces, and the n value is no less than 14; both surfaces of each piezoelectric sheet are divided into m electrodes with different directions, and the m value is no less than 32; different piezoelectric laminations are laminated into a laminated pile; the connection method of electrodes between the piezoelectric laminations adopts an internal connection method or an external connection method; an electrode excited by a sinwt signal is connected in parallel with a leading-out electrode, and an electrode excited by a coswt signal is also connected in parallel with the leading-out electrode respectively. The present invention promotes the miniaturization of an ultrasonic motor; when the peak-peak value of an electric signal is about 32 to 36V, and the rotor can rotate obviously on the surface of the stator; the present invention has a wide application prospect for biology, medical treatment, micro machinery, defense science and technology, etc.
Description
Technical field
The invention belongs to the applications of ultrasound field, particularly Wei Xinghua supersonic motor structural design.
Background technology
Piezoelectric ultrasonic motor is an inverse piezoelectric effect of utilizing piezoelectric, the driving mechanism of taking specific structure to make, and it generally is made of functional parts such as stator, rotor and pre-pressure mechanisms.It utilizes the inverse piezoelectric effect of piezoelectric ceramic, produces ultrasonic vibration at stator surface, and by the frictional force drives rotor motion between stator and the rotor.Ultrasound electric machine has the following characteristics that are better than the common electrical magneto:
1, the slow-speed of revolution, big torque do not need reducing gear can directly drive load.
2, volume is little, structure is flexible, and power to volume ratio is 3-12 a times of electromagnetic machine.
3, starting stops response soon, and the response time is less than 1 millisecond.
4, do not produce electromagnetic interference, be not subjected to electromagnetic interference yet.
5, self-sustaining moment is arranged, gearless gap, but precision positioning.
6, move quiet noiseless.
The flexural vibration mode supersonic motor is a kind of of ultrasound electric machine, other ultrasound electric machine is fairly simple relatively for its structure, same mainly by the stator that encourages ultrasonic vibration, rotor/the axle of output torque and the compositions such as pre-pressure mechanism that pressurize to rotor, said stator mainly is made of the piezo ceramic element and the match block of excited vibration again.The flexural vibration mode supersonic motor is divided into piezoelectric patches drive motors, piezo tube drive motors according to the mode of the crooked yawing of excitation and the shape of piezo ceramic element again simultaneously.Their transmission principle is similar with driving mechanism, as shown in Figure 1.Stator is in the mode of oscillation that circumference is shaken the head, one very little gap is arranged between stator 11 and the ring-type rotor 12, the curved edges motion of shaking the head in stator limit during transmission, therefore the point of contact contact is arranged between the stator rotor, its contact point moves on the circumferential periphery of stator, successively, the frictional force between stator and rotor makes rotor rotate along the direction opposite with the contact point moving direction.
Fig. 2 is that two-layer piezoelectric lamination (every layer be made up of two piezoelectric patches) is formed one group of transducer for existing piezoelectric patches encourages the schematic diagram of crooked yawing, used piezo ceramic element.On same piezoelectric patches, divide the two halves opposite polarization with diameter symmetry, two piezoelectric patches 22 spatial vertical of two piezoelectric patches 21 of logical A phase current and logical B phase current are arranged, two-phase all adopts ten thousand bright sandwich structures to form stator, A imports sin ω t signal mutually simultaneously, B imports cos ω t signal mutually, adopts each 90 degree phase difference of time and space to encourage flexural vibrations like this; The flexural vibration mode supersonic motor structure of this piezoelectric patches excitation as shown in Figure 3, match block 36,38 clamps the common stator that constitutes motor in two-layer piezoelectric lamination 37 backs up and down, place the rotor 35 on the stator to be hollow-core construction, there is the spring 34 that applies precompression its hollow part, moment is by gear 33 outputs, and 32 is the polytetrafluoroethylene cover, plays bearing, 31 is packing ring, and 39 is main shaft.
The main advantage of above-mentioned flexural vibration mode supersonic motor is easy to realize microminiaturization and industrialization exactly.But limited by conventional processing technology, the used piezoelectric patches thickness of motor can not too thin (generally being not less than 0.2mm), the applied voltage that is added to piezoelectric patches during work is very high, need transformer to boost, power supply is difficult for integrated, and because of only with one group of transducer, the upper-lower position difference of two-layer piezoelectric patches is big, the two paths of signals resonance frequency that makes motor is degeneracy not, and motion is difficult for stable, has limited the use of this motor.
Summary of the invention
The present invention is the weak point that overcomes prior art, bending that a kind of many group piezoelectric lamination pile transducers the form ultrasound micro-motor of shaking the head is proposed, be characterized in utilizing the lamination multi-layer piezoelectric laminated stack composition piezoelectric elements of organizing transducers as the excitation flexural vibrations of burning method making altogether more, not only stable performance of electrical micro-machine of the present invention, and because each piezoelectric patches is very thin, driving power does not need transformer to boost, and can be easy to integratedly, can promote the microminiaturization and the industrialization of ultrasound electric machine greatly.
