CN2695449Y

CN2695449Y - Vacuum radiation type heater

Info

Publication number: CN2695449Y
Application number: CN 200420051279
Authority: CN
Inventors: 宋长安; 温振超; 孙志文; 时军朋
Original assignee: Individual
Current assignee: Individual
Priority date: 2004-05-22
Filing date: 2004-05-22
Publication date: 2005-04-27
Anticipated expiration: 2014-05-22

Abstract

The utility model relates to a heater for vacuum evaporation and sputtering coating. The utility model can effectively prevent heated dusty materials form sputtering in the vacuum evaporation sputter coating process, the availability ratio of materials is enhanced, a sample wafer can be charred, annealed and oxygenized, etc. in a vacuum sputtering process, and the temperature can be adjusted and controlled from the room temperature to 950 DEG C. The utility model is composed of a tray, a heating pipe and a cover plate. The tray is in a cylindrical shape, a temperature measurement hole is drilled in the center of the lower base of the tray, the heating pipe is arranged in the tray, and the cover plate is arranged on the tray. The heating pipe provides a panel heating heat source, the heating pipe is in the shape of a ring, the casing of the heating pipe is a quartz ware, and a tungsten wire is arranged in the heating pipe. A round hole is opened in the center of the cover plate and is used to position a source container when evaporating, and four steel clips are fixed at the periphery of the round hole and are used to fix the sample wafer in the sputtering process. The utility model can be widely applied for the thin coat fabrication of the evaporating thin coat and sputtering thin coat, etc. under a high vacuum situation.

Description

The vacuum radiant heater

Technical field: the utility model is a kind of well heater that can be used for vacuum-evaporation, sputter coating.

Background technology: in the vacuum plating process, to Powdered organism and organo-metallic huge legendary turtle compound (as: Znq ₂) when waiting material evaporation, normally tungsten filament is wrapped at present and does the evaporation heating source on the beaker or make evaporation heating source container with molybdenum boat.In actually operating, more than two kinds of methods run into such difficulty: the former is because the poor thermal conductivity of beaker, and beaker is broken easily when directly twining heating with tungsten filament, and the beaker bore is big simultaneously, is evaporated to material on the print less than 30% at every turn; The latter is because molybdenum boat directly contacts dusty material, and material can advance to spill molybdenum boat under high vacuum, attached to the print surface, can not form the ideal film.

In addition, traditional vacuum coating film equipment needs that after carrying out sputter diffusion furnace is put in the print taking-up and carries out processing such as charing, annealing, oxidation again, and significant limitation is arranged.For addressing this problem, the multifunctional vacuum coating equipment of Sheng Chaning print is handled on stone or metal plate for standing a stove on as a precaution against fire with electric furnace filament winding group when sputter, but the micropore in the ceramic stone or metal plate for standing a stove on as a precaution against fire can discharge impurity in recent years, and print is polluted, and temperature raises slow.

Summary of the invention:

The utility model provides a kind of vacuum radiant heater, when it can prevent vacuum vapor plating effectively, be heated dusty material advance to spatter, replace beaker to make source container with the little and non-friable crucible of bore, improved the utilization ratio of material; And can be in vacuum sputtering print be carried out processing such as charing, annealing, oxidation.

The utility model is achieved in that it is made up of pallet, heating tube and cover plate three parts, and pallet is cylindrical, is that the stainless steel plate turning of 2.5mm is made by thickness, is drilled with thermometer hole at the pallet center of going to the bottom, the pallet heating pipe built-in, on put cover plate; Heating tube provides the thermal source of radiation formula heating, and ringwise, shell is a quartz ware, built-in tungsten filament; A circular hole is opened at the cover plate center, and its diameter is not more than the diameter of circular heating tube, is used for placing source container when evaporation, is fixed with four steel folders around the circular hole, is used for fixing print when sputter.

The utility model is simple in structure, easy handling, not only improved the function of vacuum coating film equipment evaporation sputter, and can be high temperature resistant, indeformable, do not discharge the gaseous impurities molecule, temperature can be regulated control arbitrarily between room temperature to 950 ℃, can be widely used in the preparation of films such as evaporation, sputter under the high vacuum.

