CN2595021Y - Radio frequency excited CO2 waveguide laser - Google Patents
Radio frequency excited CO2 waveguide laser Download PDFInfo
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- CN2595021Y CN2595021Y CN 02294688 CN02294688U CN2595021Y CN 2595021 Y CN2595021 Y CN 2595021Y CN 02294688 CN02294688 CN 02294688 CN 02294688 U CN02294688 U CN 02294688U CN 2595021 Y CN2595021 Y CN 2595021Y
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- resonant cavity
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Abstract
The utility model discloses a sealing and separating radio frequency excited CO2 waveguide laser device, which is mainly composed of a shell body, a resonant cavity arranged in the shell body and a radio frequency source arranged out of the shell body, wherein, the shell body is a sealed vacuum tube of which the front end is provided with a light outlet hole; the resonant cavity which is arranged in the shell body is mainly composed of a waveguide tube and optical coupling mirrors which are arranged on both ends of the waveguide tube, the waveguide tube is a hollow tube which is composed of an upper aluminium alloy electrode, a lower aluminium alloy electrode and ceramic, the internal diameter of the waveguide tube is small and the inner wall of the waveguide tube is smooth and clean; the front end and the rear end of the waveguide tube are respectively provided with light outlet holes which correspond to the light outlet hole of the waveguide tube; a resonant cavity output mirror is arranged on the front end of the resonant cavity of which the rear end is provided with a resonant cavity reflecting mirror; the upper electrode of the waveguide tube is connected with the radio frequency source via a feed-in terminal. With the adoption of the radio frequency exciting method, the CO2 gas in the cavity is moved in the waveguide tube to generate laser. The utility model has the advantages of small size, good light output quality and long service life.
Description
Technical field
The utility model relates to a kind of CO
2Laser more particularly, relates to a kind of CO of sealed-off radio-frequency excited mode
2Waveguide laser.
Background technology
Laser technology is the important symbol of 20th century scientific technological advance, and it can be widely used in industry, agricultural, medical science, military affairs, scientific research and the daily life.The core of various large, medium and small type laser equipments is can lasing laser.Laser of a great variety has gas laser, solid state laser.Carbon dioxide (the CO that the utility model relates to
2) laser is a kind of in the gas laser, it also is the main core component in laser process equipment, the laser medical equipment.
RF excited CO
2Waveguide laser is numerous CO
2A kind of novel product in the middle of the gas laser, it compare with the laser of other type have high power, the characteristics of high efficiency, high light beam quality, so be particularly suitable for laser processing.Such as laser drilling, need laser beam very round, very thin sometimes, if laser go out that optical mode is bad just can not to produce high-quality light beam, also just can't process high-quality hole.
But, up to the present, China this type of RF excited CO
2Waveguide laser also mainly by import, costs an arm and a leg, and domestic also do not have independent development to develop corresponding product.
The laser that China produces voluntarily is glass tube laser and high-power (multikilowatt) laser mostly.Wherein sealed-off type laser mainly is the glass tube laser, and the shortcoming of glass tube laser is that beam mode is bad, and resonant cavity poor stability, life-span be short, high pressure is arranged, and be dangerous to human body, and the body cracky.High-power (multikilowatt) laser has axial flow laser and cross-flow laser, mostly is the continuous current excitation mode.Its shortcoming is: owing to make the continuous current excitation power supply of its work need use current-limiting resistance, so power consumption is very big, sputter is seriously polluted.In addition, high-power (multikilowatt) laser must can obtain power demand making under the condition of gas flow, and gas flow just must be equipped with air pump, pipeline, so high power laser can not be realized sealed-off, cause equipment volume huge, move inconvenience, the occasion of use is restricted greatly.
Summary of the invention
In order to fill up China independent development development RF excited CO
2The blank of waveguide laser overcomes the drawback of existing laser, and the purpose of this utility model provides that a kind of volume is little, good beam quality, life-span are long, human body is not had the sealed-off radio-frequency excited CO of harm
2Waveguide laser.