The bending that many groups piezoelectric lamination pile transducer that the present invention proposes the is formed ultrasound micro-motor of shaking the head comprises central shaft and is placed in rotor and stator on the central shaft, and the moment output block; This stator is made of the ten thousand bright sandwich structures of stator last match block, transducer, electrode lead-out tablet, following match block; It is characterized in that described transducer is many groups piezoelectric lamination pile transducer of an integral body being pressed into of .n lamination electricity laminated stack, n 〉=14, wherein, two piezoelectric patches of every lamination electricity lamination are that ten thousand bright formulas are arranged; Two surfaces of every piezoelectric patches are divided into the different m part electrode of polarised direction, m 〉=32, and each lamination electricity lamination laminates into a laminated stack again; Connection or method for externally in method of connecting electrodes between each lamination electricity lamination adopts are respectively with the extraction electrode in parallel of sin ω t signal excitation, again with the extraction electrode also in parallel of cos ω t excitation.
The size range of described motor diameter can be between 1mm-30mm, the thickness of described piezoelectric lamination pile can be the 1/5-1/3 of the size range of motor diameter, the gross thickness of every lamination electricity lamination can be 10-100 μ m, and the electrode layers thickness of every piezoelectric lamination can be 3-10 μ m.
The ultrasound micro-motor of the bendings that above-mentioned many group piezoelectric lamination pile transducers are formed can being shaken the head is used for digital or the automatic focus of non-digital camera and camera lens, the automatic focus of other optical instrument optical lens, the precision positioning field of mechanical platform, moving body or turntable.
Characteristics of the present invention and effect:
The present invention utilize lamination altogether burning method many n lamination electricity laminated stack of making form the piezoelectric elements of many group transducers as the excitation flexural vibrations, replace existing one group of transducer forming by two-layer piezoelectric lamination, because every lamination electricity lamination very thin (every thickness can reach 3-5 μ m), therefore can be under the situation that does not need transformer to boost, the 2-6V signal of telecommunication directly is provided, rotor is obviously rotated, the driving power integrability on stator surface.
Owing to use many group transducers, make the resonance frequency degeneracy of motor stator, and the polarization of sub-electrode is abundant, runnability is good, and better effects if makes motor performance stable.
The thickness and the quantity of the piezoelectric patches that transducer of the present invention adopts, those skilled in the art can require to determine to motor performance according to practical application.Ultrasound electric machine diameter dimension of the present invention can be 1mm between the 30mm.
N lamination of the present invention electricity laminated stack is formed many group transducers and be can be used for existing various structural bending and shake the head in the ultrasound micro-motor.
The present invention can promote the microminiaturization and the industrialization of ultrasound electric machine greatly, at aspects such as biology, medical treatment, micromechanics, science and techniques of defence wide application prospect is arranged.
Description of drawings
Fig. 1 is the transmission principle schematic diagram of the flexural vibration mode supersonic motor that had.
Fig. 2 is for encouraging the principle schematic of crooked yawing by 2 layers of 4 piezoelectric patches.
Fig. 3 encourages the structural representation of crooked head-shaking motor for existing 4 piezoelectric patches.
Fig. 4 divides equally the laminated stack structural principle schematic diagram of 2 equal portions for piezoelectric patches of the present invention.
Fig. 5 divides equally the synthetic unit construction principle schematic diagram of branch laminated stack of 2 equal portions for piezoelectric patches of the present invention.
Fig. 6 divides equally the laminated stack structural principle schematic diagram of 4 equal portions for piezoelectric patches of the present invention.
Fig. 7 divides equally the synthetic unit construction principle schematic diagram of intersection rotation laminated stack of 4 equal portions for piezoelectric patches of the present invention.
Fig. 8 divides equally the laminated stack structural principle schematic diagram of four road signal leads of 4 equal portions for piezoelectric patches of the present invention.
Fig. 9 rotates laminated stack unit construction principle schematic diagram for the intersection that piezoelectric patches of the present invention is divided equally more than 6 parts.
Figure 10 divides equally 6 parts three-phase laminated stack structural principle schematic diagram for piezoelectric patches of the present invention.
Figure 11 is embodiment one structural representation of piezoelectric ultrasonic motor of the present invention.
Figure 12 is embodiment two structural representations of piezoelectric ultrasonic motor of the present invention.