Description of drawings:

Fig. 1 is the perspective view of this vacuum radiant heater.

Fig. 2 is the structural representation of this vacuum radiant heater when being used for vacuum-evaporation.

Fig. 3 is the structural representation of this vacuum radiant heater when being used for vacuum sputtering.

Each assembly with the corresponding of its numbering is: pallet-(1), leg-(10), thermometer hole-(11), power connection frame-(12), locating slot-(14); Heating tube-(2), tungsten filament-(21), steel wire-(22), power connection-(23); Cover plate-(3), circular hole-(3 1), steel folder-(32), backstay-(33); Source container-(4); Print-(5).

Embodiment:

Below in conjunction with accompanying drawing embodiment of the present utility model is described in detail.

The main body of this vacuum radiant heater comprises pallet (1), heating tube (2) and cover plate (3) three parts, pallet (1) is supported by three legs (10), heating pipe built-in (2), on put cover plate (3), its three backstays (33) embed respectively in corresponding three locating slots (14), and the power connection that links to each other with heating tube (23) just is being put on the power connection frame (12).

Pallet (1) can be considered the outer cover of this vacuum radiant heater, when well heater is worked, in high vacuum environment, be in high temperature (can record its temperature) state, require outer covering on to keep the stable of structure in this environment, will good properties be arranged to temperature simultaneously from thermometer hole (11).In the present embodiment, it is that the stainless steel plate turning of 2.5mm is made with thickness, can not only be high temperature resistant, and indeformable, be suitable for high vacuum pyritous environment, and temperature is even, the cooling that heats up is fast, helps temperature controlling.

Place the inner heating tube (2) of pallet (1) as pyrotoxin, built-in tungsten filament (21) is connected by power connection (23) and heating power supply.In order to prevent when energising is heated, tungsten filament (21) can be attached to heating tube (2) inwall under the effect of gravity because of the heating deliquescing, cause heating tube (2) to break, adopt four spiral steel wires (22) fixed support tungsten filaments (21) in the present embodiment, because steel wire (22) carefully and under the high temperature has very strong hardness and toughness, therefore be that the ideal of support fixation tungsten filament (21) is selected.Heating tube (2) is made annular, and its sheating material is selected quartz for use, and this is because annular radiation formula Heating temperature is even, quartzy can be high temperature resistant, temperature required back maintenance constant temperature easily can be regulated but also reach to temperature not only arbitrarily between room temperature to 950 ℃ like this.This is very crucial in the treating processes of growth for Thin Film and print.

Cover plate (3) places the top of pallet (1), has the circular hole (31) that diameter is not more than circular heating tube (2) diameter at its center, and its function is to be used for placing source container (4) when evaporation; Be fixed with four steel folders (32) around circular hole (31), function is to be used for fixing print (5) when sputter.In the present embodiment, cover plate (3) is made with stainless material, because its thermal conductivity is good, helps improving temperature; At cover plate (3) lower surface three backstays (33) are arranged, every backstay (33) embedded corresponding locating slot (14) and is blocked by it when it placed pallet (1) to go up, like this, cover plate (3) and pallet (1) become a firm integral body, utilize three legs (10) of pallet (1) bottom this vacuum radiant heater can be lain against on the bearing surface.

Claims

1. a vacuum radiant heater comprises pallet, heating tube and cover plate, it is characterized in that the tray bottom surface center is drilled with thermometer hole, the pallet heating pipe built-in, on put cover plate; Heating tube ringwise, built-in tungsten filament; The cover plate center has circular hole, is fixed with four steel folders around circular hole.

2. vacuum radiant heater according to claim 1 is characterized in that pallet (1) and cover plate (3) are Stainless Steel Products, and heating tube (2) shell is a quartz ware.

3. vacuum radiant heater according to claim 1 is characterized in that circular hole (31) diameter at cover plate center is not more than the diameter of circular heating tube (2).