For achieving the above object, the utility model is taked following design: a kind of sealed-off radio-frequency excited CO
2Waveguide laser, it mainly is made of housing, resonant cavity, radio frequency source and cooling system; Described resonant cavity and cooling system are positioned at enclosure interior, and radio frequency source is positioned at outside, and radio frequency source links to each other with resonant cavity in the housing by feed-in terminal separated; Described housing is the vacuum body of a sealing, and its front end is provided with a light hole; Described resonant cavity is arranged on enclosure interior, and it mainly is made of waveguide and the optical coupled mirror that is arranged on the waveguide two ends; Described waveguide is the hollow tubing conductor that is surrounded by upper and lower electrode of aluminium alloy and pottery; Its internal diameter is very little, inwall is very bright and clean; Front and back ends at waveguide is respectively equipped with light hole; Corresponding with the waveguide light hole, be provided with the resonant cavity outgoing mirror at the front end of resonant cavity; Corresponding with the light hole of waveguide, be provided with cavity mirror in the rear end of resonant cavity; The top electrode of described waveguide links to each other with described radio frequency source by feed-in terminal separated; Described radio frequency source provides the radio frequency operation power supply for whole laser; Described cooling system is positioned at outside described housing, the resonant cavity, and it is fixed on the inwall of housing.
Described resonant cavity outgoing mirror is that reflectivity is 85%, transmissivity is 15% eyeglass.
Described radio frequency source mainly is made up of oscillating unit circuit, pushing unit circuit and power amplification unit circuit; External ac power source is after the signal input part access of oscillating unit circuit, produce rf oscillation signal through the oscillating unit circuit, rf oscillation signal is punished two-way ingoing power amplifying unit circuit after the amplification of pushing unit circuit, after the power amplification unit circuit power amplified, the radio-frequency power supply signal that will have certain energy by two feed-in terminal separated on the resonant cavity was fed in the resonant cavity.
Described cooling system is a water-cooling system, and it is made of the water pipe that is fixed on described inner walls.
The utility model also is provided with a match circuit between described radio-frequency power supply and resonant cavity, it is made of electric capacity, inductance and the resistance of series connection successively.
Between the upper and lower electrode of described waveguide, also be parallel with several and can change the inductance coil that voltage distributes.
Also be filled with highly purified N in the resonant cavity described in the utility model
2, He and Xe assist gas.
Description of drawings
Fig. 1 is the perspective view of the utility model laser
Fig. 2 is the perspective view of the utility model resonant cavity
Fig. 3 is the front view of the utility model resonant cavity
Fig. 4 is the A-A cutaway view of Fig. 3
Fig. 5 is the physical circuit figure of the utility model radio frequency source
Fig. 6 is the utility model match circuit physical circuit figure
Embodiment
As shown in Figure 1, the sealed-off radio-frequency excited CO of the utility model
2Waveguide laser mainly is made of housing 1, resonant cavity 2, radio frequency source 3 and cooling system 4; Housing 1 is a closed shell, is provided with resonant cavity 2 and cooling system 4 in housing 1, is provided with radio frequency source 3 in the outside of housing 1.
The utility model housing 1 is the aluminium alloy extrusions vacuum body of a sealing, and its front end is provided with a light hole 11.
The resonant cavity 2 that is arranged in the housing 1 is the lasing critical components of the utility model.As Fig. 2, Fig. 3, shown in Figure 4, resonant cavity 2 mainly is to be made of waveguide 21 and the optical coupled mirror 22,23 that is arranged on the waveguide two ends.Waveguide 21 be one by the upper and lower electrode 211,212 of aluminium alloy, the pottery 213,214 hollow tubing conductors that surround; Its internal diameter is very little, inwall is very bright and clean.It is that working gas is CO
2The lasing space of gas discharge.Front and back ends at waveguide 21 is respectively equipped with resonant cavity outgoing mirror 22 resonant cavity speculums 23, and wherein, resonant cavity outgoing mirror 22 is 85% for reflectivity, and transmissivity is 15% eyeglass.For making the CO that is stored in the resonant cavity 2
2Working gas produces laser, also needs the top electrode 211 of waveguide 21 is linked to each other with radio frequency source 3 by feed-in terminal separated 217.
Radio frequency source 3 is the CO that make in the resonant cavity 2
2Gas molecule produces transition between energy level and then lasing necessary condition, and it provides the radio frequency operation power supply for whole laser.Radio-frequency power supply is meant the power supply that frequency is worked in the 88MHz-108MHz scope.The selected radio-frequency power supply frequency of the utility model is 90MHz, and supply voltage is 24V, and electric current 20A, power are 350W.Fig. 5 is the physical circuit figure of the utility model radio frequency source 3.As shown in the figure, this source circuits mainly is made up of oscillating unit circuit 31, pushing unit circuit 32 and power amplification unit circuit 33.External ac power source is after signal input part " E " access of oscillating unit circuit 31, behind oscillating unit circuit 31, produce rf oscillation signal, this rf oscillation signal is through the amplification of pushing unit circuit 32, from 2 of A, B punishment two-way ingoing power amplifying unit circuit 33, after 33 power amplifications of power amplification unit circuit from RF
1Point and RF
2Point output is fed in the resonant cavity by the radio-frequency power supply signal that two feed-in terminal separated 217 on the resonant cavity will have certain energy again.