Embodiment
The invention provides two kinds of motor embodiment, and, be described with reference to the accompanying drawings as follows by having 7 kinds of different many groups piezoelectric lamination pile transducer structures that realize making ultrasound electric machine stator of the present invention:
Embodiment one:
The present invention has designed the embodiment one of piezoelectric ultrasonic motor, in the present embodiment except that adopting many group piezoelectric lamination pile transducers as the piezoelectric element, other structure adopts the applicant to obtain the analog structure of the ultrasound electric machine of patent, as shown in figure 11, this motor is made up of rotor 111, stator 112, central shaft 113.Wherein, stator 112 is made up of last match block 1121, multilayer piezoelectric ceramic laminated stack 1122, electrode lead-out tablet 1123, following match block 1124.Rotor 111 is made up of pre-load nut 1111, fixed support 1112, gear 1113, transition piece A1114, transition piece B1115, rotor 1116 and preloading spring 1117.
The endoporus of last match block 1121 is a screwed hole 11211, and be connected with the screw portion 1131 of central shaft 113, screwing between the two can provide precompression for multilayer piezoelectric ceramic laminated stack 1122, and multilayer piezoelectric ceramic laminated stack 1122, electrode lead-out tablet 1123, time match block 1124 are clamped between the flange termination 1132 of last match block 1121 and central shaft 113, form stator 112 structural ten thousand bright patterns, simultaneously, the end face of flange termination 1132 plays the effect to central shaft 113 axial location.The electricity of multilayer piezoelectric ceramic laminated stack 1122 is drawn by electrode lead-out tablet 1123 and is finished.Rotor 1116, transition piece B1115, preloading spring 1117, gear 1113, transition piece A1114, fixed support 1112 are enclosed within the end near the screw thread 1133 of central shaft 113 successively, by cooperating rotor 111 and stator 112 formation one of the screw thread 1133 on pre-load nut 1111 and the central shaft 113.The contact end 11161 of rotor 1116 is circular, and the top groove that processes " U " word shape of certain mechanical elasticity separately of circular contact end 11161, according to the overall dimension of motor, this contact end 11161 characteristic size radially should be controlled at 0.05mm between the 1mm.Last match block 1121 in contact end 11161 and the stator 112 adopts the mode of electroplating to deposit the last layer surface wear-resistant material near the upper surface of rotor 1116, the frictional dissipation when purpose reduces machine operation.Preloading spring 1117 is placed between gear 1113 and the transition piece B 1115, and the expansion force by preloading spring 1117 provides axial pre tightening force for rotor 111 with contacting of stator 112.Bond together by epoxy glue between transition piece B1115 and the rotor 1116, gear 1113, transition piece B1115 and rotor 1116 threes relative position when machine operation are constant, it is three's rotation synchronously together, and the stator 112 of fixed support 1112 and pre-load nut 1111 relative motors keeps motionless, and two symmetrical screws 11121 on the fixed support 1112 provide and extraneous being connected and fixed.
The size range of the motor diameter of present embodiment can be between 1mm-30mm; The piezoelectric patches that is adopted utilizes lamination burning method making altogether, and the gross thickness of piezoelectric lamination pile is the 1/5-1/43 of the size range of motor diameter, and the gross thickness of every lamination electricity lamination is 10-100 μ m, and the electrode layers thickness of every piezoelectric lamination is 3-10 μ m.Total number of plies of piezoelectric lamination is by the gross thickness of piezoelectric lamination pile and adopt the thickness of every of piezoelectric patches to determine.
Many groups piezoelectric lamination pile transducer 1122 in the present embodiment can adopt following 7 kinds of concrete structures:
Many groups piezoelectric lamination pile transducer of the 1st kind of structure as shown in Figure 4, piezoelectric lamination 411 is that left and right sides two halves polarised direction is opposite, two as bright ten thousand formulas arrangement up and down, piezoelectric lamination 412 is that front and back two halves polarised direction is also opposite, also arranges as ten thousand bright formulas for two up and down.One group of transducer of 411 and 421 mutually orthogonal compositions, the above-mentioned transducer of respectively organizing is combined many groups (every group of two-layer n layer n 〉=14 altogether) piezoelectric lamination transducer.Method of connecting electrodes between each lamination electricity lamination all can with interior connection or method for externally.With 41 classes of sin ω t signal excitation extraction electrode in parallel,, promptly make many groups piezoelectric lamination pile transducer of an integral body respectively again with the 42 classes extraction electrode also in parallel of cos ω t excitation.With Fig. 2 compare attenuate sheet thick, reduced driving voltage. carry out orthogonal arrangement in pairs between each lamination electricity lamination in every group of transducer, make frequency degeneracy performance improve.
Many groups piezoelectric lamination pile transducer of the 2nd kind of structure as shown in Figure 5, opposite two as ten thousand bright formulas up and down of left and right sides two halves polarised direction are arranged in the piezoelectric lamination 511, two halves polarised direction in the left and right sides is also opposite in the piezoelectric lamination 512, up and down two also as ten thousand bright formulas arrange.Piezoelectric lamination 511,512.....n1 layer (n1 〉=7) are formed and are divided piezoelectricity lamination transducer group 51, and pumping signal makes it to produce the vibration that bends right and left; The polarised direction of two halves is opposite before and after in the piezoelectric lamination 521, two as bright ten thousand formulas arrangement up and down, and the polarised direction of front and back two halves is also opposite in the piezoelectric lamination 522, also arranges as ten thousand bright formulas for two up and down.521,522......n2 layer (n2 〉=7) is formed and is divided piezoelectricity lamination transducer group 52, flexural vibrations before and after pumping signal makes it to produce. and divide piezoelectricity lamination transducer 51 and 52 mutually orthogonal many group piezoelectric lamination pile transducers that form a whole.Method of connecting electrodes between each lamination electricity lamination all can with interior connection or method for externally.With the extraction electrode in parallel of sin ω t signal excitation, with the extraction electrode also in parallel of cos ω t excitation, promptly make operational integral body and organize piezoelectric lamination pile transducer more more respectively.With Fig. 2 compare attenuate sheet thick, reduced driving voltage. but, make frequency degeneracy performance to improve because of piezoelectric patches in every group of transducer is arranged in parallel. but this structure extraction electrode is simple than first kind
Many groups piezoelectric lamination pile transducer of the 3rd kind of structure as shown in Figure 6, piezoelectric lamination 611 is divided into 4 parts of electrodes, wherein two parts polarised direction in the left and right sides is opposite, two as bright ten thousand formulas arrangement up and down, piezoelectric lamination 612 also is divided into 4 parts of electrodes, and wherein two parts polarised direction in the left and right sides is also opposite, also arrange for two up and down as ten thousand bright formulas. piezoelectric lamination 611,612..... n layer (n 〉=14) is arranged and formed piezoelectric lamination pile, pumping signal makes it to produce the flexural vibrations of 45 degree and 135 degree directions respectively; Mutually orthogonal synthetic the rotatablely moving of position and time.Many group piezoelectric lamination pile transducers form a whole.Method of connecting electrodes between each lamination electricity lamination all can with interior connection or method for externally.With the extraction electrode in parallel of sin ω t signal excitation,, promptly make operational many group piezoelectric lamination pile transducers respectively again with the extraction electrode also in parallel of cos ω t excitation.With Fig. 2 compare attenuate sheet thick, reduced driving voltage. and the ten thousand bright laminations of one deck of per two piezoelectric patches composition, not only make frequency degeneracy performance obviously improve. but also because the polarised direction of the two relative sub-electrodes of this structure is opposite, launching efficiency really is the twice of the 1st kind and the 2nd kind.
Many groups piezoelectric lamination pile transducer of the 4th kind of structure as shown in Figure 7, piezoelectric lamination 711 is divided into 4 parts of electrodes, wherein two parts polarised direction in diagonal angle is identical, and the 1st piezoelectric patches is opposite with the 2nd piezoelectric patches diagonal angle polarised direction, two as bright ten thousand formulas arrangement up and down, piezoelectric lamination 712 also is divided into 4 parts of electrodes, wherein two parts polarised direction in diagonal angle is also identical, and the 1st piezoelectric patches is also opposite with the 2nd piezoelectric patches diagonal angle polarised direction, also arrange for two up and down as ten thousand bright formulas, but 712 to 711 piezoelectric patches dextrorotations turn 90 degrees (or 270 degree), piezoelectric lamination 711 and 712 cross arrangements are formed n lamination electricity laminated stack 71 (n 〉=14), and pumping signal will make it to produce the flexural vibrations of 45 degree and 135 degree directions respectively; Mutually orthogonal synthetic the rotatablely moving of position and time. many group piezoelectric lamination pile transducers form a whole.Method of connecting electrodes between each piezoelectric lamination all can with interior connection or method for externally. with the extraction electrode in parallel of sin ω t signal excitation,, promptly make operational many group piezoelectric lamination pile transducers respectively again with the extraction electrode also in parallel of cos ω t excitation.With Fig. 2 compare attenuate sheet thick, reduced driving voltage. and every two-layer piezoelectric lamination forms and divides a transducer, not only makes frequency degeneracy performance obviously improve. but also the arousal effect of this structure also is the twice of the 1st kind and the 2nd kind.