After radio frequency source 3 work produced radio frequency, radio-frequency power supply was fed into energy in the resonant cavity by two feed-in terminal separated, makes the CO in the resonant cavity
2Working gas excites, and produces glow discharge.This moment CO
2Atom in the molecule breaks away from the position under the poised state, produces transition between energy level.In the process of stimulated radiation transition, discharge photon, and it can make the incandescnet particle that is on the energy level produce one and the identical photon of this photon states, these two photons can remove to bring out other particle again, produce the more identical photon of multimode, this phenomenon is exactly that stimulated radiation is amplified.These photons are constantly vibrated between the eyeglass 22,23 at resonant cavity two ends, and constantly are exaggerated, and then penetrate and form laser from resonant cavity outgoing mirror 22, housing 1 light hole 11.
In the utility model development process, the inventor finds that the output impedance of radio frequency source 3 and the equiva lent impedance of laser resonant cavity 2 do not match, and the output impedance of radio frequency source is 50 Ω, and the equiva lent impedance of laserresonator is not 50 Ω.For this reason, the utility model increases by a match circuit 5 between radio frequency source 3 and laser resonant cavity 2, as shown in Figure 6.This match circuit 5 is by the capacitor C of connecting successively
0, inductance L, resistance R constitute; And, in capacitor C
0And also be parallel with capacitor C T, C ' between the common point of inductance L and the ground.Laser discharge resonant cavity 2 can an equivalent Cheng Youyi capacitor C and the shunt circuit of a resistance R g formation, and C is the distributed capacitance on the waveguide, and Rg is the effective resistance of gas discharge plasma; At the discharge gas preceding Rg → ∞ that catches fire, at the back Rg=a (the a=constant is generally 100-1000 Ω) that catches fire.So output RF1, the RF2 of the utility model radio frequency source 3 is actually by lattice network 5 and links to each other with two feed-in terminal separated 217 of resonant cavity 2, the radio-frequency power supply signal that will have certain energy is fed in the resonant cavity.As seen from Figure 6, radio frequency source 3, match circuit 5 resonant cavity 2 form a loop.Its main effect is: at CO
2Before catching fire, gas discharge makes the high voltage that loop resonance produces is enough to make gas ionization; At CO
2After gas discharge catches fire, realize impedance matching, make the impedance of discharge resonant cavity be similar to 50 Ω.
Because the formation of laser is by the transition campaign generation of working gas particle, so, along with the formation of laser can produce a large amount of heats.If the untimely discharge of heat will influence the operate as normal of laser, such as: pattern can change, power output diminishes, element in the middle of the radio frequency source burns out etc., and causing at last can not bright dipping.In order to address this problem, the utility model is provided with cooling system 4 in housing 1, outside the resonant cavity 2.The utility model cooling system 4 is a water-cooling system, and it is made of the water pipe that is fixed on housing 1 inwall, and cooling water advances from water inlet 41, go out (as shown in Figure 1) from delivery port 42, in the process of boiler water circulation, heat is in time taken out of, thereby reached the purpose that makes the laser steady operation.The utility model adopts water cooling, can certainly adopt air cooling way to reduce the temperature of laser, guarantees the laser operate as normal.
Radio-frequency power supply 3, is evenly distributed in order to make radio-frequency voltage during with the top electrode of radio-frequency power supply feed-in resonant cavity waveguide through match circuit 5, and the utility model has adopted following method: 1,2 feed-ins, shorten the distance of load point and transmission line; 2, several inductance coils 24 in parallel between the upper and lower electrode of waveguide change the distribution of voltage.So just make the voltage distribution on the entire electrode length be tending towards even.
In addition, the waveguide that the utility model is selected for use is made of aluminium alloy and pottery, and the internal diameter of waveguide is 2-3mm, and length is 700mm.In order to make good product consistency, and cost is low, and what the utility model was selected for use is the section bar of aluminum alloy heat extrusion modling, passes through Precision Machining again, makes its upper and lower electrode surface reach required precision and fineness.The pottery with the aluminium electrode between closely contact, the while must not make its distortion, distortion when mounted, with the assurance waveguide precision.
The utility model is filled in the CO in the resonant cavity 2
2Gas is for being highly purified CO
2Gas has also added high-purity N simultaneously
2, He and Xe assist gas, their effect is the output that strengthens laser.
Because the utility model adopts above technical scheme, the utility model RF excited CO
2The laser of waveguide is compared with the laser of other type has following advantage:
1, conversion efficiency height.Because the utility model adopts radio-frequency power supply to provide working power for resonant cavity, and radio-frequency power supply is without current-limiting resistance, thereby reduced the loss of power, and then makes whole laser conversion efficiency height.
2, volume is little, and is easy to use.Because working gas CO of the present utility model
2Be filled in the resonant cavity by sealed-off equipment, so the utility model does not need to be equipped with equipment such as air pump, pipeline in use, volume is little, can use in various occasions easily.
2, it is good to go out optical mode.Because the utility model adopts the structural design of waveguide, makes CO
2Discharge generation laser in the waveguide that working gas is very little at internal diameter, inwall is very bright and clean, so it is good that it goes out optical mode, the beam quality height.
3, operating voltage is low, and is little to personal safety harm, reduces the requirement to the High-Voltage Insulation of components and parts and power supply, helps the miniaturization of laser simultaneously.
4, long service life.Because the utility model adopts the RF excited mode to work, the decomposition rate of working gas reduces under radio frequency conditions, the harmful effects such as pollution that do not have sputter to cause simultaneously, so, the long service life of laser.
The above only is preferred embodiment of the present utility model, and protection range of the present utility model is not limited thereto.Anyly all belong within the utility model protection range based on the equivalent transformation on the technical solutions of the utility model.
Claims (7)
1, a kind of sealed-off radio-frequency excited CO
2Waveguide laser is characterized in that: it mainly is made of housing, resonant cavity, radio frequency source and cooling system; Described resonant cavity and cooling system are positioned at enclosure interior, and radio frequency source is positioned at outside, and radio frequency source links to each other with resonant cavity in the housing by feed-in terminal separated;
Described housing is the vacuum body of a sealing, and its front end is provided with a light hole;
Described resonant cavity is arranged on enclosure interior, and it mainly is made of waveguide and the optical coupled mirror that is arranged on the waveguide two ends; Described waveguide is the hollow tubing conductor that is surrounded by upper and lower electrode of aluminium alloy and pottery; Its internal diameter is very little, inwall is very bright and clean; Front and back ends at waveguide is respectively equipped with light hole; Corresponding with the waveguide light hole, be provided with the resonant cavity outgoing mirror at the front end of resonant cavity; Corresponding with the light hole of waveguide, be provided with cavity mirror in the rear end of resonant cavity; The top electrode of described waveguide links to each other with described radio frequency source by feed-in terminal separated;
Described radio frequency source provides the radio frequency operation power supply for whole laser;
Described cooling system is positioned at outside described housing, the resonant cavity, and it is fixed on the inwall of housing.
2, sealed-off radio-frequency excited CO according to claim 1
2Waveguide laser is characterized in that: described resonant cavity outgoing mirror is that reflectivity is 85%, transmissivity is 15% eyeglass.
3, sealed-off radio-frequency excited CO according to claim 2
2Waveguide laser is characterized in that: described radio frequency source mainly is made up of oscillating unit circuit, pushing unit circuit and power amplification unit circuit; External ac power source is after the signal input part access of oscillating unit circuit, produce rf oscillation signal through the oscillating unit circuit, rf oscillation signal is punished two-way ingoing power amplifying unit circuit after the amplification of pushing unit circuit, after the power amplification unit circuit power amplified, the radio-frequency power supply signal that will have certain energy by two feed-in terminal separated on the resonant cavity was fed in the resonant cavity.
4, sealed-off radio-frequency excited CO according to claim 3
2Waveguide laser is characterized in that: described cooling system is a water-cooling system, and it is made of the water pipe that is fixed on described inner walls.
5, sealed-off radio-frequency excited CO according to claim 4
2Waveguide laser is characterized in that: the utility model also is provided with a match circuit between described radio-frequency power supply and resonant cavity, and it is made of electric capacity, inductance and the resistance of series connection successively.
6, sealed-off radio-frequency excited CO according to claim 5
2Waveguide laser is characterized in that: also be parallel with several and can change the inductance coil that voltage distributes between the upper and lower electrode of described waveguide.