Many groups piezoelectric lamination pile transducer of the 5th kind of structure as shown in Figure 8, piezoelectric lamination 811 is divided into even 4 parts to electrode, two piezoelectric patches are installed by bright all places formula up and down, add respectively simultaneously on 4 electrodes of each piezoelectric patches Sin ω t, Cos ω t ,-Sin ω t ,-Cos ω t four tunnel encourages the signals of telecommunication.Again with n layer (n 〉=14) piezoelectric lamination 811,812 (with 811 identical) ... again the respective electrode parallel connection, be assembled into whole many group piezoelectric lamination pile transducers.Method of connecting electrodes between each piezoelectric lamination all can with interior connection or method for externally. respectively with sin ω t, cos ω t,-sin ω t, the pumping signal electrode parallel connection of-cos ω t is drawn, promptly can provide assembling motor stator or other transducer to use. with Fig. 2 compare attenuate sheet thick, having reduced driving voltage. and the ten thousand bright laminations formed of per two piezoelectric patches not only make frequency degeneracy performance obviously improve. and also the arousal effect of this structure also is the twice of the 1st kind and the 2nd kind.
Sin ω t, cos ω t ,-sin ω t ,-cos ω t four road ac signals, then can encourage this PZT (piezoelectric transducer) to produce required crooked yawing, the wherein any two-way of exchange, crooked yawing is anti-phase.
This mode also can be divided into 4k with electrode, k=1,2,3...k be the mode order, two piezoelectric patches are by bright all places formula installation up and down, plus signal sin ω t successively, cos ω t,-sin ω t,-cos ω t, sin ω t, cos ω t,-sin ω t ,-cos ω t.... is the respective electrode parallel connection. and the method for connecting electrodes between the piezoelectric patches all can with interior connection or method for externally.Respectively with sin ω t, cos ω t ,-sin ω t, the pumping signal electrode parallel connection of-cos ω t is drawn, and many group piezoelectric lamination pile transducers that form a whole promptly can provide assembling motor stator or other transducer to use.
Many groups piezoelectric lamination pile transducer of the 6th kind of structure as shown in Figure 9, piezoelectric lamination 911 is divided into 6 parts of electrodes, wherein adjacent two parts polarised direction is opposite, two as bright ten thousand formulas arrangement up and down, piezoelectric lamination 921 also is divided into 6 parts of electrodes, wherein adjacent two parts polarised direction is also opposite, also arranges 30 degree but 911 to 921 piezoelectric patches turn clockwise (or 330 degree) up and down for two as ten thousand bright formulas.N1 layer 911 lamination and n2 layer 921 lamination (n1+n2) 〉=14 are arranged the formation piezoelectric lamination pile, and pumping signal will make it to produce 3 rank flexural vibrations respectively; Rotatablely moving of the mutually orthogonal synthetic 3 rank patterns of position and time.Many group piezoelectric lamination pile transducers form a whole.Method of connecting electrodes between each lamination electricity lamination all can with interior connection or method for externally.With the extraction electrode in parallel of sin ω t signal excitation,, promptly make operational many group piezoelectric lamination pile transducers respectively again with the extraction electrode also in parallel of cos ω t excitation.With Fig. 2 compare attenuate sheet thick, reduced driving voltage. and the ten thousand bright laminations formed of per two piezoelectric patches not only make frequency degeneracy performance improve. but also the arousal effect of this structure is than the 1st kind and the 2nd kind high approximately 1.5 times.
Kind electrode division and compound mode can be extended to piezoelectric patches is divided into 8,10,12...... Deng even number part, make adjacent two parts of reverse polarizations. top one deck bright ten thousand with following one deck bright ten thousand along circumferentially staggering 1/2 equal portions, add sin ω t signal voltage above, add cos ω t signal voltage below. promptly form crooked rotation mode., operational many group piezoelectric lamination pile transducers are promptly made in the combination of .n lamination sheets.
Many groups piezoelectric lamination pile transducer of the 7th kind of structure as shown in figure 10, piezoelectric lamination 1011 is divided into 6 parts of electrodes, wherein adjacent three partial polarization directions are identical, relative in addition three part reverse polarizations.Two as bright ten thousand formulas arrangement are arranged the formation piezoelectric lamination pile with n layer 1011 (n 〉=14) up and down, and pumping signal will make it to produce the three-phase flexural vibrations respectively; Synthetic the rotatablely moving of 120 degree of mutual deviation mutually of position and time.Many group piezoelectric lamination pile transducers form a whole.Method of connecting electrodes between each piezoelectric lamination all can with interior connection or method for externally.With the extraction electrode in parallel of sin ω t signal excitation,, promptly make operational many group piezoelectric lamination pile transducers respectively again with extraction electrode in parallel sin (ω t+120) excitation and sin (ω t+240) excitation.With Fig. 2 compare attenuate sheet thick, reduced driving voltage. and the ten thousand bright laminations formed of per two piezoelectric patches not only make frequency degeneracy performance obviously improve, and be better than the 1st, 2,3,4,5 kinds. and the arousal effect of this structure be the 1st kind and the 2nd kind 1.5-3 doubly.
Kind electrode division and compound mode can be extended to piezoelectric patches is divided into 12, and the 24...... equal portions make relative two parts of reverse polarizations, and operational many group piezoelectric lamination pile transducers are promptly made in the combination of .n lamination sheets.