7, sealed-off radio-frequency excited CO according to claim 6
2Waveguide laser is characterized in that: also be filled with highly purified N in the resonant cavity described in the utility model
2, He and Xe assist gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02294688 CN2595021Y (en) | 2002-12-30 | 2002-12-30 | Radio frequency excited CO2 waveguide laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02294688 CN2595021Y (en) | 2002-12-30 | 2002-12-30 | Radio frequency excited CO2 waveguide laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2595021Y true CN2595021Y (en) | 2003-12-24 |
Family
ID=33752058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02294688 Expired - Lifetime CN2595021Y (en) | 2002-12-30 | 2002-12-30 | Radio frequency excited CO2 waveguide laser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2595021Y (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100411259C (en) * | 2006-06-29 | 2008-08-13 | 上海交通大学 | Built-in screw type electrode radio-frequency carbone dioxide laser |
| CN102315582A (en) * | 2011-07-26 | 2012-01-11 | 华中科技大学 | RF (radio frequency) power supply used for CO2 (carbon dioxide) laser |
| CN103503252A (en) * | 2010-11-23 | 2014-01-08 | 依拉迪激光有限公司 | Ceramic gas laser having an integrated beam shaping waveguide |
| CN105228330A (en) * | 2015-09-01 | 2016-01-06 | 沈阳拓荆科技有限公司 | A kind of radio frequency plasma equipment adaptation |
| CN105977769A (en) * | 2016-07-19 | 2016-09-28 | 北京康迪光电子股份有限公司 | Novel carbon dioxide radio frequency metal laser device |
| CN106073893A (en) * | 2016-07-20 | 2016-11-09 | 合肥安博罗医疗器械有限公司 | A kind of CO2laser therapeutic apparatus |
| CN106129784A (en) * | 2016-07-19 | 2016-11-16 | 北京康迪光电子股份有限公司 | A kind of Novel carbon dioxide radio frequency metal laser instrument |
| CN107134708A (en) * | 2011-02-24 | 2017-09-05 | 依拉迪激光有限公司 | Ceramic lath, free space and waveguide laser |
| CN115621829A (en) * | 2022-12-21 | 2023-01-17 | 吉林省永利激光科技有限公司 | Radio frequency excitation waveguide CO 2 Laser device |
-
2002
- 2002-12-30 CN CN 02294688 patent/CN2595021Y/en not_active Expired - Lifetime
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100411259C (en) * | 2006-06-29 | 2008-08-13 | 上海交通大学 | Built-in screw type electrode radio-frequency carbone dioxide laser |
| CN103503252A (en) * | 2010-11-23 | 2014-01-08 | 依拉迪激光有限公司 | Ceramic gas laser having an integrated beam shaping waveguide |
| CN107134708A (en) * | 2011-02-24 | 2017-09-05 | 依拉迪激光有限公司 | Ceramic lath, free space and waveguide laser |
| CN107134708B (en) * | 2011-02-24 | 2019-11-01 | 依拉迪激光有限公司 | Ceramic lath, free space and waveguide laser |
| CN102315582A (en) * | 2011-07-26 | 2012-01-11 | 华中科技大学 | RF (radio frequency) power supply used for CO2 (carbon dioxide) laser |
| CN105228330A (en) * | 2015-09-01 | 2016-01-06 | 沈阳拓荆科技有限公司 | A kind of radio frequency plasma equipment adaptation |
| CN105228330B (en) * | 2015-09-01 | 2018-09-14 | 沈阳拓荆科技有限公司 | A kind of radio frequency plasma equipment adaptation |
| CN105977769A (en) * | 2016-07-19 | 2016-09-28 | 北京康迪光电子股份有限公司 | Novel carbon dioxide radio frequency metal laser device |
| CN106129784A (en) * | 2016-07-19 | 2016-11-16 | 北京康迪光电子股份有限公司 | A kind of Novel carbon dioxide radio frequency metal laser instrument |
| CN106073893A (en) * | 2016-07-20 | 2016-11-09 | 合肥安博罗医疗器械有限公司 | A kind of CO2laser therapeutic apparatus |
| CN115621829A (en) * | 2022-12-21 | 2023-01-17 | 吉林省永利激光科技有限公司 | Radio frequency excitation waveguide CO 2 Laser device |
| CN115621829B (en) * | 2022-12-21 | 2023-04-18 | 吉林省永利激光科技有限公司 | Radio frequency excitation waveguide CO2 laser |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20090327 Pledge (preservation): Pledge registration |
|
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20121230 Granted publication date: 20031224 |