Embodiment two:
The motor general structure of present embodiment is the improvement to embodiment one structure, and as shown in figure 12, this motor is made up of rotor 121, stator 122, central shaft 123.Wherein, stator 122 is by last match block 1222, the friction material 1221 that is bonded in match block 1222 upper surfaces, multilayer piezoelectric ceramic laminated stack 1223, electrode lead-out tablet 1224, match block 1225, the binding nut 1226 that has an internal thread are formed down.Rotor 121 is made up of pre-load nut 1211, fixed support 1212, gear 1213, preloading spring 1214 and rotor 1215.
Friction material 1221 and last match block 1222 link together by epoxide-resin glue, the endoporus of last match block 1222 is a unthreaded hole, and and keep interference fits between the central shaft 123, by the end face realization central shaft 123 of the ring flange on the central shaft 123 1232 and the axial location between the last stator 122.Multilayer piezoelectric ceramic laminated stack 1223, electrode lead-out tablet 1224, following match block 1225 are enclosed within the side of central shaft 123 near screw threads 1233 successively, particular location will lean on last with the bottom of last match block 1222, then, cooperate with the bottom thread 1233 of central shaft 123 with the binding nut 1226 that has internal thread, multilayer piezoelectric ceramic laminated stack 1223, electrode lead-out tablet 1224 and following match block 1225 are become bright ten thousand form with certain power clamping.The electricity of multilayer piezoelectric ceramic laminated stack 1223 is drawn by electrode lead-out tablet 1224 and is finished.Rotor 1215, preloading spring 1214, gear 1213, fixed support 1212 are enclosed within central shaft 123 side near screw threads 1231 successively, by cooperating rotor 121 and stator 122 formation one of the screw thread 1231 on pre-load nut 1211 and the central shaft 123.The contact end 12151 of rotor 1215 is circular, and according to the overall dimension of motor, this contact end 12151 characteristic size radially should be controlled at 0.05mm between the 1mm, during machine operation and friction material 1221 CONTACT WITH FRICTION.Preloading spring 1214 is placed between gear 1213 and the rotor 1215, and the tension force by preloading spring 1214 provides axial pre tightening force for rotor 121 with contacting of stator 122.Relative position between gear 1213 and the rotor 1215 is motionless, gear 1213 rotates synchronously with rotor 1215 when being machine operation, and the stator 122 of fixed support 1212 and pre-load nut 1211 relative motors keeps motionless, and two symmetrical screws 12121 on the fixed support 1212 provide and extraneous being connected and fixed.
Many groups piezoelectric lamination pile transducer 1223 in the present embodiment can adopt 7 kinds of above-mentioned concrete structures equally.
Claims (10)
1. the bending formed of the piezoelectric lamination pile transducer of group more than kind ultrasound micro-motor of shaking the head comprises central shaft and is placed in rotor and stator on the central shaft, and the moment output block; This stator is made of the ten thousand bright sandwich structures of stator last match block, transducer, electrode lead-out tablet, following match block; It is characterized in that described transducer is many groups piezoelectric lamination pile transducer of an integral body being pressed into of .n lamination electricity laminated stack, n 〉=14, wherein, two piezoelectric patches of every lamination electricity lamination are that ten thousand bright formulas are arranged; Two surfaces of every piezoelectric patches are divided into the different m part electrode of polarised direction, m 〉=32, and each lamination electricity lamination laminates into a laminated stack again; Connection or method for externally in method of connecting electrodes between each lamination electricity lamination adopts are respectively with the extraction electrode in parallel of sin ω t signal excitation, again with the extraction electrode also in parallel of cos ω t excitation.
2. the bending ultrasound micro-motor of shaking the head according to claim 1, it is characterized in that, from top to bottom two piezoelectric patches of ground floor piezoelectric lamination are divided into 2 parts and become the opposite ten thousand bright combinations of left and right sides two halves polarised direction in described every group of transducer, two piezoelectric patches of second layer piezoelectric lamination also respectively are divided into the opposite ten thousand bright combinations of 2 parts of one-tenth front and back two halves polarised directions, one group of transducer of the ten thousand mutually orthogonal compositions of combination that first, second adjacent two piezoelectric patches are bright.
3. the bending ultrasound micro-motor of shaking the head according to claim 1, it is characterized in that, from top to bottom two piezoelectric patches of ground floor piezoelectric lamination are divided into 2 parts and become the opposite electrodes of left and right sides two halves polarised direction in described every group of transducer, two piezoelectric patches of second layer piezoelectric lamination are divided into 2 parts of opposite electrodes of one-tenth front and back two halves polarised direction, the mutually orthogonal composition first grouping transducer of first, second lamination electricity lamination; The front and back two halves polarised direction of two piezoelectric patches of the 3rd lamination electricity lamination is opposite, and the left and right sides two halves polarised direction of two piezoelectric patches of the 4th lamination electricity lamination is opposite, the mutually orthogonal composition second grouping transducer of the 3rd, the 4th lamination electricity lamination; One group of piezoelectric lamination transducer of described first, second grouping mutually orthogonal composition of transducer.
4. the bending ultrasound micro-motor of shaking the head according to claim 1, it is characterized in that, from top to bottom two piezoelectric patches of ground floor piezoelectric lamination are divided into 4 parts and become the opposite electrodes of left and right sides two halves polarised direction in described every group of transducer, two piezoelectric patches of second layer piezoelectric lamination are divided into 4 parts of opposite electrodes of one-tenth front and back two halves polarised direction, one group of transducer of first, second lamination electricity mutually orthogonal composition of lamination.
5. the bending ultrasound micro-motor of shaking the head according to claim 1, it is characterized in that, from top to bottom two piezoelectric patches of ground floor piezoelectric lamination are divided into 4 parts and become the identical electrodes of diagonal angle polarised direction in described every group of transducer, two piezoelectric patches of second layer piezoelectric lamination are divided into 4 parts and become the identical electrode of diagonal angle polarised direction and turn 90 degrees placement with the dextrorotation of ground floor piezoelectric lamination, the mutually orthogonal composition first grouping transducer of first, second lamination electricity lamination; Three, the structure with first, second lamination electricity lamination is identical respectively for the 4th lamination electricity lamination, second group of transducer of the 3rd, the 4th lamination electricity mutually orthogonal composition of lamination; Mutually orthogonal composition more than the one group piezoelectric lamination pile transducers of described first, second grouping transducer.
6. the bending ultrasound micro-motor of shaking the head according to claim 1, it is characterized in that, every adjacent two piezoelectric patches constitute one deck piezoelectric lamination in described every group of transducer, every piezoelectric patches of wherein every lamination electricity lamination is divided into 4 parts of electrodes of polarization in the same way, add respectively simultaneously on 4 electrodes of each piezoelectric patches Sin ω t, Cos ω t ,-Sin ω t ,-Cos ω t four tunnel excitation signals of telecommunication, respective electrode parallel connection that again will the electric lamination of adjacent 2 laminations is assembled into one group of piezoelectric lamination transducer.
7. the bending ultrasound micro-motor of shaking the head according to claim 1, it is characterized in that, from top to bottom two piezoelectric patches of ground floor piezoelectric lamination are divided into 6 parts of electrodes in described every group of transducer, wherein adjacent two parts polarised direction is opposite, two piezoelectric patches of second layer piezoelectric lamination are divided into 6 parts of electrodes, wherein adjacent two parts polarised direction is opposite, and first, second lamination electricity lamination 30 degree that turn clockwise are placed, and are assembled into one group of piezoelectric lamination transducer.
8. the bending ultrasound micro-motor of shaking the head according to claim 1, it is characterized in that the adjacent two layers piezoelectric lamination is formed one group of transducer in described every group of transducer, wherein every piezoelectric patches is divided into 6 parts of electrodes, adjacent three partial polarization directions are identical, relative in addition three part reverse polarizations.
9. as the ultrasound micro-motor of shaking the head of bending as described in the claim 1,2,3,4,5,6,7 or 8 any one, it is characterized in that, the size range of described motor diameter is between 1mm-30mm, the gross thickness of described piezoelectric lamination pile is the 1/5-1/3 of the size range of motor diameter, the gross thickness of every lamination electricity lamination is 10-100 μ m, and the electrode layers thickness of every piezoelectric lamination is 3-10 μ m.
10. as the ultrasound micro-motor of shaking the head of bending as described in the claim 1,2,3,4,5,6,7 or 8 any one, it is characterized in that, match block has a friction material layer near a side surface of rotor on described, the endoporus that should go up match block is a unthreaded hole, and and central shaft 123 between keep interference fits; Described multilayer piezoelectric ceramic laminated stack is finished supply voltage by the electrode lead-out tablet of bottom and is introduced, and cooperates with the bottom thread of central shaft by binding nut; The contact end of described rotor is circular, this contact end characteristic size radially at 0.05mm between the 1mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100711527A CN100375380C (en) | 2004-07-30 | 2004-07-30 | Curve swing head supersonic mciro motor composed of multiple piezoelectric lamination pile transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100711527A CN100375380C (en) | 2004-07-30 | 2004-07-30 | Curve swing head supersonic mciro motor composed of multiple piezoelectric lamination pile transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1588784A CN1588784A (en) | 2005-03-02 |
| CN100375380C true CN100375380C (en) | 2008-03-12 |
Family
ID=34604584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100711527A Expired - Fee Related CN100375380C (en) | 2004-07-30 | 2004-07-30 | Curve swing head supersonic mciro motor composed of multiple piezoelectric lamination pile transducer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100375380C (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101291122B (en) * | 2008-06-13 | 2011-09-14 | 清华大学 | Linear piezoelectric actuator with double-driving feet |
| CN103050151B (en) * | 2012-12-24 | 2014-10-15 | 南京航空航天大学 | X-Y workbench with two degrees of freedom |
| CN107306097B (en) * | 2016-04-22 | 2019-09-13 | 北京派和智能装备技术有限公司 | Using the micro machine of multi-layer annular piezoelectric ceramics |
| CN108065964B (en) * | 2018-01-16 | 2021-04-20 | 中国科学院苏州生物医学工程技术研究所 | Ultrasonic imaging method, device and equipment and ultrasonic imaging probe |
| CN114649684B (en) * | 2020-12-21 | 2024-06-04 | 上海航天电子通讯设备研究所 | Corrugated feed source loudspeaker lamination stacking method and device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1066940A (en) * | 1992-07-02 | 1992-12-09 | 清华大学 | Piezoelectric-current changing rotary step motor |
| CN1267950A (en) * | 2000-04-28 | 2000-09-27 | 清华大学 | Two-way rotating longitudinal-bending standing-wave supersonic motor |
| CN1306336A (en) * | 2001-02-28 | 2001-08-01 | 清华大学 | Bending-vibration ultrasonic small electric machine based on piezoelectric column and electrode combination exciation method |
| CN1359188A (en) * | 2002-01-29 | 2002-07-17 | 清华大学 | Curve and straight combined straight line ulrasonic motor |
-
2004
- 2004-07-30 CN CNB2004100711527A patent/CN100375380C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1066940A (en) * | 1992-07-02 | 1992-12-09 | 清华大学 | Piezoelectric-current changing rotary step motor |
| CN1267950A (en) * | 2000-04-28 | 2000-09-27 | 清华大学 | Two-way rotating longitudinal-bending standing-wave supersonic motor |
| CN1306336A (en) * | 2001-02-28 | 2001-08-01 | 清华大学 | Bending-vibration ultrasonic small electric machine based on piezoelectric column and electrode combination exciation method |
| CN1359188A (en) * | 2002-01-29 | 2002-07-17 | 清华大学 | Curve and straight combined straight line ulrasonic motor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1588784A (en) | 2005-03-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100428618C (en) | Composite ultrasonic micromotor with slotted metal square column piezoelectric sheet | |
| US6806621B2 (en) | Electroactive polymer rotary motors | |
| CN1767347A (en) | Screw thread driven polyhedron ultrasonic motor | |
| CN201075845Y (en) | Screwed cap type ultrasound electric machine | |
| JP2005168281A (en) | Laminated piezoelectric element and vibration wave driver | |
| CN1156068C (en) | Bending-vibration ultrasonic small electric machine based on piezoelectric column and electrode combination exciation method | |
| CN101227157B (en) | Piezoelectricity thread driver adopting Langevin-type transducer structure | |
| CN113224972B (en) | Single-stator three-degree-of-freedom spherical ultrasonic motor and excitation method thereof | |
| CN102931869A (en) | SMD (Surface Mount Device) ultrasonic motor vibrator and drive method thereof | |
| CN101563839B (en) | A linear driver | |
| CN100375380C (en) | Curve swing head supersonic mciro motor composed of multiple piezoelectric lamination pile transducer | |
| CN102355160A (en) | Longitudinal and bending composite mode sandwich two-foot ultrasonic linear motor oscillator with elastic support | |
| CN107306097B (en) | Using the micro machine of multi-layer annular piezoelectric ceramics | |
| CN100578278C (en) | Optical focusing mechanism | |
| JP2009254190A (en) | Ultrasonic motor | |
| CN102931875A (en) | SMD square ultrasonic motor vibrator and driving method thereof | |
| CN1738178A (en) | Polyhedron piezoelectric column or piezoelectric tube ultrasonic micromotor | |
| CN1258864C (en) | Ultrasonic micro-motor with piezo column of electric conductive shaft and method for polarizing and exciting its electrodes therefor | |
| JP4871593B2 (en) | Vibrator and vibration wave drive device | |
| CN100461609C (en) | Hollow metal square column piezoelectric element composite ultrasonic micromotor | |
| CN110661445A (en) | Parallel three-degree-of-freedom piezoelectric resonance self-actuating mechanism and excitation method thereof | |
| CN2847685Y (en) | Grooved metal square colume piezoelectric sheet composite supersonic micro motor | |
| CN107612417B (en) | Three degree of freedom spherical rotor ultrasonic motor stator matrix and its motivational techniques | |
| CN216672880U (en) | Stator assembly | |
| CN102118118B (en) | Linear type ultrasonic micromotor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080312 Termination date: 20110730 |